JP2019192853A - Cleaning apparatus - Google Patents

Abstract

To provide a cleaning apparatus capable of preventing a scattering material from scattering to an outer side of a case, and effectively continuing an exhaust of dirty spray.SOLUTION: A cleaning apparatus 9 comprises: a table 90 holding a cleaned material; a nozzle 91 which sprays a cleaning liquid; a case 92 which houses the table 90 and the nozzle 91, and in which an exhaust port 920a having an opening 929 for carrying-out/in the cleaned material from an upper part and connected to a suction source 928 is formed; a switch sheet 931 covering the opening 929 excluding a part thereof; and a fixing sheet 951 arranged below the switching sheet 931 and having a size for covering a part of the opening 929. The fixing sheet 951 permits one end to be fixed to an upper end prat of the case 92, the other end side to be hanged, a gap to be formed between the switch sheet 931 and the fixing sheet 951, a vent bole 954 directing from above the opening 929 into the case 92 to be formed, and an outer air to flow into the case 92, and prevents the cleaning liquid or the like from scattering to the outer side of the case 92.SELECTED DRAWING: Figure 7

Description

  The present invention relates to a cleaning apparatus for cleaning an object to be cleaned such as a wafer.

A wafer subjected to cutting or grinding is cleaned by, for example, a single-wafer type spinner cleaning mechanism (see, for example, Patent Document 1), thereby removing foreign matters such as cutting waste remaining on the processing surface. Is done.
An exhaust port connected to a suction source is formed in the storage case of the cleaning device, and contaminated sprays (sprays including cutting waste) generated during cleaning are sucked and exhausted from the exhaust ports. Yes.

JP 2013-229462 A

  In the case of a wafer in which the object to be cleaned is cut, the cleaning liquid and the end material formed on the wafer by cutting (for example, a triangular chip formed on the outer periphery) may be scattered due to the water pressure and the centrifugal force received during cleaning. is there. In view of this, it is conceivable to seal the opening of the housing case in order to prevent the scattered matter from scattering outside the housing case. However, if the opening is sealed and no outside air is taken into the housing case, there is a problem that the inside of the housing case is decompressed and the spray is not exhausted well.

  Therefore, in the cleaning device, there is a problem in that the scattered matter is prevented from scattering out of the housing case of the cleaning device during cleaning, and the dirty spray can be continuously exhausted more efficiently.

  The present invention for solving the above problems is a cleaning apparatus, a spinner table for holding an object to be cleaned, a cleaning nozzle for injecting a cleaning liquid onto the object to be cleaned held by the spinner table, and the spinner table, A housing case that accommodates the cleaning nozzle and has an opening for carrying an object to be washed in from above or carrying it out from above and an exhaust port connected to a suction source; An openable and closable sheet that covers the opening except for the portion, and a fixed sheet that is disposed below the openable and closable sheet when the object to be cleaned is cleaned and covers a part of the opening. One end is fixed to the upper end of the storage case, and the other end side of the storage case hangs down to form a gap between the openable / closable sheet and the fixed sheet, so that the storage case is viewed from above the opening. A cleaning device that forms a vent opening inward and allows outside air to flow into the housing case, and prevents the cleaning liquid and the end material of the object being cleaned from scattering outside the housing case. .

  The cleaning apparatus according to the present invention includes an openable / closable sheet that covers the opening except for a part of the opening of the housing case, and a fixed size that is disposed below the openable / closable sheet when cleaning the object to be cleaned and covers a part of the opening. The fixed sheet has one end fixed to the upper end of the housing case and the other end hanging from the one end, so that a gap is formed between the openable / closable sheet and the fixed sheet. Therefore, a vent is formed from above the opening into the housing case, allowing outside air to flow into the housing case, preventing the inside of the housing case from being depressurized, and continuing to exhaust the dirty spray efficiently. be able to. Moreover, since the opening of the storage case is in a state where the entire surface is covered, it is possible to prevent the cleaning liquid and the end material of the object to be cleaned from being scattered outside the storage case.

It is a perspective view which shows an example of the external appearance of the cutting device with which the washing | cleaning apparatus was integrated. It is a perspective view which shows an example of the inside of the cutting device with which the washing | cleaning apparatus was integrated. It is a perspective view which shows an example of a storage case. It is a top view which shows arrangement | positioning with an openable-closable sheet | seat, a fixed sheet | seat, and a storage case. It is sectional drawing which shows arrangement | positioning with an openable-closable sheet | seat, a fixed sheet | seat, and a storage case. The top view explaining the state which wash | cleans to-be-washed object with a washing | cleaning apparatus, preventing the cleaning liquid and the end material of the to-be-washed object from being scattered outside the housing case by the openable / closable sheet and the fixed sheet. is there. Sectional drawing explaining the state which wash | cleans a to-be-washed object with a washing | cleaning apparatus, preventing the cleaning material and the end material of the to-be-washed object from being scattered outside the housing case by the openable / closable sheet and the fixed sheet. is there.

