JP7002400B2 - Cleaning equipment - Google Patents

Description

The present invention relates to a cleaning device for cleaning an object to be cleaned such as a wafer.

Wafers that have been machined or ground are cleaned by, for example, a single-wafer spinner cleaning mechanism (see, for example, Patent Document 1) to remove foreign substances such as cutting chips remaining on the surface to be machined. Will be done.
An exhaust port connected to the suction source is formed in the storage case of the cleaning device, and the contaminated spray (spray containing cutting chips, etc.) generated during cleaning is sucked from the exhaust port and exhausted. There is.

Japanese Unexamined Patent Publication No. 2013-229462

In the case of a wafer on which the object to be cleaned has been cut, the cleaning liquid and the offcuts formed on the wafer by cutting (for example, triangular chips formed on the outer peripheral portion) may scatter due to the water pressure received during cleaning and the centrifugal force received. be. Therefore, in order to prevent the scattered matter from scattering outside the storage case, it is conceivable to seal the opening of the storage case. However, if the opening is closed so that the outside air is not taken into the storage case at all, there is a problem that the inside of the storage case is depressurized and the spray cannot be properly exhausted.

Therefore, in the cleaning device, there is a problem that the scattered matter is prevented from being scattered to the outside of the storage case of the cleaning device during cleaning, and the dirty spray can be continuously exhausted more efficiently.

The present invention for solving the above problems is a cleaning device, the spinner table for holding the object to be cleaned, a cleaning nozzle for injecting a cleaning liquid onto the object to be cleaned held by the spinner table, and the spinner table. A storage case for accommodating the cleaning nozzle, having an opening for carrying in the object to be cleaned from above to the inside or carrying out from the inside to the top, and having an exhaust port connected to a suction source, and one of the openings. The fixed sheet comprises an openable / closable sheet that covers the opening except for a portion, and a fixed sheet that is arranged below the openable / closable sheet and covers a part of the opening when the object to be washed is washed. One end is fixed to the upper end of the storage case, and the other end of the storage case hangs down to form a gap between the openable / closable sheet and the fixed sheet, so that the space is formed from above the opening toward the inside of the storage case. It is a cleaning device that forms a vent to allow outside air to flow into the storage case and prevents the cleaning liquid and scraps of the object to be cleaned from being scattered outside the storage case.

The cleaning device according to the present invention has an openable / closable sheet that covers the opening except for a part of the opening of the storage case, and a fixed size that is placed below the openable / closable sheet when cleaning the object to be cleaned and covers a part of the opening. A sheet is provided, and since one end of the fixed sheet is fixed to the upper end portion of the storage case and the other end side of the fixed sheet hangs down, a gap is formed between the openable / closable sheet and the fixed sheet. Therefore, a vent is formed from above the opening toward the inside of the storage case to allow outside air to flow into the storage case to prevent the inside of the storage case from being depressurized, and to continue to efficiently exhaust dirty spray. be able to. Further, since the opening of the storage case is completely covered, it is possible to prevent the cleaning liquid and the scraps of the object to be cleaned from being scattered outside the storage case.

It is a perspective view which shows an example of the appearance of the cutting apparatus which incorporated the cleaning apparatus. It is a perspective view which shows an example of the inside of the cutting apparatus which incorporated the cleaning apparatus. It is a perspective view which shows an example of the containment case. It is a top view which shows the arrangement of an openable seat, a fixed seat, and a storage case. It is sectional drawing which shows the arrangement of an openable / closable sheet, a fixed sheet, and a storage case. It is a plan view explaining a state in which the cleaning liquid and the scraps of the object to be cleaned are cleaned by the cleaning device while being prevented from being scattered to the outside of the storage case by the openable sheet and the fixing sheet. be. It is a cross-sectional view explaining a state in which the cleaning liquid and the scraps of the object to be cleaned are cleaned by the cleaning device while being prevented from being scattered to the outside of the storage case by the openable / closable sheet and the fixing sheet. be.

The processing device 1 shown in FIGS. 1 and 2 is, for example, a cutting device for cutting a workpiece W held on a chuck table 30 by a cutting means 6, and includes a cleaning device 9 according to the present invention. There is. The cleaning device 9 is a laser processing device that performs desired processing on the work piece W by laser irradiation, a grinding device that grinds and thins the work piece W with a rotating grinding wheel, or a work piece with a polishing pad. It may be arranged in a polishing device for polishing W, or may be used by the cleaning device 9 alone.

