JP2018516233A - ホウ素含有化合物、組成物、及びホウ素含有膜の堆積方法 - Google Patents
ホウ素含有化合物、組成物、及びホウ素含有膜の堆積方法 Download PDFInfo
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- JP2018516233A JP2018516233A JP2017551188A JP2017551188A JP2018516233A JP 2018516233 A JP2018516233 A JP 2018516233A JP 2017551188 A JP2017551188 A JP 2017551188A JP 2017551188 A JP2017551188 A JP 2017551188A JP 2018516233 A JP2018516233 A JP 2018516233A
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- boron
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- reactor
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- 238000000034 method Methods 0.000 title claims abstract description 126
- 229910052796 boron Inorganic materials 0.000 title claims abstract description 117
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title claims abstract description 115
- 239000000203 mixture Substances 0.000 title claims abstract description 35
- 150000001875 compounds Chemical class 0.000 title claims abstract description 21
- 238000000151 deposition Methods 0.000 title claims description 29
- 239000002243 precursor Substances 0.000 claims abstract description 74
- 238000010926 purge Methods 0.000 claims description 141
- 230000008569 process Effects 0.000 claims description 65
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 61
- 239000007789 gas Substances 0.000 claims description 55
- 125000000217 alkyl group Chemical group 0.000 claims description 48
- 238000000231 atomic layer deposition Methods 0.000 claims description 44
- 229910052757 nitrogen Inorganic materials 0.000 claims description 40
- 229910052710 silicon Inorganic materials 0.000 claims description 40
- 239000010703 silicon Substances 0.000 claims description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 35
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 claims description 34
- 125000006575 electron-withdrawing group Chemical group 0.000 claims description 34
- 229910052760 oxygen Inorganic materials 0.000 claims description 32
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical group N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 30
- -1 alkyl hydrocarbons Chemical class 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 29
- 125000006619 (C1-C6) dialkylamino group Chemical group 0.000 claims description 28
- 229910052739 hydrogen Inorganic materials 0.000 claims description 28
- 125000000041 C6-C10 aryl group Chemical group 0.000 claims description 27
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 25
- 239000001301 oxygen Substances 0.000 claims description 25
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 24
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 24
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 22
- 150000004820 halides Chemical class 0.000 claims description 22
- 239000001257 hydrogen Substances 0.000 claims description 22
- 125000003118 aryl group Chemical group 0.000 claims description 21
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 21
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 20