  The processing apparatus 1 shown in FIGS. 1 and 2 is, for example, a cutting apparatus that performs cutting with the cutting means 6 on the workpiece W held on the chuck table 30 and includes the cleaning device 9 according to the present invention. Yes. The cleaning device 9 is a laser processing device for performing desired processing on the workpiece W by laser irradiation, a grinding device for grinding and thinning the workpiece W with a rotating grinding wheel, or a workpiece with a polishing pad. It may be disposed in a polishing apparatus that polishes W, or may be usable by the cleaning apparatus 9 alone.

  The workpiece W is, for example, a circular plate-like semiconductor wafer. On the surface Wa of the workpiece W, devices D are formed in a lattice-like region partitioned by the division lines S. For example, the back surface Wb of the workpiece W is stuck to the sticking surface of the dicing tape T, and the outer peripheral part of the dicing tape T is stuck to the annular frame F. Thereby, the workpiece W is supported by the annular frame F via the dicing tape T, and can be handled using the annular frame F. The workpiece W is not limited to the above example.

As shown in FIG. 1, a casing 11 and an apparatus cover 15 are disposed on a base 10 of the processing apparatus 1, and a processing chamber 12 is defined in the casing 11.
A chuck table 30 and a cutting means 6 are disposed in the processing chamber 12. The chuck table 30 is surrounded from the periphery by a cover 31, and is rotated by a rotating means (not shown) disposed below the cover 31. It is supported so as to be rotatable around a direction axis. A bellows cover 311 that expands and contracts in the X-axis direction is connected to the cover 31, and a cutting table (not shown) that reciprocates the chuck table 30 in the cutting feed direction (X-axis direction) below the cover 31 and the bellows cover 311. Feed means are provided. The cutting feed means is a ball screw mechanism that cuts and feeds the chuck table 30 by rotating the ball screw by a motor.

  The chuck table 30 shown in FIG. 1 has a circular plate shape, for example, and sucks and holds the workpiece W on a holding surface 30a communicating with a suction source (not shown). Further, around the chuck table 30, for example, four fixed clamps 32 that sandwich and fix the annular frame F are arranged at equal intervals in the circumferential direction.

  The cutting means 6 disposed above the movement path of the chuck table 30 in the X-axis direction can be moved in the Y-axis direction by the index feeding means 69 and moved in the Z-axis direction by the cutting feed means 68. It is possible. The cutting means 6 includes a spindle 61 whose axial direction is the Y-axis direction, a spindle housing 62 that rotatably supports the spindle 61, a motor (not shown) that rotates the spindle 61, and a cutting blade 63 that is fixed to the spindle 61. The cutting blade 63 also rotates at a high speed as the motor drives the spindle 61 to rotate.

  For example, on the side surface of the spindle housing 62, an alignment unit 67 is provided for detecting the division line S to be cut of the workpiece W by performing pattern matching using a captured image. The cutting means 6 and the alignment means 67 move in the Y axis direction and the Z axis direction in conjunction with each other.

On the front side (−X direction side) of the housing 11, a viewing window made of a transparent member such as glass for confirming the state of the workpiece W being cut from the outside of the housing 11. 110 is provided.
On the side surface of the housing 11 on the + Y direction side, operation means 111 including a touch panel on which an operation screen for an operator to input processing conditions and the like to the processing apparatus 1 is displayed.

A cassette mounting table 13 is installed at one corner on the + Y direction side on the base 10 of the processing apparatus 1, and the cassette mounting table 13 is moved up and down in the Z-axis direction by a lift elevator (not shown) disposed below the cassette mounting table 13. It is possible to move. Then, in a state where a cassette (not shown) containing the workpiece W supported by the annular frame F is mounted on the cassette mounting table 13, the cassette mounting table 13 is lifted and lowered by the lifting elevator to process the cassette. The height position when the object W is taken in and out is adjusted.
A workpiece carry-in port (not shown) is formed on the side surface of the device cover 15 on the + Y direction side, and the workpiece W drawn from the cassette is carried into the device cover 15 from the workpiece carry-in port. The

  As shown in FIG. 2, at a position adjacent to the cassette mounting table 13, the chuck table 30 is located between the inside of the device cover 15 (not shown in FIG. 2) and the inside of the housing 11. It can reciprocate in the X-axis direction through a loading / unloading port 116 provided in the lower part. The chuck table 30 is positioned inside the housing 11 in FIG. 1 and is positioned inside the apparatus cover 15 in FIG.

