JP2019143485A - 真空ポンプと真空ポンプの制御装置 - Google Patents
真空ポンプと真空ポンプの制御装置 Download PDFInfo
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- JP2019143485A JP2019143485A JP2018025853A JP2018025853A JP2019143485A JP 2019143485 A JP2019143485 A JP 2019143485A JP 2018025853 A JP2018025853 A JP 2018025853A JP 2018025853 A JP2018025853 A JP 2018025853A JP 2019143485 A JP2019143485 A JP 2019143485A
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- JP
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- Prior art keywords
- cooling
- vacuum pump
- circuit board
- pump
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims abstract description 130
- 239000002826 coolant Substances 0.000 claims abstract description 9
- 238000003860 storage Methods 0.000 claims description 6
- 229920005989 resin Polymers 0.000 description 28
- 239000011347 resin Substances 0.000 description 28
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- 239000000498 cooling water Substances 0.000 description 11
- 230000004308 accommodation Effects 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000005266 casting Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5813—Cooling the control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/06—Cooling; Heating; Prevention of freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/121—Casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/068—Mechanical details of the pump control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D9/00—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D9/0081—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by a single plate-like element ; the conduits for one heat-exchange medium being integrated in one single plate-like element
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2210/00—Working fluids
- F05D2210/10—Kind or type
- F05D2210/12—Kind or type gaseous, i.e. compressible
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
前記制御装置は、
冷却面を有し内部に冷却媒体流路が形成された冷却部と、
発熱部品を備え前記冷却部による冷却が可能な複数の電装部品部と、を有し、
前記冷却面は、異なる方向に向けて複数形成され、複数の前記冷却面に前記複数の電装部品部の各々が熱移動可能に取り付けられていることを特徴とする真空ポンプ。
前記複数の電装部品部の少なくとも1つには、前記回路基板及び前記発熱部品を少なくとも部分的に覆うモールド部が設けられていることを特徴とする真空ポンプにある。
発熱部品を備え前記冷却部による冷却が可能な複数の電装部品部と、を有し、
前記冷却面が、異なる方向に向けて複数形成され、複数の前記冷却面に前記複数の電装部品部の各々が熱移動可能に取り付けられていることを特徴とする真空ポンプの制御装置にある。
冷却部は、一般的には冷却管38に流す冷却水により冷却されるが、冷却媒体(冷媒)は冷却水に限定されず、水以外の流体や冷却ガス等の他の冷媒であっても構わない。
11 ポンプ本体
31 電装ケース(制御装置)
31a 第1収容空間(収容空間)
31b 第2収容空間(収容空間)
33 電源回路部(電装部品部)
34 制御回路部(電装部品部)
36 冷却ジャケット(冷却部)
38 冷却管
38a 冷却媒体流路
40 鉛直部
46 鉛直部の内側面(冷却面)
47 鉛直部の外側面(冷却面)
51 回路基板
62 回路部品(発熱部品)
74 モールド樹脂(モールド部)
Claims (4)
- ポンプ本体と、前記ポンプ本体の外側に配置された制御装置とを備え、
前記制御装置は、
冷却面を有し内部に冷却媒体流路が形成された冷却部と、
発熱部品を備え前記冷却部による冷却が可能な複数の電装部品部と、を有し、
前記冷却面は、異なる方向に向けて複数形成され、複数の前記冷却面に前記複数の電装部品部の各々が熱移動可能に取り付けられていることを特徴とする真空ポンプ。 - 前記複数の電装部品部は、前記発熱部品が実装されるとともに前記冷却面に固定された回路基板を有し、
前記複数の電装部品部の少なくとも1つには、前記回路基板及び前記発熱部品を少なくとも部分的に覆うモールド部が設けられていることを特徴とする請求項1に記載の真空ポンプ。 - 前記制御装置は、前記冷却部によって複数の収容空間に区分けされ、各々の前記収容空間に前記複数の電装部品部の内の少なくとも一つを備えていることを特徴とする請求項1又は2に記載の真空ポンプ。
- 冷却面を有し内部に冷却媒体流路が形成された冷却部と、
発熱部品を備え前記冷却部による冷却が可能な複数の電装部品部と、を有し、
前記冷却面が、異なる方向に向けて複数形成され、複数の前記冷却面に前記複数の電装部品部の各々が熱移動可能に取り付けられていることを特徴とする真空ポンプの制御装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018025853A JP7096006B2 (ja) | 2018-02-16 | 2018-02-16 | 真空ポンプと真空ポンプの制御装置 |
PCT/JP2019/004744 WO2019159854A1 (ja) | 2018-02-16 | 2019-02-08 | 真空ポンプと真空ポンプの制御装置 |
EP19753700.4A EP3754202A4 (en) | 2018-02-16 | 2019-02-08 | VACUUM PUMP AND VACUUM PUMP CONTROLLER |
KR1020207018896A KR20200121786A (ko) | 2018-02-16 | 2019-02-08 | 진공 펌프와 진공 펌프의 제어 장치 |
CN201980011234.7A CN111630279A (zh) | 2018-02-16 | 2019-02-08 | 真空泵与真空泵的控制装置 |
US16/967,889 US11415151B2 (en) | 2018-02-16 | 2019-02-08 | Vacuum pump, and control device of vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018025853A JP7096006B2 (ja) | 2018-02-16 | 2018-02-16 | 真空ポンプと真空ポンプの制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019143485A true JP2019143485A (ja) | 2019-08-29 |
JP7096006B2 JP7096006B2 (ja) | 2022-07-05 |
Family
ID=67620179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018025853A Active JP7096006B2 (ja) | 2018-02-16 | 2018-02-16 | 真空ポンプと真空ポンプの制御装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11415151B2 (ja) |
EP (1) | EP3754202A4 (ja) |
JP (1) | JP7096006B2 (ja) |
KR (1) | KR20200121786A (ja) |
CN (1) | CN111630279A (ja) |
WO (1) | WO2019159854A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7022265B2 (ja) * | 2017-10-25 | 2022-02-18 | 株式会社島津製作所 | 真空ポンプ |
JP7087418B2 (ja) * | 2018-02-02 | 2022-06-21 | 株式会社島津製作所 | 真空ポンプ |
JP7088688B2 (ja) | 2018-02-16 | 2022-06-21 | エドワーズ株式会社 | 真空ポンプと真空ポンプの制御装置 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS642397A (en) * | 1987-06-24 | 1989-01-06 | Nec Corp | Cooling structure of package for electronic circuit |
JPS645045A (en) * | 1987-06-26 | 1989-01-10 | Nec Corp | Cooling structure for integrated circuit package |
JPH07194139A (ja) * | 1993-12-27 | 1995-07-28 | Hitachi Ltd | 電気自動車用インバータの冷却装置 |
DE102007028475A1 (de) * | 2007-06-01 | 2008-09-04 | Bombardier Transportation Gmbh | Kühlung von elektronischen Hochleistungsbauteilen |
JP2010079397A (ja) * | 2008-09-24 | 2010-04-08 | Hitachi Ltd | 電子装置 |
WO2011111209A1 (ja) * | 2010-03-11 | 2011-09-15 | 株式会社島津製作所 | ターボ分子ポンプ装置 |
WO2012053271A1 (ja) * | 2010-10-19 | 2012-04-26 | エドワーズ株式会社 | 真空ポンプ |
JP2013100760A (ja) * | 2011-11-08 | 2013-05-23 | Shimadzu Corp | 一体型ターボ分子ポンプ |
JP2014043827A (ja) * | 2012-08-28 | 2014-03-13 | Osaka Vacuum Ltd | 分子ポンプ |
JP2015049443A (ja) * | 2013-09-03 | 2015-03-16 | ソニー株式会社 | 光源装置および映像表示装置 |
JP2017153339A (ja) * | 2016-02-25 | 2017-08-31 | トヨタ自動車株式会社 | 機器ユニット |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0424637Y2 (ja) | 1987-06-24 | 1992-06-10 | ||
JPS645045U (ja) | 1987-06-30 | 1989-01-12 | ||
IT1288737B1 (it) * | 1996-10-08 | 1998-09-24 | Varian Spa | Dispositivo di pompaggio da vuoto. |
JP3961155B2 (ja) * | 1999-05-28 | 2007-08-22 | Bocエドワーズ株式会社 | 真空ポンプ |
WO2005015026A1 (ja) * | 2003-08-08 | 2005-02-17 | Boc Edwards Japan Limited | 真空ポンプ |
JP2005320905A (ja) * | 2004-05-10 | 2005-11-17 | Boc Edwards Kk | 真空ポンプ |
US7079396B2 (en) * | 2004-06-14 | 2006-07-18 | Sun Microsystems, Inc. | Memory module cooling |
US7289327B2 (en) * | 2006-02-27 | 2007-10-30 | Stakick Group L.P. | Active cooling methods and apparatus for modules |
US7106595B2 (en) * | 2004-09-15 | 2006-09-12 | International Business Machines Corporation | Apparatus including a thermal bus on a circuit board for cooling components on a daughter card releasably attached to the circuit board |
EP1811175B1 (en) * | 2004-10-15 | 2011-10-05 | Edwards Japan Limited | Damper and vacuum pump |
JP2006344503A (ja) * | 2005-06-09 | 2006-12-21 | Boc Edwards Kk | 端子構造及び真空ポンプ |
JP4749054B2 (ja) * | 2005-06-22 | 2011-08-17 | エドワーズ株式会社 | ターボ分子ポンプ、およびターボ分子ポンプの組み立て方法 |
