JP2015015400A - Processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing device which reduces the possibility of damage of a sheet-like shutter member and inhibits a cleaning liquid from scattering to the exterior of a housing.SOLUTION: A cutting device includes: a chuck table; cutting means which cuts a processed object W held by the chuck table; and cleaning means 50 which cleans the processed object W cut by the cutting means. The cleaning means 50 includes: a spinner table 51; a cleaning nozzle 52 which jets a cleaning liquid CL; a housing 53 which houses the spinner table 51 etc.; and a sheet-like shutter member 55. The sheet-like shutter member 55 has flexibility and fully closes an opening 56 of the housing 53 during cleaning of the processed object W. The sheet-like shutter member 55 includes ventilation pores 55a which allow a gas to flow into the housing 53 and inhibit droplets D Of the cleaning liquid CL scattering in the housing 53 from passing.

Description

  The present invention relates to a processing device, particularly a cleaning means.

  In the semiconductor device manufacturing process, a large number of rectangular device areas are defined on the surface of a workpiece such as a semiconductor wafer by grid-like division lines, and electronic circuits such as ICs and LSIs are formed on the surface of these device areas. Then, after performing necessary processing such as grinding after polishing the back surface, the workpiece is cut and divided along a predetermined division line to obtain a large number of devices from one workpiece.

  As a device for dividing a workpiece, there is known a cutting device provided with a cutting means for cutting a workpiece by cutting a cutting blade rotated at high speed into the workpiece and a spinner cleaning device for cleaning the cut workpiece (Patent Document 1). ). The spinner cleaning device adsorbs and holds a workpiece on a holding table disposed in a cylindrical casing, rotates the holding table, and jets cleaning liquid from a cleaning nozzle toward the rotating workpiece to clean the workpiece. Then, the work is dried by ejecting air from the air nozzle to the work. Further, the casing is configured such that a sheet-like member closes the opening so that the cleaning liquid does not scatter from the casing to the outside (Patent Document 2).

JP 2006-128359 A JP 2012-94659 A

  In this type of cleaning apparatus, a cleaning liquid having a high flow rate is sprayed onto a work rotating at a high speed, so that a dirty mist is generated when the cleaning liquid is supplied to the work. Therefore, a duct is provided in the casing, and air in the casing is sucked through the duct to discharge mist to the outside. Therefore, the inside of the housing is inclined to negative pressure, but if the housing opening is completely blocked, the sheet-like member may bend and open / close may be damaged, or countermeasures may be taken. As described above, the opening is shielded leaving a region of about ¼ to ５, and the cleaning liquid scattered slightly during the cleaning has jumped out of the casing from the portion where the opening is not shielded.

  This invention is made | formed in view of the above, Comprising: It aims at providing the processing apparatus which can suppress that a washing | cleaning liquid disperses outside a housing | casing, suppressing the possibility of damaging.

  In order to solve the above-described problems and achieve the object, a processing apparatus of the present invention includes a chuck table that holds a workpiece, a processing unit that processes the workpiece held on the chuck table, and the processing A cleaning means for supplying a cleaning liquid to the workpiece processed by the means and cleaning the workpiece, wherein the cleaning means includes a holding table for holding the workpiece; A cleaning nozzle that ejects the cleaning liquid toward the workpiece held by the holding table, a housing that houses the holding table and the cleaning nozzle, and has an opening on the upper surface that allows the workpiece to pass through. A body, one end communicating with the suction source, and the other end connected to the casing, the exhaust duct for exhausting the atmosphere containing the cleaning liquid in the casing, and the opening of the casing when cleaning the workpiece Sheet-like shutter member with flexibility to fully close The sheet-like shutter member is provided with ventilation pores that allow gas to flow into the casing and suppress the passage of the droplets of the cleaning liquid scattered in the casing. .

  In the processing apparatus, it is preferable that the ventilation pores of the sheet-like shutter member are 2 mm or more and 8 mm or less.