  The processing apparatus 1 includes a transport unit 4 for carrying the workpiece W into the chuck table 30 inside the apparatus cover 15, and the transport unit 4 is a transport pad for holding the workpiece W via the annular frame F. 40, a transport pad moving means 41 that moves the transport pad 40 in the Y-axis direction, and a lower arm 42 that moves the transport pad 40 up and down.

  The transport pad 40 has, for example, an H-shaped outer shape in plan view, and the lower end side of the lower arm 42 is attached to the upper surface thereof. The transport pad 40 has four suction disks 401 on the lower surface for sucking the annular frame F that supports the workpiece W. Each suction disk 401 communicates with a suction source (not shown) that generates a suction force.

The transport pad moving means 41 is disposed, for example, in the middle portion of the side surface of the housing 11 in the + X direction, and includes a ball screw 410 having an axis in the Y-axis direction and a pair of guides disposed in parallel to the ball screw 410. A rail 411, a motor 412 connected to one end of the ball screw 410, and a movable block 413 that includes a nut that is screwed into the ball screw 410 and supports the lower arm 42.
When the motor 412 rotates the ball screw 410, the movable block 413 slides on the guide rail 411 in the Y-axis direction while being guided by the pair of guide rails 411, and is transported attached to the lower end side of the lower arm 42. The pad 40 moves in the Y axis direction.

  The lower arm 42 having an L-shaped outer shape when viewed from the side is composed of a ball screw mechanism, an electric cylinder, or the like, and raises and lowers the transport pad 40 in the Z-axis direction.

  For example, a clamp 46 that pulls out the workpiece W before processing while holding the annular frame F from the cassette (not shown) mounted on the cassette mounting table 13 in the vertical direction is provided at the center of the lower surface of the transport pad 40. ing. The clamp 46 is movable in the Y-axis direction and the Z-axis direction together with the transport pad 40 by the transport pad moving means 41 and the lower arm 42.

As shown in FIG. 2, above the chuck table 30 located in the apparatus cover 15, a centering guide comprising a pair of guide rails for aligning the workpiece W drawn from the cassette by the clamp 46 at a fixed position. 36 is arranged. The guide rails each having a L-shaped cross section and extending in the Y-axis direction can be separated from or approach each other in the X-axis direction, and are arranged so that stepped guide surfaces (inner side surfaces) face each other. Yes. When the workpiece W is carried into the chuck table 30, the workpiece W is pulled out from a cassette (not shown) placed on the cassette mounting table 13 by the clamp 46 and placed on the centering guide 36. When cleaning of the processed workpiece W after processing is completed, the workpiece W placed on the centering guide 36 by the transport pad 40 is pushed into the cassette by the clamp 46.
The pair of guide rails of the centering guide 36 approach each other when the workpiece W is placed, support the outer peripheral edge of the annular frame F, and position (centering) the chuck table 30 with respect to the workpiece W. When not mounted, the chuck tables 30 are separated from each other so as to leave a space on the holding surface 30a.

  As shown in FIG. 2, the processing apparatus 1 unloads the workpiece W (the workpiece W that has come out of the processing chamber 12 inside the housing 11) after cutting from the chuck table 30, and the workpiece to be cleaned. A loading means 5 for loading W onto a spinner table 90 described later is provided. The carry-in means 5 includes, for example, a carry-in pad 50 that holds the workpiece W held by the chuck table 30 via the annular frame F, a carry-in pad moving means 51 that moves the carry-in pad 50 in the Y-axis direction, And an upper arm 52 that raises and lowers the carry-in pad 50.

  The carry-in pad 50 has, for example, an H-shaped outer shape in plan view, and includes four suction disks 501 that suck the annular frame F that supports the article to be cleaned W on the lower surface side. Each suction disk 501 communicates with a suction source (not shown) that generates a suction force. The lower end side of the upper arm 52 is fixed to the upper surface of the carry-in pad 50.

The carry-in pad moving means 51 is disposed, for example, in the upper portion of the side surface of the housing 11 in the + X direction, and includes a ball screw 510 having an axis in the Y-axis direction and a pair of guides disposed in parallel to the ball screw 510. A rail 511, a motor 512 connected to one end of the ball screw 510, and a movable block 513 that includes a nut that is screwed into the ball screw 510 and supports the upper arm 52 therein.
When the motor 512 rotates the ball screw 510, the movable block 513 slides on the guide rail 511 in the Y-axis direction while being guided by the pair of guide rails 511, and is attached to the lower end side of the upper arm 52. The carry-in pad 50 moves in the Y-axis direction.

