JP2019095799A5 - - Google Patents

Download PDF

Info

Publication number
JP2019095799A5
JP2019095799A5 JP2019012078A JP2019012078A JP2019095799A5 JP 2019095799 A5 JP2019095799 A5 JP 2019095799A5 JP 2019012078 A JP2019012078 A JP 2019012078A JP 2019012078 A JP2019012078 A JP 2019012078A JP 2019095799 A5 JP2019095799 A5 JP 2019095799A5
Authority
JP
Japan
Prior art keywords
optical assembly
sensor
light beam
assembly according
combined output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019012078A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019095799A (ja
Filing date
Publication date
Priority claimed from DE102013204442.9A external-priority patent/DE102013204442A1/de
Application filed filed Critical
Publication of JP2019095799A publication Critical patent/JP2019095799A/ja
Publication of JP2019095799A5 publication Critical patent/JP2019095799A5/ja
Pending legal-status Critical Current

Links

JP2019012078A 2013-03-14 2019-01-28 照射光を案内するための光導波路 Pending JP2019095799A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201361781123P 2013-03-14 2013-03-14
DE102013204442.9 2013-03-14
US61/781123 2013-03-14
DE102013204442.9A DE102013204442A1 (de) 2013-03-14 2013-03-14 Optischer Wellenleiter zur Führung von Beleuchtungslicht

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2015562039A Division JP6473700B2 (ja) 2013-03-14 2014-03-07 照射光を案内するための光導波路

Publications (2)

Publication Number Publication Date
JP2019095799A JP2019095799A (ja) 2019-06-20
JP2019095799A5 true JP2019095799A5 (https=) 2019-09-26

Family

ID=51519699

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015562039A Active JP6473700B2 (ja) 2013-03-14 2014-03-07 照射光を案内するための光導波路
JP2019012078A Pending JP2019095799A (ja) 2013-03-14 2019-01-28 照射光を案内するための光導波路

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2015562039A Active JP6473700B2 (ja) 2013-03-14 2014-03-07 照射光を案内するための光導波路

Country Status (4)

Country Link
US (2) US9671548B2 (https=)
JP (2) JP6473700B2 (https=)
DE (1) DE102013204442A1 (https=)
WO (1) WO2014139881A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013204442A1 (de) 2013-03-14 2014-10-02 Carl Zeiss Smt Gmbh Optischer Wellenleiter zur Führung von Beleuchtungslicht
CN104181648B (zh) * 2014-07-07 2015-10-28 中国科学院上海光学精密机械研究所 空心光子晶体光纤气体吸收池及其制作方法
DE102014219112A1 (de) * 2014-09-23 2016-03-24 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie sowie Hohlwellenleiter-Komponente hierfür
WO2018017650A1 (en) * 2016-07-22 2018-01-25 Applied Materials, Inc. Twisted kaleido
DE102016118471A1 (de) * 2016-09-29 2018-03-29 Valeo Schalter Und Sensoren Gmbh Erfassungsvorrichtung für ein Kraftfahrzeug, Anbauteil sowie Kraftfahrzeug
DE102016225563A1 (de) 2016-12-20 2018-06-21 Carl Zeiss Smt Gmbh Hohlwellenleiter zur Führung von EUV-Licht mit einer Nutzwellenlänge
DE102017205548A1 (de) 2017-03-31 2018-10-04 Carl Zeiss Smt Gmbh Optische Baugruppe zum Führen eines Ausgabestrahls eines Freie-Elektronen-Lasers
CZ309726B6 (cs) 2017-11-01 2023-08-23 PO LIGHTING CZECH s.r.o Světlovodivý optický systém
US11520044B2 (en) 2018-09-25 2022-12-06 Waymo Llc Waveguide diffusers for LIDARs
US11499924B2 (en) 2019-06-03 2022-11-15 KLA Corp. Determining one or more characteristics of light in an optical system
DE102019115146B4 (de) * 2019-06-05 2021-01-14 Schott Ag Optisches Gerät, Verwendungen des optischen Gerätes, Fahrzeug oder Beobachtungsstation mit dem optischen Gerät sowie Verfahren zur hochauflösenden Bildübertragung
US11293880B2 (en) 2020-02-20 2022-04-05 Kla Corporation Method and apparatus for beam stabilization and reference correction for EUV inspection
CN115280177B (zh) * 2020-03-02 2025-04-22 佳能株式会社 光学装置、车载系统、以及移动装置
DE102021206203A1 (de) * 2021-06-17 2022-12-22 Carl Zeiss Smt Gmbh Heizanordnung und Verfahren zum Heizen eines optischen Elements
DE102024203350B4 (de) * 2024-04-11 2025-12-24 Carl Zeiss Smt Gmbh Energie-Detektions-Baugruppe für ein Beleuchtungssystem eines Maskeninspektionssystems zum Einsatz mit EUV-Beleuchtungslicht

