JP2022025341A - Processing device - Google Patents

Abstract

To dry a work-piece.SOLUTION: A processing device comprises: separating means 18 that separates a work-piece 14 from a holding surface 210 by jetting water, air and mixed liquid from the holding surface 210; carrying-out means 6 that comprises a carrying pad 60 that carries the work-piece 14 and a ring air nozzle 61 that blows air to an upper surface 140 of the work-piece 14 protruding from the carrying pad 60; and a lower surface air nozzle 8 that jets air toward a lower surface 141 of the work-piece 14 held on the carrying pad 60. Using the device, air is sprayed from the lower air nozzle 8 to the lower surface 141 of the work-piece 14 separated from the holding surface 210 sucked and held on the carrying pad 60, and a chuck table and the carrying pad 60 are relatively moved horizontally to dry the lower surface, and air is sprayed from the ring air nozzle 61 to dry the upper surface 140 of the work-piece 14.SELECTED DRAWING: Figure 2

Description

The present invention relates to a processing apparatus.

For example, a processing device such as a grinding device that grinds a workpiece holds the workpiece on a holding surface of a chuck table, and uses an annular grinding wheel to hold the upper surface of the workpiece held on the holding surface. Grinding.
Further, the grinding apparatus is provided with a carrying-out means for sucking and holding the work piece after grinding by using a transport pad for sucking and holding.
When the work piece is carried out from the holding surface using the carrying-out means, the work piece held on the holding surface is sucked and held by the transport pad, and a mixed liquid of water and air is ejected and held from the holding surface. The workpiece is carried out from the holding surface by separating the workpiece from the surface and moving the transport pad in a direction away from the holding surface.

In this way, the mixed liquid is ejected from the holding surface to separate the workpiece, so that the lower surface of the workpiece gets wet. Further, after separating the workpiece from the holding surface, as disclosed in Patent Document 1, cleaning water is supplied to the lower surface of the workpiece and the workpiece is washed with a cleaning tool such as a brush, so that the lower surface of the workpiece gets wet. .. Further, by separating the workpieces or cleaning the lower surface of the workpiece as described above, water rises to the upper surface of the workpiece and the upper surface becomes wet. In this way, the lower surface and the upper surface of the workpiece get wet.

Japanese Unexamined Patent Publication No. 2018-086692

When the work piece gets wet as described above, for example, if the next process is a process that does not wet the work piece such as laser machining, it is necessary to dry the work piece, and the work piece is dried. There is a problem that it takes time to make it.
Therefore, a processing apparatus that processes a work piece using washing water or the like has a problem of drying the work piece in order to convey it to the next process.

The present invention comprises a holding means having a chuck table for holding a work piece on a holding surface, a processing means for supplying processing water to process a work piece held on the holding surface, and holding the work piece on the holding surface. A processing device including a carrying-out means for carrying out the workpiece to be carried out from the holding surface, a horizontal moving means for moving the holding means and the carrying-out means in a direction relatively parallel to the holding surface, and a control means. Further, a separation means for ejecting a mixed liquid of water and air from the holding surface to separate the workpiece from the holding surface, and a lower surface air nozzle for injecting air toward the lower surface of the workpiece. The carrying-out means is provided with a transport pad having a diameter smaller than that of the workpiece that sucks and holds the upper surface of the workpiece, and a ring air nozzle that blows air onto the upper surface of the workpiece protruding from the transport pad. The control means ejects air from the lower surface air nozzle to the lower surface of the workpiece separated from the holding surface by suction and holding by the transport pad, and moves the holding means and the carrying out means in a relatively horizontal direction. It is a processing device that dries the lower surface and blows air from the ring air nozzle to dry the upper surface of the workpiece.

When the workpiece is sucked and held on the suction surface of the transport pad and separated from the holding surface of the chuck table, the upper surface and the lower surface of the workpiece can be dried. This eliminates the need for a drying unit to dry the workpiece. Further, since the upper surface and the lower surface of the workpiece are dried while the workpiece is being carried out, a separate step of drying the workpiece is not required, and the drying time is shortened.