The upper arm 52 is composed of a ball screw mechanism, an electric cylinder, or the like, and raises and lowers the carry-in pad 50 in the Z-axis direction.
For example, the movable block 513 is formed to have a longer dimension in the X-axis direction than the movable block 413 of the transport pad moving means 41, and the upper side of the movable block 513 formed in this way is formed on the lower surface on the + X direction side. The arm 52 is attached. Therefore, the lower arm 42 of the transport means 4 is displaced in the X-axis direction from the flow line of the carry-in pad 50 connected to the lower end side of the upper arm 52. Thereby, when unloading the workpiece W from the chuck table 30, the loading means 5 can convey the workpiece W in the Y-axis direction without colliding with the conveying means 4.

  2 and 3, a cleaning apparatus 9 according to the present invention includes a spinner table 90 that holds an object to be cleaned W, a cleaning nozzle 91 that sprays a cleaning liquid onto the object to be cleaned W held by the spinner table 90, and a spinner table. 90 and a cleaning nozzle 91, a housing case having an opening 929 for carrying the object to be washed W from above into the inside or carrying it out from above and an exhaust port 920 a connected to the suction source 928. 92.

As shown in FIG. 2, the storage case 92 having a circular opening 929 is disposed, for example, at one corner on the −Y direction side on the base 10 under the movement path of the carry-in pad 50.
As shown in FIG. 3, the spinner table 90 has, for example, a circular plate shape, and is composed of a porous member or the like, and adsorbing portions 900 that adsorb the object to be cleaned W, and a frame body 901 that supports the adsorbing portions 900 Is provided. The suction portion 900 communicates with a suction source (not shown), and suction force generated by suction from the suction source is transmitted to a holding surface 900a that is an exposed surface of the suction portion 900 and is flush with the frame body 901. Thus, the spinner table 90 can suck and hold the workpiece W on the holding surface 900a. Further, around the frame body 901, for example, four fixing clamps 901a for fixing the annular frame F are arranged at equal intervals in the circumferential direction.

  A rotating means 94 is disposed below the spinner table 90, and the rotating means 94 allows the spinner table 90 to rotate about the axis in the Z-axis direction. Further, the spinner table 90 can be moved up and down by a vertical movement means (not shown), and when the workpiece W is loaded / unloaded, the spinner table 90 is raised and positioned at the loading / unloading height position. The spinner table 90 holding the previous workpiece W is lowered and positioned at the cleaning work height position in the housing case 92.

  In FIG. 3, a part of the side wall 920 and the like of the housing case 92 is notched so that the inside can be grasped. The housing case 92 having a columnar inner space includes a side wall 920 that surrounds the spinner table 90 and a bottom 921 that is formed integrally with the lower portion of the side wall 920. A cleaning liquid discharge port (not shown) is formed in the bottom 921, and the cleaning liquid flowing from the holding surface 900 a of the spinner table 90 to the bottom 921 is discharged from the cleaning liquid discharge port to the outside of the apparatus.

  An exhaust port 920a is formed through the side wall 920 of the housing case 92, and one end of an exhaust path 926 made of a metal pipe or a resin hose communicates with the exhaust port 920a. The other end of the exhaust passage 926 communicates with a suction source 928 such as a vacuum generator.

  As shown in FIG. 3, the cleaning nozzle 91 whose outer shape is substantially L-shaped when viewed from the side is erected on the bottom 921 of the housing case 92, for example, and the injection port 910 formed at the tip thereof has a spinner. The table 90 opens toward the holding surface 900a. The cleaning nozzle 91 can be rotated around the axis in the Z-axis direction by a rotating means (not shown) including a motor and a rotary joint, and can move the ejection port 910 from above the spinner table 90 to a retracted position. . The cleaning nozzle 91 communicates with a cleaning liquid supply unit (not shown) that supplies a cleaning liquid (for example, pure water) to the surface Wa of the article W to be cleaned.

  For example, the cleaning apparatus 9 includes an air nozzle 96 that dries the object to be cleaned W by air blow. The air nozzles 96 whose outer shape is substantially L-shaped when viewed from the side are arranged side by side with the cleaning nozzle 91, and an injection port 960 formed at the tip of the air nozzle 96 opens toward the holding surface 900 a of the spinner table 90. . The air nozzle 96 can be rotated around the axis in the Z-axis direction by a rotating means (not shown) together with the cleaning nozzle 91, and can move the ejection port 960 from above the spinner table 90 to the retracted position. The air nozzle 96 communicates with an air supply means (not shown) including a compressor that supplies air to the surface Wa of the object W to be cleaned.

