JP2018535546A5 - - Google Patents
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- Publication number
- JP2018535546A5 JP2018535546A5 JP2018520092A JP2018520092A JP2018535546A5 JP 2018535546 A5 JP2018535546 A5 JP 2018535546A5 JP 2018520092 A JP2018520092 A JP 2018520092A JP 2018520092 A JP2018520092 A JP 2018520092A JP 2018535546 A5 JP2018535546 A5 JP 2018535546A5
- Authority
- JP
- Japan
- Prior art keywords
- voltage pulse
- change section
- stretch
- polarization
- electromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015013553.8 | 2015-10-20 | ||
| DE102015013553.8A DE102015013553B4 (de) | 2015-10-20 | 2015-10-20 | Verfahren zur Ansteuerung eines Stellelements |
| PCT/DE2016/100490 WO2017067544A1 (de) | 2015-10-20 | 2016-10-20 | Verfahren zur ansteuerung eines elektromechanischen elements |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018535546A JP2018535546A (ja) | 2018-11-29 |
| JP2018535546A5 true JP2018535546A5 (enExample) | 2019-09-05 |
| JP7018388B2 JP7018388B2 (ja) | 2022-02-10 |
Family
ID=57326138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018520092A Active JP7018388B2 (ja) | 2015-10-20 | 2016-10-20 | 電気機械要素を制御する方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US11303226B2 (enExample) |
| EP (1) | EP3365926B1 (enExample) |
| JP (1) | JP7018388B2 (enExample) |
| KR (1) | KR102242758B1 (enExample) |
| CN (1) | CN108463893B (enExample) |
| DE (1) | DE102015013553B4 (enExample) |
| ES (1) | ES2898507T3 (enExample) |
| IL (1) | IL258775B2 (enExample) |
| WO (1) | WO2017067544A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020216555A1 (en) | 2019-04-23 | 2020-10-29 | Asml Netherlands B.V. | Object table, a stage apparatus, a lithographic apparatus and a method of loading an object onto an object table or stage apparatus |
| US11456330B2 (en) | 2019-08-07 | 2022-09-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fatigue-free bipolar loop treatment to reduce imprint effect in piezoelectric device |
| KR20220000600A (ko) | 2020-06-26 | 2022-01-04 | 엘지이노텍 주식회사 | 초음파 리니어 모터 |
| DE102023208848A1 (de) | 2022-11-07 | 2024-05-08 | Carl Zeiss Smt Gmbh | Beleuchtungssystem für eine lithographieanlage, lithographieanlage und verfahren zum betreiben eines beleuchtungssystems einer lithographieanlage |
| DE102022131394A1 (de) | 2022-11-28 | 2024-05-29 | Pi Ceramic Gmbh | Aktuatorvorrichtung |
| DE102023126711A1 (de) | 2023-09-29 | 2025-04-03 | Physik Instrumente (PI) GmbH & Co KG | Aktoreinheit, Antriebsvorrichtung und Antriebssystem |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS611278A (ja) | 1984-06-11 | 1986-01-07 | Nippon Telegr & Teleph Corp <Ntt> | 圧電アクチユエ−タ |
| JP3114434B2 (ja) * | 1993-06-30 | 2000-12-04 | ブラザー工業株式会社 | 圧電アクチュエータの駆動方法 |
| DE10028335B4 (de) * | 2000-06-08 | 2004-04-01 | Epcos Ag | Verfahren zum Polarisieren einer Piezokeramik, Verfahren zur Herstellung eines Piezo-Aktors und Verwendung des Piezo-Aktors |
| JP4374551B2 (ja) * | 2001-09-11 | 2009-12-02 | セイコーエプソン株式会社 | 液体吐出ヘッド、液体吐出装置、及び液体吐出ヘッドの駆動方法 |
| DE102004009140B4 (de) * | 2004-02-25 | 2006-10-05 | Siemens Ag | Verfahren und Vorrichtung zur Polarisierung eines piezoelektrischen Aktors |
| DE102004021955A1 (de) * | 2004-05-04 | 2005-12-01 | Siemens Ag | Verfahren zum Polarisieren einer Piezokeramik |
| JP2008085194A (ja) * | 2006-09-28 | 2008-04-10 | Univ Of Tokyo | 強誘電体デバイス |
| US8138658B2 (en) | 2008-01-28 | 2012-03-20 | Technion Research & Development Foundation Ltd. | Piezoelectric-ferroelectric actuator device |
| JP5371329B2 (ja) * | 2008-08-29 | 2013-12-18 | 富士フイルム株式会社 | 圧電素子、および液体吐出装置 |
| JP6145992B2 (ja) * | 2012-03-26 | 2017-06-14 | セイコーエプソン株式会社 | 液体噴射装置 |
-
2015
- 2015-10-20 DE DE102015013553.8A patent/DE102015013553B4/de active Active
-
2016
- 2016-10-20 JP JP2018520092A patent/JP7018388B2/ja active Active
- 2016-10-20 WO PCT/DE2016/100490 patent/WO2017067544A1/de not_active Ceased
- 2016-10-20 KR KR1020187014205A patent/KR102242758B1/ko active Active
- 2016-10-20 US US15/769,971 patent/US11303226B2/en active Active
- 2016-10-20 CN CN201680074995.3A patent/CN108463893B/zh active Active
- 2016-10-20 EP EP16797453.4A patent/EP3365926B1/de active Active
- 2016-10-20 ES ES16797453T patent/ES2898507T3/es active Active
-
2018
- 2018-04-17 IL IL258775A patent/IL258775B2/en unknown
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