The workpiece W is, for example, a circular plate-shaped semiconductor wafer, and a device D is formed on a surface Wa of the workpiece W in a grid-like region partitioned by a planned division line S. For example, the back surface Wb of the workpiece W is attached to the attachment surface of the dicing tape T, and the outer peripheral portion of the dicing tape T is attached to the annular frame F. As a result, the workpiece W is supported by the annular frame F via the dicing tape T, and handling using the annular frame F is possible. The workpiece W is not limited to the above example.

As shown in FIG. 1, a housing 11 and a device cover 15 are arranged on a base 10 of a processing device 1, and a processing chamber 12 is defined in the housing 11.
A chuck table 30 and a cutting means 6 are arranged in the processing chamber 12, and the chuck table 30 is surrounded by a cover 31 from the surroundings and has a Z-axis by a rotating means (not shown) arranged below the cover 31. It is rotatably supported around the axis of direction. A bellows cover 311 that expands and contracts in the X-axis direction is connected to the cover 31, and a chuck table 30 is reciprocated in the cutting feed direction (X-axis direction) below the cover 31 and the bellows cover 311. A feeding means is provided. The cutting feed means is a ball screw mechanism that feeds the chuck table 30 by cutting by rotating the ball screw with a motor.

The chuck table 30 shown in FIG. 1 has, for example, a circular plate-like outer shape, and sucks and holds the workpiece W on a holding surface 30a communicating with a suction source (not shown). Further, around the chuck table 30, for example, four fixed clamps 32 for sandwiching and fixing the annular frame F are evenly arranged at equal intervals in the circumferential direction.

The cutting means 6 arranged above the movement path in the X-axis direction of the chuck table 30 can be moved in the Y-axis direction by the indexing feeding means 69, and can be moved in the Z-axis direction by the cutting feeding means 68. It is possible. The cutting means 6 includes a spindle 61 whose axial direction is the Y-axis direction, a spindle housing 62 that rotatably supports the spindle 61, a motor (not shown) for rotating the spindle 61, and a cutting blade 63 fixed to the spindle 61. As the motor drives the spindle 61 to rotate, the cutting blade 63 also rotates at high speed.

For example, on the side surface of the spindle housing 62, an alignment means 67 for detecting the planned division line S of the workpiece W to be cut by performing pattern matching using an image taken is provided. The cutting means 6 and the alignment means 67 move in conjunction with each other in the Y-axis direction and the Z-axis direction.

On the front side (-X direction side) of the housing 11, a viewing window made of a transparent member such as glass for confirming the state of the workpiece W being machined from the outside of the housing 11. 110 is provided.
On the side surface of the housing 11 on the + Y direction side, an operating means 111 including a touch panel or the like for displaying an operation screen for an operator to input machining conditions and the like to the machining apparatus 1 is disposed.

A cassette mounting table 13 is installed in a corner of the base 10 of the processing apparatus 1 on the + Y direction side, and the cassette mounting table 13 is moved up and down in the Z-axis direction by an elevating elevator (not shown) arranged below the cassette mounting table 13. It is movable. Then, in a state where a cassette (not shown) accommodating the workpiece W supported by the annular frame F is mounted on the cassette mounting table 13, the cassette mounting table 13 is moved up and down by the elevating elevator to be processed from the cassette. The height position when putting in and out the object W is adjusted.
A work piece carry-in port (not shown) is formed on the side surface of the device cover 15 on the + Y direction side, and the work piece W drawn out from the cassette is carried into the device cover 15 from the work piece carry-in port. To.

As shown in FIG. 2, at a position adjacent to the cassette mounting table 13, the chuck table 30 has a side surface of the housing 11 between the inside of the device cover 15 (not shown in FIG. 2) and the inside of the housing 11. It can be reciprocated in the X-axis direction through the carry-in outlet 116 provided at the bottom. The chuck table 30 is positioned inside the housing 11 in FIG. 1, and is positioned inside the device cover 15 in FIG. 2.

The processing apparatus 1 includes a conveying means 4 for carrying the workpiece W into the chuck table 30 inside the apparatus cover 15, and the conveying means 4 has a conveying pad for holding the workpiece W via the annular frame F. 40, a transport pad moving means 41 for moving the transport pad 40 in the Y-axis direction, and a lower arm 42 for raising and lowering the transport pad 40 are provided.

The transport pad 40 has, for example, an outer shape having an H shape in a plan view, and the lower end side of the lower arm 42 is attached to the upper surface thereof. The transport pad 40 has four suction plates 401 on the lower surface thereof that suck the annular frame F that supports the workpiece W. Each suction plate 401 communicates with a suction source (not shown) that produces a suction force.