It is a perspective view which shows the whole of a processing apparatus. It is sectional drawing of the carrying-out means and holding means at the time of carrying out a work piece by using the carrying-out means. It is a perspective view which shows the whole of a processing apparatus. It is sectional drawing of the carrying-out means and holding means at the time of carrying out a work piece by using the 2nd carrying-out means.

1 Configuration of the processing device The processing device 1 shown in FIG. 1 is a processing device that grinds the workpiece 14 held on the chuck table 20 by using the processing means 3. The workpiece 14 is, for example, a disk-shaped semiconductor wafer or the like. Hereinafter, the configuration of the processing apparatus 1 will be described.
As shown in FIG. 1, the processing apparatus 1 includes a base 10 extending in the Y-axis direction and a column 11 erected on the + Y direction side of the base 10.

On the side surface of the column 11 on the −Y direction side, a machining feed means 4 that supports the machining means 3 so as to be able to move up and down is arranged. The processing means 3 includes, for example, a spindle 30 having a rotating shaft 35 in the Z-axis direction, a housing 31 that rotatably supports the spindle 30, a spindle motor 32 that rotationally drives the spindle 30 around the rotating shaft 35, and a spindle. It is a grinding means including a mount 33 connected to the lower end of the mount 33 and a grinding wheel 34 detachably mounted on the lower surface of the mount 33.

The grinding wheel 34 includes a wheel base 341 and a plurality of substantially rectangular parallelepiped grinding wheels 340 arranged in an annular shape on the lower surface of the wheel base 341. The lower surface of the grinding wheel 340 is a grinding surface 342 that comes into contact with the workpiece 14.

By rotating the spindle 30 using the spindle motor 32, the mount 33 connected to the spindle 30 and the grinding wheel 34 mounted on the lower surface of the mount 33 are integrally rotated.

The machining feed means 4 rotates the ball screw 40 having a rotation shaft 45 in the Z-axis direction, a pair of guide rails 41 arranged parallel to the ball screw 40, and the ball screw 40 around the rotation shaft 45. It includes a shaft motor 42, an elevating plate 43 in which an internal nut is screwed into a ball screw 40 and a side portion is in sliding contact with a guide rail 41, and a holder 44 which is connected to the elevating plate 43 and supports the processing means 3.

When the ball screw 40 is driven by the Z-axis motor 42 and the ball screw 40 rotates about the rotation shaft 45, the elevating plate 43 is guided by the guide rail 41 to move up and down in the Z-axis direction and the holder. The grinding wheel 34 of the processing means 3 held by the 44 moves in the Z-axis direction.

The holding means 2 is arranged on the base 10. The holding means 2 has a chuck table 20 for holding the workpiece 14. The chuck table 20 includes a disk-shaped suction portion 21 and a frame body 22 that supports the suction portion 21. The suction unit 21 is a porous member and has a large number of pores. The upper surface of the suction portion 21 is a holding surface 210 for holding the workpiece 14, and the upper surface 220 of the frame body 22 is formed flush with the holding surface 210.

As shown in FIG. 2, the chuck table 20 is mounted on the base 23, and the lower surface 221 of the frame body 22 is supported by the base 23. The base 23 is rotatably supported by the annular connecting member 29. The connecting member 29 is supported by a plurality of (two in FIG. 2) support columns 291 and the support columns 291 are supported by the support plate 290. That is, the chuck table 20 is arranged on the support plate 290 via the support pillar 291 and the connecting member 29 and the base 23, and the horizontal position thereof is fixed.

Below the chuck table 20, a rotating means 26 for rotating the base 23 is arranged. The rotating means 26 is, for example, a pulley mechanism, and is wound around a drive shaft 262 that can be rotated about an axis in the Z-axis direction by a motor 260, a drive pulley 263 connected to the upper end of the drive shaft 262, and a drive pulley 263. A transmission belt 264 that is rotated and transmits the driving force of the drive pulley 263 to the driven pulley 265, a driven pulley 265 that is wound around the transmission belt 264 together with the drive pulley 263, and a driven shaft 266 that is connected to the driven pulley 265. And a rotary joint 267 connected to the lower end of the driven shaft 266. The driven shaft 266 is connected to the base 23.

