ATE479385T1 - Selbsteichender drucksensor - Google Patents

Selbsteichender drucksensor

Info

Publication number
ATE479385T1
ATE479385T1 AT08104806T AT08104806T ATE479385T1 AT E479385 T1 ATE479385 T1 AT E479385T1 AT 08104806 T AT08104806 T AT 08104806T AT 08104806 T AT08104806 T AT 08104806T AT E479385 T1 ATE479385 T1 AT E479385T1
Authority
AT
Austria
Prior art keywords
actuator
membrane
pressure sensor
deformable
insulating
Prior art date
Application number
AT08104806T
Other languages
English (en)
Inventor
Patrick Pons
Pierre Montoriol
Pierre Yameogo
Original Assignee
Captomed Eurl
Centre Nat Rech Scient
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Captomed Eurl, Centre Nat Rech Scient filed Critical Captomed Eurl
Application granted granted Critical
Publication of ATE479385T1 publication Critical patent/ATE479385T1/de

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
    • A61B5/021Measuring pressure in heart or blood vessels
    • A61B5/0215Measuring pressure in heart or blood vessels by means inserted into the body
    • A61B5/02156Calibration means
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/03Detecting, measuring or recording fluid pressure within the body other than blood pressure, e.g. cerebral pressure; Measuring pressure in body tissues or organs
    • A61B5/031Intracranial pressure
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005Apparatus for calibrating pressure sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0247Pressure sensors

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Veterinary Medicine (AREA)
  • Cardiology (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Public Health (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Vascular Medicine (AREA)
  • Physiology (AREA)
  • Neurosurgery (AREA)
  • Hematology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
AT08104806T 2007-07-31 2008-07-21 Selbsteichender drucksensor ATE479385T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0705573A FR2919486B1 (fr) 2007-07-31 2007-07-31 Capteur de pression auto-etalonnable.

Publications (1)

Publication Number Publication Date
ATE479385T1 true ATE479385T1 (de) 2010-09-15

Family

ID=38846907

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08104806T ATE479385T1 (de) 2007-07-31 2008-07-21 Selbsteichender drucksensor

Country Status (6)

Country Link
US (1) US8622923B2 (de)
EP (1) EP2022395B1 (de)
AT (1) ATE479385T1 (de)
DE (1) DE602008002373D1 (de)
ES (1) ES2350756T3 (de)
FR (1) FR2919486B1 (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7455666B2 (en) 2001-07-13 2008-11-25 Board Of Regents, The University Of Texas System Methods and apparatuses for navigating the subarachnoid space
US11382571B2 (en) 2008-10-29 2022-07-12 Flashback Technologies, Inc. Noninvasive predictive and/or estimative blood pressure monitoring
US11395634B2 (en) 2008-10-29 2022-07-26 Flashback Technologies, Inc. Estimating physiological states based on changes in CRI
US8512260B2 (en) * 2008-10-29 2013-08-20 The Regents Of The University Of Colorado, A Body Corporate Statistical, noninvasive measurement of intracranial pressure
US11395594B2 (en) 2008-10-29 2022-07-26 Flashback Technologies, Inc. Noninvasive monitoring for fluid resuscitation
US11406269B2 (en) 2008-10-29 2022-08-09 Flashback Technologies, Inc. Rapid detection of bleeding following injury
US11478190B2 (en) 2008-10-29 2022-10-25 Flashback Technologies, Inc. Noninvasive hydration monitoring
US20110172545A1 (en) * 2008-10-29 2011-07-14 Gregory Zlatko Grudic Active Physical Perturbations to Enhance Intelligent Medical Monitoring
US11857293B2 (en) 2008-10-29 2024-01-02 Flashback Technologies, Inc. Rapid detection of bleeding before, during, and after fluid resuscitation
SE533726C2 (sv) 2009-04-30 2010-12-14 Moelnlycke Health Care Ab Apparat med negativt tryck för behandling av sår
US8313819B2 (en) 2009-08-12 2012-11-20 Medos International S.A.R.L. Ultra-thin multi-layer packaging
US8313811B2 (en) * 2009-08-12 2012-11-20 Medos International S.A.R.L. Plasma enhanced polymer ultra-thin multi-layer packaging
US8361591B2 (en) * 2009-08-12 2013-01-29 Medos International Sarl Packaging with active protection layer
US9131896B2 (en) * 2009-08-12 2015-09-15 Medos International S.A.R.L. In situ offset compensation for pressure sensors
CN102573948B (zh) * 2009-09-22 2014-10-01 莫恩里克保健公司 用于控制伤口中的负压的设备
US20110092955A1 (en) 2009-10-07 2011-04-21 Purdy Phillip D Pressure-Sensing Medical Devices, Systems and Methods, and Methods of Forming Medical Devices
US20120302938A1 (en) * 2010-03-19 2012-11-29 University Of Washington Drainage systems for excess body fluids and associated methods
CN103002940B (zh) 2010-03-19 2018-09-14 华盛顿大学 用于过量体液的引流系统
EP2668483B1 (de) * 2011-01-28 2015-11-18 ELMOS Semiconductor AG Mikroelektromechanisches bauelement und verfahren zum testen eines mikroelektromechanischen bauelements
WO2013016212A1 (en) 2011-07-22 2013-01-31 Flashback Technologies, Inc. Hemodynamic reserve monitor and hemodialysis control
US10006281B2 (en) 2012-02-10 2018-06-26 Austin Star Detonator Company Calibration of molded piezoelectric longitudinal charge coefficient of a pressure sensor for blasting operation
US8714021B2 (en) * 2012-02-27 2014-05-06 Amphenol Thermometrics, Inc. Catheter die and method of fabricating the same
US10506934B2 (en) 2012-05-25 2019-12-17 Phyzhon Health Inc. Optical fiber pressure sensor
WO2014076620A2 (en) * 2012-11-14 2014-05-22 Vectorious Medical Technologies Ltd. Drift compensation for implanted capacitance-based pressure transducer