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2929186A1 (de) * 1979-07-19 1981-02-05 Licentia Gmbh Einrichtung zur auskopplung eines definierten anteils eines lichtbuendels einer lichtleitfaser
JPS5814108A (ja) * 1981-07-17 1983-01-26 Nippon Telegr & Teleph Corp <Ntt> マルチコア光フアイバ用光結合器
JPS5879240A (ja) * 1981-11-06 1983-05-13 Nippon Kogaku Kk <Nikon> 異物検出装置
US4834497A (en) * 1987-02-27 1989-05-30 The United States Of American As Represented By The United States Department Of Energy Fiber optic fluid detector
US4918583A (en) 1988-04-25 1990-04-17 Nikon Corporation Illuminating optical device
JPH0210501U (https=) * 1988-07-04 1990-01-23
US5059013A (en) 1988-08-29 1991-10-22 Kantilal Jain Illumination system to produce self-luminous light beam of selected cross-section, uniform intensity and selected numerical aperture
DE4124311A1 (de) 1991-07-23 1993-01-28 Zeiss Carl Fa Anordnung zur kohaerenzreduktion und strahlformung eines laserstrahls
US5224200A (en) 1991-11-27 1993-06-29 The United States Of America As Represented By The Department Of Energy Coherence delay augmented laser beam homogenizer
AU7921894A (en) 1993-09-30 1995-04-18 Cymer Laser Technologies Full field mask illumination enhancement methods and apparatus
US5479543A (en) * 1994-06-02 1995-12-26 Reliant Technologies, Inc. Precision light-guiding terminal for optical fibers
US5473408A (en) 1994-07-01 1995-12-05 Anvik Corporation High-efficiency, energy-recycling exposure system
US5953477A (en) * 1995-11-20 1999-09-14 Visionex, Inc. Method and apparatus for improved fiber optic light management
IL125986A (en) * 1996-03-13 2004-05-12 Visionex Inc Device and method for improved operation of light in optical fiber
US5763930A (en) 1997-05-12 1998-06-09 Cymer, Inc. Plasma focus high energy photon source
JP3517573B2 (ja) * 1997-11-27 2004-04-12 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
JP2001080308A (ja) 1999-09-10 2001-03-27 Ntn Corp 車輪軸受装置
JP2001091469A (ja) * 1999-09-21 2001-04-06 Olympus Optical Co Ltd 表面欠陥検査装置
JP2001110713A (ja) 1999-10-12 2001-04-20 Nikon Corp 反射型光学素子及び該光学素子を備える照明光学装置、投影露光装置、デバイス製造方法
JP2001174410A (ja) * 1999-12-21 2001-06-29 Nkk Corp 照明装置
JP2001307523A (ja) * 2000-04-19 2001-11-02 Mitsubishi Rayon Co Ltd 照明装置
TWI240788B (en) 2000-05-04 2005-10-01 Koninkl Philips Electronics Nv Illumination system, light mixing chamber and display device
US7070280B2 (en) 2001-07-04 2006-07-04 Unaxis Balzers Aktiengesellschaft Method for the generation of light of a given polarization state
KR100433211B1 (ko) 2001-08-10 2004-05-28 엘지전자 주식회사 광량 및 편광 균일화 광학소자를 이용한 프로젝터의 조명 광학계
ATE448442T1 (de) 2001-09-26 2009-11-15 Koninkl Philips Electronics Nv Mikrostrukturiertes beleuchtungssystem zur bereitstellung polarisierten lichtes
WO2003060584A1 (en) * 2002-01-15 2003-07-24 Sumitomo Electric Industries, Ltd. Optical waveguide module
WO2003079067A1 (en) * 2002-03-18 2003-09-25 Ntt Electronics Corporation Method and device for manufacturing bare optical fiber
DE10220815A1 (de) 2002-05-10 2003-11-20 Zeiss Carl Microelectronic Sys Reflektives Röntgenmikroskop und Inspektionssystem zur Untersuchung von Objekten mit Wellenlängen 100 nm
US6888988B2 (en) 2003-03-14 2005-05-03 Agilent Technologies, Inc. Small form factor all-polymer optical device with integrated dual beam path based on total internal reflection optical turn
JP2005195348A (ja) * 2003-12-26 2005-07-21 Nikon Corp 照明光学装置
JP2005241290A (ja) * 2004-02-24 2005-09-08 Toshiba Corp 画像入力装置及び検査装置
US7387954B2 (en) 2004-10-04 2008-06-17 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device
US20060082888A1 (en) 2004-10-19 2006-04-20 Andrew Huibers Optically reconfigurable light integrator in display systems using spatial light modulators
US20060285110A1 (en) * 2005-02-25 2006-12-21 Accent Optical Technologies, Inc. Apparatus and method for enhanced critical dimension scatterometry
KR101353657B1 (ko) 2005-12-23 2014-01-20 칼 짜이스 레이저 옵틱스 게엠베하 레이저 빔 프로파일을 성형하기 위한 광학 시스템 및 방법
JP5108490B2 (ja) * 2007-12-19 2012-12-26 オリンパス株式会社 細胞解析装置用照明装置
TWI337267B (en) * 2008-12-10 2011-02-11 Ind Tech Res Inst Fiber laser device
NL2004094A (en) * 2009-02-11 2010-08-12 Asml Netherlands Bv Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method.
DE102010061505B4 (de) 2010-12-22 2012-10-31 Kla-Tencor Mie Gmbh Verfahren zur Inspektion und Detektion von Defekten auf Oberflächen von scheibenförmigen Objekten
JPWO2012137842A1 (ja) * 2011-04-04 2014-07-28 株式会社ニコン 照明装置、露光装置、デバイス製造方法、導光光学素子及び導光光学素子の製造方法
DE102013204442A1 (de) 2013-03-14 2014-10-02 Carl Zeiss Smt Gmbh Optischer Wellenleiter zur Führung von Beleuchtungslicht

