JP2016122777A5 - - Google Patents
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- Publication number
- JP2016122777A5 JP2016122777A5 JP2014262862A JP2014262862A JP2016122777A5 JP 2016122777 A5 JP2016122777 A5 JP 2016122777A5 JP 2014262862 A JP2014262862 A JP 2014262862A JP 2014262862 A JP2014262862 A JP 2014262862A JP 2016122777 A5 JP2016122777 A5 JP 2016122777A5
- Authority
- JP
- Japan
- Prior art keywords
- holding
- holding unit
- unit
- fixing member
- support device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims 5
- 238000005259 measurement Methods 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014262862A JP6485687B2 (ja) | 2014-12-25 | 2014-12-25 | 保持装置、物体支持装置及び露光装置、並びにデバイス製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014262862A JP6485687B2 (ja) | 2014-12-25 | 2014-12-25 | 保持装置、物体支持装置及び露光装置、並びにデバイス製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016122777A JP2016122777A (ja) | 2016-07-07 |
| JP2016122777A5 true JP2016122777A5 (enExample) | 2018-01-18 |
| JP6485687B2 JP6485687B2 (ja) | 2019-03-20 |
Family
ID=56329172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014262862A Active JP6485687B2 (ja) | 2014-12-25 | 2014-12-25 | 保持装置、物体支持装置及び露光装置、並びにデバイス製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6485687B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7051455B2 (ja) * | 2018-01-16 | 2022-04-11 | キオクシア株式会社 | パターン形成装置および半導体装置の製造方法 |
| JP7110005B2 (ja) * | 2018-06-20 | 2022-08-01 | キヤノン株式会社 | 基板回転装置、基板回転方法、リソグラフィ装置、および物品製造方法 |
| KR102822419B1 (ko) * | 2020-12-08 | 2025-06-18 | 에스케이하이닉스 주식회사 | 반도체 제조 장치, 이를 이용하는 캐리어 위치 판독 방법 및 반도체 다이의 부착 방법 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4009356A1 (en) * | 2012-11-30 | 2022-06-08 | Nikon Corporation | Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device |
-
2014
- 2014-12-25 JP JP2014262862A patent/JP6485687B2/ja active Active
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