JP2019174413A - 異物検査装置および異物検査方法 - Google Patents
異物検査装置および異物検査方法 Download PDFInfo
- Publication number
- JP2019174413A JP2019174413A JP2018065913A JP2018065913A JP2019174413A JP 2019174413 A JP2019174413 A JP 2019174413A JP 2018065913 A JP2018065913 A JP 2018065913A JP 2018065913 A JP2018065913 A JP 2018065913A JP 2019174413 A JP2019174413 A JP 2019174413A
- Authority
- JP
- Japan
- Prior art keywords
- electromagnetic wave
- inspection
- foreign matter
- main surface
- image sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 title claims description 141
- 238000000034 method Methods 0.000 title claims description 15
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 abstract description 10
- 206010070245 Foreign body Diseases 0.000 description 21
- 239000011255 nonaqueous electrolyte Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000000126 substance Substances 0.000 description 8
- 208000027418 Wounds and injury Diseases 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000004804 winding Methods 0.000 description 4
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V5/00—Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
- G01V5/20—Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
- G01V5/22—Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/17—Circuit arrangements not adapted to a particular type of detector
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
- H01M10/4285—Testing apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/40—Separators; Membranes; Diaphragms; Spacing elements inside cells
- H01M50/403—Manufacturing processes of separators, membranes or diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/32—Accessories, mechanical or electrical features adjustments of elements during operation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/413—Imaging sensor array [CCD]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/652—Specific applications or type of materials impurities, foreign matter, trace amounts
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- High Energy & Nuclear Physics (AREA)
- Theoretical Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Quality & Reliability (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Textile Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
128*48=6144μm(主面31上での、第2方向に沿った検査段33の128段分の長さ)
θ=83°のとき、軸23と上記流動方向とのなす平面内で、軸23方向の、電磁波発生源2から各画素32までの距離は、一番近い画素32と一番遠い画素32とで、6144μm*sin83°=約6.1mm異なる。これにより、拡大率も異なり、上記分解能が異なってくる。この差を求める。第2方向の分解能の差の方が、第1方向の分解能の差より小さくなるので、誤差の大きくなる第2方向の分解能の差を求める。
検査対象物1の電磁波発生源2から遠い側面における一番近い画素32の第1方向分解能は、48*(2*100)/(800−6.1/2)=12.05μm/1画素
差は0.1μm/1画素で、0.1/12=0.83%と、分解能の差は十分小さい。
側面14における一番近い画素32の第1方向分解能は、48*100/(800−6.1/2)=6.02μm/1画素
差は0.04μm/1画素で、0.04/12=0.33%と、分解能の差は十分小さい。
12 非水電解液二次電池用セパレータ
13 異物
2 電磁波発生源
21 電磁波
3 イメージセンサ
31 主面
32 画素
33 検査段
34 主面の法線方向
35 第1方向に伸びる軸
100、101 異物検査装置
Z 電磁波発生源が放出する電磁波の強度が最も高い方向と平行な方向
Claims (8)
- 検査対象物に対して電磁波を照射する電磁波発生源と、
上記検査対象物を透過した上記電磁波の画像を構成する多数の画素が設けられた主面を有しているイメージセンサとを備えており、
上記主面の法線方向は、上記電磁波発生源が放出する電磁波の強度が最も高い方向に対して傾いている異物検査装置。 - 上記多数の画素は、複数の画素が第1方向に並んでなる検査段が、当該第1方向に対して垂直な第2方向に複数並べられた構成を有しており、
上記主面の法線方向は、上記第1方向に伸びる軸に従って回転するように傾いている請求項1に記載の異物検査装置。 - 上記電磁波発生源は、広がりを有している上記電磁波を発する請求項1または2に記載の異物検査装置。
- 上記検査対象物は、フィルムが、上記電磁波発生源が放出する電磁波の強度が最も高い方向に対して垂直な方向に積層された積層体を含んでおり、
上記主面の法線方向は、上記積層体における積層の方向に傾いている請求項1から3のいずれか1項に記載の異物検査装置。 - 検査対象物に対して電磁波を照射する工程と、
イメージセンサの主面に設けられた多数の画素によって、上記検査対象物を透過した上記電磁波の画像を構成する工程とを含んでおり、