- MNWRORMXBIWXCI-UHFFFAOYSA-N tetrakis(dimethylamido)titanium Chemical compound CN(C)[Ti](N(C)C)(N(C)C)N(C)C MNWRORMXBIWXCI-UHFFFAOYSA-N 0.000 claims description 20
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 18
- 125000003342 alkenyl group Chemical group 0.000 claims description 18
- 125000000304 alkynyl group Chemical group 0.000 claims description 18
- 150000004767 nitrides Chemical class 0.000 claims description 18
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 17
- 239000002904 solvent Substances 0.000 claims description 17
- 125000006549 C4-C10 aryl group Chemical group 0.000 claims description 15
- 229910021529 ammonia Inorganic materials 0.000 claims description 15
- 238000005229 chemical vapour deposition Methods 0.000 claims description 15
- DRBJLUWUQJTEOO-UHFFFAOYSA-N C(C)(CC)N(C(C)CC)B Chemical compound C(C)(CC)N(C(C)CC)B DRBJLUWUQJTEOO-UHFFFAOYSA-N 0.000 claims description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 13
- 229910052786 argon Inorganic materials 0.000 claims description 11
- 238000005137 deposition process Methods 0.000 claims description 10
- JGZUJELGSMSOID-UHFFFAOYSA-N dialuminum;dimethylazanide Chemical compound CN(C)[Al](N(C)C)N(C)C.CN(C)[Al](N(C)C)N(C)C JGZUJELGSMSOID-UHFFFAOYSA-N 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 150000001412 amines Chemical class 0.000 claims description 8
- 238000009835 boiling Methods 0.000 claims description 8
- 229910052734 helium Inorganic materials 0.000 claims description 8
- 239000001307 helium Substances 0.000 claims description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 8
- 125000001931 aliphatic group Chemical group 0.000 claims description 7
- 125000004663 dialkyl amino group Chemical group 0.000 claims description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 6
- UFXPFCDHJCIVDO-UHFFFAOYSA-N [di(propan-2-yl)amino]boron Chemical compound CC(C)N([B])C(C)C UFXPFCDHJCIVDO-UHFFFAOYSA-N 0.000 claims description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 6
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical group C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 claims description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical group [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 5
- 229930195733 hydrocarbon Natural products 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- POFFJVRXOKDESI-UHFFFAOYSA-N 1,3,5,7-tetraoxa-4-silaspiro[3.3]heptane-2,6-dione Chemical compound O1C(=O)O[Si]21OC(=O)O2 POFFJVRXOKDESI-UHFFFAOYSA-N 0.000 claims description 4
- WSSNSJARNQRJJY-UHFFFAOYSA-N BNCC1=CC=CC=C1 Chemical compound BNCC1=CC=CC=C1 WSSNSJARNQRJJY-UHFFFAOYSA-N 0.000 claims description 4
- WQSHNOVWBAIWIO-UHFFFAOYSA-N C(C)(C)N(C1CCCCC1)B Chemical compound C(C)(C)N(C1CCCCC1)B WQSHNOVWBAIWIO-UHFFFAOYSA-N 0.000 claims description 4
- WHDVKSSOUHMNJH-UHFFFAOYSA-N C(C)N(C1CCCCC1)B Chemical compound C(C)N(C1CCCCC1)B WHDVKSSOUHMNJH-UHFFFAOYSA-N 0.000 claims description 4
- OIUPZEAQPZFRQK-UHFFFAOYSA-N CN(C1CCCCC1)B Chemical compound CN(C1CCCCC1)B OIUPZEAQPZFRQK-UHFFFAOYSA-N 0.000 claims description 4
