ATE445156T1 - Beschichtung für raue umgebungen und sensoren unter verwendung derselben - Google Patents
Beschichtung für raue umgebungen und sensoren unter verwendung derselbenInfo
- Publication number
- ATE445156T1 ATE445156T1 AT06751299T AT06751299T ATE445156T1 AT E445156 T1 ATE445156 T1 AT E445156T1 AT 06751299 T AT06751299 T AT 06751299T AT 06751299 T AT06751299 T AT 06751299T AT E445156 T1 ATE445156 T1 AT E445156T1
- Authority
- AT
- Austria
- Prior art keywords
- coating
- harsh environments
- sensors
- awd
- same
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title abstract 5
- 238000000576 coating method Methods 0.000 title abstract 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- 238000005299 abrasion Methods 0.000 abstract 1
- 230000004888 barrier function Effects 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 239000010955 niobium Substances 0.000 abstract 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
Landscapes
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Pinball Game Machines (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2006/015537 WO2007123539A1 (en) | 2006-04-20 | 2006-04-20 | Coating for harsh environments and sensors using same |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE445156T1 true ATE445156T1 (de) | 2009-10-15 |
Family
ID=37640271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT06751299T ATE445156T1 (de) | 2006-04-20 | 2006-04-20 | Beschichtung für raue umgebungen und sensoren unter verwendung derselben |
Country Status (8)
Country | Link |
---|---|
US (2) | US7800285B2 (de) |
EP (1) | EP1891429B1 (de) |
JP (1) | JP4913863B2 (de) |
CN (1) | CN101180532A (de) |
AT (1) | ATE445156T1 (de) |
CH (1) | CH698809B1 (de) |
DE (1) | DE602006009646D1 (de) |
WO (1) | WO2007123539A1 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007036473A1 (de) * | 2007-08-01 | 2009-02-05 | Testo Ag | Vorrichtung zum Messen des Zustands eines Messguts, insbesondere von Ölen oder Fetten |
JP5314963B2 (ja) * | 2008-08-12 | 2013-10-16 | 富士フイルム株式会社 | 積層体、圧電素子、および液体吐出装置 |
US7936110B2 (en) | 2009-03-14 | 2011-05-03 | Delaware Capital Formation, Inc. | Lateral excitation of pure shear modes |
US8664836B1 (en) * | 2009-09-18 | 2014-03-04 | Sand 9, Inc. | Passivated micromechanical resonators and related methods |
WO2011035147A2 (en) | 2009-09-18 | 2011-03-24 | Delaware Capital Formation, Inc. | Controlled compressional wave components of thickness shear mode multi-measurand sensors |
JP2011103327A (ja) * | 2009-11-10 | 2011-05-26 | Seiko Epson Corp | 圧電素子、圧電アクチュエーター、液体噴射ヘッドおよび液体噴射装置 |
BR112012026079B1 (pt) * | 2010-04-15 | 2021-04-27 | Synthes Gmbh | Revestimento para um substrato de cocrmo |
US9169551B2 (en) | 2010-04-15 | 2015-10-27 | DePuy Synthes Products, Inc. | Coating for a CoCrMo substrate |
JP5713615B2 (ja) * | 2010-09-17 | 2015-05-07 | 大和製衡株式会社 | ロードセル |
CN103712872A (zh) * | 2012-09-28 | 2014-04-09 | 中国石油化工股份有限公司 | 一种评价油品的低温腐蚀性能的方法 |
US9308090B2 (en) | 2013-03-11 | 2016-04-12 | DePuy Synthes Products, Inc. | Coating for a titanium alloy substrate |
CN105203252A (zh) * | 2014-06-30 | 2015-12-30 | 罗斯蒙特公司 | 具有带类金刚石碳涂层的密封件的过程压力变送器 |
JP2015096868A (ja) * | 2015-01-20 | 2015-05-21 | 大和製衡株式会社 | ロードセル |
US10352904B2 (en) | 2015-10-26 | 2019-07-16 | Qorvo Us, Inc. | Acoustic resonator devices and methods providing patterned functionalization areas |
WO2017075344A1 (en) | 2015-10-28 | 2017-05-04 | Qorvo Us, Inc. | Sensor device with baw resonator and through-substrate fluidic vias |
US10458982B2 (en) | 2015-10-30 | 2019-10-29 | Qorvo Us, Inc. | Fluidic device including BAW resonators along opposing channel surfaces |
US10393704B2 (en) | 2015-10-30 | 2019-08-27 | Qorvo Us, Inc. | Multi-frequency BAW mixing and sensing system and method |
US10302595B2 (en) | 2015-11-06 | 2019-05-28 | Qorvo Us, Inc. | Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization |
WO2017083131A1 (en) * | 2015-11-09 | 2017-05-18 | Qorvo Us, Inc. | Baw sensor with enhanced surface area active region |
US10267770B2 (en) | 2016-07-27 | 2019-04-23 | Qorvo Us, Inc. | Acoustic resonator devices and methods with noble metal layer for functionalization |
US11444595B2 (en) | 2016-08-11 | 2022-09-13 | Qorvo Biotechnologies, Llc | Acoustic resonator device with controlled placement of functionalization material |
CN107068847A (zh) * | 2017-04-27 | 2017-08-18 | 苏州国科昂卓医疗科技有限公司 | 一种压电器件及其制作方法 |
KR102393445B1 (ko) * | 2017-10-04 | 2022-05-03 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 연마 물품 및 이의 형성 방법 |
DE102017222624A1 (de) * | 2017-12-13 | 2019-06-13 | SKF Aerospace France S.A.S | Beschichtete Lagerkomponente und Lager mit einer solchen Komponente |
DE102018110189A1 (de) * | 2018-04-27 | 2019-10-31 | Endress+Hauser Conducta Gmbh+Co. Kg | Sensor der Prozessautomatisierungstechnik und Herstellung desselben |
US11921427B2 (en) | 2018-11-14 | 2024-03-05 | Lam Research Corporation | Methods for making hard masks useful in next-generation lithography |
CN109930120B (zh) * | 2018-12-20 | 2020-12-25 | 兰州空间技术物理研究所 | 一种空间活动零部件表面智能复合润滑薄膜及其制备方法 |
CN110265544A (zh) * | 2019-06-24 | 2019-09-20 | 京东方科技集团股份有限公司 | 压电传感器及制备方法、进行指纹识别的方法及电子设备 |
CN114651173A (zh) * | 2019-11-06 | 2022-06-21 | 联邦科学及工业研究组织 | 用于感测pH的多层电极 |
EP3908882A4 (de) | 2020-01-15 | 2022-03-16 | Lam Research Corporation | Unterschicht für die haftung und dosisreduzierung von fotolack |
CN111536909A (zh) * | 2020-04-20 | 2020-08-14 | 中物院成都科学技术发展中心 | 一种薄膜镀层质量及超声波紧固件的质量检测方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9001833D0 (en) * | 1990-01-26 | 1990-03-28 | De Beers Ind Diamond | Method of bonding a diamond film to a substrate |
US5440189A (en) * | 1991-09-30 | 1995-08-08 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device |
JPH06245754A (ja) * | 1993-02-19 | 1994-09-06 | Terumo Corp | 塩基配列読み取り装置 |
US5482602A (en) * | 1993-11-04 | 1996-01-09 | United Technologies Corporation | Broad-beam ion deposition coating methods for depositing diamond-like-carbon coatings on dynamic surfaces |
US5880552A (en) * | 1997-05-27 | 1999-03-09 | The United States Of America As Represented By The Secretary Of The Navy | Diamond or diamond like carbon coated chemical sensors and a method of making same |
US6394945B1 (en) * | 1997-12-22 | 2002-05-28 | Mds (Canada), Inc. | Radioactively coated devices |
US6320295B1 (en) | 1998-11-18 | 2001-11-20 | Mcgill Robert Andrew | Diamond or diamond like carbon coated chemical sensors and a method of making same |
DE10206480B4 (de) * | 2001-02-16 | 2005-02-10 | Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. | Akustisches Oberflächenwellenbauelement |
JP2003172737A (ja) * | 2001-12-07 | 2003-06-20 | Toyo Kohan Co Ltd | 固体支持体、基体、バイオセンサ、およびそれらを用いた生体物質の解析方法 |
JP3953921B2 (ja) * | 2002-09-10 | 2007-08-08 | 日本プレーテック株式会社 | ダイヤモンドqcmの作製方法及びそのダイヤモンドqcm |