  As shown in FIGS. 4 to 5, the cleaning device 9 includes an openable / closable sheet 931 that covers the opening 929 except for a part of the opening 929 of the housing case 92 when cleaning the object to be cleaned W, and when cleaning the object W to be cleaned. A fixed sheet 951 that is disposed below the openable / closable sheet 931 and covers a part of the opening 929.

The openable / closable sheet 931 shown in FIG. 5 forms a first sheet piece 931a and a second sheet piece 931b by bending a synthetic resin sheet (for example, a polyester sheet which is a shape memory resin sheet) at an intermediate portion thereof. A winding part is formed by curling from the intermediate part where both the sheet pieces are overlapped and bent to store the shape of the curl, and a winding rod 935 is inserted into the winding part.
As shown in FIG. 4, the width (length in the X-axis direction) of the openable / closable sheet 931 is larger than the diameter of the opening 929 of the housing case 92.
The total length (Y-axis direction length) of the openable / closable sheet 931 is such that the openable / closable sheet 931 covers the opening 929 except for a part of the opening 929 and cleans the fixed sheet 951 from above. The length is a part of which overlaps by a predetermined length.
The openable / closable sheet 931 is not limited to the double type in which the extension or winding of both sheet pieces is started from the center shown in the present embodiment, and the extension or winding of the second sheet piece 931b is started from one side. It may be of a single type that is started.

  For example, as shown in FIG. 4, an openable / closable sheet fixing base 930 to which the openable / closable sheet 931 is fixed is provided in a region on the + Y direction side of the upper end portion (upper surface in the present embodiment) of the side wall 920 of the housing case 92. It is arranged. On the openable / closable sheet fixing base 930, for example, the first sheet piece 931a side of the openable / closable sheet 931 is fixed via a mounting bracket (not shown).

  For example, a pair of guide rails 934 extend in parallel to the Y-axis direction so as to sandwich the opening 929 in regions on both sides in the X direction of the upper end portion (upper surface) of the side wall 920 of the housing case 92. On the guide rail 934, a moving unit 932 for opening and closing the openable / closable sheet 931 is disposed.

  The moving portion 932 has a bar-like outer shape that extends in the X-axis direction so that the second sheet piece 931 b side of the openable / closable sheet 931 is fixed and crosses the upper side of the opening 929. The bottom surfaces of both ends of the moving part 932 are loosely fitted to the guide rail 934 so as to slide on the guide rail 934. The moving part 932 reciprocates while being guided by the guide rail 934 in the Y-axis direction by an electric cylinder or air cylinder (not shown), and the openable / closable sheet 931 is opened and closed accordingly.

For example, in a region on the −Y direction side of the upper end (upper surface) of the side wall 920 of the storage case 92, a fixed sheet mounting base 950 to which a fixed sheet 951 is attached is disposed. The height of the fixed sheet mounting base 950 is set to be lower than the height of the openable / closable sheet fixing base 930.
The fixed sheet 951 is a resin sheet (for example, a vinyl chloride sheet) having a certain degree of flexibility, and has a rectangular outer shape in plan view. In this embodiment, the fixed sheet 951 has one end 951a attached to the upper surface of the fixed sheet mounting base 950 with an appropriate adhesive or the like with the longitudinal direction parallel to the X-axis direction. The one end 951a may be in a state of being gripped by a gripping clamp from the vertical direction.
Since the fixed sheet 951 has a certain degree of flexibility and moves according to the vertical movement of the spinner table 90, the vertical movement of the spinner table 90 is not hindered.

The length in the longitudinal direction (X-axis direction) of the fixed sheet 951 is, for example, larger than the diameter of the opening 929 of the housing case 92. As shown in FIGS. 4 and 5, the other end 951 b side of the fixing sheet 951 with respect to the one end 951 a hangs down under its own weight and covers a part of the opening 929 (for example, about 1/6) of the housing case 92. .
4 and 5, the fixed sheet 951 is a single sheet having a rectangular shape in plan view, but is not limited thereto. The fixed sheet 951 may be, for example, a warm sheet having a plurality of cuts extending in the Y-axis direction with a predetermined interval in the X-axis direction. Alternatively, the fixed sheet mounting base 950 may be movable in the Y-axis direction, and the position of the other end 951b of the fixed sheet 951 in the Y-axis direction may be changed.