上記主面の法線方向を、上記検査対象物に対して照射される電磁波の強度が最も高い方向に対して傾けて、上記イメージセンサを配置する異物検査方法。 - 上記多数の画素は、複数の画素が第1方向に並んでなる検査段が、当該第1方向に対して垂直な第2方向に複数並べられた構成を有しており、
上記主面の法線方向を、上記第1方向に伸びる軸に従って回転するように傾けて、上記イメージセンサを配置する請求項5に記載の異物検査方法。 - 広がりを有している上記電磁波を発する請求項5または6に記載の異物検査方法。
- 上記検査対象物は、フィルムが、上記検査対象物に対して照射される電磁波の強度が最も高い方向に対して垂直な方向に積層された積層体を含んでおり、
上記主面の法線方向を、上記積層体における積層の方向に傾けて、上記イメージセンサを配置する請求項5から7のいずれか1項に記載の異物検査方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018065913A JP7106323B2 (ja) | 2018-03-29 | 2018-03-29 | 異物検査装置および異物検査方法 |
US16/369,260 US10852254B2 (en) | 2018-03-29 | 2019-03-29 | Foreign object inspection device and foreign object inspection method |
KR1020190036664A KR102649640B1 (ko) | 2018-03-29 | 2019-03-29 | 이물 검사 장치 및 이물 검사 방법 |
CN201910256198.2A CN110333256A (zh) | 2018-03-29 | 2019-03-29 | 异物检查装置以及异物检查方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018065913A JP7106323B2 (ja) | 2018-03-29 | 2018-03-29 | 異物検査装置および異物検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019174413A true JP2019174413A (ja) | 2019-10-10 |
JP7106323B2 JP7106323B2 (ja) | 2022-07-26 |
Family
ID=68054208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018065913A Active JP7106323B2 (ja) | 2018-03-29 | 2018-03-29 | 異物検査装置および異物検査方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10852254B2 (ja) |
JP (1) | JP7106323B2 (ja) |
KR (1) | KR102649640B1 (ja) |
CN (1) | CN110333256A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11639904B2 (en) * | 2017-04-26 | 2023-05-02 | Nikon Corporation | Inspection device, inspection method, and method for producing object to be inspected |
JP7382244B2 (ja) * | 2020-02-04 | 2023-11-16 | 本田技研工業株式会社 | 膜電極構造体の検査方法 |
US11965991B1 (en) * | 2020-09-23 | 2024-04-23 | Waymo Llc | Surface fouling detection |
DE102021203119A1 (de) | 2021-03-29 | 2022-09-29 | Carl Zeiss Industrielle Messtechnik Gmbh | Inspektionssystem und Verfahren zur Inspektion wenigstens eines Prüfobjekts |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005283147A (ja) * | 2004-03-26 | 2005-10-13 | Shimadzu Corp | X線異物検査装置 |
US7453978B1 (en) * | 2007-06-25 | 2008-11-18 | University Of Tennessee Research Foundation | Variable resolution x-ray CT detector with multi-axis tilt |
JP2009180719A (ja) * | 2008-02-01 | 2009-08-13 | Ishida Co Ltd | X線検査装置 |
JP2011249095A (ja) * | 2010-05-26 | 2011-12-08 | Toyota Motor Corp | 積層電極体型電池とその製造方法および異物検査方法 |
JP2016109654A (ja) * | 2014-12-03 | 2016-06-20 | 東芝Itコントロールシステム株式会社 | 電池検査装置 |
JP2017157536A (ja) * | 2016-03-01 | 2017-09-07 | 東芝Itコントロールシステム株式会社 | X線発生装置およびx線撮像装置 |
JP2019158473A (ja) * | 2018-03-09 | 2019-09-19 | 浜松ホトニクス株式会社 | 画像取得システムおよび画像取得方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3530938A1 (de) * | 1985-08-29 | 1987-03-12 | Heimann Gmbh | Gepaeckpruefanlage |
JPH1123494A (ja) * | 1997-07-02 | 1999-01-29 | Shimadzu Corp | X線異物検査装置 |
JP2002230522A (ja) | 2001-02-06 | 2002-08-16 | Mitsubishi Rayon Co Ltd | 被検査対象物の欠陥検出装置及び欠陥検査方法 |
JP2003156451A (ja) | 2001-11-21 | 2003-05-30 | Mitsubishi Rayon Co Ltd | 欠陥検出装置 |
JP2005265467A (ja) | 2004-03-16 | 2005-09-29 | Mec:Kk | 欠陥検出装置 |
JP2008224448A (ja) * | 2007-03-13 | 2008-09-25 | Omron Corp | X線検査方法およびx線検査装置 |
JP5784915B2 (ja) * | 2011-01-25 | 2015-09-24 | 浜松ホトニクス株式会社 | 放射線検出器およびそれを備える放射線画像取得装置 |
JP5956730B2 (ja) * | 2011-08-05 | 2016-07-27 | 株式会社日立ハイテクサイエンス | X線分析装置及び方法 |
JP6487855B2 (ja) * | 2014-01-23 | 2019-03-20 | 株式会社ジョブ | X線検査装置及びx線検査方法 |
JP6397690B2 (ja) | 2014-08-11 | 2018-09-26 | 株式会社日立ハイテクノロジーズ | X線透過検査装置及び異物検出方法 |
JP6738644B2 (ja) | 2016-04-15 | 2020-08-12 | 三星電子株式会社Samsung Electronics Co.,Ltd. | 撮像装置及び撮像方法 |
