DE102015013553B4 - Verfahren zur Ansteuerung eines Stellelements - Google Patents

Verfahren zur Ansteuerung eines Stellelements Download PDF

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Publication number
DE102015013553B4
DE102015013553B4 DE102015013553.8A DE102015013553A DE102015013553B4 DE 102015013553 B4 DE102015013553 B4 DE 102015013553B4 DE 102015013553 A DE102015013553 A DE 102015013553A DE 102015013553 B4 DE102015013553 B4 DE 102015013553B4
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DE
Germany
Prior art keywords
length
voltage pulses
domains
actuating element
voltage
Prior art date
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Active
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DE102015013553.8A
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German (de)
English (en)
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DE102015013553A1 (de
Inventor
Harry Marth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physik Instrumente PI Se and Co KG
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Physik Instrumente PI Se and Co KG
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Priority to DE102015013553.8A priority Critical patent/DE102015013553B4/de
Application filed by Physik Instrumente PI Se and Co KG filed Critical Physik Instrumente PI Se and Co KG
Priority to US15/769,971 priority patent/US11303226B2/en
Priority to CN201680074995.3A priority patent/CN108463893B/zh
Priority to EP16797453.4A priority patent/EP3365926B1/de
Priority to KR1020187014205A priority patent/KR102242758B1/ko
Priority to PCT/DE2016/100490 priority patent/WO2017067544A1/de
Priority to JP2018520092A priority patent/JP7018388B2/ja
Priority to ES16797453T priority patent/ES2898507T3/es
Publication of DE102015013553A1 publication Critical patent/DE102015013553A1/de
Application granted granted Critical
Publication of DE102015013553B4 publication Critical patent/DE102015013553B4/de
Priority to IL258775A priority patent/IL258775B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Stepping Motors (AREA)
  • Micromachines (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE102015013553.8A 2015-10-20 2015-10-20 Verfahren zur Ansteuerung eines Stellelements Active DE102015013553B4 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
DE102015013553.8A DE102015013553B4 (de) 2015-10-20 2015-10-20 Verfahren zur Ansteuerung eines Stellelements
CN201680074995.3A CN108463893B (zh) 2015-10-20 2016-10-20 用于控制机电元件的方法
EP16797453.4A EP3365926B1 (de) 2015-10-20 2016-10-20 Verfahren zur ansteuerung eines elektromechanischen elements
KR1020187014205A KR102242758B1 (ko) 2015-10-20 2016-10-20 전기 기계적 소자를 활성시키는 방법
US15/769,971 US11303226B2 (en) 2015-10-20 2016-10-20 Method for activating an electromechanical element
PCT/DE2016/100490 WO2017067544A1 (de) 2015-10-20 2016-10-20 Verfahren zur ansteuerung eines elektromechanischen elements
JP2018520092A JP7018388B2 (ja) 2015-10-20 2016-10-20 電気機械要素を制御する方法
ES16797453T ES2898507T3 (es) 2015-10-20 2016-10-20 Procedimiento para controlar un elemento electromecánico
IL258775A IL258775B2 (en) 2015-10-20 2018-04-17 A method for controlling an electromechanical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102015013553.8A DE102015013553B4 (de) 2015-10-20 2015-10-20 Verfahren zur Ansteuerung eines Stellelements

Publications (2)

Publication Number Publication Date
DE102015013553A1 DE102015013553A1 (de) 2017-04-20
DE102015013553B4 true DE102015013553B4 (de) 2018-03-08

Family

ID=57326138

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102015013553.8A Active DE102015013553B4 (de) 2015-10-20 2015-10-20 Verfahren zur Ansteuerung eines Stellelements

Country Status (9)

Country Link
US (1) US11303226B2 (enExample)
EP (1) EP3365926B1 (enExample)
JP (1) JP7018388B2 (enExample)
KR (1) KR102242758B1 (enExample)
CN (1) CN108463893B (enExample)
DE (1) DE102015013553B4 (enExample)
ES (1) ES2898507T3 (enExample)
IL (1) IL258775B2 (enExample)
WO (1) WO2017067544A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023208848A1 (de) 2022-11-07 2024-05-08 Carl Zeiss Smt Gmbh Beleuchtungssystem für eine lithographieanlage, lithographieanlage und verfahren zum betreiben eines beleuchtungssystems einer lithographieanlage