CN103076117A (zh) * 2012-12-26 2013-05-01 南京高华科技有限公司 一种传感器及其测量方法
US10105103B2 (en) 2013-04-18 2018-10-23 Vectorious Medical Technologies Ltd. Remotely powered sensory implant
US10205488B2 (en) 2013-04-18 2019-02-12 Vectorious Medical Technologies Ltd. Low-power high-accuracy clock harvesting in inductive coupling systems
US10282014B2 (en) 2013-09-30 2019-05-07 Apple Inc. Operating multiple functions in a display of an electronic device
US10327645B2 (en) 2013-10-04 2019-06-25 Vascular Imaging Corporation Imaging techniques using an imaging guidewire
US10463264B2 (en) 2013-10-15 2019-11-05 Aqueduct Critical Care, Inc. Pressure/force sensors having a flexible membrane, dynamic and static pressure/force sensor calibration methods
US10537255B2 (en) 2013-11-21 2020-01-21 Phyzhon Health Inc. Optical fiber pressure sensor
US9285289B2 (en) 2013-12-06 2016-03-15 Freescale Semiconductor, Inc. Pressure sensor with built-in calibration capability
US9726922B1 (en) 2013-12-20 2017-08-08 Apple Inc. Reducing display noise in an electronic device
CA2936349A1 (en) 2014-01-16 2015-07-23 University Of Washington Through Its Center For Commercialization Pressure reference assemblies for body fluid drainage systems and associated methods
WO2015148533A1 (en) 2014-03-24 2015-10-01 Arkis Biosciences An implantable dual sensor bio-pressure transponder and method of calibration
US10548523B2 (en) * 2014-04-08 2020-02-04 Regents Of The University Of Minnesota Pressure sensing catheter system
US9689770B2 (en) * 2014-07-17 2017-06-27 Infineon Technologies Ag Selfcalibration of capacitive pressure sensors with electrostatic forces
US10258240B1 (en) 2014-11-24 2019-04-16 Vascular Imaging Corporation Optical fiber pressure sensor
US9549851B2 (en) 2015-01-28 2017-01-24 Novartis Ag Surgical hand piece with integrated pressure sensor
US10296123B2 (en) 2015-03-06 2019-05-21 Apple Inc. Reducing noise in a force signal in an electronic device
US10185397B2 (en) 2015-03-08 2019-01-22 Apple Inc. Gap sensor for haptic feedback assembly
EP3291723A2 (de) 2015-05-07 2018-03-14 Vectorious Medical Technologies Ltd. Herzimplantat mit septumgreifer
US9927905B2 (en) 2015-08-19 2018-03-27 Apple Inc. Force touch button emulation
US10416811B2 (en) 2015-09-24 2019-09-17 Apple Inc. Automatic field calibration of force input sensors
US10753815B2 (en) 2015-10-28 2020-08-25 Hewlett-Packard Development Company, L.P. Relative pressure sensor
EP3368874A4 (de) * 2015-10-28 2019-06-05 Hewlett-Packard Development Company, L.P. Relativdrucksensor
US9846097B2 (en) * 2015-11-03 2017-12-19 Nxp Usa, Inc. Pressure sensor with variable sense gap
EP3398237B1 (de) 2015-12-30 2020-12-02 Vectorious Medical Technologies Ltd. Leistungseffizientes drucksensorimplantat
EP3903675A1 (de) * 2016-08-31 2021-11-03 Nipro Corporation Druckmessvorrichtung
DE102018103180A1 (de) * 2018-02-13 2019-08-14 First Sensor AG Anordnung für einen halbleiterbasierten Drucksensorchip und Drucksensorchip
FR3078567B1 (fr) * 2018-03-01 2020-03-06 Universite Grenoble Alpes Dispositif et procede de mesure de debit d'un liquide
US11918386B2 (en) 2018-12-26 2024-03-05 Flashback Technologies, Inc. Device-based maneuver and activity state-based physiologic status monitoring

