JP2019009148A - 半導体装置およびその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 87
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 230000001133 acceleration Effects 0.000 claims description 18
- 238000002513 implantation Methods 0.000 claims description 13
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 12
- 229910052698 phosphorus Inorganic materials 0.000 claims description 12
- 239000011574 phosphorus Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000000137 annealing Methods 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 238000005224 laser annealing Methods 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims description 3
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 37
- 229910052710 silicon Inorganic materials 0.000 abstract description 37
- 239000010703 silicon Substances 0.000 abstract description 37
- 230000010355 oscillation Effects 0.000 abstract description 21
- 239000010410 layer Substances 0.000 description 151
- 238000009826 distribution Methods 0.000 description 17
- 238000005516 engineering process Methods 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 9
- 238000002347 injection Methods 0.000 description 9
- 239000007924 injection Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Abstract
Description
本発明の前提となる技術である前提技術について説明する。
<構成>
図1は、本発明の実施の形態1による半導体装置の構成の一例を示す断面図である。図1に示す半導体装置は、IGBTである。本実施の形態1による半導体装置は、第1n型バッファ層8の構造に特徴を有している。その他の構成は、図21に示す前提技術による半導体装置と同様であるため、ここでは詳細な説明を省略する。
図4〜11は、本実施の形態1による半導体装置であるIGBTの製造工程の一例を示す図である。
図13は、本発明の実施の形態2による半導体装置の構成の一例を示す断面図である。図13に示す半導体装置は、IGBTである。本実施の形態2による半導体装置は、第1n型バッファ層17の構造に特徴を有している。その他の構成および製造方法は、実施の形態1と同様であるため、ここでは詳細な説明を省略する。
図17は、本発明の実施の形態3による半導体装置の構成の一例を示す断面図である。図17に示す半導体装置は、IGBTである。本実施の形態3による半導体装置は、第1n型バッファ層18の構造に特徴を有している。その他の構成および製造方法は、実施の形態1または実施の形態2と同様であるため、ここでは詳細な説明を省略する。
Claims (14)
- 半導体基板と、
前記半導体基板の一方主面内に形成され、前記一方主面からの深さが異なる複数のプロトンの濃度のピークを有する第1バッファ層と、
を備え、
前記第1バッファ層は、前記一方主面から近い方の位置に存在する前記ピークから前記半導体基板の他方主面に向かう前記プロトンの濃度の勾配が、前記一方主面から遠い方の位置に存在する前記ピークから前記他方主面に向かう前記プロトンの濃度の勾配よりも小さいことを特徴とする、半導体装置。 - 半導体基板と、
前記半導体基板の一方主面内に形成され、前記一方主面からの深さが異なる複数のプロトンの濃度のピークを有する第1バッファ層と、
を備え、
前記第1バッファ層は、前記一方主面から近い方の位置に存在する前記ピークの半値幅が、前記一方主面から遠い方の位置に存在する前記ピークの半値幅よりも大きいことを特徴とする、半導体装置。 - 各前記ピークから前記他方主面に向かう前記プロトンの濃度の勾配は、2.0E14cm3/μm以下であることを特徴とする、請求項1に記載の半導体装置。
- 各前記ピークの半値幅は、1.0μm以上であることを特徴とする、請求項2に記載の半導体装置。
- 前記第1バッファ層は、最も前記一方主面側の領域の前記プロトンの濃度が、前記半導体基板の不純物濃度以下であることを特徴とする、請求項1から4のいずれか1項に記載の半導体装置。
- 前記第1バッファ層は、各前記プロトンの濃度のピークが、前記一方主面から前記半導体基板の他方主面に向かって小さくなることを特徴とする、請求項1から5のいずれか1項に記載の半導体装置。
- 前記第1バッファ層は、各前記プロトンの濃度のピークを3つ以上有することを特徴とする、請求項1から6のいずれか1項に記載の半導体装置。
- 前記第1バッファ層は、前記一方主面からの深さが20μm以上であることを特徴とする、請求項1から7のいずれか1項に記載の半導体装置。
- 前記第1バッファ層の前記一方主面側に形成された第2バッファ層をさらに備えることを特徴とする、請求項1から8のいずれか1項に記載の半導体装置。
- 前記第2バッファ層の不純物は、リンまたはヒ素であることを特徴とする、請求項9に記載の半導体装置。
- 前記半導体装置は、絶縁ゲート型バイポーラトランジスタまたはダイオードであることを特徴とする、請求項1から10のいずれか1項に記載の半導体装置。
- 請求項1から11のいずれか1項に記載の半導体装置の製造方法であって、
前記第1バッファ層は、イオン注入機を用いて、1.5MeV以下の異なる加速電圧かつ異なる注入角度で複数回のイオン注入を行うことによって形成されることを特徴とする、半導体装置の製造方法。 - 請求項1から11のいずれか1項に記載の半導体装置の製造方法であって、
前記第1バッファ層は、前記半導体基板の前記一方主面内における前記第1バッファ層を形成すべき領域を遮蔽した遮蔽物を介して、イオン注入機を用いて1.5MeV以下の異なる加速電圧で複数回のイオン注入を行うことによって形成されることを特徴とする、半導体装置の製造方法。 - 請求項10に記載の半導体装置の製造方法であって、
前記第1バッファ層は、ファーネスアニールで前記プロトンを活性化させることによって形成され、
前記第2バッファ層は、レーザーアニールで前記リンまたは前記ヒ素を活性化させることによって形成されることを特徴とする、半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017120399A JP6661575B2 (ja) | 2017-06-20 | 2017-06-20 | 半導体装置およびその製造方法 |
US15/898,375 US10263102B2 (en) | 2017-06-20 | 2018-02-16 | Semiconductor device and method of manufacturing the same |
DE102018205274.3A DE102018205274B4 (de) | 2017-06-20 | 2018-04-09 | Halbleitervorrichtung und verfahren zu deren herstellung |
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WO2021125140A1 (ja) * | 2019-12-17 | 2021-06-24 | 富士電機株式会社 | 半導体装置 |
JP2021132073A (ja) * | 2020-02-18 | 2021-09-09 | 株式会社デンソー | 半導体装置 |
JP7415913B2 (ja) | 2020-12-28 | 2024-01-17 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
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