  In view of this, the processing apparatus of the present invention is formed with small ventilation pores that prevent passage of droplets of the cleaning liquid scattered during cleaning while ensuring ventilation in the sheet-like shutter member. For this reason, the processing apparatus can prevent the sheet-like shutter member from being bent by the exhaust in the housing even when the opening is fully closed, and can prevent the cleaning liquid from scattering outside the housing. It has become possible. Further, an inexpensive measure of forming ventilation pores in the sheet-like shutter member has an effect of increasing the utility value of the inexpensive sheet-like shutter member.

Drawing 1 is a figure showing the example of composition of the cutting device concerning an embodiment. FIG. 2 is a side sectional view showing an outline of the cleaning means of the cutting apparatus according to the embodiment. FIG. 3 is a side sectional view showing an outline when the workpiece is unloaded from the cleaning means shown in FIG.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
A cutting apparatus as a processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view illustrating an outline of a configuration example of a cutting apparatus according to an embodiment. FIG. 2 is a side sectional view showing an outline of the cleaning means of the cutting apparatus according to the embodiment. FIG. 3 is a side sectional view showing an outline when the workpiece is unloaded from the cleaning means shown in FIG.

  A cutting apparatus 1 (corresponding to a processing apparatus) according to this embodiment includes at least a cutting means 20 (corresponding to a processing means) having a cutting blade 21 and a chuck table 10 that holds a workpiece W (shown in FIG. 1). The workpiece W is cut (corresponding to machining) by providing and relatively moving them. The cutting apparatus 1 is for cleaning the workpiece W cut by the cutting means 20 with the cleaning means 50.

  As shown in FIG. 1, the cutting apparatus 1 includes a cassette elevator (not shown) that accommodates a workpiece W before and after cutting, the chuck table 10, the cutting means 20, the cleaning means 50, and control means ( (Not shown). Furthermore, the cutting apparatus 1 relatively moves the chuck table 10 and the cutting means 20 in the Y-axis direction, and an X-axis moving means (not shown) that relatively moves the chuck table 10 and the cutting means 20 in the X-axis direction. Y-axis moving means 30, Z-axis moving means 40 for relatively moving the chuck table 10 and cutting means 20 in the Z-axis direction, and a first for conveying the workpiece W before cutting to the chuck table 10 from the cassette elevator. Transporting means (not shown), and second transporting means 60 (shown in FIG. 3) for transporting the workpiece W after cutting between the chuck table 10, the cleaning means 50, and the cassette table. ing.

  Here, the workpiece W is a plate-like workpiece to be processed by the cutting apparatus 1. In this embodiment, the workpiece W is a semiconductor wafer or an optical device wafer having a plurality of devices partitioned by division lines that are orthogonal to each other. It is. The workpiece W is divided into individual devices by causing the cutting apparatus 1 to relatively move the chuck table 10 and the cutting means 20 having the cutting blade 21 to perform cutting on the division line. Moreover, in this embodiment, as shown in FIG. 1, the workpiece W has a dicing tape T attached to the back surface opposite to the surface on which the device is formed, and an annular frame F attached to the dicing tape T. And is attached to the annular frame F via the dicing tape T. In the present invention, the workpiece W may be a package substrate having a plurality of devices partitioned by the division lines.

  The cassette elevator accommodates a plurality of workpieces W, and is provided on the apparatus main body 2 of the cutting apparatus 1 so as to be movable up and down in the Z-axis direction.

  The chuck table 10 holds the workpiece W that has been transferred to the opening of the annular frame F through the dicing tape T by the workpiece W before being cut by the first transfer means. is there. The chuck table 10 has a disk shape in which a portion constituting the surface is made of porous ceramic or the like, is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and is a workpiece W placed on the surface. Hold by sucking. The chuck table 10 is provided so as to be movable in the X-axis direction by the X-axis moving means, and is provided so as to be rotatable around a central axis (parallel to the Z-axis) by a rotation drive source (not shown). .