When the drive shaft 262 is rotated by using the motor 260, the drive pulley 263 is rotated, and the rotational force of the drive pulley 263 is transmitted to the driven pulley 265 by the transmission belt 264 to rotate the driven pulley 265. As a result, the driven shaft 266 connected to the driven pulley 265 rotates about the rotating shaft 25 in the Z-axis direction, and the base 23 connected to the driven shaft 266 rotates the rotating shaft 25 in the Z-axis direction. It is configured to rotate around an axis.

Below the chuck table 20, a suction source 240, an air supply source 241 and a water supply source 242 connected to the suction portion 21 through the flow path 243 are arranged.
The flow path 243 is formed so as to penetrate the inside of the frame body 22, the base 23, the driven shaft 266, and the rotary joint 267, and protrudes from the side surface of the rotary joint 267 to the outside of the rotary joint 267. It branches into a suction path 2430, an air flow path 2431, and a water flow path 2432.

A suction valve 2400 and a throttle valve 2401 are arranged between the suction source 240 and the suction portion 21, and the suction mechanism 180 is configured by the suction source 240, the suction valve 2400, the throttle valve 2401 and the suction path 2430. There is. When the suction source 240 is operated with the suction source 240 and the suction valve 2400 open, the suction force generated by the suction source 240 is transmitted to the holding surface 210 of the suction unit 21 through the flow path 243.
For example, the work piece 14 can be sucked and held on the holding surface 210 by opening the suction valve 2400 and operating the suction source 240 while the work piece 14 is placed on the holding surface 210. ..

Further, an air valve 2410 and a throttle valve 2411 are arranged between the air supply source 241 and the suction unit 21, and the air supply mechanism 181 is provided by the air supply source 241, the air valve 2410, the throttle valve 2411 and the air flow path 2431. Is configured. When air is supplied using the air supply source 241 with the air valve 2410 open, the supplied air is transmitted to the suction unit 21 through the flow path 243 and is transmitted from a large number of pores formed on the holding surface 210. It will be injected toward the space above the holding surface 210.

A water valve 2420 and a throttle valve 2421 are arranged between the water supply source 242 and the suction unit 21, and the water supply mechanism 182 is provided by the water supply source 242, the water valve 2420, the throttle valve 2421 and the water flow path 2342. It is configured. When water is supplied from the water supply source 242 with the water valve 2420 open, the supplied water is transmitted to the suction unit 21 through the flow path 243 and is ejected from a large number of pores of the holding surface 210. ..

The air supply mechanism 181 and the water supply mechanism 182 form a separating means 18 for separating the workpiece 14 from the holding surface 210. Air is supplied from the air supply source 241 while the air valve 2410 of the air supply mechanism 181 is open while the workpiece 14 is placed on the holding surface 210, and the water valve 2420 of the water supply mechanism 182 is opened. When water is supplied from the water supply source 242 in this state, the air is supplied to the flow path 243 through the air flow path 2431 and the water is supplied to the flow path 243 through the water flow path 2432. As a result, the mixed liquid of air and water mixed in the flow path 243 is ejected from the holding surface 210, and the lower surface 141 of the workpiece 14 is urged by the mixed liquid from the −Z direction, so that the workpiece 14 is urged. It is configured to be separated from the holding surface 210.

Further, for example, in a state where the workpiece or the like is not placed on the holding surface 210, the air valve 2410 is opened and the air supply source 241 is operated to inject air from a large number of pores of the holding surface 210. Grinding debris and the like adhering to the inside of the suction unit 21 and the holding surface 210 can be removed. Further, for example, in a state where the workpiece or the like is not placed on the holding surface 210, the water valve 2420 is opened and the water supply source 242 is operated to inject water from a large number of pores of the holding surface 210. The holding surface 210 can be cleaned. At this time, the air valve 2410 may be opened to inject air together with water.

As shown in FIG. 1, a gantry column 12 is erected on the −Y direction side of the base 10, and a unloading means 6 is supported by the gantry column 12.