- QTRQHYHCQPFURH-UHFFFAOYSA-N aluminum;diethylazanide Chemical compound [Al+3].CC[N-]CC.CC[N-]CC.CC[N-]CC QTRQHYHCQPFURH-UHFFFAOYSA-N 0.000 claims description 4
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 4
- VBCSQFQVDXIOJL-UHFFFAOYSA-N diethylazanide;hafnium(4+) Chemical compound [Hf+4].CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC VBCSQFQVDXIOJL-UHFFFAOYSA-N 0.000 claims description 4
- VJDVOZLYDLHLSM-UHFFFAOYSA-N diethylazanide;titanium(4+) Chemical compound [Ti+4].CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC VJDVOZLYDLHLSM-UHFFFAOYSA-N 0.000 claims description 4
- ZYLGGWPMIDHSEZ-UHFFFAOYSA-N dimethylazanide;hafnium(4+) Chemical compound [Hf+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C ZYLGGWPMIDHSEZ-UHFFFAOYSA-N 0.000 claims description 4
- DWCMDRNGBIZOQL-UHFFFAOYSA-N dimethylazanide;zirconium(4+) Chemical compound [Zr+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C DWCMDRNGBIZOQL-UHFFFAOYSA-N 0.000 claims description 4
- 150000002170 ethers Chemical class 0.000 claims description 4
- NPEOKFBCHNGLJD-UHFFFAOYSA-N ethyl(methyl)azanide;hafnium(4+) Chemical compound [Hf+4].CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C NPEOKFBCHNGLJD-UHFFFAOYSA-N 0.000 claims description 4
- LNKYFCABELSPAN-UHFFFAOYSA-N ethyl(methyl)azanide;titanium(4+) Chemical compound [Ti+4].CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C LNKYFCABELSPAN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 claims description 4
- QRRJTGSPNLTVBV-UHFFFAOYSA-N piperidin-1-ylborane Chemical compound BN1CCCCC1 QRRJTGSPNLTVBV-UHFFFAOYSA-N 0.000 claims description 4
- 150000003512 tertiary amines Chemical class 0.000 claims description 4
- 125000001302 tertiary amino group Chemical group 0.000 claims description 4
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 4
- KXNUTWQZHXCNER-UHFFFAOYSA-N C1(=CC=CC=C1)CCNB Chemical compound C1(=CC=CC=C1)CCNB KXNUTWQZHXCNER-UHFFFAOYSA-N 0.000 claims description 3
- DUWJQLQZEANHRV-UHFFFAOYSA-N CC1N(C(CCC1)C)B Chemical compound CC1N(C(CCC1)C)B DUWJQLQZEANHRV-UHFFFAOYSA-N 0.000 claims description 3
- TUWOHNSFAIQLPO-UHFFFAOYSA-N CCBNC Chemical compound CCBNC TUWOHNSFAIQLPO-UHFFFAOYSA-N 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- HUQOFZLCQISTTJ-UHFFFAOYSA-N diethylaminoboron Chemical compound CCN([B])CC HUQOFZLCQISTTJ-UHFFFAOYSA-N 0.000 claims description 3
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 claims description 3
- YPTUAQWMBNZZRN-UHFFFAOYSA-N dimethylaminoboron Chemical compound [B]N(C)C YPTUAQWMBNZZRN-UHFFFAOYSA-N 0.000 claims description 3
- PALZAXLZULBBHA-UHFFFAOYSA-N dimethylazanide;vanadium(4+) Chemical compound [V+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C PALZAXLZULBBHA-UHFFFAOYSA-N 0.000 claims description 3
- YSTQWZZQKCCBAY-UHFFFAOYSA-L methylaluminum(2+);dichloride Chemical compound C[Al](Cl)Cl YSTQWZZQKCCBAY-UHFFFAOYSA-L 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- OTSOGXNIABDRQR-UHFFFAOYSA-N C(C)N(CC)[Ta] Chemical compound C(C)N(CC)[Ta] OTSOGXNIABDRQR-UHFFFAOYSA-N 0.000 claims description 2