  The cutting means 20 is for cutting the workpiece W held by the chuck table 10. The cutting means 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving means 30 with respect to the workpiece W held on the chuck table 10, and is movable in the Z-axis direction by the Z-axis moving means 40. Is provided. The cutting means 20 is an extremely thin cutting grindstone having a substantially ring shape, and includes a cutting blade 21 that performs cutting on the workpiece W by rotating with a spindle (not shown).

  The X-axis moving means moves the chuck table 10 between the carry-in / out area O where the workpiece W is carried in and out of the chuck table 10 and the machining area P where the workpiece W is cut by the cutting means 20. It is processed and fed in the axial direction. In the processing area P, the chuck table 10 is located below the processing means. A partition door 70 (indicated by a one-dot chain line in FIG. 1) is provided between the carry-in / out area O and the processing area P.

  The cleaning unit 50 supplies the cleaning liquid CL to the workpiece W cut by the cutting unit 20 to clean the workpiece W. As shown in FIGS. 2 and 3, the cleaning unit 50 includes a spinner table 51 (corresponding to a holding table) that holds the workpiece W, and a cleaning liquid CL toward the workpiece W held on the spinner table 51. It has a cleaning nozzle 52 that ejects, a housing 53, an exhaust duct 54, and a sheet-like shutter member 55.

  The workpiece W after cutting on the chuck table 10 is transported to the spinner table 51 by the second transport means 60. The spinner table 51 has a disk shape in which a portion constituting the surface is formed of porous ceramic or the like, is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and is a workpiece W placed on the surface. Hold by sucking. The spinner table 51 is rotated around a central axis (parallel to the Z axis) by a rotational force generated by a spinner table drive source (not shown). The spinner table 51 is provided so as to be movable up and down in the Z-axis direction by an elevating means (not shown) such as an air cylinder.

  The cleaning nozzle 52 is swingably provided between a work position shown in FIG. 2 where the tip faces the spinner table 51 and a retracted position shown in FIG. 3 where the tip is retracted from the surface of the spinner table 51. The cleaning nozzle 52 ejects the cleaning liquid CL from the tip toward the workpiece W held by the spinner table 51 at the work position. The cleaning nozzle 52 does not prevent (allow) the workpiece W to be taken in and out of the cleaning means 50 at the retracted position.

  The casing 53 is provided in the apparatus main body 2 of the cutting apparatus 1 and accommodates the spinner table 51 and the cleaning nozzle 52. The casing 53 is formed in a box shape having an upper surface 57 with an opening 56 that allows the workpiece W to pass therethrough. The exhaust duct 54 has one end communicating with a suction source (not shown) and the other end connected to the housing 53. The exhaust duct 54 exhausts the atmosphere containing the cleaning liquid CL in the casing 53 to the outside of the casing 53 and the apparatus main body 2 of the cutting apparatus 1 by being sucked by a suction source.

  The sheet-like shutter member 55 has flexibility, and fully closes the opening 56 of the housing 53 when the workpiece W is cleaned by the cleaning means 50. The sheet-like shutter member 55 is formed in a sheet-like or film-like shape made of synthetic resin or the like, and is maintained in a state of being wound around the outer periphery of the winding rod 58 in a roll shape in a free state where no tensile force acts. . The sheet-like shutter member 55 can be pulled out from the outer periphery of the winding rod 58 by applying a tensile force. One end of the sheet-like shutter member 55 is attached to a fixing member 59 a fixed to the upper surface 57 of the housing 53. The fixing member 59 a is disposed at the edge (near the edge) of the opening 56.