The carrying-out means 6 includes a circular transport pad 60 that sucks and holds the upper surface 140 of the workpiece 14. As shown in FIG. 2, the transport pad 60 is formed to have a smaller diameter than the workpiece 14, and an air flow path 601 is formed inside the transport pad 60. The air flow path 601 is formed, for example, by being stretched in an annular shape inside the transport pad 60, and is opened at the lower surface 600 of the transport pad 60 to be connected to the space outside the transport pad 60. Further, the air flow path 601 is branched into an air supply path 6910 and a suction path 6810 outside the transport pad 60. The air supply path 6910 is connected to the air supply source 690, and the suction path 6810 is connected to the suction source 680. An air valve 691 is arranged in the air supply path 6910, and a suction valve 681 is arranged in the suction path 6810.

By supplying air from the air supply source 690 with the air valve 691 open, the supplied air is injected from the lower surface 600 of the transport pad 60 through the air flow path 601.
Further, by operating the suction source 680 with the air valve 691 closed and the suction valve 681 open, the generated suction force is transmitted to the lower surface 600 of the transport pad 60 through the air flow path 601. To. For example, in a state where the upper surface 140 of the workpiece 14 is in contact with the lower surface 600 of the transfer pad 60, the suction force generated by the suction source 680 is transmitted to the lower surface 600 of the transfer pad 60, whereby the transfer pad 60 The workpiece 14 can be sucked and held on the lower surface 600. Here, since the transport pad 60 is formed to have a smaller diameter than the workpiece 14, when the workpiece 14 is sucked and held by the transport pad 60, the workpiece 14 is formed from the outer periphery of the transport pad 60. It will stick out.

The carrying-out means 6 includes a ring air nozzle 61 that blows air onto a portion 1400 protruding from the transport pad 60 on the upper surface 140 of the workpiece 14 that is sucked and held by the transport pad 60. The ring air nozzle 61 is connected to the outer surface of the transport pad 60, and an air supply path 610 is formed inside the ring air nozzle 61. The air supply path 610 is looped around the inside of the ring air nozzle 61, and a part of the air supply path 610 penetrates the ring air nozzle 61 in the Z-axis direction. Further, the air supply path 610 is connected to the air supply source 63.
Further, an air valve 62 is arranged in the air supply path 610. By supplying air from the air supply source 63 while the workpiece 14 is sucked and held by the transport pad 60 and the air valve 62 is open, the supplied air passes through the air supply path 610 and rings. The air is sprayed from the lower surface 611 of the air nozzle 61 to the portion 1400 protruding from the transport pad 60 on the upper surface 140 of the workpiece 14. As a result, the upper surface 140 of the workpiece 14 can be dried.

Three support members 602 (two are shown in FIG. 2) are fixed to the upper surface 6000 of the transport pad 60. The support member 602 extends in the Z-axis direction, and a brim portion 6020 is formed on the support member 602. The support member 602 penetrates through a through hole 6030 formed in the plate-shaped connecting member 603, and the brim portion 6020 is supported by the connecting member 603.
The connecting member 603 is connected to the shaft portion 604. A horizontal moving means 66 is connected to the upper end of the shaft portion 604, and the horizontal moving means 66 is supported by the elevating means 67. Further, the elevating means 67 is connected to the gantry column 12 shown in FIG. That is, the transport pad 60 is supported by the portal column 12 via the horizontal moving means 66 and the elevating means 67.
The shaft portion 604 may be connected to the elevating means 67, and the elevating means 67 may be supported by the horizontal moving means 66.

The horizontal moving means 66 is, for example, a robot arm capable of turning in the horizontal direction as shown in FIG. 1, and the transport pad 60 can be swiveled and moved in the horizontal direction by using the horizontal moving means 66.
Further, the elevating means 67 is provided with a ball screw mechanism (not shown) or the like inside thereof, and by operating the ball screw mechanism, the transport pad 60 can be moved up and down in the Z-axis direction.

A lower surface air nozzle 8 is arranged on the + Y direction side of the portal column 12 and on the −Y direction side of the chuck table 20 on the base 10. The lower surface air nozzle 8 includes a plurality of air nozzles 80 arranged side by side in the X-axis direction. The air nozzle 80 is connected to the air supply source 81. By supplying air from the air supply source 81, air can be injected from the air nozzle 80 in the + Z direction.