The transport pad moving means 41 is, for example, disposed in the middle portion of the + X direction side surface of the housing 11, a ball screw 410 having an axial center in the Y-axis direction, and a pair of guides arranged in parallel with the ball screw 410. It includes a rail 411, a motor 412 connected to one end of the ball screw 410, and a movable block 413 having a nut screwed to the ball screw 410 inside to support the lower arm 42.
When the motor 412 rotates the ball screw 410, the movable block 413 slides on the guide rail 411 in the Y-axis direction while being guided by the pair of guide rails 411, and is attached to the lower end side of the lower arm 42. The pad 40 moves in the Y-axis direction.

The lower arm 42 having an L-shaped outer shape when viewed from the side is composed of a ball screw mechanism, an electric cylinder, or the like, and raises and lowers the transport pad 40 in the Z-axis direction.

For example, a clamp 46 is provided at the center of the lower surface of the transport pad 40 to pull out the workpiece W before processing while holding the annular frame F from the vertical direction from a cassette (not shown) mounted on the cassette mounting table 13. ing. The clamp 46 can be moved in the Y-axis direction and the Z-axis direction together with the transfer pad 40 by the transfer pad moving means 41 and the lower arm 42.

As shown in FIG. 2, above the chuck table 30 located in the device cover 15, a centering guide composed of a pair of guide rails for aligning the workpiece W pulled out from the cassette by the clamp 46 at a fixed position. 36 are arranged. The guide rails having an L-shaped cross section and extending in the Y-axis direction can be separated from each other or approach each other in the X-axis direction, and are arranged so that the stepped guide surfaces (inner side surfaces) face each other. There is. When the workpiece W is carried into the chuck table 30, the workpiece W is pulled out from a cassette (not shown) mounted on the cassette mounting table 13 by the clamp 46 and placed on the centering guide 36. Further, when the cleaning of the workpiece W after processing is completed, the workpiece W placed on the centering guide 36 by the transport pad 40 is pushed into the cassette by the clamp 46.
The pair of guide rails of the centering guide 36 approach each other when the workpiece W is placed, support the outer peripheral edge portion of the annular frame F, and position (center) the chuck table 30 to position the workpiece W. When not placed, they are separated from each other so as to leave a space on the holding surface 30a of the chuck table 30.

As shown in FIG. 2, the processing apparatus 1 carries out the workpiece W after cutting (the workpiece W coming out of the processing chamber 12 inside the housing 11) from the chuck table 30, and also carries out the workpiece W to be cleaned. The carrying means 5 for carrying W onto the spinner table 90, which will be described later, is provided. The carry-in means 5 includes, for example, a carry-in pad 50 that holds the object to be cleaned W held by the chuck table 30 via the annular frame F, a carry-in pad moving means 51 that moves the carry-in pad 50 in the Y-axis direction, and the like. It is provided with an upper arm 52 for raising and lowering the carry-in pad 50.

The carry-in pad 50 has, for example, an H-shaped outer shape in a plan view, and is provided with four suction plates 501 on the lower surface side thereof for sucking the annular frame F that supports the object to be cleaned W. Each suction plate 501 communicates with a suction source (not shown) that produces a suction force. The lower end side of the upper arm 52 is fixed to the upper surface of the carry-in pad 50.

The carry-in pad moving means 51 is, for example, arranged in the upper portion of the + X direction side surface of the housing 11, and has a ball screw 510 having an axial center in the Y-axis direction and a pair of guides arranged in parallel with the ball screw 510. It includes a rail 511, a motor 512 connected to one end of the ball screw 510, and a movable block 513 internally provided with a nut screwed to the ball screw 510 to support the upper arm 52.
When the motor 512 rotates the ball screw 510, the movable block 513 slides on the guide rail 511 in the Y-axis direction while being guided by the pair of guide rails 511, and is attached to the lower end side of the upper arm 52. The carry-in pad 50 moves in the Y-axis direction.

The upper arm 52 is composed of a ball screw mechanism, an electric cylinder, or the like, and raises and lowers the carry-in pad 50 in the Z-axis direction.
For example, the movable block 513 is formed to have a longer dimension in the X-axis direction than the movable block 413 of the transport pad moving means 41, and the upper is formed on the lower surface of the movable block 513 formed so long on the + X direction side. The arm 52 is attached. Therefore, the lower arm 42 of the transport means 4 is displaced in the X-axis direction from the flow line of the carry-in pad 50 connected to the lower end side of the upper arm 52. As a result, when the workpiece W is carried out from the chuck table 30, the carry-in means 5 can convey the workpiece W in the Y-axis direction without colliding with the conveying means 4.

