CN108463893B - 用于控制机电元件的方法 - Google Patents

用于控制机电元件的方法 Download PDF

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Publication number
CN108463893B
CN108463893B CN201680074995.3A CN201680074995A CN108463893B CN 108463893 B CN108463893 B CN 108463893B CN 201680074995 A CN201680074995 A CN 201680074995A CN 108463893 B CN108463893 B CN 108463893B
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length
electromechanical element
voltage pulse
voltage
polarization
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Chinese (zh)
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CN108463893A (zh
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哈利·马斯
乔纳斯·雷瑟尔
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Physik Instrumente PI GmbH and Co KG
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Physik Instrumente PI GmbH and Co KG
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Stepping Motors (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)
CN201680074995.3A 2015-10-20 2016-10-20 用于控制机电元件的方法 Active CN108463893B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015013553.8 2015-10-20
DE102015013553.8A DE102015013553B4 (de) 2015-10-20 2015-10-20 Verfahren zur Ansteuerung eines Stellelements
PCT/DE2016/100490 WO2017067544A1 (de) 2015-10-20 2016-10-20 Verfahren zur ansteuerung eines elektromechanischen elements

Publications (2)

Publication Number Publication Date
CN108463893A CN108463893A (zh) 2018-08-28
CN108463893B true CN108463893B (zh) 2022-02-08

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CN201680074995.3A Active CN108463893B (zh) 2015-10-20 2016-10-20 用于控制机电元件的方法

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US (1) US11303226B2 (enExample)
EP (1) EP3365926B1 (enExample)
JP (1) JP7018388B2 (enExample)
KR (1) KR102242758B1 (enExample)
CN (1) CN108463893B (enExample)
DE (1) DE102015013553B4 (enExample)
ES (1) ES2898507T3 (enExample)
IL (1) IL258775B2 (enExample)
WO (1) WO2017067544A1 (enExample)

Families Citing this family (6)

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Publication number Priority date Publication date Assignee Title
NL2025206A (en) 2019-04-23 2020-10-30 Asml Netherlands Bv Object table, a stage apparatus, a lithographic apparatus and a method of loading an object onto an object table or stage apparatus
US11456330B2 (en) * 2019-08-07 2022-09-27 Taiwan Semiconductor Manufacturing Company, Ltd. Fatigue-free bipolar loop treatment to reduce imprint effect in piezoelectric device
KR20220000600A (ko) 2020-06-26 2022-01-04 엘지이노텍 주식회사 초음파 리니어 모터
DE102023208848A1 (de) 2022-11-07 2024-05-08 Carl Zeiss Smt Gmbh Beleuchtungssystem für eine lithographieanlage, lithographieanlage und verfahren zum betreiben eines beleuchtungssystems einer lithographieanlage
DE102022131394A1 (de) 2022-11-28 2024-05-29 Pi Ceramic Gmbh Aktuatorvorrichtung
DE102023126711A1 (de) * 2023-09-29 2025-04-03 Physik Instrumente (PI) GmbH & Co KG Aktoreinheit, Antriebsvorrichtung und Antriebssystem

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611278A (ja) * 1984-06-11 1986-01-07 Nippon Telegr & Teleph Corp <Ntt> 圧電アクチユエ−タ
US8138658B2 (en) * 2008-01-28 2012-03-20 Technion Research & Development Foundation Ltd. Piezoelectric-ferroelectric actuator device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3114434B2 (ja) * 1993-06-30 2000-12-04 ブラザー工業株式会社 圧電アクチュエータの駆動方法
DE10028335B4 (de) 2000-06-08 2004-04-01 Epcos Ag Verfahren zum Polarisieren einer Piezokeramik, Verfahren zur Herstellung eines Piezo-Aktors und Verwendung des Piezo-Aktors
JP4374551B2 (ja) * 2001-09-11 2009-12-02 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置、及び液体吐出ヘッドの駆動方法
DE102004009140B4 (de) 2004-02-25 2006-10-05 Siemens Ag Verfahren und Vorrichtung zur Polarisierung eines piezoelektrischen Aktors
DE102004021955A1 (de) 2004-05-04 2005-12-01 Siemens Ag Verfahren zum Polarisieren einer Piezokeramik
JP2008085194A (ja) * 2006-09-28 2008-04-10 Univ Of Tokyo 強誘電体デバイス
JP5371329B2 (ja) * 2008-08-29 2013-12-18 富士フイルム株式会社 圧電素子、および液体吐出装置
JP6145992B2 (ja) * 2012-03-26 2017-06-14 セイコーエプソン株式会社 液体噴射装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611278A (ja) * 1984-06-11 1986-01-07 Nippon Telegr & Teleph Corp <Ntt> 圧電アクチユエ−タ
US8138658B2 (en) * 2008-01-28 2012-03-20 Technion Research & Development Foundation Ltd. Piezoelectric-ferroelectric actuator device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Advanced piezoelectric-ferroelectric stack actuator;Uri Kushnir等;《Sensors and Actuators A：Physical》;20081224;第103页左栏-104页左栏，图1-4 *

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Publication number Publication date
EP3365926A1 (de) 2018-08-29
KR102242758B1 (ko) 2021-04-22
IL258775A (en) 2018-06-28
CN108463893A (zh) 2018-08-28
US11303226B2 (en) 2022-04-12
JP7018388B2 (ja) 2022-02-10
US20180316285A1 (en) 2018-11-01
IL258775B2 (en) 2023-06-01
WO2017067544A1 (de) 2017-04-27
KR20180074730A (ko) 2018-07-03
DE102015013553B4 (de) 2018-03-08
ES2898507T3 (es) 2022-03-07
DE102015013553A1 (de) 2017-04-20
EP3365926B1 (de) 2021-10-20
JP2018535546A (ja) 2018-11-29

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