The case where the workpiece W is cut by the processing apparatus 1 shown in FIGS. 1 and 2 and then the workpiece W is cleaned by the cleaning apparatus 9 will be described.
First, a cassette (not shown) containing a plurality of workpieces W supported by the annular frame F is placed on the cassette placing table 13 shown in FIG. 2, and then the height of the cassette is adjusted by a lift elevator.

  Next, the transport pad moving means 41 moves the clamp 46 in the + Y direction to enter the cassette. Further, the annular frame F is gripped by the clamp 46, and one workpiece W is pulled out from the cassette by the clamp 46, and the annular frame F is placed on the centering guide 36. Then, the pair of guide rails of the centering guide 36 approach each other in the X-axis direction and center the workpiece W while supporting the outer peripheral edge portion of the annular frame F.

  The transport pad 40 is moved in the Y-axis direction by the transport pad moving means 41, and each suction plate 401 is positioned above the annular frame F on the centering guide 36. Further, the lower arm 42 lowers the conveyance pad 40, and the suction plate 401 contacts the annular frame F to perform adsorption, whereby the conveyance pad 40 picks up the workpiece W.

  When the workpiece W is picked up, the pair of guide rails of the centering guide 36 moves away from each other, and a gap through which the workpiece W passes is formed between the pair of guide rails. Then, the lower arm 42 lowers the transport pad 40 and places the workpiece W on the holding surface 30 a of the chuck table 30. After the fixed clamp 32 sandwiches and fixes the annular frame F, and the chuck table 30 sucks and holds the workpiece W on the holding surface 30a, the suction of the annular frame F by the transport pad 40 is released.

Next, the chuck table 30 that sucks and holds the workpiece W is fed in the −X direction by a cutting feed means (not shown) and moves into the housing 11.
The workpiece W is sent in the −X direction, and the position of the division line S to be cut is detected by the alignment means 67 shown in FIG. As the planned division line S is detected, the cutting means 6 is indexed and fed in the Y-axis direction, and the planned division line S and the cutting blade 63 are aligned in the Y-axis direction.
The cutting feed means 68 lowers the cutting means 6, and for example, the cutting means 63 is positioned at a height position where the cutting blade 63 fully cuts the workpiece W and cuts into the dicing tape T.

A cutting feed means (not shown) feeds the chuck table 30 in the −X direction, and the cutting blade 63 cuts into the workpiece W while rotating at a high speed to cut the division line S.
When the workpiece W advances in the -X direction to a predetermined position in the X-axis direction where the cutting blade 63 finishes cutting the division planned line S, a cutting feed means (not shown) once stops the cutting feed of the workpiece W, The cutting feed means 68 raises the cutting means 6 and separates the cutting blade 63 from the workpiece W. Then, a cutting feed means (not shown) sends the chuck table 30 in the + X direction and returns it to the original position. The cutting means 6 is indexed and fed in the Y-axis direction at intervals between adjacent division lines S, and the same cutting is performed sequentially, and all the division lines S in the same direction are cut. Further, the chuck table 30 is rotated 90 degrees and the same cutting is performed, so that all the division lines S are cut vertically and horizontally and the workpiece W is divided into chips each including the device D. Further, a triangular tip serving as an end material is formed on the outer peripheral portion of the workpiece W.

The chuck table 30 is fed in the + X direction by a cutting feed means (not shown), and the chuck table 30 moves from the inside of the housing 11 into the apparatus cover 15.
Next, the loading means 5 unloads the workpiece W (hereinafter, referred to as the workpiece W) from the chuck table 30. That is, the carry-in pad 50 is moved in the Y-axis direction by the carry-in pad moving means 51 shown in FIG. 2, and each suction plate 501 is positioned above the annular frame F that supports the article W to be cleaned. Further, the upper arm 52 lowers the carry-in pad 50, the suction plate 501 comes into contact with the annular frame F to perform suction, and the carry-in pad 50 picks up the object W to be cleaned.

  The object to be cleaned W is sucked and held by the chuck table 30 and the fixing of the annular frame F by the fixing clamp 32 is released. Then, the upper arm 52 raises the carry-in pad 50, and then the carry-in pad moving means 51 moves the carry-in pad 50 in the −Y direction and conveys the article W to be cleaned to the cleaning device 9.

The opening 929 of the storage case 92 of the cleaning device 9 is in an open state so that the article to be cleaned W can be carried in as shown in FIG.
The object W to be cleaned is transported above the spinner table 90 by the carry-in pad moving means 51, and the position of the carry-in pad 50 is adjusted so that the center of the object W to be cleaned approximately matches the center of the holding surface 900a of the spinner table 90. Adjustments are made.