DE102006016405A1 (de) * | 2006-04-07 | 2007-10-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Antriebsgerät |
JP5021349B2 (ja) | 2007-03-27 | 2012-09-05 | 小島プレス工業株式会社 | 車両搭載アンテナ用回路基板 |
US7957134B2 (en) * | 2007-04-10 | 2011-06-07 | Hewlett-Packard Development Company, L.P. | System and method having evaporative cooling for memory |
US7755897B2 (en) * | 2007-12-27 | 2010-07-13 | Fu Zhun Precision Industry (Shen Zhen) Co., Ltd. | Memory module assembly with heat dissipation device |
EP2314877B1 (en) * | 2008-07-14 | 2018-08-22 | Edwards Japan Limited | Vacuum pump |
JP5782378B2 (ja) * | 2009-08-21 | 2015-09-24 | エドワーズ株式会社 | 真空ポンプ |
CN102782837B (zh) * | 2010-03-08 | 2015-08-12 | 国际商业机器公司 | 液态双列直插存储模块冷却设备 |
JP5353838B2 (ja) * | 2010-07-07 | 2013-11-27 | 株式会社島津製作所 | 真空ポンプ |
JP5778166B2 (ja) * | 2010-10-19 | 2015-09-16 | エドワーズ株式会社 | 真空ポンプ |
JP6735526B2 (ja) * | 2013-08-30 | 2020-08-05 | エドワーズ株式会社 | 真空ポンプ |
JP6287475B2 (ja) * | 2014-03-28 | 2018-03-07 | 株式会社島津製作所 | 真空ポンプ |
JP6651406B2 (ja) | 2016-04-27 | 2020-02-19 | マレリ株式会社 | 電力変換装置 |
DE102017103475A1 (de) * | 2016-02-25 | 2017-08-31 | Toyota Jidosha Kabushiki Kaisha | Geräteeinheit |
JP6884553B2 (ja) * | 2016-11-04 | 2021-06-09 | エドワーズ株式会社 | 真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法 |
JP6855845B2 (ja) * | 2017-03-03 | 2021-04-07 | 日本電産トーソク株式会社 | モータ及び電動オイルポンプ |
US10233943B2 (en) * | 2017-04-05 | 2019-03-19 | Shimadzu Corporation | Vacuum pump control device |
JP7022265B2 (ja) * | 2017-10-25 | 2022-02-18 | 株式会社島津製作所 | 真空ポンプ |
JP7087418B2 (ja) * | 2018-02-02 | 2022-06-21 | 株式会社島津製作所 | 真空ポンプ |
JP7088688B2 (ja) * | 2018-02-16 | 2022-06-21 | エドワーズ株式会社 | 真空ポンプと真空ポンプの制御装置 |
-
2018
- 2018-02-16 JP JP2018025853A patent/JP7096006B2/ja active Active
-
2019
- 2019-02-08 EP EP19753700.4A patent/EP3754202A4/en active Pending
- 2019-02-08 CN CN201980011234.7A patent/CN111630279A/zh active Pending
- 2019-02-08 US US16/967,889 patent/US11415151B2/en active Active
- 2019-02-08 WO PCT/JP2019/004744 patent/WO2019159854A1/ja unknown
- 2019-02-08 KR KR1020207018896A patent/KR20200121786A/ko unknown
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS642397A (en) * | 1987-06-24 | 1989-01-06 | Nec Corp | Cooling structure of package for electronic circuit |
JPS645045A (en) * | 1987-06-26 | 1989-01-10 | Nec Corp | Cooling structure for integrated circuit package |
JPH07194139A (ja) * | 1993-12-27 | 1995-07-28 | Hitachi Ltd | 電気自動車用インバータの冷却装置 |
DE102007028475A1 (de) * | 2007-06-01 | 2008-09-04 | Bombardier Transportation Gmbh | Kühlung von elektronischen Hochleistungsbauteilen |
JP2010079397A (ja) * | 2008-09-24 | 2010-04-08 | Hitachi Ltd | 電子装置 |
WO2011111209A1 (ja) * | 2010-03-11 | 2011-09-15 | 株式会社島津製作所 | ターボ分子ポンプ装置 |
WO2012053271A1 (ja) * | 2010-10-19 | 2012-04-26 | エドワーズ株式会社 | 真空ポンプ |
JP2013100760A (ja) * | 2011-11-08 | 2013-05-23 | Shimadzu Corp | 一体型ターボ分子ポンプ |
JP2014043827A (ja) * | 2012-08-28 | 2014-03-13 | Osaka Vacuum Ltd | 分子ポンプ |
JP2015049443A (ja) * | 2013-09-03 | 2015-03-16 | ソニー株式会社 | 光源装置および映像表示装置 |
JP2017153339A (ja) * | 2016-02-25 | 2017-08-31 | トヨタ自動車株式会社 | 機器ユニット |
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US11415151B2 (en) | 2022-08-16 |
CN111630279A (zh) | 2020-09-04 |
KR20200121786A (ko) | 2020-10-26 |
EP3754202A4 (en) | 2021-11-10 |
US20210025406A1 (en) | 2021-01-28 |
EP3754202A1 (en) | 2020-12-23 |
JP7096006B2 (ja) | 2022-07-05 |
WO2019159854A1 (ja) | 2019-08-22 |
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