JP2018533310A5 - - Google Patents
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- JP2018533310A5 JP2018533310A5 JP2018522723A JP2018522723A JP2018533310A5 JP 2018533310 A5 JP2018533310 A5 JP 2018533310A5 JP 2018522723 A JP2018522723 A JP 2018522723A JP 2018522723 A JP2018522723 A JP 2018522723A JP 2018533310 A5 JP2018533310 A5 JP 2018533310A5
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- Japan
- Prior art keywords
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- interface layer
- resonator device
- mems
- Prior art date
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- 239000010410 layer Substances 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 230000009870 specific binding Effects 0.000 claims description 10
- 230000009871 nonspecific binding Effects 0.000 claims description 9
- 239000002094 self assembled monolayer Substances 0.000 claims description 7
- 239000013545 self-assembled monolayer Substances 0.000 claims description 7
- 238000009826 distribution Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 9
- 239000012530 fluid Substances 0.000 claims 3
- 238000000231 atomic layer deposition Methods 0.000 claims 2
- 239000003989 dielectric material Substances 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- -1 Ta 2 O 5 Inorganic materials 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- 239000011230 binding agent Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 229910000510 noble metal Inorganic materials 0.000 claims 1
- 150000001282 organosilanes Chemical class 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 239000010970 precious metal Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 125000003396 thiol group Chemical class [H]S* 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562252402P | 2015-11-06 | 2015-11-06 | |
| US62/252,402 | 2015-11-06 | ||
| PCT/US2016/058745 WO2017078992A1 (en) | 2015-11-06 | 2016-10-26 | Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018533310A JP2018533310A (ja) | 2018-11-08 |
| JP2018533310A5 true JP2018533310A5 (enExample) | 2021-01-14 |
| JP6882280B2 JP6882280B2 (ja) | 2021-06-02 |
Family
ID=57256432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018522723A Active JP6882280B2 (ja) | 2015-11-06 | 2016-10-26 | 音響共振器装置、ならびに気密性および表面機能化を提供する製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10302595B2 (enExample) |
| EP (1) | EP3371583B1 (enExample) |
| JP (1) | JP6882280B2 (enExample) |
| CN (1) | CN108474764B (enExample) |
| WO (1) | WO2017078992A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10352904B2 (en) | 2015-10-26 | 2019-07-16 | Qorvo Us, Inc. | Acoustic resonator devices and methods providing patterned functionalization areas |
| US10371667B2 (en) * | 2015-11-16 | 2019-08-06 | Qorvo Us, Inc. | BAW sensor with passive mixing structures |
| US10267770B2 (en) | 2016-07-27 | 2019-04-23 | Qorvo Us, Inc. | Acoustic resonator devices and methods with noble metal layer for functionalization |
| EP3497439B1 (en) | 2016-08-11 | 2023-12-20 | Qorvo US, Inc. | Acoustic resonator device with controlled placement of functionalization material |
| JP7601791B2 (ja) * | 2019-05-06 | 2024-12-17 | コーボ ユーエス，インコーポレイティド | 音波共振装置 |
| US12445109B2 (en) | 2019-07-31 | 2025-10-14 | QXONIX Inc. | Structures, acoustic wave resonators, layers, devices and systems |
| WO2021021739A1 (en) | 2019-07-31 | 2021-02-04 | QXONIX Inc. | Mass loaded bulk acoustic wave (baw) resonator structures, devices and systems |
| US12451860B2 (en) | 2019-07-31 | 2025-10-21 | QXONIX Inc. | Structures, acoustic wave resonators, devices and systems |
| US12431861B2 (en) | 2019-07-31 | 2025-09-30 | Qxoniix Inc. | Layers, structures, acoustic wave resonators, devices and systems |
| US11401601B2 (en) * | 2019-09-13 | 2022-08-02 | Qorvo Us, Inc. | Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same |
| JP7378723B2 (ja) * | 2019-09-30 | 2023-11-14 | 国立大学法人東北大学 | 弾性波デバイス |
| US12031949B2 (en) * | 2019-11-15 | 2024-07-09 | Qorvo Us, Inc. | Preventing epoxy bleed-out for biosensor devices |
| WO2021127521A1 (en) * | 2019-12-19 | 2021-06-24 | Qorvo Us, Inc. | Resonator structure for mass sensing |
| CN111351848B (zh) * | 2020-03-19 | 2020-10-16 | 山东科技大学 | 一种传感器的制备方法、传感器以及传感器的检测方法 |
| CN114900147B (zh) * | 2022-07-08 | 2022-11-01 | 深圳新声半导体有限公司 | 体声波谐振器及其制造方法 |
Family Cites Families (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU490006A1 (ru) * | 1974-05-15 | 1975-10-30 | Ленинградский электротехнический институт | Ультразвуковой преобразователь |
| US4640756A (en) | 1983-10-25 | 1987-02-03 | The United States Of America As Represented By The United States Department Of Energy | Method of making a piezoelectric shear wave resonator |
| JPH0617897B2 (ja) * | 1985-05-23 | 1994-03-09 | 住友ベ−クライト株式会社 | ガス濃度測定装置 |
| JPH0946793A (ja) * | 1995-07-31 | 1997-02-14 | Taiyo Yuden Co Ltd | 圧電要素及び圧電音響装置 |
| US6320295B1 (en) | 1998-11-18 | 2001-11-20 | Mcgill Robert Andrew | Diamond or diamond like carbon coated chemical sensors and a method of making same |
| JP2001251159A (ja) * | 2000-03-08 | 2001-09-14 | Mitsubishi Electric Corp | 薄膜圧電素子及びその製造方法 |
| JP3984441B2 (ja) * | 2001-07-26 | 2007-10-03 | 松下電器産業株式会社 | 圧電薄膜振動子及びフィルタ |
| JP3908512B2 (ja) * | 2001-11-16 | 2007-04-25 | セイコーインスツル株式会社 | 圧電トランスデューサ及び脈波検出装置 |
| US7989851B2 (en) | 2002-06-06 | 2011-08-02 | Rutgers, The State University Of New Jersey | Multifunctional biosensor based on ZnO nanostructures |
| WO2004017063A2 (de) | 2002-07-19 | 2004-02-26 | Siemens Aktiengesellschaft | Vorrichtung und verfahren zur detektion einer substanz mithilfe eines hochfrequenten piezoakustischen dünnfilmresonators |
| DE10318956A1 (de) * | 2003-04-26 | 2004-11-11 | Kanesho Soil Treatment Bvba | Verfahren und Vorrichtung zum Nachweis von flüchtigen Analyten in Luftproben |
| US7498720B2 (en) * | 2003-10-08 | 2009-03-03 | Koninklijke Philips Electronics N.V. | Bulk acoustic wave sensor |
| US20050148065A1 (en) * | 2003-12-30 | 2005-07-07 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
| US7134319B2 (en) * | 2004-08-12 | 2006-11-14 | Honeywell International Inc. | Acoustic wave sensor with reduced condensation and recovery time |
| US20080254486A1 (en) * | 2004-12-15 | 2008-10-16 | University Of Guelph | Prion Sensors for Diagnosis of Transmissible Spongiform Encephalopathy or for Detection of Prions, and Use Thereof |
| WO2006114829A1 (ja) * | 2005-04-06 | 2006-11-02 | Murata Manufacturing Co., Ltd. | 表面波センサ装置 |
| FI118829B (fi) * | 2005-07-08 | 2008-03-31 | Valtion Teknillinen | Mikromekaaninen sensori, sensoriryhmä ja menetelmä sekä pitkittäisten akustisten aaltojen uusi käyttö |
| CN101180532A (zh) * | 2006-04-20 | 2008-05-14 | 多弗电子股份有限公司 | 用于恶劣环境的涂层以及使用所述涂层的传感器 |
| JP4432990B2 (ja) * | 2007-03-22 | 2010-03-17 | セイコーエプソン株式会社 | センサ及び電子機器 |
| JP2009207075A (ja) * | 2008-02-29 | 2009-09-10 | Tdk Corp | 共振子フィルタの製造方法 |
| CN101246162A (zh) * | 2008-03-12 | 2008-08-20 | 浙江大学 | 利用压电薄膜体声波器件的抗体检测生物芯片 |
| US8448494B2 (en) | 2008-12-30 | 2013-05-28 | Stmicroelectronics S.R.L. | Integrated electronic microbalance plus chemical sensor |
| FI20096201A0 (fi) * | 2009-11-19 | 2009-11-19 | Valtion Teknillinen | Massa-aaltoresonaattori ja menetelmä sen valmistamiseksi |
| US20110121916A1 (en) * | 2009-11-24 | 2011-05-26 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Hybrid bulk acoustic wave resonator |
| DK2630479T3 (da) | 2010-10-20 | 2020-07-20 | Qorvo Us Inc | Anordning og fremgangsmåde til måling af bindingskinetik og koncentration med en resonanssensor |
| US8698569B2 (en) * | 2011-02-21 | 2014-04-15 | Panasonic Corporation | MEMS resonator |
| US8896395B2 (en) * | 2011-09-14 | 2014-11-25 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having multiple lateral features |
| CN102608172A (zh) * | 2012-03-12 | 2012-07-25 | 山东科技大学 | 具有直流电极的薄膜体声波谐振生化传感器 |
| CN102778509A (zh) * | 2012-08-17 | 2012-11-14 | 天津理工大学 | 一种声表面波气体传感器基片 |
| CN104034798A (zh) * | 2013-03-07 | 2014-09-10 | 浙江工商大学 | 细胞悬液浓度检测系统及其检测方法 |
| CN103454345B (zh) * | 2013-08-20 | 2016-01-13 | 西安交通大学 | 基于cmut的海洋生化物质监测传感器及其制备与测量方法 |
| JP6284076B2 (ja) * | 2013-11-22 | 2018-02-28 | 国立大学法人豊橋技術科学大学 | 物理・化学センサおよび特定物質の測定方法 |
| US9910015B2 (en) | 2014-04-14 | 2018-03-06 | Texas Instruments Incorporated | Sensor array chip with piezoelectric transducer including inkjet forming method |
| CN104330470B (zh) * | 2014-09-30 | 2018-04-10 | 成都柏森松传感技术有限公司 | 基于saw传感器的检测装置 |
| CN105157935A (zh) * | 2015-08-09 | 2015-12-16 | 安徽普为智能科技有限责任公司 | 一种锂电池气密均匀性的检测方法 |
| WO2017066448A1 (en) | 2015-10-14 | 2017-04-20 | Qorvo Us, Inc. | Deposition system for growth of inclined c-axis piezoelectric material structures |
| US10352904B2 (en) | 2015-10-26 | 2019-07-16 | Qorvo Us, Inc. | Acoustic resonator devices and methods providing patterned functionalization areas |
| US10267770B2 (en) | 2016-07-27 | 2019-04-23 | Qorvo Us, Inc. | Acoustic resonator devices and methods with noble metal layer for functionalization |
| EP3497439B1 (en) | 2016-08-11 | 2023-12-20 | Qorvo US, Inc. | Acoustic resonator device with controlled placement of functionalization material |
-
2016
- 2016-10-26 JP JP2018522723A patent/JP6882280B2/ja active Active
- 2016-10-26 US US15/334,528 patent/US10302595B2/en active Active
- 2016-10-26 CN CN201680078230.7A patent/CN108474764B/zh active Active
- 2016-10-26 WO PCT/US2016/058745 patent/WO2017078992A1/en not_active Ceased
- 2016-10-26 EP EP16794124.4A patent/EP3371583B1/en active Active
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