- QQBINNXWRDRCHB-UHFFFAOYSA-N CCC(C)(C)N=[Ta](N(C)C)(N(C)C)N(C)C Chemical compound CCC(C)(C)N=[Ta](N(C)C)(N(C)C)N(C)C QQBINNXWRDRCHB-UHFFFAOYSA-N 0.000 claims description 2
- PDGHBHKZHSFTHO-UHFFFAOYSA-N CCN(C)[Ta](=NC(C)(C)C)(N(C)CC)N(C)CC Chemical compound CCN(C)[Ta](=NC(C)(C)C)(N(C)CC)N(C)CC PDGHBHKZHSFTHO-UHFFFAOYSA-N 0.000 claims description 2
- KKSXSQXELVXONV-UHFFFAOYSA-N CCN(C)[W](=NC(C)(C)C)(=NC(C)(C)C)N(C)CC Chemical compound CCN(C)[W](=NC(C)(C)C)(=NC(C)(C)C)N(C)CC KKSXSQXELVXONV-UHFFFAOYSA-N 0.000 claims description 2
- GODRSDDUYGEYDK-UHFFFAOYSA-N CCN(CC)[Ta](N(CC)CC)(N(CC)CC)=NC(C)(C)CC Chemical compound CCN(CC)[Ta](N(CC)CC)(N(CC)CC)=NC(C)(C)CC GODRSDDUYGEYDK-UHFFFAOYSA-N 0.000 claims description 2
- IVBDGJZEAHBGFJ-UHFFFAOYSA-N CCN(CC)[W](=NC(C)(C)C)(=NC(C)(C)C)N(CC)CC Chemical compound CCN(CC)[W](=NC(C)(C)C)(=NC(C)(C)C)N(CC)CC IVBDGJZEAHBGFJ-UHFFFAOYSA-N 0.000 claims description 2
- LYWGPKCZWZCWAG-UHFFFAOYSA-N CCN=[Ta](N(C)C)(N(C)C)N(C)C Chemical compound CCN=[Ta](N(C)C)(N(C)C)N(C)C LYWGPKCZWZCWAG-UHFFFAOYSA-N 0.000 claims description 2
- AEKOOYWLWGERES-UHFFFAOYSA-N CCN=[Ta](N(C)CC)(N(C)CC)N(C)CC Chemical compound CCN=[Ta](N(C)CC)(N(C)CC)N(C)CC AEKOOYWLWGERES-UHFFFAOYSA-N 0.000 claims description 2
- ZLKUSFBEBZOVGX-UHFFFAOYSA-N CCN=[Ta](N(CC)CC)(N(CC)CC)N(CC)CC Chemical compound CCN=[Ta](N(CC)CC)(N(CC)CC)N(CC)CC ZLKUSFBEBZOVGX-UHFFFAOYSA-N 0.000 claims description 2
- 229910004013 NO 2 Inorganic materials 0.000 claims description 2
- 229910021550 Vanadium Chloride Inorganic materials 0.000 claims description 2
- 125000005234 alkyl aluminium group Chemical group 0.000 claims description 2
- SKKMWRVAJNPLFY-UHFFFAOYSA-N azanylidynevanadium Chemical compound [V]#N SKKMWRVAJNPLFY-UHFFFAOYSA-N 0.000 claims description 2
- PPJPTAQKIFHZQU-UHFFFAOYSA-N bis(tert-butylimino)tungsten;dimethylazanide Chemical compound C[N-]C.C[N-]C.CC(C)(C)N=[W]=NC(C)(C)C PPJPTAQKIFHZQU-UHFFFAOYSA-N 0.000 claims description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- VSLPMIMVDUOYFW-UHFFFAOYSA-N dimethylazanide;tantalum(5+) Chemical compound [Ta+5].C[N-]C.C[N-]C.C[N-]C.C[N-]C.C[N-]C VSLPMIMVDUOYFW-UHFFFAOYSA-N 0.000 claims description 2
- 239000012153 distilled water Substances 0.000 claims description 2
- IMKXKRVWMWJAFF-UHFFFAOYSA-N n-bis[ethyl(methyl)amino]alumanyl-n-methylethanamine Chemical compound CCN(C)[Al](N(C)CC)N(C)CC IMKXKRVWMWJAFF-UHFFFAOYSA-N 0.000 claims description 2
- RPESBQCJGHJMTK-UHFFFAOYSA-I pentachlorovanadium Chemical compound [Cl-].[Cl-].[Cl-].[Cl-].[Cl-].[V+5] RPESBQCJGHJMTK-UHFFFAOYSA-I 0.000 claims description 2
- 239000008213 purified water Substances 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- OEIMLTQPLAGXMX-UHFFFAOYSA-I tantalum(v) chloride Chemical compound Cl[Ta](Cl)(Cl)(Cl)Cl OEIMLTQPLAGXMX-UHFFFAOYSA-I 0.000 claims description 2
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 claims description 2
- KPGXUAIFQMJJFB-UHFFFAOYSA-H tungsten hexachloride Chemical compound Cl[W](Cl)(Cl)(Cl)(Cl)Cl KPGXUAIFQMJJFB-UHFFFAOYSA-H 0.000 claims description 2