A roll sponge 82 extended in the X-axis direction is disposed on the −Y direction side of the air nozzle 80. As shown in FIG. 2, a motor 83 for rotating the roll sponge 82 is disposed inside the roll sponge 82. Further, inside the roll sponge 82, a washing water nozzle 84 connected to a washing water source (not shown) is arranged. The washing water nozzle 84 can supply washing water to the inside of the roll sponge 82.
For example, in a state where the workpiece 14 sucked and held by the transport pad 60 is positioned above the roll sponge 82, the cleaning water is supplied from the cleaning water nozzle 84 to the inside of the roll sponge 82 and the motor 83 is used to roll. By rotating the sponge 82, the lower surface 141 of the workpiece 14 can be cleaned.
Further, a drain port 85 is provided below the roll sponge 82. The washing water scattered from the roll sponge 82 will be discharged to the outside of the processing apparatus 1 from the drain port 85.

The processing apparatus 1 includes a control means 19 as shown in FIG. The control means 19 includes a CPU, a memory, and the like, and has a function of performing various controls of the processing device 1 when grinding the workpiece 14 using the processing device 1.

2 Operation of processing equipment (grinding of workpiece)
The operation of the processing device 1 when grinding the workpiece 14 using the processing device 1 will be described. When grinding the workpiece 14 using the processing apparatus 1, first, the workpiece 14 is placed on the holding surface 210 of the chuck table 20 shown in FIG. 1 and connected to the holding surface 210. By operating the suction source, the workpiece 14 is suction-held on the holding surface 210.

Then, the chuck table 20 is rotated around the rotation shaft 25 by using the rotation means 26 shown in FIG. As a result, the workpiece 14 held on the holding surface 210 of the chuck table 20 rotates about the rotation shaft 25. Further, the grinding wheel 340 is rotated around the rotating shaft 35 by using the spindle motor 32 shown in FIG. 1.

In a state where the workpiece 14 held on the holding surface 210 is rotating and the grinding wheel 340 is rotating, the grinding wheel 340 is lowered in the −Z direction by using the machining feed means 4. As a result, the grinding surface 342 of the grinding wheel 340 comes into contact with the upper surface 140 of the workpiece 14 held by the holding surface 210. The workpiece 14 is ground by further lowering the grinding wheel 340 in the −Z direction while the grinding surface 342 of the grinding wheel 340 is in contact with the upper surface 140 of the workpiece 14. Here, during the grinding process of the workpiece 14, the grinding wheel 340 and the workpiece 14 are used from a processing water supply means or the like (not shown) for the purpose of removing the machining chips generated by the grinding process of the workpiece 14. The processing water is supplied to the position where the wheel comes into contact.
When grinding the workpiece 14, the thickness of the workpiece 14 is measured by using, for example, a thickness measuring means having a height gauge (not shown) provided in the vicinity of the chuck table 20, and the workpiece 14 is subjected to the grinding process. When the work piece 14 is ground to a predetermined thickness, the work piece 14 is finished to be ground.

(Carrying out the work piece)
After the grinding process of the workpiece 14 is completed, the workpiece 14 held on the holding surface 210 of the chuck table 20 is carried out by using the carrying-out means 6. When the workpiece 14 is carried out by using the carrying-out means 6, first, the transport pad 60 is moved in the horizontal direction by using the horizontal moving means 66, so that the transport pad 60 is held on the holding surface as shown in FIG. It is positioned above the 210, and the transport pad 60 is lowered in the −Z direction using the elevating means 67 to bring the lower surface 600 of the transport pad 60 into contact with the workpiece 14.
Here, the transfer pad 60 is formed to have a smaller diameter than the work piece 14, and when the lower surface 600 of the transfer pad 60 is brought into contact with the upper surface 140 of the work piece 14, the work piece 14 protrudes from the outer periphery of the work piece 14. ..

Then, in a state where the workpiece 14 is in contact with the lower surface 600 of the transport pad 60, the suction valve 681 is opened to operate the suction source 680. As a result, the generated suction force is transmitted to the lower surface 600 of the transport pad 60 through the suction path 6810 and the air flow path 601 to suck the upper surface 140 of the workpiece 14 to the lower surface 600 of the transport pad 60.