The cleaning device 9 according to the present invention shown in FIGS. A storage case that accommodates the 90 and the cleaning nozzle 91, has an opening 929 for carrying in the object to be cleaned W from above to the inside, or is carried out from the inside to the top, and has an exhaust port 920a connected to the suction source 928. It is equipped with 92.

As shown in FIG. 2, the storage case 92 having a circular opening 929 is arranged, for example, in a corner on the base 10 on the −Y direction side under the movement path of the carry-in pad 50.
As shown in FIG. 3, the spinner table 90 has, for example, a suction portion 900 having a circular plate-like outer shape, which is made of a porous member or the like and sucks the object to be cleaned W, and a frame body 901 that supports the suction portion 900. To prepare for. The suction unit 900 communicates with a suction source (not shown), and the suction force generated by the suction source sucking is transmitted to the holding surface 900a which is the exposed surface of the suction unit 900 and is formed flush with the frame 901. As a result, the spinner table 90 can suck and hold the object to be cleaned W on the holding surface 900a. Further, around the frame body 901, for example, four fixed clamps 901a for fixing the annular frame F are arranged at equal intervals in the circumferential direction.

A rotating means 94 is disposed below the spinner table 90, and the rotating means 94 makes the spinner table 90 rotatable around an axial center in the Z-axis direction. Further, the spinner table 90 can be moved up and down by a vertical movement means (not shown), and when the object W to be cleaned is carried in and out, the spinner table 90 is raised and positioned at the carry-in / carry-out height position, and is also washed. The spinner table 90 in a state of holding the previous object W to be cleaned is lowered and positioned at the cleaning work height position in the storage case 92.

In FIG. 3, a part of the side wall 920 and the like of the storage case 92 is cut out so that the inside can be grasped. The storage case 92 having a columnar internal space is composed of a side wall 920 surrounding the spinner table 90 and a bottom 921 integrally formed under the side wall 920. A cleaning liquid discharge port (not shown) is formed on the bottom 921, and the cleaning liquid flowing down from the holding surface 900a of the spinner table 90 to the bottom 921 is discharged from the cleaning liquid discharge port to the outside of the device.

An exhaust port 920a is formed through the side wall 920 of the storage case 92, and one end of an exhaust passage 926 made of a metal pipe or a resin hose communicates with the exhaust port 920a. The other end of the exhaust passage 926 communicates with a suction source 928 such as a vacuum generator.

As shown in FIG. 3, the cleaning nozzle 91 having a substantially L-shaped outer shape is erected on the bottom 921 of the storage case 92, and the injection port 910 formed at the tip thereof is a spinner. It opens toward the holding surface 900a of the table 90. The cleaning nozzle 91 can be rotated around the axis in the Z-axis direction by a rotating means (not shown) including a motor and a rotary joint, and the injection port 910 can be moved from above the spinner table 90 to the retracted position. .. The cleaning nozzle 91 communicates with a cleaning liquid supply means (not shown) that supplies a cleaning liquid (for example, pure water) to the surface Wa of the object W to be cleaned.

For example, the cleaning device 9 includes an air nozzle 96 that dries the object to be cleaned W after cleaning by air blowing. The air nozzles 96 having a substantially L-shaped outer shape are arranged side by side with the cleaning nozzle 91, and the injection port 960 formed at the tip thereof opens toward the holding surface 900a of the spinner table 90. .. The air nozzle 96 can be rotated around the axis in the Z-axis direction by a rotating means (not shown) together with the cleaning nozzle 91, and the injection port 960 can be moved from above the spinner table 90 to the retracted position. The air nozzle 96 communicates with an air supply means (not shown) including a compressor or the like that supplies air to the surface Wa of the object W to be cleaned.

As shown in FIGS. 4 to 5, the cleaning device 9 includes an openable / closable sheet 931 that covers the opening 929 except for a part of the opening 929 of the storage case 92 when cleaning the object W to be cleaned, and the cleaning device 9 when cleaning the object W to be cleaned. It is provided with a fixed sheet 951 that is arranged below the openable sheet 931 and has a size that covers a part of the opening 929.

