KR102242758B1 - 전기 기계적 소자를 활성시키는 방법 - Google Patents

전기 기계적 소자를 활성시키는 방법 Download PDF

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KR102242758B1
KR102242758B1 KR1020187014205A KR20187014205A KR102242758B1 KR 102242758 B1 KR102242758 B1 KR 102242758B1 KR 1020187014205 A KR1020187014205 A KR 1020187014205A KR 20187014205 A KR20187014205 A KR 20187014205A KR 102242758 B1 KR102242758 B1 KR 102242758B1
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extension
voltage
voltage pulse
electromechanical element
section
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KR20180074730A (ko
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해리 마쓰
조나스 라이저
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피직 인스트루멘테 (페이) 게엠베하 운트 코. 카게
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H01L41/042—
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
    • H01L41/047—
    • H01L41/09—
    • H01L41/18—
    • H01L41/257—
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)
  • Control Of Stepping Motors (AREA)
KR1020187014205A 2015-10-20 2016-10-20 전기 기계적 소자를 활성시키는 방법 Active KR102242758B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015013553.8 2015-10-20
DE102015013553.8A DE102015013553B4 (de) 2015-10-20 2015-10-20 Verfahren zur Ansteuerung eines Stellelements
PCT/DE2016/100490 WO2017067544A1 (de) 2015-10-20 2016-10-20 Verfahren zur ansteuerung eines elektromechanischen elements

Publications (2)

Publication Number Publication Date
KR20180074730A KR20180074730A (ko) 2018-07-03
KR102242758B1 true KR102242758B1 (ko) 2021-04-22

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US (1) US11303226B2 (enExample)
EP (1) EP3365926B1 (enExample)
JP (1) JP7018388B2 (enExample)
KR (1) KR102242758B1 (enExample)
CN (1) CN108463893B (enExample)
DE (1) DE102015013553B4 (enExample)
ES (1) ES2898507T3 (enExample)
IL (1) IL258775B2 (enExample)
WO (1) WO2017067544A1 (enExample)

Families Citing this family (6)

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Publication number Priority date Publication date Assignee Title
WO2020216555A1 (en) 2019-04-23 2020-10-29 Asml Netherlands B.V. Object table, a stage apparatus, a lithographic apparatus and a method of loading an object onto an object table or stage apparatus
US11456330B2 (en) 2019-08-07 2022-09-27 Taiwan Semiconductor Manufacturing Company, Ltd. Fatigue-free bipolar loop treatment to reduce imprint effect in piezoelectric device
KR20220000600A (ko) 2020-06-26 2022-01-04 엘지이노텍 주식회사 초음파 리니어 모터
DE102023208848A1 (de) 2022-11-07 2024-05-08 Carl Zeiss Smt Gmbh Beleuchtungssystem für eine lithographieanlage, lithographieanlage und verfahren zum betreiben eines beleuchtungssystems einer lithographieanlage
DE102022131394A1 (de) 2022-11-28 2024-05-29 Pi Ceramic Gmbh Aktuatorvorrichtung
DE102023126711A1 (de) 2023-09-29 2025-04-03 Physik Instrumente (PI) GmbH & Co KG Aktoreinheit, Antriebsvorrichtung und Antriebssystem

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JPS611278A (ja) 1984-06-11 1986-01-07 Nippon Telegr & Teleph Corp <Ntt> 圧電アクチユエ−タ
JP3114434B2 (ja) * 1993-06-30 2000-12-04 ブラザー工業株式会社 圧電アクチュエータの駆動方法
DE10028335B4 (de) 2000-06-08 2004-04-01 Epcos Ag Verfahren zum Polarisieren einer Piezokeramik, Verfahren zur Herstellung eines Piezo-Aktors und Verwendung des Piezo-Aktors
JP4374551B2 (ja) 2001-09-11 2009-12-02 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置、及び液体吐出ヘッドの駆動方法
DE102004009140B4 (de) 2004-02-25 2006-10-05 Siemens Ag Verfahren und Vorrichtung zur Polarisierung eines piezoelektrischen Aktors
DE102004021955A1 (de) 2004-05-04 2005-12-01 Siemens Ag Verfahren zum Polarisieren einer Piezokeramik
JP2008085194A (ja) 2006-09-28 2008-04-10 Univ Of Tokyo 強誘電体デバイス
WO2009095911A1 (en) 2008-01-28 2009-08-06 Technion Research & Development Foundation Ltd. Piezoelectric-ferroelectric actuator device
JP5371329B2 (ja) 2008-08-29 2013-12-18 富士フイルム株式会社 圧電素子、および液体吐出装置
JP6145992B2 (ja) 2012-03-26 2017-06-14 セイコーエプソン株式会社 液体噴射装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
인용발명 1: 독일 특허공보 DE102004021955(2005.12.01.) 1부.*
인용발명 2: Uri Kushnir, Oded Rabinovitch. Advanced piezoelectric-ferroelectric stack actuator. 2009년, Sensors and Actuators A 150(p 102-109) 1부.*
인용발명 3: Y Kadota and T Morita. Fatigue and retention properties of shape*

Also Published As

Publication number Publication date
CN108463893A (zh) 2018-08-28
DE102015013553A1 (de) 2017-04-20
EP3365926B1 (de) 2021-10-20
ES2898507T3 (es) 2022-03-07
IL258775B2 (en) 2023-06-01
US11303226B2 (en) 2022-04-12
WO2017067544A1 (de) 2017-04-27
KR20180074730A (ko) 2018-07-03
IL258775A (en) 2018-06-28
JP2018535546A (ja) 2018-11-29
DE102015013553B4 (de) 2018-03-08
EP3365926A1 (de) 2018-08-29
US20180316285A1 (en) 2018-11-01
JP7018388B2 (ja) 2022-02-10
CN108463893B (zh) 2022-02-08

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