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3920002A (en) * 1971-12-22 1975-11-18 Kendall & Co Fluid sampling and measuring apparatus
DE2403211C3 (de) * 1974-01-23 1981-12-24 Etablissement Dentaire Ivoclar, Schaan Werkstoff für Dentalzwecke
NL168655C (nl) * 1975-04-09 1982-04-16 Siemens Ag Inrichting voor het permanent polariseren van schijfvormige piezoelektrische lichamen.
US4407296A (en) * 1980-09-12 1983-10-04 Medtronic, Inc. Integral hermetic impantable pressure transducer
FR2494437A1 (fr) * 1980-11-20 1982-05-21 Commissariat Energie Atomique Dispositif de mesure comprenant une jauge de contrainte avec un support en verre mince
US4465075A (en) * 1982-03-29 1984-08-14 Motorola, Inc. On-chip pressure transducer and temperature compensation circuit therefor
US4468639A (en) * 1982-09-29 1984-08-28 The United States Of America As Represented By The Secretary Of The Navy Monolithic combined charge transfer and surface acoustic wave device
DE8407322U1 (de) * 1984-03-09 1984-05-30 Keller, Hans W., Dipl.-Phys. ETH, 8404 Winterthur Piezoresestive druckmesszelle
US4703757A (en) * 1984-11-16 1987-11-03 Cordis Corporation Optical fiber pressure transducer
US5184619A (en) * 1986-11-10 1993-02-09 Peritronics Medical, Inc. Intrauterine pressure and fetal heart rate sensor
US4812742A (en) * 1987-12-03 1989-03-14 Unisys Corporation Integrated circuit package having a removable test region for testing for shorts and opens
US4951671A (en) * 1988-08-23 1990-08-28 Coan William M Tonometry apparatus
US5019977A (en) * 1988-11-07 1991-05-28 Rainwise, Inc. Light pen interactive weather parameter display system
US5437284A (en) * 1993-12-30 1995-08-01 Camino Laboratories, Inc. System and method for in vivo calibration of a sensor
US5810734A (en) * 1994-04-15 1998-09-22 Vital Insite, Inc. Apparatus and method for measuring an induced perturbation to determine a physiological parameter
US5564434A (en) * 1995-02-27 1996-10-15 Medtronic, Inc. Implantable capacitive absolute pressure and temperature sensor
US6120460A (en) * 1996-09-04 2000-09-19 Abreu; Marcio Marc Method and apparatus for signal acquisition, processing and transmission for evaluation of bodily functions
DE19638813C1 (de) * 1996-09-20 1998-03-05 Sican F & E Gmbh Sibet Meßvorrichtung für medizinische Anwendungen mit einem intrakorporal einsetzbaren Sensorelement und Verfahren zu deren Herstellung
US6111520A (en) * 1997-04-18 2000-08-29 Georgia Tech Research Corp. System and method for the wireless sensing of physical properties
DE19724001C1 (de) * 1997-06-07 1998-10-01 Meinhard Prof Dr Knoll Sensor zur Messung von Druckprofilen
US6475170B1 (en) * 1997-12-30 2002-11-05 Remon Medical Technologies Ltd Acoustic biosensor for monitoring physiological conditions in a body implantation site
US6010461A (en) * 1998-09-01 2000-01-04 Sitek, Inc. Monolithic silicon intra-ocular pressure sensor and method therefor
EP1400204A1 (de) * 1999-08-05 2004-03-24 Broncus Technologies, Inc. Verfahren und Vorrichtungen zur Herstellung von kollateralen Kanälen in den Lungen
US6394986B1 (en) * 1999-11-06 2002-05-28 Millar Instruments, Inc. Pressure sensing module for a catheter pressure transducer
AT411559B (de) * 2000-05-15 2004-02-25 Akg Acoustics Gmbh Elektroakustischer wandler mit kleinen abmessungen
FR2817756B1 (fr) * 2000-12-08 2008-10-31 Hospal Internat Marketing Man Dispositif pour la mesure de pression comportant un capteur d'effort motorise
US6706001B2 (en) * 2001-05-11 2004-03-16 Bernard B. Fresco Dual tonometer pressure measurement device
US7209788B2 (en) * 2001-10-29 2007-04-24 Duke University Closed loop brain machine interface
US20040043500A1 (en) * 2002-08-27 2004-03-04 Rumps J Eric Wafer-scale microwave digestion apparatus and methods
WO2004019773A1 (en) * 2002-08-27 2004-03-11 Michigan State University Implantable microscale pressure sensor system
US8303511B2 (en) * 2002-09-26 2012-11-06 Pacesetter, Inc. Implantable pressure transducer system optimized for reduced thrombosis effect
US7059196B1 (en) * 2004-11-22 2006-06-13 Honeywell International Inc. Disposable wireless pressure sensor
US7216048B2 (en) * 2004-12-30 2007-05-08 Honeywell International Inc. Calibrated pressure sensor
WO2006110798A2 (en) * 2005-04-12 2006-10-19 Cardiomems, Inc. Electromagnetically coupled hermetic chamber
US7355283B2 (en) * 2005-04-14 2008-04-08 Sandisk Corporation Rigid wave pattern design on chip carrier substrate and printed circuit board for semiconductor and electronic sub-system packaging
US7684872B2 (en) * 2006-04-26 2010-03-23 Medtronic, Inc. Contactless interconnect for transducers
JP2008034791A (ja) * 2006-06-28 2008-02-14 Denso Corp 熱電変換装置およびその装置の製造方法

Also Published As

Publication number Publication date
US8622923B2 (en) 2014-01-07
DE602008002373D1 (de) 2010-10-14
EP2022395A1 (de) 2009-02-11
ES2350756T3 (es) 2011-01-26
FR2919486A1 (fr) 2009-02-06
FR2919486B1 (fr) 2009-10-02
EP2022395B1 (de) 2010-09-01
US20090036754A1 (en) 2009-02-05

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