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 claims description 2
- WIDQNNDDTXUPAN-UHFFFAOYSA-I tungsten(v) chloride Chemical compound Cl[W](Cl)(Cl)(Cl)Cl WIDQNNDDTXUPAN-UHFFFAOYSA-I 0.000 claims description 2
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 2
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 claims description 2
- TYAFTSSBHXMDSM-UHFFFAOYSA-N diethylazanide;vanadium(4+) Chemical compound [V+4].CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC TYAFTSSBHXMDSM-UHFFFAOYSA-N 0.000 claims 2
- GOVWJRDDHRBJRW-UHFFFAOYSA-N diethylazanide;zirconium(4+) Chemical compound [Zr+4].CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC GOVWJRDDHRBJRW-UHFFFAOYSA-N 0.000 claims 2
- MMMVJDFEFZDIIM-UHFFFAOYSA-N 2-$l^{1}-azanyl-2-methylpropane Chemical compound CC(C)(C)[N] MMMVJDFEFZDIIM-UHFFFAOYSA-N 0.000 claims 1
- MHMBUJVKUFAYFM-UHFFFAOYSA-N C(C)N(C)[Ta] Chemical compound C(C)N(C)[Ta] MHMBUJVKUFAYFM-UHFFFAOYSA-N 0.000 claims 1
- KVKAPJGOOSOFDJ-UHFFFAOYSA-N CN(C)[Ta] Chemical compound CN(C)[Ta] KVKAPJGOOSOFDJ-UHFFFAOYSA-N 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 94
- 229910052582 BN Inorganic materials 0.000 description 39
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 38
- 230000008021 deposition Effects 0.000 description 22
- 239000000463 material Substances 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 12
- 239000010410 layer Substances 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 11
- TVJORGWKNPGCDW-UHFFFAOYSA-N aminoboron Chemical compound N[B] TVJORGWKNPGCDW-UHFFFAOYSA-N 0.000 description 10
- 125000004432 carbon atom Chemical group C* 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- BGECDVWSWDRFSP-UHFFFAOYSA-N borazine Chemical compound B1NBNBN1 BGECDVWSWDRFSP-UHFFFAOYSA-N 0.000 description 6
- 229910052810 boron oxide Inorganic materials 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- BIVNKSDKIFWKFA-UHFFFAOYSA-N N-propan-2-yl-N-silylpropan-2-amine Chemical compound CC(C)N([SiH3])C(C)C BIVNKSDKIFWKFA-UHFFFAOYSA-N 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 5
- 150000001639 boron compounds Chemical class 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 239000002019 doping agent Substances 0.000 description 5
- 238000011068 loading method Methods 0.000 description 5
- SOLWORTYZPSMAK-UHFFFAOYSA-N n-[bis(dimethylamino)boranyl]-n-methylmethanamine Chemical compound CN(C)B(N(C)C)N(C)C SOLWORTYZPSMAK-UHFFFAOYSA-N 0.000 description 5
- 230000000737 periodic effect Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 4
- 241001493498 Ipomoea jalapa Species 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 239000012686 silicon precursor Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- GNZBDLMUHMACNZ-UHFFFAOYSA-N N-(disilanyl)-N-propan-2-ylpropan-2-amine Chemical compound CC(C)N([SiH2][SiH3])C(C)C GNZBDLMUHMACNZ-UHFFFAOYSA-N 0.000 description 3
- ANSYKGYLJJTCPH-UHFFFAOYSA-N N-butan-2-yl-N-(disilanyl)butan-2-amine Chemical compound CCC(C)N([SiH2][SiH3])C(C)CC ANSYKGYLJJTCPH-UHFFFAOYSA-N 0.000 description 3