The openable / closable sheet 931 shown in FIG. 5 is formed by bending a synthetic resin sheet (for example, a polyester sheet which is a shape memory resin sheet) at an intermediate portion thereof to form a first sheet piece 931a and a second sheet piece 931b. A take-up portion is formed by curling from an intermediate portion in which both sheet pieces are overlapped and bent to memorize the shape of the winding habit, and a take-up rod 935 is inserted through the take-up portion.
As shown in FIG. 4, the width (length in the X-axis direction) of the openable / closable sheet 931 is larger than the diameter of the opening 929 of the storage case 92.
The total length (length in the Y-axis direction) of the openable / closable sheet 931 is such that the openable / closable sheet 931 covers the opening 929 except for a part of the opening 929 when the object W to be cleaned is washed, and the opening / closing sheet 931 covers the opening 929 from above with respect to the fixed sheet 951. A part is a length that overlaps by a predetermined length.
The openable / closable sheet 931 is not limited to the double type in which both sheet pieces are started to be extended or wound from the center shown in the present embodiment, and the second sheet piece 931b can be extended or wound from one side. It may be a single type to be started.

For example, as shown in FIG. 4, in the region on the + Y direction side of the upper end portion (upper surface in this embodiment) of the side wall 920 of the storage case 92, the openable / closable sheet fixing base 930 to which the openable / closable sheet 931 is fixed is provided. It is arranged. On the openable / closable seat fixing base 930, for example, the first seat piece 931a side of the openable / closable seat 931 is fixed via a mounting bracket (not shown).

For example, a pair of guide rails 934 extend parallel to the Y-axis direction so as to sandwich the opening 929 in the regions on both sides of the upper end portion (upper surface) of the side wall 920 of the storage case 92 in the X direction. On the guide rail 934, a moving portion 932 for opening and closing the openable / closable sheet 931 is arranged.

The moving portion 932 has a bar-shaped outer shape in which the second sheet piece 931b side of the openable / closable sheet 931 is fixed and extends in the X-axis direction so as to cross above the opening 929. The bottom surfaces of both ends of the moving portion 932 are loosely fitted to the guide rail 934 so that they can slide on the guide rail 934. The moving unit 932 reciprocates while being guided by a guide rail 934 in the Y-axis direction by an electric cylinder or an air cylinder (not shown), and the openable / closable sheet 931 is opened / closed accordingly.

For example, a fixed seat mounting base 950 to which the fixed sheet 951 is attached is arranged in the region on the −Y direction side of the upper end portion (upper surface) of the side wall 920 of the storage case 92. The height of the fixed seat mounting base 950 is set lower than the height of the openable / closable seat fixing base 930.
The fixed sheet 951 is a resin sheet (for example, a vinyl chloride sheet) having a certain degree of flexibility, and has a rectangular outer shape in a plan view. In the present embodiment, the fixed sheet 951 has one end 951a attached to the upper surface of the fixed sheet mounting base 950 with the longitudinal direction parallel to the X-axis direction with an appropriate adhesive or the like. One end 951a may be in a state of being gripped by a gripping clamp from the vertical direction.
Since the fixed sheet 951 has a certain degree of flexibility, it moves in response to the vertical movement of the spinner table 90, and thus does not interfere with the vertical movement of the spinner table 90.

The length of the fixed sheet 951 in the longitudinal direction (X-axis direction) is, for example, larger than the diameter of the opening 929 of the storage case 92. As shown in FIGS. ..
In the examples shown in FIGS. 4 and 5, the fixed sheet 951 is a single sheet having a rectangular shape in a plan view, but the fixed sheet 951 is not limited thereto. The fixed sheet 951 may be, for example, a curtain-shaped sheet in which a plurality of cuts extending in the Y-axis direction are formed at predetermined intervals in the X-axis direction. Further, the fixed seat mounting base 950 may be movable in the Y-axis direction, and the position of the other end 951b of the fixed seat 951 may be changed in the Y-axis direction.

Hereinafter, a case where the workpiece W is cut by the processing apparatus 1 shown in FIGS. 1 and 2 and then the workpiece W is cleaned by the cleaning apparatus 9 will be described.
First, a cassette (not shown) accommodating a plurality of workpieces W supported by the annular frame F is placed on the cassette mounting table 13 shown in FIG. 2, and then the height of the cassette is adjusted by an elevating elevator.

Next, the transport pad moving means 41 moves the clamp 46 in the + Y direction to enter the inside of the cassette. Further, the annular frame F is gripped by the clamp 46, one workpiece W is pulled out from the cassette by the clamp 46, and the annular frame F is placed on the centering guide 36. Then, the pair of guide rails of the centering guide 36 approach each other in the X-axis direction and support the outer peripheral edge portion of the annular frame F while centering the workpiece W.