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113826046A (zh) 2019-04-23 2021-12-21 Asml荷兰有限公司 载物台、工作台设备、光刻设备以及将物体装载到载物台或工作台设备上的方法
US11456330B2 (en) * 2019-08-07 2022-09-27 Taiwan Semiconductor Manufacturing Company, Ltd. Fatigue-free bipolar loop treatment to reduce imprint effect in piezoelectric device
KR20220000600A (ko) 2020-06-26 2022-01-04 엘지이노텍 주식회사 초음파 리니어 모터
DE102022131394A1 (de) 2022-11-28 2024-05-29 Pi Ceramic Gmbh Aktuatorvorrichtung
DE102023126711A1 (de) * 2023-09-29 2025-04-03 Physik Instrumente (PI) GmbH & Co KG Aktoreinheit, Antriebsvorrichtung und Antriebssystem
DE102024118794B4 (de) * 2024-07-02 2026-01-22 Physik Instrumente (PI) SE & Co KG Verfahren zum Betreiben eines Aktuators, Aktuator und Stellvorrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10028335A1 (de) 2000-06-08 2002-02-14 Epcos Ag Verfahren zum Polarisieren einer Piezokeramik, Verfahren zur Herstellung eines Piezo-Aktors und Verwendung des Piezo-Aktors
DE102004009140A1 (de) 2004-02-25 2005-09-22 Siemens Ag Verfahren und Vorrichtung zur Polarisierung eines piezoelektrischen Aktors
DE102004021955A1 (de) 2004-05-04 2005-12-01 Siemens Ag Verfahren zum Polarisieren einer Piezokeramik
US8138658B2 (en) 2008-01-28 2012-03-20 Technion Research & Development Foundation Ltd. Piezoelectric-ferroelectric actuator device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611278A (ja) * 1984-06-11 1986-01-07 Nippon Telegr & Teleph Corp <Ntt> 圧電アクチユエ−タ
JP3114434B2 (ja) * 1993-06-30 2000-12-04 ブラザー工業株式会社 圧電アクチュエータの駆動方法
JP4374551B2 (ja) * 2001-09-11 2009-12-02 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置、及び液体吐出ヘッドの駆動方法
JP2008085194A (ja) * 2006-09-28 2008-04-10 Univ Of Tokyo 強誘電体デバイス
JP5371329B2 (ja) * 2008-08-29 2013-12-18 富士フイルム株式会社 圧電素子、および液体吐出装置
JP6145992B2 (ja) * 2012-03-26 2017-06-14 セイコーエプソン株式会社 液体噴射装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10028335A1 (de) 2000-06-08 2002-02-14 Epcos Ag Verfahren zum Polarisieren einer Piezokeramik, Verfahren zur Herstellung eines Piezo-Aktors und Verwendung des Piezo-Aktors
DE102004009140A1 (de) 2004-02-25 2005-09-22 Siemens Ag Verfahren und Vorrichtung zur Polarisierung eines piezoelektrischen Aktors
DE102004021955A1 (de) 2004-05-04 2005-12-01 Siemens Ag Verfahren zum Polarisieren einer Piezokeramik
US8138658B2 (en) 2008-01-28 2012-03-20 Technion Research & Development Foundation Ltd. Piezoelectric-ferroelectric actuator device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KUSHNIR, U.; RABINOVITCH, O.: Advanced piezoelectric-ferroelectric stack actuator. In: Sensors and Actuators A 150 (2009), 102-109

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023208848A1 (de) 2022-11-07 2024-05-08 Carl Zeiss Smt Gmbh Beleuchtungssystem für eine lithographieanlage, lithographieanlage und verfahren zum betreiben eines beleuchtungssystems einer lithographieanlage

Also Published As

Publication number Publication date
DE102015013553A1 (de) 2017-04-20
JP2018535546A (ja) 2018-11-29
EP3365926A1 (de) 2018-08-29
KR20180074730A (ko) 2018-07-03
EP3365926B1 (de) 2021-10-20
KR102242758B1 (ko) 2021-04-22
CN108463893B (zh) 2022-02-08
US20180316285A1 (en) 2018-11-01
CN108463893A (zh) 2018-08-28
WO2017067544A1 (de) 2017-04-27
ES2898507T3 (es) 2022-03-07
US11303226B2 (en) 2022-04-12
IL258775A (en) 2018-06-28
JP7018388B2 (ja) 2022-02-10
IL258775B2 (en) 2023-06-01

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R018 Grant decision by examination section/examining division
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Free format text: PREVIOUS MAIN CLASS: H01L0041090000

Ipc: H10N0030200000