  The other end of the sheet-like shutter member 55 is attached to a moving member 59b which is provided so as to be movable in the horizontal direction and moves toward and away from the fixed member 59a by moving in the horizontal direction. In the present embodiment, the moving member 59b and the fixed member 59a are arranged in the X-axis direction, and the moving member 59b is disposed closer to the processing region P than the fixed member 59a. The moving member 59b is moved in the X-axis direction by moving means (not shown) such as an air cylinder. Further, the moving member 59b and the sheet-like shutter member 55 are guided by guide members (not shown) at both ends in the width direction, and move above the opening 56 by moving in the X-axis direction. When the moving member 59b is closest to the fixed member 59a, the moving member 59b is disposed at a position that allows the workpiece W to pass through the opening 56. When the moving member 59b is farthest from the fixing member 59a, the moving member 59b is disposed at a position where the opening 56 is sandwiched between the moving member 59b and the fixing member 59a in plan view.

  When the moving member 59b is disposed at the position farthest from the fixed member 59a by the air cylinder, the sheet-like shutter member 55 is pulled out from the outer periphery of the winding rod 58, and as shown in FIG. Close (covers the entire opening 56). In the present invention, even if there is a gap of about several mm in the Z-axis direction between the sheet-like shutter member 55 and the opening 56 of the housing 53, the sheet-like shutter member 55 fully closes the opening 56 ( It covers the entire opening 56). In other words, in the present invention, the sheet-like shutter member 55 fully closes the opening 56 (covers the entire opening 56) with no gap between the sheet-like shutter member 55 and the opening 56 of the housing 53. The sheet-like shutter member 55 fully closes the opening 56 (the entire opening 56 is fully closed) together with the opening 56 being fully closed (covering the entire opening 56) in a state where there is a gap of about several mm between the opening 56 and the opening 56. Cover).

  When the moving member 59b is disposed at the position closest to the fixed member 59a by the air cylinder, the sheet-like shutter member 55 is wound around the outer periphery of the winding rod 58, and as shown in FIG. The whole is opened and the workpiece W is allowed to pass through the opening 56.

  Further, the sheet-like shutter member 55 allows a gas to flow into the housing 53 with the opening 56 fully closed, and suppresses the passage of the droplets D of the cleaning liquid CL scattered in the housing 53. A plurality of holes 55a are provided. Here, suppressing the passage of the droplet D of the cleaning liquid CL in the present invention means that the passage of the droplet D of the cleaning liquid CL is completely prevented, that is, the liquid droplet D of the cleaning liquid CL is not allowed to pass. It means that the liquid droplet D is allowed to pass through a slight amount of the cleaning liquid CL so as not to cause a trouble in the cutting process by, for example, the droplet D adhering to the workpiece W not accommodated in the cleaning means 50. That is, to suppress the passage of the droplet D of the cleaning liquid CL in the present invention means to suppress the passage of the droplet D of the cleaning liquid CL as much as possible so as not to cause a problem in the cutting process.

  In the present embodiment, the ventilation pores 55 a are formed in a round shape in plan view, are arranged at equal intervals on the surface of the sheet-like shutter member 55, and penetrate the sheet-like shutter member 55. The diameter (size) of the vent hole 55a is 2 mm or more and 8 mm or less. In the present invention, the planar shape of the vent hole 55a may be formed in various shapes without being limited to this, and may be arranged at various intervals without being limited to equal intervals. Further, the size of the vent hole 55a is set so as not to cause a trouble in the cutting process based on the surface tension of the cleaning liquid CL, the wettability between the cleaning liquid CL and the sheet-like shutter member 55, the suction amount of the exhaust duct 54, and the like. In addition, it is desirable that the size is appropriately set so that the passage of the droplets D of the cleaning liquid CL can be suppressed as much as possible.

  The control means controls the above-described components constituting the cutting apparatus 1 to cause the cutting apparatus 1 to perform a machining operation on the workpiece W. The control means is mainly composed of an arithmetic processing unit constituted by a CPU or the like and a microprocessor (not shown) provided with a ROM, a RAM, etc., and a display means (not shown) for displaying the state of the machining operation, The operation means (not shown) used when the operator registers the machining content information and the like is connected.