Next, the upper arm 52 lowers the carry-in pad 50, and the article to be cleaned W is placed on the holding surface 900 a of the spinner table 90. Then, as shown in FIG. 5, the fixing clamp 901a sandwiches and fixes the annular frame F, and the suction force generated by a suction source (not shown) is transmitted onto the holding surface 900a of the spinner table 90, whereby the spinner table 90 Sucks and holds the object W to be cleaned. Further, the suction of the annular frame F by the carry-in pad 50 is released.
Then, the spinner table 90 that sucks and holds the workpiece W is lowered to the cleaning work height position in the housing case 92 as shown in FIG.

  Next, as shown in FIGS. 6 and 7, the first sheet piece 931 a and the second sheet piece 931 b are pulled out from the take-up rod 935 as the moving unit 932 moves in the −Y direction. The openable / closable sheet 931 extends substantially horizontally toward the -Y direction. When the moving unit 932 moves to a predetermined position on the −Y direction side, the openable / closable sheet 931 covers the opening 929 except for a part of the opening 929, and the second sheet piece 931 b covers the fixed sheet 951. A state in which the other end 951b side is covered by a predetermined area from above, that is, the fixed sheet 951 is disposed below the openable / closable sheet 931 when the article to be cleaned W is cleaned.

  Since the other end 951b side of the fixed sheet 951 hangs down, a gap is formed between the openable / closable sheet 931 and the fixed sheet 951, so that a vent hole 954 is formed from above the opening 929 into the housing case 92. The Further, the opening 929 of the housing case 92 is in a state where the entire surface is covered with the fixed sheet 951 and the openable / closable sheet 931.

  Next, the cleaning nozzle 91 pivots, and the ejection port 910 of the cleaning nozzle 91 is positioned above the central region of the surface Wa of the object W that is sucked and held by the spinner table 90. Then, a cleaning liquid (for example, pure water) is sprayed from the injection port 910 of the cleaning nozzle 91 toward the center of the surface Wa of the object W to be cleaned. Further, the cleaning nozzle 91 that injects the cleaning liquid swivels so as to reciprocate at a predetermined angle around the axis in the Z-axis direction above the workpiece W. In addition, when the spinner table 90 rotates at a predetermined rotation speed, the cleaning liquid is sprayed from the cleaning nozzle 91 over the entire surface Wa of the object W to be cleaned.

  As a result, the object to be cleaned W is cleaned, and the cleaning liquid flows on the surface Wa of the object to be cleaned W from the center side toward the outer peripheral side by the centrifugal force generated by the rotation of the spinner table 90. It flows down from the top to the bottom 921 of the storage case 92.

During the cleaning, a spray containing cutting waste and the like remaining on the surface Wa of the object to be cleaned W is generated and scattered in the housing case 92. Therefore, the suction source 928 is activated, and the suction source 928 sucks the spray containing dirt such as cutting dust from the storage case 92. During cleaning, since the outside air is constantly taken into the housing case 92 by the vents 954 from above the opening 929 into the housing case 92, the inside of the housing case 92 is decompressed and the spray is not exhausted. Does not occur.
As shown in the examples shown in FIGS. 6 and 7, the outside air taken into the housing case 92 is set by setting the exhaust port 920 a and the air vent 954 of the housing case 92 to face each other obliquely in the Y-axis direction. Is directed to the exhaust port 920a as it is, and the flow of outside air in the housing case 92 is preferably rectified.

  On the other hand, during the cleaning, the end material formed on the workpiece W by cutting (for example, the triangular chip formed on the outer peripheral portion of the workpiece W) or the splash of the cleaning liquid scatters toward the opening 929 side. Sometimes. However, since the entire opening 929 of the storage case 92 is covered with the fixed sheet 951 and the openable / closable sheet 931, splashes and scraps of the cleaning liquid are scattered outside the storage case 92. Is prevented. Since the outside air constantly flows into the housing case 92 from the vent 954, the flow of the outside air prevents splashes and the like flying toward the vent 954 from scattering outside the housing case 92. Can be removed.

  After the object to be cleaned W is cleaned by the cleaning liquid for a predetermined time, the cleaning liquid jet from the cleaning nozzle 91 is stopped. Next, air is jetted from the jet port 960 of the air nozzle 96 toward the center of the surface Wa of the article W to be cleaned. Further, the air nozzle 96 that injects air swivels above the article to be cleaned W so as to reciprocate around the axis in the Z-axis direction at a predetermined angle. Further, the rotating means 94 rotates the spinner table 90 at a predetermined rotational speed, whereby the entire surface Wa of the article W to be cleaned is dried by air blowing. When the drying of the article W to be cleaned is completed, the air nozzle 96 pivots from the spinner table 90 and retracts.