The transport pad 40 is moved in the Y-axis direction by the transport pad moving means 41, and each suction plate 401 is positioned above the annular frame F on the centering guide 36. Further, the lower arm 42 lowers the transport pad 40, and the suction plate 401 contacts the annular frame F to perform suction, so that the transport pad 40 picks up the workpiece W.

When the workpiece W is picked up, the pair of guide rails of the centering guide 36 move in a direction in which they are separated from each other, and a gap through which the workpiece W passes is formed between the pair of guide rails. Then, the lower arm 42 lowers the transport pad 40, and the workpiece W is placed on the holding surface 30a of the chuck table 30. After the fixing clamp 32 holds and fixes the annular frame F and the chuck table 30 sucks and holds the workpiece W on the holding surface 30a, the suction of the annular frame F by the transport pad 40 is released.

Next, the chuck table 30 that sucks and holds the workpiece W is fed in the −X direction by a cutting feed means (not shown) and moves inside the housing 11.
The workpiece W is sent in the −X direction, and the position of the planned division line S to be cut is detected by the alignment means 67 shown in FIG. As the scheduled division line S is detected, the cutting means 6 is indexed and fed in the Y-axis direction, and the scheduled division line S and the cutting blade 63 are aligned in the Y-axis direction.
The cutting feed means 68 lowers the cutting means 6, and for example, the cutting means 6 is positioned at a height position where the cutting blade 63 fully cuts the workpiece W and cuts into the dicing tape T.

A cutting feed means (not shown) feeds the chuck table 30 in the −X direction, and the cutting blade 63 cuts into the workpiece W while rotating at high speed to cut the scheduled division line S.
When the workpiece W advances in the −X direction to a predetermined position in the X-axis direction where the cutting blade 63 finishes cutting the scheduled division line S, the cutting feed means (not shown) once stops the cutting feed of the workpiece W. The cutting feed means 68 raises the cutting means 6 to separate the cutting blade 63 from the workpiece W. Then, a cutting feed means (not shown) feeds the chuck table 30 in the + X direction and returns it to its original position. The cutting means 6 is indexed and fed in the Y-axis direction at intervals of adjacent scheduled division lines S, and the same cutting is sequentially performed, and all scheduled division lines S in the same direction are cut. Further, the chuck table 30 is rotated 90 degrees and the same cutting is performed, so that all the scheduled division lines S are cut vertically and horizontally, and the workpiece W is divided into chips having the device D. Further, a triangular tip as an end material is formed on the outer peripheral portion of the workpiece W.

The chuck table 30 is fed in the + X direction by a cutting feed means (not shown), and the chuck table 30 moves from the inside of the housing 11 to the inside of the device cover 15.
Next, the carrying-in means 5 carries out the workpiece W (hereinafter referred to as the workpiece W) from the chuck table 30. That is, the carry-in pad 50 is moved in the Y-axis direction by the carry-in pad moving means 51 shown in FIG. 2, and each suction plate 501 is positioned above the annular frame F that supports the object W to be cleaned. Further, the upper arm 52 lowers the carry-in pad 50, the suction plate 501 contacts the annular frame F to perform suction, and the carry-in pad 50 picks up the object W to be cleaned.

The suction holding of the object W to be cleaned by the chuck table 30 and the fixing of the annular frame F by the fixing clamp 32 are released. Then, the upper arm 52 raises the carry-in pad 50, and then the carry-in pad moving means 51 moves the carry-in pad 50 in the −Y direction to convey the object W to be cleaned to the cleaning device 9.

As shown in FIG. 4, the opening 929 of the storage case 92 of the cleaning device 9 is in an open state so that the object to be cleaned W can be carried in.
The position of the carry-in pad 50 is such that the object to be cleaned W is conveyed above the spinner table 90 by the carry-in pad moving means 51, and the center of the object to be cleaned W is approximately aligned with the center of the holding surface 900a of the spinner table 90. Adjustments are made.

Next, the upper arm 52 lowers the carry-in pad 50, and the object W to be cleaned is placed on the holding surface 900a of the spinner table 90. Then, as shown in FIG. 5, the fixed clamp 901a sandwiches and fixes the annular frame F, and the suction force generated by the suction source (not shown) is transmitted onto the holding surface 900a of the spinner table 90, whereby the spinner table 90 Suctions and holds the object W to be cleaned. Further, the suction of the annular frame F by the carry-in pad 50 is released.
Then, as shown in FIG. 5, the spinner table 90 that sucks and holds the object W to be cleaned descends to the cleaning work height position in the storage case 92.