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Images
Classifications
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
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- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
- C07F5/02—Boron compounds
- C07F5/027—Organoboranes and organoborohydrides
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
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- C07F5/022—Boron compounds without C-boron linkages
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
- C07F5/02—Boron compounds
- C07F5/05—Cyclic compounds having at least one ring containing boron but no carbon in the ring
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- C23C16/34—Nitrides
- C23C16/342—Boron nitride
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
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Abstract
Description
基材を反応器中に提供する工程と、
以下の式I及びII:
基材の少なくとも1つの表面を反応チャンバー中に提供する工程と;以下の式I及びII:
a.基材を反応器中に提供する工程と、
b.以下の式I及びII:
c.反応器をパージガスでパージする工程と、
d.酸素含有源を提供して、少なくとも1つの表面上に膜を堆積する堆積工程と、
e.反応器をパージガスでパージする工程とを含み、
工程b〜eが、膜の所望の厚さが得られるまで繰り返される方法が提供される。1つの特定の実施形態において、堆積工程は、約室温〜約1000℃、又は室温〜約400℃、又は室温〜約300℃、又は室温〜約200℃、又は室温〜約100℃の範囲の1つ又は複数の温度で行われる。
a.基材を反応器中に提供する工程と、
b.以下の式I及びII:
c.反応器をパージガスでパージする工程と、
d.酸素含有源を提供して、少なくとも1つの表面上に膜を堆積する堆積工程と、
e.反応器をパージガスでパージする工程と、
f.少なくとも1つのケイ素含有源を反応器中に導入する工程と、
g.反応器をパージガスでパージする工程と、
h.酸素含有源を提供して、少なくとも1つの表面上に膜を堆積する堆積工程と、
i.反応器をパージガスでパージする工程とを含み、
工程b〜iが、膜の所望の厚さが得られるまで繰り返される方法が提供される。幾つかの実施形態において、工程b〜eが繰り返され、次いで、工程f〜iが繰り返されて、酸化ホウ素及び酸化ケイ素からなるナノラミネート層を堆積する。他の実施形態において、工程f〜iを行い繰り返して、その後、工程b〜eを繰り返すことができる。ナノラミネートのために、酸化ケイ素の厚さは、1〜5000Å、10〜2000Å、50〜1500Å、50〜1000Å、50〜500Åの範囲であることができ、一方で、酸化ホウ素の厚さは、1〜5000Å、10〜2000Å、50〜1500Å、50〜1000Å、50〜500Åの範囲である。1つの特定の実施形態において、堆積工程は、約室温〜約1000℃、又は室温〜約400℃、又は室温〜約300℃、又は室温〜約200℃、又は室温〜約100℃の範囲の1つ又は複数の温度で行われる。別の特定の実施形態において、ケイ素含有源が、少なくとも1つのSiH3基を有する場合、例えば、ジイソプロピルアミノシラン、ジ−sec−ブチルアミノシラン、ジイソプロピルアミノジシラン、ジ−sec−ブチルアミノジシランが用いられる場合、堆積工程は200℃未満の温度で行われる。
a.基材を反応器中に提供する工程と、
b.以下の式I及びII:
c.反応器をパージガスでパージする工程と、
d.窒素含有源を提供して、少なくとも1つの表面上に膜を堆積する堆積工程と、
e.反応器をパージガスでパージする工程とを含み、
工程b〜eが、膜の所望の厚さが得られるまで繰り返される方法が提供される。1つの特定の実施形態において、堆積工程は、約室温〜約1000℃、又は室温〜約400℃、又は室温〜約300℃、又は室温〜約200℃、又は室温〜約100℃の範囲の1つ又は複数の温度で行われる。
a.基材を反応器中に提供する工程と、
b.以下の式I及びII:
c.反応器をパージガスでパージする工程と、
d.窒素含有源を提供して、少なくとも1つの表面上に膜を堆積する堆積工程と、
e.反応器をパージガスでパージする工程と、
f.少なくとも1つのケイ素含有源を反応器中に導入する工程と、
g.反応器をパージガスでパージする工程と、
h.窒素含有源を提供して、少なくとも1つの表面上に膜を堆積する堆積工程と、
i.反応器をパージガスでパージする工程とを含み、
工程b〜gが、膜の所望の厚さが得られるまで繰り返される方法が提供される。幾つかの実施形態において、工程b〜eが繰り返され、次いで、工程f〜iが繰り返されて、窒化ホウ素及び窒化ケイ素からなるナノラミネート層を堆積する。他の実施形態において、最初に工程f〜iを行い繰り返して、その後、工程b〜eを繰り返すことができる。ナノラミネートのために、窒化ケイ素の厚さは、1〜5000Å、10〜2000Å、50〜1500Å、50〜1000Å、50〜500Åの範囲であることができ、一方で、窒化ホウ素の厚さは、1〜5000Å、10〜2000Å、50〜1500Å、50〜1000Å、50〜500Åの範囲である。1つの特定の実施形態において、堆積工程は、約室温〜約1000℃、又は室温〜約400℃、又は室温〜約300℃、又は室温〜約200℃、又は室温〜約100℃の範囲の1つ又は複数の温度で行われる。別の特定の実施形態において、ケイ素含有源が、少なくとも1つのSiH3基を有する場合、例えば、ジイソプロピルアミノシラン、ジ−sec−ブチルアミノシラン、ジイソプロピルアミノジシラン、ジ−sec−ブチルアミノジシランが用いられる場合、堆積工程は200℃未満の温度で行われる。
a.基材を反応器中に提供する工程と、
b.以下の式I及びII:
c.反応器をパージガスでパージする工程と、
d.窒素含有源を提供して、少なくとも1つの表面上に膜を堆積する堆積工程と、
e.反応器をパージガスでパージする工程と、
