JP2018525840A - 低誘電特性を有するガラス基板アセンブリ - Google Patents
低誘電特性を有するガラス基板アセンブリ Download PDFInfo
- Publication number
- JP2018525840A JP2018525840A JP2018509741A JP2018509741A JP2018525840A JP 2018525840 A JP2018525840 A JP 2018525840A JP 2018509741 A JP2018509741 A JP 2018509741A JP 2018509741 A JP2018509741 A JP 2018509741A JP 2018525840 A JP2018525840 A JP 2018525840A
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- Prior art keywords
- glass
- layer
- dielectric
- dielectric layer
- substrate assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011521 glass Substances 0.000 title claims abstract description 241
- 239000000758 substrate Substances 0.000 title claims abstract description 146
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 34
- 238000004891 communication Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 241
- 238000000034 method Methods 0.000 description 43
- 239000003989 dielectric material Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 19
- 238000000137 annealing Methods 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 238000000429 assembly Methods 0.000 description 9
- 230000000712 assembly Effects 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 239000004020 conductor Substances 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 238000009472 formulation Methods 0.000 description 5
- 238000003475 lamination Methods 0.000 description 5
- -1 multilayers Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000007764 slot die coating Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000005347 annealed glass Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 description 1
- MZVABYGYVXBZDP-UHFFFAOYSA-N 1-adamantyl 2-methylprop-2-enoate Chemical compound C1C(C2)CC3CC2CC1(OC(=O)C(=C)C)C3 MZVABYGYVXBZDP-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- XVZXOLOFWKSDSR-UHFFFAOYSA-N Cc1cc(C)c([C]=O)c(C)c1 Chemical group Cc1cc(C)c([C]=O)c(C)c1 XVZXOLOFWKSDSR-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 241000124033 Salix Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 239000004964 aerogel Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000011143 downstream manufacturing Methods 0.000 description 1
- 239000011532 electronic conductor Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000006112 glass ceramic composition Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- WKGDNXBDNLZSKC-UHFFFAOYSA-N oxido(phenyl)phosphanium Chemical compound O=[PH2]c1ccccc1 WKGDNXBDNLZSKC-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0029—Etching of the substrate by chemical or physical means by laser ablation of inorganic insulating material
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
-
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/008—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character comprising a mixture of materials covered by two or more of the groups C03C17/02, C03C17/06, C03C17/22 and C03C17/28
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
- C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
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- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/4807—Ceramic parts
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
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- H05K1/0213—Electrical arrangements not otherwise provided for
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- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
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- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/002—Etching of the substrate by chemical or physical means by liquid chemical etching
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- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/43—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase
- C03C2217/44—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the composition of the continuous phase
- C03C2217/445—Organic continuous phases
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- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
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- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09509—Blind vias, i.e. vias having one side closed
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- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
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- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
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- H05K2203/0743—Mechanical agitation of fluid, e.g. during cleaning of the conductive pattern
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- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
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- H05K2203/075—Global treatment of printed circuits by fluid spraying, e.g. cleaning a conductive pattern using nozzles
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- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0756—Uses of liquids, e.g. rinsing, coating, dissolving
- H05K2203/0776—Uses of liquids not otherwise provided for in H05K2203/0759 - H05K2203/0773
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- H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
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- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/107—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by filling grooves in the support with conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
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Abstract
Description
実施例1では、2つの0.1mmのCorning(登録商標)EAGLE XG(登録商標)ガラス基板を準備した。1つのガラス基板は、対照として使用し、アニール処理には供しなかったが、他方のガラス基板は、該ガラス基板を250℃/時の速度で700℃まで徐々に加熱することによって、アニールした。該ガラス基板を700℃で10時間、維持し、次に、10時間かけて室温まで冷却させた。両方の試料の誘電特性を10GHzで評価した。対照ガラス基板は、約5.14の誘電率値及び約0.0060の散逸率値を示した。アニールしたガラス基板は、約5.02の誘電率値及び約0.0038の散逸率値を示した。
実施例2では、Corning Incorporated社製の3つの0.7mmのEAGLE XG(登録商標)ガラス基板を準備した。1つのガラス基板は、対照として使用し、アニール処理には供しなかった。第2のガラス基板は、該第2のガラス基板を250℃/時の速度で600℃まで徐々に加熱することによって、アニールした。第2のガラス基板を600℃で10時間、維持し、次に、10時間かけて室温まで冷却させた。第3のガラス基板は、該第3のガラス基板を250℃/時の速度で650℃まで徐々に加熱することによって、アニールした。第3のガラス基板を650℃で10時間、維持し、次に、10時間かけて室温まで冷却させた。3つの試料すべての誘電特性を10GHzで評価した。対照ガラス基板は、約5.21の誘電率値及び約0.0036の散逸率値を示した。600℃でアニールした第2のガラス基板は、約5.18の誘電率値及び約0.0029の散逸率値を示した。650℃でアニールした第3のガラス基板は、約5.18の誘電率値及び約0.0026の散逸率値を示した。
実施例3では、Corning Incorporated社製の2つの0.7mmのContegoガラス基板を準備した。1つのガラス基板は、対照として使用し、アニール処理には供しなかった。第2のガラス基板は、該第2のガラス基板を250℃/時の速度で600℃まで徐々に加熱することによって、アニールした。第2のガラス基板を600℃で10時間、維持し、次に、10時間かけて室温まで冷却させた。対照ガラス基板は、約4.70の誘電率値及び約0.0033の散逸率値を示した。600℃でアニールした第2のガラス基板は、約4.68の誘電率値及び約0.0027の散逸率値を示した。
第1の表面及び第2の表面を含むガラス層と、
前記ガラス層の前記第1の表面又は前記第2の表面のうちの少なくとも一方に配置された誘電体層であって、10GHzの周波数を有する電磁放射に応じて約3.0未満の誘電率値を有する、誘電体層と
を含む、基板アセンブリ。
前記ガラス層が約300μm未満の厚さを有することを特徴とする、実施形態1に記載の基板アセンブリ。
前記誘電体層が、10GHzの周波数を有する電磁放射に応じて約0.003未満の散逸率値を有することを特徴とする、実施形態1又は実施形態2に記載の基板アセンブリ。
前記誘電体層の誘電率値が、10GHzの周波数を有する電磁放射に応じて約2.2〜約2.5の範囲内にあることを特徴とする、実施形態1〜3のいずれかに記載の基板アセンブリ。
前記ガラス層が、10GHzの周波数を有する電磁放射に応じて約5.0未満の誘電率値及び約0.003未満の散逸率値を有することを特徴とする、実施形態1〜4のいずれかに記載の基板アセンブリ。
前記ガラス層がアニールされていることを特徴とする、実施形態5に記載の基板アセンブリ。
10GHzの周波数を有する電磁放射に応じて、前記ガラス層の誘電率値が約4.7〜約5.0の範囲内にあり、かつ、前記ガラス層の散逸率値が約0.000〜約0.003の範囲内にあることを特徴とする、実施形態5又は実施形態6に記載の基板アセンブリ。
前記誘電体層がポリマーを含むことを特徴とする、実施形態1〜7のいずれかに記載の基板アセンブリ。
前記誘電体層内、前記誘電体層の下、又は前記誘電体層の表面に配置された導電層をさらに含むことを特徴とする、実施形態1〜8のいずれかに記載の基板アセンブリ。
前記導電層が、複数の導電性トレースを含むことを特徴とする、実施形態9に記載の基板アセンブリ。
前記誘電体層の表面が、少なくとも1つの3次元特徴を含むことを特徴とする、実施形態1〜10のいずれかに記載の基板アセンブリ。
前記少なくとも1つの3次元特徴が、前記誘電体層の前記表面にチャネルを含み、
前記基板アセンブリが、前記チャネル内に配置された導電性トレースを含む
ことを特徴とする、実施形態11に記載の基板アセンブリ。
前記少なくとも1つの3次元特徴が、前記誘電体層内にスルーホールビアを含むことを特徴とする、実施形態11又は実施形態12に記載の基板アセンブリ。
第1の表面及び第2の表面を含む第2のガラス層であって、前記誘電体層が、前記第1のガラス層の前記第2の表面と前記第2のガラス層の前記第1の表面との間に配置されている、第2のガラス層と、
前記第2のガラス層の前記第2の表面に配置された第2の誘電体層と
をさらに含むことを特徴とする、実施形態1〜13のいずれかに記載の基板アセンブリ。
前記誘電体層の表面に配置された導電層、
前記導電層の表面に配置された第2の誘電体層、
前記第2の誘電体層の表面に配置された第2のガラス層、及び
前記第2のガラス層の表面に配置された第3の誘電体層
をさらに含むことを特徴とする、実施形態1〜13のいずれかに記載の基板アセンブリ。
第1の表面及び第2の表面を含むガラス層、
前記ガラス層の前記第1の表面又は前記第2の表面のうちの少なくとも一方に配置された誘電体層であって、10GHzの周波数を有する電磁放射に応じて約3.0未満の誘電率値を有する、誘電体層、
前記誘電体層内、前記誘電体層の下、又は前記誘電体層の表面に配置された複数の導電性トレース、及び
前記誘電体層の前記表面に配置され、かつ、前記複数の導電性トレースのうちの1つ以上の導電性トレースに電気的に接続された集積回路部品であって、無線通信信号の送信又は受信のうちの少なくとも一方を実行するように構成されている、集積回路部品
を含む、電子アセンブリ。