Next, as shown in FIGS. 6 and 7, the first sheet piece 931a and the second sheet piece 931b are pulled out from the take-up rod 935 as the moving portion 932 moves in the −Y direction. The openable / closable sheet 931 extends substantially horizontally in the −Y direction. Then, when the moving portion 932 moves to a predetermined position on the −Y direction side, the openable / closable sheet 931 covers the opening 929 except for a part of the opening 929, and the second sheet piece 931b covers the fixed sheet 951. The other end 951b side is covered by a predetermined area from above, that is, the fixed sheet 951 is arranged below the openable / closable sheet 931 when the object W to be cleaned is washed.

Since the other end 951b side of the fixed sheet 951 hangs down, a gap is formed between the openable / closable sheet 931 and the fixed sheet 951 to form a vent 954 from above the opening 929 toward the inside of the storage case 92. To. Further, the entire surface of the opening 929 of the storage case 92 is covered with the fixed sheet 951 and the openable / closable sheet 931.

Next, the cleaning nozzle 91 swivels, and the injection port 910 of the cleaning nozzle 91 is positioned above the central region of the surface Wa of the object W to be cleaned, which is sucked and held by the spinner table 90. Then, the cleaning liquid (for example, pure water) is injected from the injection port 910 of the cleaning nozzle 91 toward the center of the surface Wa of the object W to be cleaned. Further, the cleaning nozzle 91 that injects the cleaning liquid swirls and reciprocates above the object to be cleaned W around the axis in the Z-axis direction at a predetermined angle. Further, as the spinner table 90 rotates at a predetermined rotation speed, the cleaning liquid is sprayed from the cleaning nozzle 91 onto the entire surface Wa of the object W to be cleaned.

As a result, the object to be cleaned W is cleaned, and the centrifugal force generated by the rotation of the spinner table 90 causes the cleaning liquid to flow on the surface Wa of the object W to be cleaned from the center side to the outer peripheral side, and the spinner table 90. It flows down from the top to the bottom 921 of the storage case 92.

During the above cleaning, a spray containing cutting chips and the like remaining on the surface Wa of the object to be cleaned W is generated and scattered in the storage case 92. Therefore, the suction source 928 operates, and the suction source 928 sucks the spray containing dirt such as cutting chips from the inside of the storage case 92. During cleaning, the outside air is constantly taken into the storage case 92 by the vent 954 toward the inside of the storage case 92 from above the opening 929, so that the inside of the storage case 92 is depressurized and the spray is not exhausted. Does not occur.
As shown in the examples shown in FIGS. 6 and 7, the outside air taken into the accommodation case 92 is set so that the exhaust port 920a and the ventilation port 954 of the accommodation case 92 face each other diagonally in the Y-axis direction. Is preferable because it goes directly to the exhaust port 920a and the flow of the outside air in the accommodation case 92 is rectified.

On the other hand, during the above cleaning, the offcuts (for example, the triangular tip formed on the outer peripheral portion of the object W to be cleaned) formed on the object W to be cleaned by cutting and the droplets of the cleaning liquid are scattered toward the opening 929 side. Sometimes. However, since the entire surface of the opening 929 of the storage case 92 is covered with the fixed sheet 951 and the openable / closable sheet 931, splashes of cleaning liquid and scraps may be scattered outside the storage case 92. Is prevented. Since the outside air always flows into the storage case 92 from the ventilation port 954, the flow of the outside air prevents splashes and the like flying toward the ventilation port 954 from being scattered outside the storage case 92. Ventilate.

After the object W to be cleaned is washed with the cleaning liquid for a predetermined time, the injection of the cleaning liquid from the cleaning nozzle 91 is stopped. Next, air is injected from the injection port 960 of the air nozzle 96 toward the center of the surface Wa of the object W to be cleaned. Further, the air nozzle 96 that injects air swirls and reciprocates above the object to be cleaned W around the axis in the Z-axis direction at a predetermined angle. Further, the rotating means 94 rotates the spinner table 90 at a predetermined rotation speed, so that the entire surface Wa of the object to be cleaned W is dried by air blowing. Then, when the drying of the object to be cleaned W is completed, the air nozzle 96 swivels and moves from the spinner table 90 to evacuate.

