EP2929575A1 - Verfahren zur herstellung eines elektronischen bauteils - Google Patents
Verfahren zur herstellung eines elektronischen bauteilsInfo
- Publication number
- EP2929575A1 EP2929575A1 EP13801498.0A EP13801498A EP2929575A1 EP 2929575 A1 EP2929575 A1 EP 2929575A1 EP 13801498 A EP13801498 A EP 13801498A EP 2929575 A1 EP2929575 A1 EP 2929575A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- field
- electric
- electronic component
- polarization
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 230000010287 polarization Effects 0.000 claims abstract description 110
- 238000000034 method Methods 0.000 claims abstract description 47
- 230000005684 electric field Effects 0.000 claims description 31
- 230000008569 process Effects 0.000 claims description 6
- 230000004044 response Effects 0.000 claims description 3
- 230000002123 temporal effect Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 description 23
- 230000008901 benefit Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000011017 operating method Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000010349 pulsation Effects 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000028161 membrane depolarization Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
Definitions
- the present invention relates to a method for producing an electronic component
- An object to be solved is to provide an improved method for producing an electronic component.
- a proposed method comprises providing a piezoelectric body provided with electrodes and applying a first electrical
- the method comprises completing the
- the piezoelectric body is preferably electrically conductively connected to the electrodes.
- piezoelectric body in each case one electrode.
- the electrodes are external electrodes.
- an electrical operating field can be applied to the piezoelectric main body via the electrodes.
- the electrical operating field is that electric field meant, which is when creating an electrical
- the electrical operating field can likewise be present between inner electrode layers of the electronic component, which are each connected to one of the outer electrodes.
- piezoelectric body in the operation of the electronic component is substantially determined by a contribution of the piezoelectric effect, i. the deformation of the
- the piezoelectric body can be a piezoelectric
- Each individual grain of the piezoelectric ceramic may have one or more
- Domain flip around "not 180 °" means a change in the polarization direction of the respective ferroelectric domain by an angle other than 180 ° when the electric field is applied.
- the domain flip around "not 180 °" contributes at least in piezoelectric ceramics based on lead zirconate titanate (PZT) at room temperature over 80% to the total deflection.
- PZT lead zirconate titanate
- the deflection of a piezoelectric ceramic can be improved by preferentially promoting the domain flip around "not 180 °."
- the domain flip around "not 180 °" is influenced, for example, by the
- an electronic component can be promoted. Consequently, an electronic component can be manufactured that has a greater deflection in operation compared to a component of the prior art or easier with comparable deflection
- the piezoelectric body can be further polarized with advantage in such a way that the application of a mechanical force during polarization, can be dispensed with, without that in
- piezoelectric body requires only an electrical voltage generator.
- the first and the second electric polarization field are selected such that the achievable deflection of the electronic component in operation compared with an electronic
- Polarization method of the prior art and / or without Applying a mechanical force has been polarized by up to 75%.
- the piezoelectric body is preferably
- the piezoelectric body in this case may be in a state immediately after sintering.
- the piezoelectric body can insofar no or approximately no spontaneous
- the piezoelectric ceramic is polarized, i. there is a spontaneous one
- the first electric polarization field can be aligned parallel to the electrical operating field.
- the second electric polarizing field may be anti-parallel to
- the amount of the first electric polarizing field is less than 4 kV / mm. In a preferred embodiment of the method, the amount of the first electric polarizing field is greater than 1 kV / mm.
- the amount of the first electric polarizing field is between 1 and 4 kV / mm.
- Deflection of the electronic component can be achieved.
- the amount of the first electric polarizing field is greater than the amount of the second electric polarizing field.
- Main body in response to the applied electric field of a hysteresis curve, which is an electrical
- Coercive field strength determined wherein the amount of the second electric polarization field is chosen smaller than the amount of the electric KoerzitivfeidGood.
- the electric coercive field strength here preferably relates to that electric field strength in which a deflection of the first electric polarization field but not yet with the second electric polarization field
- Deflection can be achieved in the positive direction of the electronic component, when the electric field during operation or the electrical operating voltage is applied in the positive direction. This is based on the hysteresis curve (so-called.
- the first and / or the second electric polarization field has a temporal field profile with one or more
- polarization effect can improve by up to 20% over static or unpulsed polarization.
- the amount of an electric polarization field may be the magnitude of the maximum of a field pulse.
- the piezoelectric body has a plurality of
- piezoelectric layers and is provided with a plurality of internal electrode layers, wherein the electrodes form external electrodes, which are arranged outside the piezoelectric main body, and wherein each
- the piezoelectric body has a ceramic, for example, containing lead zirconate titanate.
- the present application further comprises a
- the method of operation includes applying a mechanical force to the electronic component.
- This device may, for example, a valve, in particular a
- an electrical operating field is applied between the electrodes to the electronic component, wherein the electrical operating voltage is polarized according to the first polarity direction.
- an electronic component is further specified after the above
- the number of ferroelectric domains whose direction of polarization changes by an angle different from 180 ° when an electric field is applied compared with an electronic component of the prior art, which usually polarizes and / or without applying a mechanical force has been raised.
- all features disclosed for the method are also disclosed for the electronic component and / or the operating method and vice versa.
- FIG. 1 shows a first side view on the basis of a schematic side view
- FIG. 2 shows a simplified temporal field profile
- FIG. 3 shows a schematic view of ferroelectric
- FIG. 4 shows a hysteresis curve (butterfly curve) of a polarized piezoelectric ceramic.
- FIG. 5 shows simplified alternative embodiments of FIG
- time field courses of electric polarization fields each comprising a first and a second electric polarization field.
- FIG. 1 shows the provision of a piezoelectric
- the piezoelectric basic body 1 is provided with two outer electrodes 2 and inner electrode layers 3.
- the two outer electrodes 2 are preferably mechanically connected to the piezoelectric main body 1 on opposite sides of the piezoelectric main body 1
- piezoelectric body preferably comprises a piezoelectric ceramic, for example of lead zirconate titanate (PZT) or barium titanate.
- PZT lead zirconate titanate
- barium titanate barium titanate
- Inner electrode layers 3 may, for example, the
- FIG. 2 shows a schematic representation of the time sequence of electrical polarization fields.
- a first electric polarization field E1 and then a second electric polarization field E2 between the electrodes 2 are first of all timed to the piezoelectric one
- the first and the second electric polarization field El and E2 are, as long as they each lie between the electrodes 2, respectively constant or represented as a rectangular pulse.
- the first and the second electric polarization field El and E2 are, as long as they each lie between the electrodes 2, respectively constant or represented as a rectangular pulse.
- the amount of the first electric polarizing field El is preferably between 1 and 4 kV / mm. With even greater electric field strengths, there is a risk of an electrical flashover, in particular in the production of electronic components having a multiplicity of piezoelectric layers. For smaller electric Feilvesn the piezoelectric body 1, however, would be insufficiently polarized. Conveniently, a corresponding electronic component is also operated with an electrical operating field which is smaller than the first electric polarizing field, that is, for example, less than 4 kV / mm. Ferroelectric domains are formed in a piezoelectric ceramic, for example, upon cooling from the sintering temperature to below the Curie temperature. After cooling, the ferroelectric domains in the piezoelectric ceramic are randomly oriented so that the total polarization is low or zero.
- FIG. 3 shows a schematic representation of
- a polarization state of the piezoelectric main body 1 can preferably be achieved, in which the domain flip can be promoted by "not 180 °" to operate in the electronic
- Component 100 to achieve the highest possible deflection.
- FIG. 3 shows the rectangles ferroelectric domains 4 whose polarization direction P is indicated on the left with the arrow respectively drawn in the ferroelectric domains 4 is.
- the direction of an applied electric field E is shown by the arrows shown on the right outside the ferroelectric domains 4.
- the arrows shown between each of the upper and lower ferroelectric domains 4 indicate an electric field E caused
- FIG. 3b shows a domain flip around "not 180 °", wherein the
- Polarization directions of the lower ferroelectric domains differ by an angle other than 180 °.
- FIG. 4 a shows a hysteresis curve of a piezoelectric ceramic or of the piezoelectric basic body 1.
- the curve K originating in the origin of coordinates indicates a curve K
- FIG. 4b shows a hysteresis curve, whose origin 0 for better clarity in the origin of
- piezoelectric body 1 in response to an applied external electric field (in kV / mm) after completion of the polarization process with the first
- Deflection of the piezoelectric body 1 in this case has an electric Koerzitivfeid Center Ek.
- Polarization state for example, the one
- the electrical coercive field intensity corresponds approximately to 1.2 to 1.3 kV / mm, that is approximately approximately the electric field strength at the point B.
- a domain flip-over by 180 ° takes place between points B and C, for example.
- the deflection between the points 0 and B or C and D includes contributions from the actual, so not by Domainumklappung
- the initial state of the polarization from the point 0 to the point N are laid. The closer the
- Ceramic recipe is achievable. Other possibilities include the promotion of grain growth in the piezoelectric
- first electric polarization field is negative and the second electric polarization field is positive.
- This embodiment is particularly useful in the case of a negative electrical operating field.
- the described embodiments apply analogously if a symmetrical butterfly curve is present.
- FIG. 5 shows in simplified form alternative embodiments of time sequences of the first and second electric polarization fields E1 and E2.
- FIG. 5a shows a
- FIG. 5b shows a first and a second electrical
- Polarization field El and E2 each formed by a single triangular pulse 6.
- the second electric polarization field E2 was applied after the first electric polarization field E1 and, furthermore, the magnitude of the first electric polarization field E1 is greater than the magnitude of the second electrical field
- Polarization field El is also positive and the second polarization electric field E2 is negative.
- the ratio of the duration in which the first electric polarization field El is applied to the duration in which the second electric polarizing field E2 is applied may be between 10: 1 and 1:10. Preferably, said ratio is between 2: 1 and 1: 2.
- FIG. 5c shows in each case a chronological sequence of the first electric polarization field E1 and of the second one
- both electric polarization fields El and E2 are respectively pulsed, so that the piezoelectric base body 1 upon application of the first and second electrical
- Polarization field El and E2 is polarized time-varying in each case.
- Polarization field El and E2 are preferably greater than a millisecond, for example 10 milliseconds or greater. Furthermore, the pulse durations of the first and second electric polarization fields are El and E2
- the electric polarization fields and the field pulses of the first and second electric polarization fields may have one or more of the pulse shapes of a rectangular, triangular, trapezoidal and sinusoidal shape.
- a device for applying the mechanical force to the piezoelectric main body and to the electronic component can be provided.
- the invention is not limited by the description with reference to the embodiments. Rather, the includes
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102012111972.4A DE102012111972A1 (de) | 2012-12-07 | 2012-12-07 | Verfahren zur Herstellung eines elektronischen Bauteils |
PCT/EP2013/074599 WO2014086611A1 (de) | 2012-12-07 | 2013-11-25 | Verfahren zur herstellung eines elektronischen bauteils |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2929575A1 true EP2929575A1 (de) | 2015-10-14 |
Family
ID=49724550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP13801498.0A Ceased EP2929575A1 (de) | 2012-12-07 | 2013-11-25 | Verfahren zur herstellung eines elektronischen bauteils |
Country Status (5)
Country | Link |
---|---|
US (1) | US9755138B2 (de) |
EP (1) | EP2929575A1 (de) |
JP (1) | JP2015536580A (de) |
DE (1) | DE102012111972A1 (de) |
WO (1) | WO2014086611A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022011406A (ja) * | 2020-06-30 | 2022-01-17 | セイコーエプソン株式会社 | 圧電素子、液体吐出ヘッド、およびプリンター |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004024122A1 (de) * | 2004-05-14 | 2005-12-08 | Siemens Ag | Verfahren zur Stabilisierung insbesondere der Ruhelänge eines piezoelektrischen Stapelaktors sowie Stapelaktor |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2235055C3 (de) * | 1972-07-17 | 1975-12-11 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zur permanenten Polarisation von piezoelektrischem Material |
JPH0548173A (ja) * | 1991-08-09 | 1993-02-26 | Toyota Motor Corp | 圧電体磁器の製造方法 |
JPH06224486A (ja) * | 1993-01-26 | 1994-08-12 | Toyota Motor Corp | 圧電セラミックスの分極方法 |
US5766340A (en) * | 1997-03-28 | 1998-06-16 | Litton Systems, Inc. | Method for post-poling mobile ion redistribution in lithium niobate |
JP3478227B2 (ja) * | 1999-08-03 | 2003-12-15 | 株式会社村田製作所 | 圧電体の分極方法 |
JP3733861B2 (ja) * | 2001-02-01 | 2006-01-11 | 株式会社村田製作所 | 積層圧電体の分極方法 |
DE10225704A1 (de) * | 2001-06-11 | 2003-01-23 | Denso Corp | Piezoelektrischer Aktuator und Verfahren zu dessen Antrieb |
GB2390479A (en) * | 2002-06-06 | 2004-01-07 | Delphi Tech Inc | Poling method |
DE102004009140B4 (de) * | 2004-02-25 | 2006-10-05 | Siemens Ag | Verfahren und Vorrichtung zur Polarisierung eines piezoelektrischen Aktors |
JP4845879B2 (ja) * | 2005-03-18 | 2011-12-28 | 日本碍子株式会社 | 圧電素子の検査方法、検査装置及び分極処理方法 |
JP2007059525A (ja) * | 2005-08-23 | 2007-03-08 | Fujifilm Corp | 積層型圧電素子及びそれを用いる装置、並びに、積層型圧電素子の製造方法 |
JP5011887B2 (ja) * | 2006-08-22 | 2012-08-29 | Tdk株式会社 | 積層型圧電素子の分極方法 |
US20080239016A1 (en) * | 2007-03-26 | 2008-10-02 | Canon Kabushiki Kaisha | Liquid discharge head and liquid discharge apparatus |
JP5313904B2 (ja) * | 2007-08-27 | 2013-10-09 | 日本碍子株式会社 | 積層型圧電/電歪素子の分極処理方法 |
DE102007047657B3 (de) * | 2007-10-05 | 2009-04-09 | Continental Automotive Gmbh | Verfahren zum Polarisieren eines piezoelektrischen Elements |
EP2682995A4 (de) * | 2011-03-01 | 2014-10-22 | Murata Manufacturing Co | Piezoelektrisches element und piezoelektrische vorrichtung damit |
US20130222453A1 (en) * | 2012-02-23 | 2013-08-29 | Xerox Corporation | Drop generator and poling waveform applied thereto |
JP5756786B2 (ja) * | 2012-09-19 | 2015-07-29 | 富士フイルム株式会社 | 圧電デバイス及びその使用方法 |
-
2012
- 2012-12-07 DE DE102012111972.4A patent/DE102012111972A1/de not_active Ceased
-
2013
- 2013-11-25 WO PCT/EP2013/074599 patent/WO2014086611A1/de active Application Filing
- 2013-11-25 EP EP13801498.0A patent/EP2929575A1/de not_active Ceased
- 2013-11-25 US US14/646,463 patent/US9755138B2/en not_active Expired - Fee Related
- 2013-11-25 JP JP2015545734A patent/JP2015536580A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004024122A1 (de) * | 2004-05-14 | 2005-12-08 | Siemens Ag | Verfahren zur Stabilisierung insbesondere der Ruhelänge eines piezoelektrischen Stapelaktors sowie Stapelaktor |
Also Published As
Publication number | Publication date |
---|---|
US9755138B2 (en) | 2017-09-05 |
JP2015536580A (ja) | 2015-12-21 |
WO2014086611A1 (de) | 2014-06-12 |
US20150318464A1 (en) | 2015-11-05 |
DE102012111972A1 (de) | 2014-06-12 |
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