ES2898507T3 - Procedimiento para controlar un elemento electromecánico - Google Patents

Procedimiento para controlar un elemento electromecánico Download PDF

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Publication number
ES2898507T3
ES2898507T3 ES16797453T ES16797453T ES2898507T3 ES 2898507 T3 ES2898507 T3 ES 2898507T3 ES 16797453 T ES16797453 T ES 16797453T ES 16797453 T ES16797453 T ES 16797453T ES 2898507 T3 ES2898507 T3 ES 2898507T3
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ES
Spain
Prior art keywords
expansion
voltage pulse
section
electromechanical element
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES16797453T
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English (en)
Spanish (es)
Inventor
Harry Marth
Jonas Reiser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physik Instrumente PI GmbH and Co KG
Original Assignee
Physik Instrumente PI GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physik Instrumente PI GmbH and Co KG filed Critical Physik Instrumente PI GmbH and Co KG
Application granted granted Critical
Publication of ES2898507T3 publication Critical patent/ES2898507T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Control Of Stepping Motors (AREA)
  • Micromachines (AREA)
ES16797453T 2015-10-20 2016-10-20 Procedimiento para controlar un elemento electromecánico Active ES2898507T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015013553.8A DE102015013553B4 (de) 2015-10-20 2015-10-20 Verfahren zur Ansteuerung eines Stellelements
PCT/DE2016/100490 WO2017067544A1 (de) 2015-10-20 2016-10-20 Verfahren zur ansteuerung eines elektromechanischen elements

Publications (1)

Publication Number Publication Date
ES2898507T3 true ES2898507T3 (es) 2022-03-07

Family

ID=57326138

Family Applications (1)

Application Number Title Priority Date Filing Date
ES16797453T Active ES2898507T3 (es) 2015-10-20 2016-10-20 Procedimiento para controlar un elemento electromecánico

Country Status (9)

Country Link
US (1) US11303226B2 (enExample)
EP (1) EP3365926B1 (enExample)
JP (1) JP7018388B2 (enExample)
KR (1) KR102242758B1 (enExample)
CN (1) CN108463893B (enExample)
DE (1) DE102015013553B4 (enExample)
ES (1) ES2898507T3 (enExample)
IL (1) IL258775B2 (enExample)
WO (1) WO2017067544A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020216555A1 (en) 2019-04-23 2020-10-29 Asml Netherlands B.V. Object table, a stage apparatus, a lithographic apparatus and a method of loading an object onto an object table or stage apparatus
US11456330B2 (en) 2019-08-07 2022-09-27 Taiwan Semiconductor Manufacturing Company, Ltd. Fatigue-free bipolar loop treatment to reduce imprint effect in piezoelectric device
KR20220000600A (ko) 2020-06-26 2022-01-04 엘지이노텍 주식회사 초음파 리니어 모터
DE102023208848A1 (de) 2022-11-07 2024-05-08 Carl Zeiss Smt Gmbh Beleuchtungssystem für eine lithographieanlage, lithographieanlage und verfahren zum betreiben eines beleuchtungssystems einer lithographieanlage
DE102022131394A1 (de) 2022-11-28 2024-05-29 Pi Ceramic Gmbh Aktuatorvorrichtung
DE102023126711A1 (de) 2023-09-29 2025-04-03 Physik Instrumente (PI) GmbH & Co KG Aktoreinheit, Antriebsvorrichtung und Antriebssystem

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611278A (ja) 1984-06-11 1986-01-07 Nippon Telegr & Teleph Corp <Ntt> 圧電アクチユエ−タ
JP3114434B2 (ja) * 1993-06-30 2000-12-04 ブラザー工業株式会社 圧電アクチュエータの駆動方法
DE10028335B4 (de) * 2000-06-08 2004-04-01 Epcos Ag Verfahren zum Polarisieren einer Piezokeramik, Verfahren zur Herstellung eines Piezo-Aktors und Verwendung des Piezo-Aktors
JP4374551B2 (ja) * 2001-09-11 2009-12-02 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置、及び液体吐出ヘッドの駆動方法
DE102004009140B4 (de) * 2004-02-25 2006-10-05 Siemens Ag Verfahren und Vorrichtung zur Polarisierung eines piezoelektrischen Aktors
DE102004021955A1 (de) * 2004-05-04 2005-12-01 Siemens Ag Verfahren zum Polarisieren einer Piezokeramik
JP2008085194A (ja) * 2006-09-28 2008-04-10 Univ Of Tokyo 強誘電体デバイス
US8138658B2 (en) 2008-01-28 2012-03-20 Technion Research & Development Foundation Ltd. Piezoelectric-ferroelectric actuator device
JP5371329B2 (ja) * 2008-08-29 2013-12-18 富士フイルム株式会社 圧電素子、および液体吐出装置
JP6145992B2 (ja) * 2012-03-26 2017-06-14 セイコーエプソン株式会社 液体噴射装置

Also Published As

Publication number Publication date
EP3365926A1 (de) 2018-08-29
DE102015013553B4 (de) 2018-03-08
CN108463893B (zh) 2022-02-08
US20180316285A1 (en) 2018-11-01
US11303226B2 (en) 2022-04-12
JP7018388B2 (ja) 2022-02-10
EP3365926B1 (de) 2021-10-20
WO2017067544A1 (de) 2017-04-27
KR20180074730A (ko) 2018-07-03
KR102242758B1 (ko) 2021-04-22
IL258775A (en) 2018-06-28
JP2018535546A (ja) 2018-11-29
CN108463893A (zh) 2018-08-28
DE102015013553A1 (de) 2017-04-20
IL258775B2 (en) 2023-06-01

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