DE10302633B4 (de) * | 2003-01-23 | 2013-08-22 | Epcos Ag | SAW-Bauelement mit verbessertem Temperaturgang |
US7204128B1 (en) * | 2005-10-05 | 2007-04-17 | James Z T Liu | Engine wear and oil quality sensor |
US20070228876A1 (en) * | 2006-03-31 | 2007-10-04 | Chien-Min Sung | Diamond Frequency Control Devices and Associated Methods |
WO2007123537A1 (en) * | 2006-04-20 | 2007-11-01 | Dover Electronics, Inc. (Dba Vectron International) | Electro acoustic sensor for high pressure environments |
-
2006
- 2006-04-20 CN CNA2006800179941A patent/CN101180532A/zh active Pending
- 2006-04-20 JP JP2009506471A patent/JP4913863B2/ja not_active Expired - Fee Related
- 2006-04-20 US US11/814,167 patent/US7800285B2/en not_active Expired - Fee Related
- 2006-04-20 EP EP06751299A patent/EP1891429B1/de not_active Not-in-force
- 2006-04-20 WO PCT/US2006/015537 patent/WO2007123539A1/en active Application Filing
- 2006-04-20 AT AT06751299T patent/ATE445156T1/de active
- 2006-04-20 CH CH00065/08A patent/CH698809B1/de not_active IP Right Cessation
- 2006-04-20 DE DE602006009646T patent/DE602006009646D1/de active Active
-
2010
- 2010-08-12 US US12/855,661 patent/US20100304012A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
DE602006009646D1 (de) | 2009-11-19 |
JP2009534652A (ja) | 2009-09-24 |
EP1891429B1 (de) | 2009-10-07 |
US20100304012A1 (en) | 2010-12-02 |
WO2007123539A1 (en) | 2007-11-01 |
CH698809B1 (de) | 2009-10-30 |
US20100038997A1 (en) | 2010-02-18 |
JP4913863B2 (ja) | 2012-04-11 |
CN101180532A (zh) | 2008-05-14 |
US7800285B2 (en) | 2010-09-21 |
EP1891429A1 (de) | 2008-02-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE445156T1 (de) | Beschichtung für raue umgebungen und sensoren unter verwendung derselben | |
US7589456B2 (en) | Digital capacitive membrane transducer | |
WO2007030756A3 (en) | Passive saw-based hydrogen sensor and system | |
WO2010036713A3 (en) | Capacitive sensor having electrodes arranged on the substrate and the flex circuit | |
WO2008051278A3 (en) | Substrate penetrating acoustic sensor | |
Littrell | High performance piezoelectric MEMS microphones | |
DE602008002373D1 (de) | Selbsteichender Drucksensor | |
WO2007087328A3 (en) | Self-exciting, self-sensing piezoelectric cantilever sensor | |
CN105765751B (zh) | 压电薄膜及其制造方法以及压电元件 | |
WO2006138697A3 (en) | Integrated displacement sensors for probe microscopy and force spectroscopy | |
WO2009150498A3 (en) | Touch and force sensing for input devices | |
WO2007084516A3 (en) | Membranes for an analyte sensor | |
JP6081476B2 (ja) | 自動車のオープニングパネルにおける作用をトリガーするためのセンサ | |
WO2008149570A1 (ja) | 音響センサ | |
EP2150075A3 (de) | Elektronische Vorrichtung und elektroakustischer Wandler | |
WO2007087179A3 (en) | Magnetic sensor with compensation | |
KR101012268B1 (ko) | 멤브레인 구조를 갖는 촉각센서 및 제작방법 | |
WO2008120511A1 (ja) | 液中物質検出センサー | |
WO2008021359A3 (en) | Measurement of autonomic function | |
US9967662B2 (en) | Microphone device | |
CN108037183B (zh) | 一种基于电容式电桥结构的超声阵列气体传感器 | |
NO20061409L (no) | Piezoelektrisk trykkbolgesensor | |
ATE384260T1 (de) | Erfassen eines umwelteinflusses durch änderung der leitfähigkeit der sensorschicht eines piezoelektrischen sensors | |
JP2010133775A (ja) | 微小差圧測定用の差圧センサ | |
ATE512553T1 (de) | GEHÄUSE FÜR MIKROFONARRAYS UND MEHRSENSORANORDNUNGEN FÜR IHRE GRÖßEN-OPTIMIERUNG |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |
Ref document number: 1891429 Country of ref document: EP |