Similar Documents

Publication Publication Date Title
JP2019095799A5 (https=)
JP5771632B2 (ja) 円筒体の輪郭形状を測定するための方法及び装置
JP5902448B2 (ja) 多レンズ光学系の光学面の曲率中心の位置の測定
JP6320550B2 (ja) コヒーレント回折イメージング方法を使用した、反射モードにおける装置
WO2010013325A1 (ja) 分光測光装置
TW200409904A (en) Apparatus for measuring film thickness formed on object, apparatus and method of measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object
JP2012118061A (ja) 高強度の高エネルギー放射光のビーム束断面におけるパラメータの空間分解測定方法
JP2002034919A (ja) 眼光学特性測定装置
CN109813536A (zh) 一种红外光学系统外部杂散光测试装置及测试方法
CN111751086B (zh) 一种物镜参数测量装置
TWM527556U (zh) 一種物件外表面的取像裝置
RU147271U1 (ru) Интерферометр для контроля формы и углового положения оптических поверхностей
JPH0479522B2 (https=)
JP2000028527A (ja) レ―ザビ―ム使用亜鉛メッキ鋼板合金化度測定方法
JP3995667B2 (ja) フォーカルプレーン式シャッタの測定装置
JP2004198244A (ja) 透過率測定装置および絶対反射率測定装置
JPH03130639A (ja) Ｍｔｆ測定装置の光軸整合方法
WO2015151233A1 (ja) 分光測定装置及び積分球
JPH08193810A (ja) 変位測定装置
JP7149478B2 (ja) 距離測定装置及びその制御方法
RU2424503C1 (ru) Способ измерения абсолютного значения коэффициента отражения зеркал
JP2008032669A5 (https=)
RU2422790C1 (ru) Способ измерения коэффициента пропускания объективов
CN103097858B (zh) 用于测定距离的光学测量系统
CN104764477B (zh) 具有在线校正功能的光学检测装置