f.少なくとも1つの金属含有源を反応器中に導入する工程と、
g.反応器をパージガスでパージする工程と、
h.窒素含有源を提供して、少なくとも1つの表面上に膜を堆積する堆積工程と、
i.反応器をパージガスでパージする工程とを含み、
工程b〜gが、膜の所望の厚さが得られるまで繰り返される方法が提供される。幾つかの実施形態において、工程b〜eが繰り返され、次いで、工程f〜iが繰り返されて、窒化ホウ素及び金属窒化物からなるナノラミネート層を堆積する。他の実施形態において、最初に工程f〜iを行い繰り返して、その後、工程b〜eを繰り返すことができる。ナノラミネートのために、金属窒化物の厚さは、1〜5000Å、10〜2000Å、50〜1500Å、50〜1000Å、50〜500Åの範囲であることができ、一方で、窒化ホウ素の厚さは、1〜5000Å、10〜2000Å、50〜1500Å、50〜1000Å、50〜500Åの範囲である。1つの特定の実施形態において、堆積工程は、約室温〜約1000℃、又は室温〜約400℃、又は室温〜約300℃、又は室温〜約200℃、又は室温〜約100℃の範囲の1つ又は複数の温度で行われる。金属含有源を使用する方法の実施形態において、金属含有源としては、限定されないが、トリメチルアルミニウム、トリエチルアルミニウム、トリス(ジメチルアミノ)アルミニウム、トリス(エチルメチルアミノ)アルミニウム、塩化アルキルアルミニウム(例えば、塩化メチルアルミニウム、DMACl)、AlCl3、トリメチルアルミニウム(TMA)、トリエチルアルミニウム、塩化メチルアルミニウム(MeAlCl2)、トリス(ジメチルアミノ)アルミニウム(TDMAA)、トリス(ジメチルアミノ)アルミニウム(TDMAA)、及びトリス(ジエチルアミノ)アルミニウム(TDEAA)、塩化ジルコニウム(ZrCl4)、テトラキス(ジメチルアミノ)ジルコニウム(TDMAZ)、テトラキス(ジエチルアミノ)ジルコニウム(TDEAZ)、テトラキス(エチルメチルアミノ)ジルコニウム(TEMAZ)、テトラキス(ジメチルアミノ)ハフニウム(TDMAH)、テトラキス(ジエチルアミノ)ハフニウム(TDEAH)、及びテトラキス(エチルメチルアミノ)ハフニウム(TEMAH)、塩化チタン(TiCl4)、テトラキス(ジメチルアミノ)チタン(TDMAT)、テトラキス(ジエチルアミノ)チタン(TDEAT)、テトラキス(エチルメチルアミノ)チタン(TEMAT)、塩化バナジウム、テトラキス(ジメチルアミノ)バナジウム(TDMAV)、テトラキス(ジエチルアミノ)バナジウム(TDEAV)、テトラキス(エチルメチルアミノ)バナジウム(TEMAV)、塩化タンタル(TaCl5)、tert−ブチルイミノトリ(ジエチルアミノ)タンタル(TBTDET)、tert−ブチルイミノトリ(ジメチルアミノ)タンタル(TBTDMT)、tert−ブチルイミノトリ(エチルメチルアミノ)タンタル(TBTEMT)、エチルイミノトリ(ジエチルアミノ)タンタル(EITDET)、エチルイミノトリ(ジメチルアミノ)タンタル(EITDMT)、エチルイミノトリ(エチルメチルアミノ)タンタル(EITEMT)、tert−アミルイミノトリ(ジメチルアミノ)タンタル(TAIMAT)、tert−アミルイミノトリ(ジエチルアミノ)タンタル、ペンタキス(ジメチルアミノ)タンタル、tert−アミルイミノトリ(エチルメチルアミノ)タンタル、六フッ化タングステン、六塩化タングステン、五塩化タングステン、ビス(tert−ブチルイミノ)ビス(ジメチルアミノ)タングステン(BTBMW)、ビス(tert−ブチルイミノ)ビス(ジエチルアミノ)タングステン、ビス(tert−ブチルイミノ)ビス(エチルメチルアミノ)タングステン、並びにそれらの組み合わせが挙げられる。
13.56MHzの直接プラズマを持つシャワーヘッド設計を備えたCN−1反応器中にシリコンウエハを設置し、2Torrのチャンバー圧力で300℃に加熱した。公知のホウ素含有前駆体のトリス(ジメチルアミノ)ボラン(TDMAB)をホウ素前駆体として使用し、ベーパードロー法を使用して反応器チャンバーに輸送した。ALDサイクルは以下のプロセス工程で構成されていた:
a.反応器及び装填ウエハを準備する
・チャンバー圧力:2Torr
b.反応器にホウ素含有前駆体を導入する
・N2流の総流量:1000sccm
・TDMABパルス:0.5秒間
c.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間
d.プラズマを導入する
・N2流の総流量:1000sccm
・プラズマ電力:125W
・プラズマパルス:10秒間
e.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間。
工程b〜eを、それぞれ、200サイクル、400サイクル、及び600サイクル繰り返した。窒化ホウ素についての成長速度を、0.10Å/サイクルとして、サイクル数に対する厚さのグラフから計算した。
13.56MHzの直接プラズマを持つシャワーヘッド設計を備えたCN−1反応器中にシリコンウエハを設置し、2Torrのチャンバー圧力で300℃に加熱した。ホウ素前駆体としてジ−sec−ブチルアミノボラン(DSBAB)を、ベーパードロー法を使用して反応器チャンバーに輸送した。ALDサイクルは以下のプロセス工程で構成されていた:
a.反応器及び装填ウエハを準備する
・チャンバー圧力:2Torr
b.反応器にホウ素含有前駆体を導入する
・N2流の総流量:1000sccm
・DSBABパルス:0.5〜1.5秒間
c.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間
d.プラズマを導入する
・N2流の総流量:1000sccm
・プラズマ電力:125W
・プラズマパルス:20秒間
e.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間。
工程b〜eを、図1に示されるようなホウ素飽和試験について、それぞれ、0.5秒間、1.0秒間、及び1.5秒間のDSBABパルスを使用して200サイクル繰り返し、DSBABが約1秒間でALD自己制御に達したことを示した。図2は、工程b〜eを、様々なN2パルスを用いて200サイクル繰り返して、N2プラズマが約10秒間でALD自己制御に達することが確かめられたことを示している。別の実験において、工程b〜eを、それぞれ、100サイクル、200サイクル、及び500サイクル繰り返した。窒化ホウ素についての成長速度を、0.14Å/サイクルとしてサイクル数に対する厚さのグラフから計算し、DSBABが比較例1で説明したTDMABより高い成長速度を有することを示した。別のセットの実験では、工程b〜eを、100〜400℃の温度で、DSBAB/パージ/N2プラズマ/パージ=1秒間/10秒間/20秒間*/10秒間の条件で200サイクル繰り返した。ここで図3を参照すると、図3では、様々な基材温度で、窒化ホウ素がDSBAB及びN2プラズマから堆積したことを示し、DSBABが、ALD堆積プロセス(例えば、約150〜約350℃で行われたALDプロセス)での使用に適していることを示した。