  Next, the machining operation of the cutting device 1 according to the embodiment will be described. When the operator registers the machining content information in the control means and receives an instruction to start the machining operation from the operator, the cutting device 1 starts the machining operation. In the processing operation, the control means transports the workpiece W before cutting from the cassette elevator to the chuck table 10 by the first transport means, and holds it on the chuck table 10 in the carry-in / out area O.

  Next, the control means moves the chuck table 10 by the X-axis moving means and performs alignment based on the information of the image picked up by the image pickup means, and then moves the workpiece W together with the chuck table 10 to the processing region P. Move. And a control means cuts the workpiece W along a division | segmentation planned line etc. based on processing content information, and divides the workpiece W into each device. When all the division lines are cut, the control means moves the workpiece W together with the chuck table 10 to the carry-in / out area O, and the second conveying means 60 cuts the work on the chuck table 10. The workpiece W subjected to the above is placed on the spinner table 51 of the cleaning means 50 and held on the spinner table 51. At this time, the moving member 59b is disposed at the position closest to the fixed member 59a, the spinner table 51 is disposed at the raised position, and the cleaning nozzle 52 is disposed at the retracted position.

  Then, the control unit lowers the spinner table 51 and moves the moving member 59b to the position farthest from the fixed member 59a to fully close the opening 56 in the sheet-like shutter member 55. Further, the control means swings the cleaning nozzle 52 to the working position. As shown in FIG. 2, the control means jets the cleaning liquid CL from the cleaning nozzle 52 onto the workpiece W while rotating the spinner table 51 around the central axis, and the cleaning liquid CL is moved by the centrifugal force to be processed. The cutting waste is removed (washed away) from the surface of the object W, and the suction source is driven to exhaust the atmosphere in the housing 53. At this time, the vent hole 55a of the sheet-like shutter member 55 suppresses the passage of the liquid droplet D of the cleaning liquid CL while allowing the gas to flow into the housing 53.

  When the cleaning of the workpiece W is completed, the control unit stops the rotation of the spinner table 51 and the ejection of the cleaning liquid CL from the cleaning nozzle 52, swings the cleaning nozzle 52 to the retracted position, and fixes the moving member 59b. Move to the position closest to the member 59a. When the sheet-like shutter member 55 substantially opens the opening 56, the control means raises the spinner table 51, and then the workpiece on the spinner table 51 is processed by the second conveying means 60 as shown in FIG. The article W is carried out of the cleaning means 50 and conveyed to the cassette table.

  As described above, according to the cutting apparatus 1 according to the present embodiment, the ventilation pores are small enough to prevent passage of the droplets D of the cleaning liquid CL that is scattered during the cleaning while ensuring the ventilation of the sheet-like shutter member 55. 55a is formed. For this reason, the cutting apparatus 1 can prevent the sheet-like shutter member 55 from being bent by the exhaust in the housing 53 even when the opening 56 is fully closed, and the cleaning liquid CL is scattered outside the housing 53. It became possible to suppress doing. Therefore, the cutting device 1 can suppress the cleaning liquid CL from being scattered outside the housing 53 while suppressing the possibility that the sheet-like shutter member 55 is damaged.

  In addition, the inexpensive measure of forming the ventilation pores 55a in the sheet-like shutter member 55 also has the effect of increasing the utility value of the inexpensive sheet-like shutter member 55, and the cutting device 1 can suppress an increase in cost. .

  Furthermore, the inventors of the present invention have confirmed the effect of the ventilation pores 55a of the sheet-like shutter member 55 of the cutting apparatus 1 described in the above-described embodiment. The results are shown in Table 1 below.

  In Table 1, in Comparative Example 1, the workpiece W was cleaned by the cleaning means 50 using the sheet-like shutter member 55 having a plurality of vent holes 55a having a diameter of 10 mm. In Comparative Example 2, the workpiece W was cleaned by the cleaning means 50 using the sheet-like shutter member 55 having a plurality of ventilation pores 55a having a diameter of 1 mm.