Further, the separating means 18 is used to eject a mixed liquid of water and air from the holding surface 210 to separate the workpiece 14 from the holding surface 210. The lower surface 141 of the workpiece 14 is urged in the + Z direction by the mixed liquid exuded from a large number of pores of the holding surface 210 to be separated from the holding surface 210, and is sucked and held by the lower surface 600 of the transport pad 60. ..

Next, the workpiece 14 which is separated from the holding surface 210 and is sucked and held on the lower surface 600 of the transport pad 60 is horizontally moved by using the horizontal moving means 66 and positioned above the roll sponge 82. Then, the cleaning water is supplied from the cleaning water nozzle 84 to the roll sponge 82 while rotating the roll sponge 82 using the motor 83. As a result, the lower surface 141 of the workpiece 14 is washed with running water. At this time, for example, the roll sponge 82 may be brought into contact with the lower surface 141 of the workpiece 14.

After cleaning the lower surface 141 of the workpiece 14, air is ejected from a plurality of air nozzles 80 provided in the lower surface air nozzle 8 toward the lower surface 141 of the workpiece 14, and is held by the transport pad 60 using the horizontal moving means 66. The work piece 14 is moved horizontally. As a result, air is supplied to the entire surface of the lower surface 141 of the workpiece 14, and the lower surface 141 of the workpiece 14 is dried.

The processing water supplied during the grinding process of the workpiece 14 may adhere to the upper surface 140 of the workpiece 14. Further, when the lower surface 141 of the workpiece 14 is washed with running water, the cleaning water scattered from the roll sponge 82 may travel along the outer peripheral surface of the workpiece 14 and adhere to the upper surface 140 of the workpiece 14. .. Therefore, while the lower surface 141 of the workpiece 14 is dried by the lower surface air nozzle 8, the air valve 62 is opened to supply air from the air supply source 63, and the ring air nozzle 61 injects air onto the upper surface 140 of the workpiece 14. As a result, the upper surface 140 of the workpiece 14 is dried.
In the configuration of only the lower surface air nozzle 8, the cleaning water adheres to the upper surface 140 along the outer peripheral surface of the workpiece 14 due to the flow of air as in the case of cleaning.

In the processing apparatus 1, the upper surface 140 and the lower surface 141 of the workpiece 14 can be dried while the workpiece 14 is being carried out, and the drying time can be shortened.
Further, the processing apparatus 1 is suitable because it is not necessary to separately provide a drying unit for drying the workpiece 14.

As shown in FIG. 3, the processing apparatus 1 includes a horizontal moving means 5 for horizontally moving the chuck table 20 in the Y direction inside the base 10, and the portal column 12 and the portal column shown in FIG. Instead of the carrying-out means 6 arranged in 12, the second carrying-out means 7 arranged on the −X direction side of the base 10 may be provided as shown in FIG.

The horizontal moving means 5 includes a ball screw 50 having a rotating shaft 55 in the Y-axis direction, a pair of guide rails 51 arranged in parallel with the ball screw 50, and a ball screw connected to the ball screw 50 and centered on the rotating shaft 55. It includes a Y-axis motor 52 that rotates 50, and a movable plate 53 in which a nut at the bottom is screwed into a ball screw 50 and moves in the Y-axis direction along a guide rail 51. A plurality of (two in FIG. 3) support columns 291 are erected on the movable plate 53, and an annular connecting member 29 is supported on the support columns 291. The annular connecting member 29 rotatably supports the base 23. A chuck table 20 is detachably attached to the base 23.

When the ball screw 50 is driven by the Y-axis motor 52 and the ball screw 50 rotates about the rotation shaft 55, the movable plate 53 is guided by the guide rail 51 and moves in the Y-axis direction. When the movable plate 53 moves in the Y-axis direction, the chuck table 20, the lower surface air nozzle 8 and the roll sponge 82 supported by the movable plate 53 move integrally with the movable plate 53 in the Y-axis direction.

When grinding the workpiece 14, for example, the chuck table 20 is held in the holding surface 210 of the chuck table 20 and then the chuck table 20 is moved in the + Y direction with respect to the machining means 3 by using the horizontal moving means 5. It is moved relative to the processing means 3 and brought closer to the processing means 3 by an appropriate distance. As a result, the workpiece 14 held on the chuck table 20 is positioned below the machining means 3. Then, in a state where the workpiece 14 held on the holding surface 210 and the grinding wheel 340 are rotating in the same manner as described above, the grinding wheel 340 is moved to the workpiece 14 in the −Z direction by using the machining feed means 4. The work piece 14 can be ground by bringing the grinding wheel 340 into close contact with the upper surface 140 of the work piece 14.

In this configuration, for example, a cover 27 and a bellows 28 stretchably connected to the cover 27 are arranged around the chuck table 20. When the chuck table 20 moves in the Y-axis direction, the cover 27 moves in the Y-axis direction together with the chuck table 20, and the bellows 28 expands and contracts.

The second carrying-out means 7 includes a transport pad 60, a ring air nozzle 61 connected to the outer surface of the transport pad 60, and a lifting means 70 for moving the transport pad 60 up and down in the Z-axis direction. An arm 72 is connected to a connecting member 603 that supports the transport pad 60 via a support member 602, and is erected in the Z-axis direction at an end of the arm 72 that is not connected to the transport pad 60. The shaft portion 71 is connected. Further, an elevating means 70 is arranged at the lower end of the shaft portion 71.

As shown in FIG. 4, the elevating means 70 controls a ball screw 702 extending in the Z-axis direction, a motor 700 that rotates the ball screw 702 around the axis in the Z-axis direction, and a rotation amount of the motor 700. It includes an encoder 701 and a movable portion 703 in which an internal nut is screwed into a ball screw 702 and moves up and down in the Z-axis direction. The movable portion 703 is connected to the shaft portion 71.
When the ball screw 702 is rotated by using the motor 700, the movable portion 703 moves up and down in the Z-axis direction while sliding in contact with the ball screw 702, and accordingly, the shaft portion 71 and the shaft portion 71 connected to the movable portion 703 move up and down. The arm 72 connected to the arm 72 and the transport pad 60 supported by the arm 72 are integrally moved up and down in the Z-axis direction.

When the workpiece 14 held on the holding surface 210 of the chuck table 20 is carried out by using the second carrying-out means 7, the chuck table 20 is horizontally held by an appropriate distance in the Y-axis direction by using the horizontal moving means 5. It is moved to position the chuck table 20 below the transport pad 60. Then, the transport pad 60 is moved in the −Z direction using the elevating means 70 to come into contact with the upper surface 140 of the workpiece 14 held by the holding surface 210, and the suction valve 681 is opened to operate the suction source 680. .. As a result, the generated suction force is transmitted to the lower surface 600 of the transport pad 60 through the suction path 6810 and the air flow path 601 to suck the upper surface 140 of the workpiece 14 to the lower surface 600 of the transport pad 60. The upper surface 140 of the workpiece 14 is sucked by the lower surface 600 of the transport pad 60, and the mixed liquid of water and air is ejected from the holding surface 210 by using the separating means 18, so that the workpiece 14 is moved in the + Z direction. It can be urged to separate from the holding surface 210.

As shown in FIG. 4, a lower surface air nozzle 8 and a roll sponge 82 are arranged on the connecting member 29. When cleaning the lower surface 141 of the workpiece 14 sucked and held by the transport pad 60 of the second carry-out means 7, the transport pad 60 is transported to a height position where the transport pad 60 comes into contact with the roll sponge 82 by using the elevating means 70. After moving the pad 60, the cleaning water is supplied from the cleaning water nozzle 84 to the inside of the roll sponge 82. Then, by moving the roll sponge 82 in the Y-axis direction using the horizontal moving means 5, the cleaning water can be spread over the entire surface of the lower surface 141 of the workpiece 14 held by the transport pad 60 for cleaning. ..

