JP2016122777A5

JP2016122777A5 -

Info

Publication number: JP2016122777A5
Application number: JP2014262862A
Authority: JP
Filing date: 2014-12-25
Publication date: 2018-01-18
Anticipated expiration: 2034-12-25

Description

本発明の第１の態様によれば、板状の物体を保持する保持装置であって、一軸方向に延びる軸部と、前記軸部に設けられ、吸着部が形成された保持部とを含む保持ユニットと、前記軸部を介して前記保持ユニットを支持する軸受部材と、前記吸着部を含む前記保持部の一部が前記物体に下方から接触する第１位置と、前記保持部が前記物体から離間する第２位置とを含む所定の角度範囲内で前記保持ユニットを前記一軸回りに回転駆動する駆動装置と、を備える保持装置が、提供される。 According to a first aspect of the present invention, the plate-like object to a holding device that holds a shaft portion extending to one axial direction, is provided on the shaft portion, a holding portion which suction unit is formed and including holding units, and a bearing member supporting the holding unit via the shaft portion, a first position in which a portion of the holding portion including the suction portion is in contact from below the object, the holding portion There holding device and a driving device for rotating the pre-Symbol holding unit to the uniaxial around within a predetermined angular range and a second position spaced from the object is provided.

本発明の第２の態様によれば、板状の物体を下方から支持する物体支持装置であって、前記物体の外周部の異なる位置にそれぞれ対応して設けられた、第１の態様に係る保持装置を複数備え、前記複数の保持装置の前記保持ユニットがともに前記第１位置にあるとき、前記物体が前記複数の保持装置によって下方から接触支持される物体支持装置が、提供される。 According to a second aspect of the present invention, there is provided an object support device for supporting a plate-like object from below, wherein the object support device is provided corresponding to a different position of the outer periphery of the object. a plurality of holding devices, when the said holding unit of the plurality of holding devices are both in the first position, the object supporting device in which the object is contacted supported from below by the plurality of holding devices are provided.

Claims

A plate-shaped object to a holding device that holds,
A shaft portion extending to one axial direction, is provided on the shaft portion, and including holding unit and a holding portion which suction unit is formed,
A bearing member that supports the holding unit via the shaft portion;
A first position in which a portion of the holding portion including the suction portion is in contact from below the object, the previous SL holding unit within a predetermined angular range and a second position in which the holding portion is separated from the object A driving device that rotates around the one axis;
A holding device.

2. The holding device according to claim 1, wherein the shaft portion extends in a second direction intersecting a first direction along a thickness direction of the object in the state where the holding is performed.

The holding unit communicates with an opening provided in the suction portion when the holding unit is in the first position, and forms a negative pressure space that does not communicate with the opening when the holding unit is in the second position. The holding device according to claim 2.

The negative pressure space is formed in the shaft portion, and is electrically connected to a pipe line connected to a vacuum exhaust device via the bearing member when the holding unit is in the first position. Holding device.

5. The gas supply pipe according to claim 1, wherein the bearing member is provided with a gas supply pipe having one end opened to face the shaft portion and the other end connected to a pressurized gas supply device. The holding device as described.

The holding device according to claim 5, further comprising an adjustment mechanism for adjusting a temperature of the holding unit.

A measurement system for measuring the rotation state of the holding unit;
The holding device according to any one of claims 1 to 6, further comprising a control device that controls the driving device using a measurement result of the measurement system.

An object support device for supporting a plate-like object from below,
Said provided corresponding to the outer circumferential portion different positions of the object, claim 1 comprising a plurality of holding device according to any one of 7, the holding unit are both said first of said plurality of holding devices An object support device in which the object is contact-supported from below by the plurality of holding devices when in position.

Wherein each of the holding device, when the holding unit is positioned in said second position, said a cleaning member movable in the axial direction while contacting with the suction unit, driving said cleaning member to said axial direction The object support device according to claim 8, further comprising a cleaning member driving device.

Each of the plurality of holding devices includes a fixing member that can be driven in a predetermined stroke in the uniaxial direction, an urging member that urges the fixing member to one side in the uniaxial direction, and a position that is separated from the holding portion. A fixing member driving device that drives the fixing member to the other side in the uniaxial direction against the urging force of the urging member;
When the supply of the application force to the fixing member driving device stops when the holding unit is located at the first position, the fixing member is moved from a position away from the holding portion to a position where it abuts on the holding portion. The object support device according to claim 8, which is driven by a biasing force of the biasing member.

When the holding unit included in each of the plurality of holding devices is positioned at the second position, when the supply of utility force to the fixing member driving device is stopped, the fixing member is moved in the uniaxial direction of the holding portion. from a position located on the other side to a position past the said suction unit, an object support device according to claim 10 which is driven by the biasing force of the biasing member at one side of the axial direction.

The fixing member is made of a cleaning member, the cleaning member from the position which is located on the other side of the axial direction of the holding portion to a position past the said suction portion, of the biasing member at one side of the axial direction The object support device according to claim 11, which is driven by an urging force.

A rotation unit provided corresponding to each of the plurality of holding devices, and further rotatable around another axis parallel to the rotation axis of each holding unit;
The object holding device according to claim 8, wherein each holding unit is supported by the corresponding rotating portion via the bearing member.

An exposure apparatus that exposes a plate-like object with an energy beam,
The object support device according to any one of claims 8 to 13, which supports the object from below.
A movable body that is movable along a predetermined plane and provided with an object placement surface on which the object is placed;
An exposure apparatus that is supported by the object support device before the object before exposure is placed on the object placement surface.

Exposing an object using the exposure apparatus of claim 14;
Developing the exposed object.