EP3339845A3 (en) * | 2016-11-30 | 2018-09-12 | Sumitomo Chemical Company, Ltd | Defect inspection device, defect inspection method, method for producing separator roll, and separator roll |
-
2018
- 2018-03-29 JP JP2018065913A patent/JP7106323B2/ja active Active
-
2019
- 2019-03-29 US US16/369,260 patent/US10852254B2/en active Active
- 2019-03-29 CN CN201910256198.2A patent/CN110333256A/zh active Pending
- 2019-03-29 KR KR1020190036664A patent/KR102649640B1/ko active IP Right Grant
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005283147A (ja) * | 2004-03-26 | 2005-10-13 | Shimadzu Corp | X線異物検査装置 |
US7453978B1 (en) * | 2007-06-25 | 2008-11-18 | University Of Tennessee Research Foundation | Variable resolution x-ray CT detector with multi-axis tilt |
JP2009180719A (ja) * | 2008-02-01 | 2009-08-13 | Ishida Co Ltd | X線検査装置 |
JP2011249095A (ja) * | 2010-05-26 | 2011-12-08 | Toyota Motor Corp | 積層電極体型電池とその製造方法および異物検査方法 |
JP2016109654A (ja) * | 2014-12-03 | 2016-06-20 | 東芝Itコントロールシステム株式会社 | 電池検査装置 |
JP2017157536A (ja) * | 2016-03-01 | 2017-09-07 | 東芝Itコントロールシステム株式会社 | X線発生装置およびx線撮像装置 |
JP2019158473A (ja) * | 2018-03-09 | 2019-09-19 | 浜松ホトニクス株式会社 | 画像取得システムおよび画像取得方法 |
Also Published As
Publication number | Publication date |
---|---|
JP7106323B2 (ja) | 2022-07-26 |
KR102649640B1 (ko) | 2024-03-21 |
US10852254B2 (en) | 2020-12-01 |
KR20190114885A (ko) | 2019-10-10 |
US20190302035A1 (en) | 2019-10-03 |
CN110333256A (zh) | 2019-10-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2019174413A (ja) | 異物検査装置および異物検査方法 | |
JP6473924B2 (ja) | 電池検査装置 | |
KR101257165B1 (ko) | Ct 장치 및 ct 장치의 촬영 방법 | |
JP5458327B2 (ja) | 電池検査装置及び電池検査方法 | |
WO2020250609A1 (ja) | 電池の検査装置および電池の検査方法 | |
JP2004022206A (ja) | 電池検査装置 | |
JP5502132B2 (ja) | 検査装置 | |
WO2017183493A1 (ja) | 膜電極接合体の連続非破壊検査方法および連続非破壊検査装置 | |
JP2022166130A (ja) | 画像処理装置、異物検査装置及び画像処理方法 | |
US10539517B2 (en) | Checking device and checking method | |
KR20200088222A (ko) | 이차전지용 엑스선 검사 장치 | |
JP4595500B2 (ja) | 巻回装置および巻きずれ検査方法 | |
JP2018092890A (ja) | 欠陥検査装置、欠陥検査方法、及びセパレータ捲回体の製造方法 | |
JP2020085690A (ja) | 積層型電池の検査装置 | |
JP5648898B2 (ja) | Ct装置 | |
JP2019174412A (ja) | 異物検査装置及び異物検査方法 | |
CN108120725A (zh) | 缺陷检查装置、缺陷检查方法、隔膜卷绕体的制造方法及隔膜卷绕体 | |
US20230236139A1 (en) | Method for identifying foil position in power storage device and method for calculating inter-foil distance in power storage device | |
JP2019049545A (ja) | 検査装置 | |
CN109471181A (zh) | 检查装置 | |
KR20200123196A (ko) | 전자 현미경 및 측정 시료의 관찰 방법 | |
JP2019049544A (ja) | 検査装置および検査方法 | |
JP5126645B2 (ja) | 検査装置 | |
KR20240095967A (ko) | 분리막 접힘 확인이 용이한 스택셀, 분리막 검사 장치 및 방법 | |
KR102679591B1 (ko) | 화상 처리 장치, 이물 검사 장치 및 화상 처리 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210209 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20211111 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20211124 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220124 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20220405 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220610 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20220610 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20220620 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20220621 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220705 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220713 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7106323 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |