CN108474764B - 声学谐振器设备和提供气密性及表面功能化的制造方法 - Google Patents

声学谐振器设备和提供气密性及表面功能化的制造方法 Download PDF

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CN108474764B
CN108474764B CN201680078230.7A CN201680078230A CN108474764B CN 108474764 B CN108474764 B CN 108474764B CN 201680078230 A CN201680078230 A CN 201680078230A CN 108474764 B CN108474764 B CN 108474764B
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resonator device
mems resonator
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acoustic wave
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CN108474764A (zh
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J.贝尔西克
R.莫尔顿
M.赖德
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Qorvo US Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/012—Phase angle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/015—Attenuation, scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors

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  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
CN201680078230.7A 2015-11-06 2016-10-26 声学谐振器设备和提供气密性及表面功能化的制造方法 Active CN108474764B (zh)

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US201562252402P 2015-11-06 2015-11-06
US62/252402 2015-11-06
PCT/US2016/058745 WO2017078992A1 (en) 2015-11-06 2016-10-26 Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization

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US (1) US10302595B2 (enExample)
EP (1) EP3371583B1 (enExample)
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WO (1) WO2017078992A1 (enExample)

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US10352904B2 (en) 2015-10-26 2019-07-16 Qorvo Us, Inc. Acoustic resonator devices and methods providing patterned functionalization areas
US10371667B2 (en) * 2015-11-16 2019-08-06 Qorvo Us, Inc. BAW sensor with passive mixing structures
US10267770B2 (en) 2016-07-27 2019-04-23 Qorvo Us, Inc. Acoustic resonator devices and methods with noble metal layer for functionalization
EP3497439B1 (en) 2016-08-11 2023-12-20 Qorvo US, Inc. Acoustic resonator device with controlled placement of functionalization material
CN113812089A (zh) 2019-05-06 2021-12-17 Qorvo生物技术有限公司 声谐振器装置
US12431861B2 (en) 2019-07-31 2025-09-30 Qxoniix Inc. Layers, structures, acoustic wave resonators, devices and systems
US12445109B2 (en) 2019-07-31 2025-10-14 QXONIX Inc. Structures, acoustic wave resonators, layers, devices and systems
US12451860B2 (en) 2019-07-31 2025-10-21 QXONIX Inc. Structures, acoustic wave resonators, devices and systems
WO2021021748A1 (en) 2019-07-31 2021-02-04 QXONIX Inc. Structures, acoustic wave resonators, devices and systems
US11401601B2 (en) * 2019-09-13 2022-08-02 Qorvo Us, Inc. Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same
JP7378723B2 (ja) * 2019-09-30 2023-11-14 国立大学法人東北大学 弾性波デバイス
EP4058802A4 (en) * 2019-11-15 2023-12-20 Qorvo US, Inc. PREVENTING EPOXY RESIN BLEEDING IN BIOSENSOR DEVICES
CN114868015A (zh) * 2019-12-19 2022-08-05 Qorvo美国公司 用于质量传感的谐振器结构
CN111351848B (zh) * 2020-03-19 2020-10-16 山东科技大学 一种传感器的制备方法、传感器以及传感器的检测方法
CN114900147B (zh) * 2022-07-08 2022-11-01 深圳新声半导体有限公司 体声波谐振器及其制造方法

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EP3371583A1 (en) 2018-09-12
US20170134001A1 (en) 2017-05-11
WO2017078992A1 (en) 2017-05-11
JP6882280B2 (ja) 2021-06-02
US10302595B2 (en) 2019-05-28
CN108474764A (zh) 2018-08-31
JP2018533310A (ja) 2018-11-08
EP3371583B1 (en) 2024-08-14

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