  In the product 1 of the present invention, the workpiece W was cleaned by the cleaning means 50 using the sheet-like shutter member 55 having a plurality of ventilation pores 55a having a diameter of 8 mm. In the product 2 of the present invention, the workpiece W was cleaned by the cleaning means 50 using the sheet-like shutter member 55 having a plurality of ventilation pores 55a having a diameter of 2 mm.

  According to the results in Table 1, in Comparative Example 1, the amount of the liquid droplet D of the cleaning liquid CL scattered outside the housing 53 through the ventilation pores 55a is too large. CL was found to be undesirable in the cutting process. Further, according to the results in Table 1, in Comparative Example 2, the amount of gas flowing into the housing 53 through the ventilation pores 55a is too small, and the sheet-like shutter member 55 is deformed. It became difficult to wrap around the outer periphery, and in the worst case, it became clear that the sheet-like shutter member 55 may be damaged, which is undesirable.

  According to the results in Table 1, the products 1 and 2 of the present invention have a small amount (no or little) of the liquid droplet D of the cleaning liquid CL scattered outside the housing 53 through the ventilation pores 55a. It became clear that it was desirable in processing. Furthermore, the product 1 of the present invention and the product 2 of the present invention can flow a sufficient amount of gas into the housing 53 through the ventilation holes 55a, and the sheet-like shutter member 55 is not deformed. It has been clarified that the sheet-like shutter member 55 can be wound around the outer periphery and there is no risk of damage. Therefore, according to the results in Table 1, the cleaning liquid CL is discharged to the outside of the housing 53 while suppressing the possibility that the sheet-like shutter member 55 is damaged by setting the diameter of the vent hole 55a to 2 mm or more and 8 mm or less. It became clear that scattering could be suppressed.

  In the above-described embodiment, the cutting apparatus 1 that performs cutting as the processing on the workpiece W is shown. However, the present invention may be applied to, for example, a laser processing apparatus as a processing apparatus that irradiates the workpiece W with a laser beam as processing to perform ablation processing or laser processing for forming a modified layer inside. . That is, the present invention may be applied to a protective film removal and cleaning device of a laser processing apparatus. In short, the present invention may be applied to various processing apparatuses that perform various processing on the workpiece W.

  The present invention is not limited to the above embodiment. That is, various modifications can be made without departing from the scope of the present invention.

1 Cutting equipment (processing equipment)
10 chuck table 20 cutting means (processing means)
50 Cleaning means 51 Spinner table (holding table)
52 Cleaning nozzle 53 Housing 54 Exhaust duct 55 Sheet-like shutter member 55a Ventilation pore 56 Opening 57 Upper surface W Workpiece CL Cleaning liquid D Droplet

Claims (2)

A chuck table for holding the workpiece, a processing means for processing the workpiece held on the chuck table, and a cleaning liquid is supplied to the workpiece processed by the processing means to clean the workpiece. A processing device comprising a cleaning means,
The cleaning means includes
A holding table for holding the workpiece;
A cleaning nozzle that ejects the cleaning liquid toward the workpiece held by the holding table;
A housing that houses the holding table and the cleaning nozzle and has an opening on the top surface that allows the workpiece to pass through;
An exhaust duct for exhausting the atmosphere containing the cleaning liquid in the housing, one end of which communicates with a suction source and the other end of which is connected to the housing;
A flexible sheet-like shutter member that fully closes the opening of the housing when the workpiece is cleaned,
The sheet-like shutter member is
A processing apparatus comprising a vent hole that allows gas to flow into the housing and suppresses the passage of the droplets of the cleaning liquid scattered in the housing.   The processing apparatus according to claim 1, wherein the ventilation pores of the sheet-like shutter member are 2 mm or more and 8 mm or less.

Images