前記ガラス層が約300μm未満の厚さを有することを特徴とする、実施形態16に記載の電子アセンブリ。
前記誘電体層が、10GHzの周波数を有する電磁放射に応じて約0.003未満の散逸率値を有することを特徴とする、実施形態16又は実施形態17に記載の電子アセンブリ。
前記誘電体層の誘電率値が、10GHzの周波数を有する電磁放射に応じて約2.2〜約2.5の範囲内にあることを特徴とする、実施形態16〜18のいずれかに記載の電子アセンブリ。
前記ガラス層が、10GHzの周波数を有する電磁放射に応じて、約5.0未満の誘電率値及び約0.003未満の散逸率値を有することを特徴とする、実施形態16〜19のいずれかに記載の電子アセンブリ。
10GHzの周波数を有する電磁放射に応じて、前記ガラス層の誘電率値が約4.7〜約5.0の範囲内にあり、かつ、前記ガラス層の散逸率値が約0.000〜約0.003の範囲内にあることを特徴とする、実施形態20に記載の電子アセンブリ。
前記誘電体層の前記表面が複数のチャネルを含み、かつ
前記複数の導電性トレースが前記複数のチャネル内に配置される
ことを特徴とする、実施形態16〜21のいずれかに記載の電子アセンブリ。
ガラス基板アセンブリを製造する方法であって、
ガラス基板を、該ガラス基板の歪み点より高く、かつ、該ガラス基板の軟化点未満の第1の温度まで加熱する工程、
前記ガラス基板を、第1の期間、前記第1の温度の約10%以内に維持する工程、
前記ガラス基板を、該ガラス基板の冷却後に、該ガラス基板が10GHzの周波数を有する電磁放射に応じて約5.0未満の誘電率値を有するように、第2の期間にわたり第2の温度まで冷却する工程、及び
10GHzの周波数を有する電磁放射に応じて約2.5未満の誘電率値を有する誘電体層を、前記ガラス基板の少なくとも1つの表面に施す工程
を含む、方法。
101 初期のスプール
103 第2のスプール
110 ガラス層
110A〜C ガラス層
111 可撓性ガラスウェブ
112 第1の表面
113 第2の表面
120 誘電体層
120A〜E 誘電体層
121 誘電材料
122 表面
125 チャネル
130 誘電体層堆積システム
130A スロットダイコーティングシステム
130B 積層システム
134A,134B ローラ
140A 第1の導電層
140B 第2の導電層
140C 第3の導電層
142 導電層
145 導電性トレース
146A 第1のビア
146B 第2のビア
150 ロール・ツー・ロールプロセス
160,160’ 積層体
170 加熱炉
200 ガラス基板アセンブリ
300 基板アセンブリ
301 電子アセンブリ
310 ガラス層
320 誘電体層
322 表面
342 導電性トレース
360 集積回路部品
362A〜C 追加的な電気部品
Claims (10)
- 第1の表面及び第2の表面を含むガラス層、及び
前記ガラス層の前記第1の表面又は前記第2の表面のうちの少なくとも一方に配置された誘電体層であって、10GHzの周波数を有する電磁放射に応じて約3.0未満の誘電率値を有する、誘電体層
を含む、基板アセンブリ。 - 前記ガラス層が約300μm未満の厚さを有することを特徴とする、請求項1に記載の基板アセンブリ。
- 前記誘電体層が、10GHzの周波数を有する電磁放射に応じて約0.003未満の散逸率値を有することを特徴とする、請求項1又は請求項2に記載の基板アセンブリ。
- 前記誘電体層の誘電率値が、10GHzの周波数を有する電磁放射に応じて、約2.2〜約2.5の範囲内にあることを特徴とする、請求項1〜3のいずれか一項に記載の基板アセンブリ。
- 前記ガラス層が、10GHzの周波数を有する電磁放射に応じて、約5.0未満の誘電率値及び約0.003未満の散逸率値を有することを特徴とする、請求項1〜4のいずれか一項に記載の基板アセンブリ。
- 10GHzの周波数を有する電磁放射に応じて、前記ガラス層の誘電率値が約4.7〜約5.0の範囲内にあり、かつ、前記ガラス層の散逸率値が約0.000〜約0.003の範囲内にあることを特徴とする、請求項5に記載の基板アセンブリ。
- 前記誘電体層内、前記誘電体層の下、又は前記誘電体層の表面に配置された導電層をさらに含むことを特徴とする、請求項1〜6のいずれか一項に記載の基板アセンブリ。
- 前記誘電体層の表面のチャネル、及び
前記チャネル内に配置された導電性トレース
を含むことを特徴とする、請求項1〜7のいずれか一項に記載の基板アセンブリ。 - 前記誘電体層内にスルーホールビアを含むことを特徴とする、請求項1〜8のいずれか一項に記載の基板アセンブリ。
- 請求項1〜9のいずれか一項に記載の基板アセンブリ、及び
前記誘電体層の表面に配置され、かつ、前記誘電体層内、前記誘電体層の下、又は前記誘電体層の前記表面に配置された1つ以上の導電性トレースに電気的に接続された集積回路部品であって、無線通信信号の送信又は受信のうちの少なくとも一方を実行するように構成されている、集積回路部品
を含む、電子アセンブリ。
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CN107926110B (zh) | 2021-04-30 |
KR20180048723A (ko) | 2018-05-10 |
CN107926111A (zh) | 2018-04-17 |
TW201714500A (zh) | 2017-04-16 |
TWI711348B (zh) | 2020-11-21 |
JP2018536276A (ja) | 2018-12-06 |
WO2017034958A1 (en) | 2017-03-02 |
CN107926110A (zh) | 2018-04-17 |
EP3338521A1 (en) | 2018-06-27 |
US20180249579A1 (en) | 2018-08-30 |
KR20180052646A (ko) | 2018-05-18 |
EP3338520A1 (en) | 2018-06-27 |
WO2017034969A1 (en) | 2017-03-02 |
US20180166353A1 (en) | 2018-06-14 |
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