  As the moving unit 932 moves in the + Y direction, the first sheet piece 931a and the second sheet piece 931b are wound around the take-up rod 935 by the shape-memorized winding kite, and the opening 929 is opened. It will be in the state. In addition, the spinner table 90 rises and the object to be cleaned W can be carried out.

  The transport pad moving means 41 shown in FIG. 2 moves the transport pad 40 in the −Y direction, and each suction plate 401 is positioned above the annular frame F on the spinner table 90. Further, the lower arm 42 lowers the transport pad 40 and the suction disk 401 contacts the annular frame F to perform suction, whereby the transport pad 40 picks up the object W to be cleaned.

  Then, the transport pad 40 moves in the + Y direction, and the annular frame F is placed on the centering guide 36. Further, after the annular frame F is gripped by the clamp 46, the workpiece W is inserted into a cassette (not shown) on the cassette mounting table 13 by the clamp 46.

  As described above, the cleaning device 9 according to the present invention is disposed below the openable / closable sheet 931 that covers the opening 929 except for a part of the opening 929 of the housing case 92 and the openable / closable sheet 931 when cleaning the object to be cleaned. The fixing sheet 951 covers a part of the opening 929. The fixing sheet 951 is open and closed because one end 951a is fixed to the upper end of the housing case 92 and the other end 951b side hangs from the one end 951a. A gap is formed between the flexible sheet 931 and the fixed sheet 951. Therefore, a ventilation hole 954 is formed from above the opening 929 into the housing case 92 to allow outside air to flow into the housing case 92 and prevent the inside of the housing case 92 from being depressurized. The spray can continue to be exhausted. Further, since the opening 929 of the storage case 92 is entirely covered with the openable / closable sheet 931 and the fixed sheet 951, the cleaning liquid and the end material of the cleaning target W being cleaned are outside the storage case 92. Can be prevented from scattering.

  The cleaning device 9 according to the present invention is not limited to the above embodiment, and each configuration of the processing device 1 and the cleaning device 9 illustrated in the accompanying drawings is not limited to the illustrated example. These can be appropriately changed within a range where the effects of the present invention can be exhibited.

W: Object to be cleaned (workpiece) T: Dicing tape F: Ring frame 1: Processing device 10: Base 11: Housing 110: Viewing window 111: Operating means 116: Loading / unloading port 12: Processing chamber 15: Device cover 13: Cassette mounting table 30: Chuck table 31: Cover 32: Fixed clamp 36: Centering guide 6: Cutting means 61: Spindle 62: Spindle housing 63: Cutting blade 69: Index feed means 68: Cutting feed means 67: Alignment means 4 : Conveying means 40: Conveying pad 401: Suction plate
41: Transfer pad moving means 410: Ball screw 411: Guide rail 412: Motor 413: Movable block 42: Lower arm 46: Clamp 5: Loading means 50: Loading pad 501: Suction plate
51: Loading pad moving means 510: Ball screw 511: Guide rail 512: Motor 513: Movable block 52: Upper arm
9: Cleaning device 90: Spinner table 900: Suction part 900a: Holding surface 901: Frame body 901a: Fixed clamp 91: Cleaning nozzle 96: Air nozzle 92: Housing case 920: Side wall 920a: Exhaust port 921: Bottom 926: Exhaust channel 928 : Suction source 929: Opening
94: Rotating means
930: Openable / closable sheet fixing base 931: Openable / closable sheet 931a: First sheet piece 931b: Second sheet piece 932: Moving portion 934: A pair of guide rails 951: Fixed sheet 954: Vent

Claims (1)

A cleaning device,
A spinner table for holding an object to be cleaned;
A cleaning nozzle for injecting a cleaning liquid onto an object to be cleaned held by the spinner table;
A housing case that houses the spinner table and the washing nozzle, has an opening for carrying an object to be washed into the inside from the top or carrying it out from the inside, and is formed with an exhaust port connected to a suction source;
An openable / closable sheet that covers the opening except for a part of the opening;
A fixed sheet that is arranged below the openable and closable sheet when cleaning the object to be cleaned and covers a part of the opening, and
The fixing sheet has one end fixed to the upper end portion of the housing case and the other end side with respect to the one end hangs down to form a gap between the openable and closable sheet and the fixing sheet, so that the fixing sheet can be seen from above the opening. A cleaning device that forms a vent opening into the storage case and allows outside air to flow into the storage case, and prevents the cleaning liquid and the end material of the object being cleaned from scattering outside the storage case. .

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