As the moving portion 932 moves in the + Y direction, the first sheet piece 931a and the second sheet piece 931b are wound around the take-up rod 935 by the winding habit of memorizing the shape, and the opening 929 is opened. It will be in a state of being crushed. Further, the spinner table 90 rises so that the object to be cleaned W can be carried out.

The transport pad 40 is moved in the −Y direction by the transport pad moving means 41 shown in FIG. 2, and each suction plate 401 is positioned above the annular frame F on the spinner table 90. Further, the lower arm 42 lowers the transport pad 40, and the suction plate 401 contacts the annular frame F to perform suction, so that the transport pad 40 picks up the object W to be cleaned.

Then, the transport pad 40 moves in the + Y direction, and the annular frame F is placed on the centering guide 36. Further, after the annular frame F is gripped by the clamp 46, the object W to be cleaned is inserted into a cassette (not shown) on the cassette mounting table 13 by the clamp 46.

As described above, the cleaning device 9 according to the present invention is arranged below the openable / closable sheet 931 that covers the opening 929 except for a part of the opening 929 of the storage case 92, and the openable / closable sheet 931 when cleaning the object to be cleaned. The fixed sheet 951 is provided with a fixed sheet 951 having a size that covers a part of the opening 929. A gap is formed between the flexible sheet 931 and the fixed sheet 951. Therefore, a vent 954 is formed from above the opening 929 toward the inside of the storage case 92 to allow outside air to flow into the inside of the storage case 92 to prevent the inside of the storage case 92 from being depressurized and to be efficiently soiled. The spray can continue to be exhausted. Further, since the entire surface of the opening 929 of the storage case 92 is covered with the openable / closable sheet 931 and the fixed sheet 951, the cleaning liquid and the scraps of the object to be cleaned W being cleaned are outside the storage case 92. It can be prevented from scattering to.

The cleaning device 9 according to the present invention is not limited to the above embodiment, and the configurations of the processing device 1 and the cleaning device 9 shown in the attached drawings are not limited to the illustrated examples. , It can be changed as appropriate within the range in which the effect of the present invention can be exhibited.

W: Object to be cleaned (processed object) T: Dicing tape F: Circular frame 1: Processing device 10: Base 11: Housing 110: Peep window 111: Operating means 116: Carry-in outlet 12: Processing room 15: Equipment cover 13: Cassette mounting table 30: Chuck table 31: Cover 32: Fixed clamp 36: Centering guide 6: Cutting means 61: Spindle 62: Spindle housing 63: Cutting blade 69: Indexing feeding means 68: Cutting feeding means 67: Aligning means 4 : Conveying means 40: Conveying pad 401: Suction board
41: Conveying pad moving means 410: Ball screw 411: Guide rail 412: Motor 413: Movable block 42: Lower arm 46: Clamp 5: Carrying means 50: Carrying pad 501: Suction board
51: Carry-in pad moving means 510: Ball screw 511: Guide rail 512: Motor 513: Movable block 52: Upper arm
9: Cleaning device 90: Spinner table 900: Suction part 900a: Holding surface 901: Frame 901a: Fixed clamp 91: Cleaning nozzle 96: Air nozzle 92: Storage case 920: Side wall 920a: Exhaust port 921: Bottom 926: Exhaust passage 928 : Suction source 929: Opening
94: Rotation means
930: Openable / closable sheet fixing base 931: Openable / closable sheet 931a: First sheet piece 931b: Second sheet piece 932: Moving part 934: Pair of guide rails 951: Fixed sheet 954: Ventilation port

Claims (1)

It ’s a cleaning device,
A spinner table that holds the object to be cleaned,
A cleaning nozzle that sprays the cleaning liquid onto the object to be cleaned held by the spinner table, and
A storage case for accommodating the spinner table and the cleaning nozzle, having an opening for carrying in the object to be cleaned from above to the inside or carrying out from the inside to the top, and having an exhaust port connected to a suction source.
An openable sheet that covers the opening except for a part of the opening,
A fixed sheet sized to cover a part of the opening, which is placed below the openable sheet when cleaning the object to be cleaned, is provided.
One end of the fixing sheet is fixed to the upper end portion of the storage case, and the other end side with respect to the one end hangs down to form a gap between the openable / closable sheet and the fixing sheet, so that the fixing sheet is formed from above the opening. A cleaning device that forms a vent toward the inside of the storage case to allow outside air to flow into the storage case and prevents the cleaning liquid and scraps of the object to be cleaned from scattering outside the storage case. ..

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