Further, when the lower surface 141 of the workpiece 14 sucked and held by the transport pad 60 of the second unloading means 7 is dried, the plurality of air nozzles 80 provided in the lower surface air nozzle 8 are directed toward the lower surface 141 of the workpiece 14. In addition to injecting air, the air nozzle 80 is horizontally moved by using the horizontal moving means 5. As a result, air is supplied to the entire surface of the lower surface 141 of the workpiece 14, and the lower surface 141 of the workpiece 14 is dried.
Further, when air is injected from the air nozzle 80 to the lower surface 141 of the workpiece 14 to dry the lower surface 141 of the workpiece 14, the air valve 62 is opened to supply air from the air supply source 63 to supply the ring. By injecting air from the air nozzle 61 onto the upper surface 140 of the workpiece 14 to dry the upper surface 140 of the workpiece 14, the upper surface 140 and the lower surface 141 of the workpiece 14 are dried while the workpiece 14 is being carried out. Can be made to.

The horizontal moving means 5 in the example of FIG. 3 is configured to move the chuck table 20, the lower surface air nozzle 8 and the roll sponge 82 in the Y-axis direction, but the chuck table 20, the lower surface air nozzle 8 and the roll are rotated by the rotation of the turntable. The sponge 82 may be rotated in the horizontal direction.
The grinding means 3 may be moved in the horizontal direction.

1: Machining device 10: Base 100: Internal base 11: Column 12: Gate column 14: Work piece 140: Top surface 141: Bottom surface 1400: Part protruding from the transport pad 19: Control means 2: Holding means 20: Chuck table 21: Suction part 210: Holding surface 22: Frame body 220: Top surface of frame body 23: Base 25: Rotating shaft 26: Rotating means 260: Motor 262: Drive shaft 263: Drive pulley 264: Transmission belt 265: Driven pulley 266 : Driven shaft 267: Rotary joint 29: Connecting member 290: Support plate 291: Support pillar 243: Flow path 2400: Suction valve 2410: Air valve 2420: Water valve 2430: Suction path 2431: Air flow path 2432: Water channel 28: Cover 29 : Bellows 3: Grinding means 30: Spindle 31: Housing 32: Spindle motor 33: Mount 34: Grinding wheel 340: Grinding grindstone 341: Wheel base 342: Bottom surface 35: Rotating shaft 4: Grinding feed means 40: Ball screw 41: Guide Rail 42: Z-axis motor 420: Encoder 43: Elevating plate 44: Holder 45: Rotating shaft 5: Horizontal moving means 50: Ball screw 51: Guide rail 52: Y-axis motor 53: Moving plate 55: Rotating shaft
6: Carrying out means 60: Conveying pad 600: Bottom surface 601: Air flow path 602: Support member 603: Connecting member 6020: Brim part 6030: Through hole 604: Shaft part 6000: Top surface 61: Ring air nozzle 610: Air supply path 62: Air valve 63: Air supply source 66: Horizontal moving means 67: Elevating means 7: Second carrying out means 70: Elevating means 702: Ball screw 703: Moving part 700: Motor 701: Encoder 71: Shaft part 72: Arm 8: Bottom air nozzle 80 : Air nozzle 81: Air supply source 82: Roll sponge 83: Motor 84: Washing water nozzle 85: Drain port 18: Separation means 180: Suction mechanism 181: Air supply mechanism 182: Water supply mechanism 27: Cover 28: Bellows

Claims (1)

A holding means having a chuck table for holding the workpiece on the holding surface, a machining means for supplying machining water to process the workpiece held on the holding surface, and a workpiece held on the holding surface. A processing device including a carrying-out means for carrying out the holding means, a horizontal moving means for moving the holding means and the carrying-out means in a direction relatively parallel to the holding surface, and a control means.
Further, it is provided with a separating means for ejecting a mixed liquid of water and air from the holding surface to separate the workpiece from the holding surface, and a lower surface air nozzle for injecting air toward the lower surface of the workpiece.
The carrying-out means includes a transport pad having a diameter smaller than that of the workpiece that sucks and holds the upper surface of the workpiece, and a ring air nozzle that blows air onto the upper surface of the workpiece protruding from the transport pad.
The control means ejects air from the lower surface air nozzle to the lower surface of the workpiece separated from the holding surface by suction and holding by the transport pad, and moves the holding means and the carrying out means in a relatively horizontal direction. A processing device that dries the lower surface and blows air from the ring air nozzle to dry the upper surface of the workpiece.

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