13.56MHzの直接プラズマを持つシャワーヘッド設計を備えたCN−1反応器中にシリコンウエハを設置し、2Torrのチャンバー圧力で300℃に加熱した。ホウ素前駆体としてジ−sec−ブチルアミノボラン(DSBAB)、及び有機アミノシラン前駆体としてジイソプロピルアミノシラン(DIPAS)を、ベーパードロー法を使用して反応器チャンバーに輸送した。ALDサイクルは以下のプロセスパラメータで構成されていた:
a.反応器及び装填ウエハを準備する
・チャンバー圧力:2Torr
b.反応器にホウ素含有前駆体を導入する
・N2流の総流量:1000sccm
・DSBABパルス:0.5秒間
c.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間
d.プラズマを導入する
・N2流の総流量:1000sccm
・プラズマ電力:125W
・プラズマパルス:20秒間
e.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間
f.反応器に有機アミノシラン含有前駆体を導入する
・N2流の総流量:1000sccm
・DIPASパルス:1秒間
g.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間
h.プラズマを導入する
・N2流の総流量:1000sccm
・プラズマ電力:125W
・プラズマパルス:10秒間
i.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間。
この例において、工程b〜eを有する窒化ホウ素を1回と、その後、工程f〜iを有する窒化ケイ素を5回とからなる1つのスーパーサイクル(super cycle)(すなわち、スーパーサイクル=窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=0.5秒間/10秒間/20秒間*/10秒間)×1サイクル+窒化ケイ素:(DIPAS/パージ/プラズマ/パージ=1.0秒間/10秒間/10秒間*/10秒間)×5サイクル)を繰り返した。そのスーパーサイクルを200回(すなわち、(窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=0.5秒間/10秒間/20秒間*/10秒間)×1サイクル+窒化ケイ素:(DIPAS/パージ/プラズマ/パージ=1.0秒間/10秒間/10秒間*/10秒間)×5サイクル)×200サイクル)繰り返した。透過型電子顕微鏡(TEM)測定は以下の厚さ:155Åのホウ素ドープ窒化ケイ素を示した。得られた膜の二次イオン質量分析法(SIMS)での分析では、以下の組成:B=5.99at%、Si=33.0at%、N=46.83at%、O=2.35at%、C=1.89at%、H=9.94at%を示した。別の実験において、工程b〜eを有する窒化ホウ素を2回と、その後、工程f〜iを有する窒化ケイ素を5回とからなる1つのスーパーサイクル(すなわち、(スーパーサイクル=窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=0.5秒間/10秒間/20秒間*/10秒間)×2サイクル+窒化ケイ素:(DIPAS/パージ/プラズマ/パージ=1.0秒間/10秒間/10秒間*/10秒間)×5サイクル)を繰り返した。そのスーパーサイクルを200回(すなわち、(窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=0.5秒間/10秒間/20秒間*/10秒間)×2サイクル+窒化ケイ素:(DIPAS/パージ/プラズマ/パージ=1.0秒間/10秒間/10秒間*/10秒間)×5サイクル)×200サイクル)繰り返した。TEM測定は170Åの膜厚を示した。得られた膜の二次イオン質量分析法(SIMS)での分析では、以下の組成:B=12.86at%、Si=26.42at%、N=44.28at%、O=1.42at%、C=4.36at%、H=10.68at%を示した。別の実験において、工程b〜eを有する窒化ホウ素を2回と、その後、工程f〜iを有する窒化ケイ素を10回とからなる1つのスーパーサイクル(すなわち、(スーパーサイクル=窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=0.5秒間/10秒間/20秒間*/10秒間)×1サイクル+窒化ケイ素:(DIPAS/パージ/プラズマ/パージ=1.0秒間/10秒間/10秒間*/10秒間)×10サイクル)を繰り返した。そのスーパーサイクルを100回(すなわち、(窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=0.5秒間/10秒間/20秒間*/10秒間)×1サイクル+窒化ケイ素:(DIPAS/パージ/プラズマ/パージ=1.0秒間/10秒間/10秒間*/10秒間)×10サイクル)×100サイクル)繰り返した。TEM測定は150Åの膜厚を示した。得られた膜の二次イオン質量分析法(SIMS)での分析では、以下の組成:B=4.63at%、Si=35.72at%、N=48.89at%、O=2.27at%、C=1.82at%、H=6.67at%を示した。
13.56MHzの直接プラズマを持つシャワーヘッド設計を備えたCN−1反応器中にシリコンウエハを設置し、2Torrのチャンバー圧力で300℃に加熱した。ホウ素前駆体としてジ−sec−ブチルアミノボラン(DSBAB)をベーパードロー法を使用して、及び金属含有前駆体としてテトラキス(ジメチルアミノ)チタン(TDMAT)をバブリング(Ar流量は50sccmであった)を使用して反応器チャンバーに輸送した。ALDサイクルは以下のプロセスパラメータで構成されていた:
a.反応器及び装填ウエハを準備する
・チャンバー圧力:2Torr
b.反応器にホウ素含有前駆体を導入する
・N2流の総流量:1000sccm
・DSBABパルス:1秒間
c.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間
d.プラズマを導入する
・N2流の総流量:1000sccm
・プラズマ電力:125W
・プラズマパルス:20秒間
e.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間
f.反応器に金属含有前駆体を導入する
・N2流の総流量:1000sccm
・TDMATパルス:1秒間
g.パージする
・N2の総流量:1000sccm
・パージ時間:20秒間
h.プラズマを導入する
・N2流の総流量:1000sccm
・プラズマ電力:125W
・プラズマパルス:5秒間
i.パージする
・N2の総流量:1000sccm
・パージ時間:10秒間。
この例において、工程b〜eを有する窒化ホウ素を1回と、その後、工程f〜iを有する窒化チタンを5回とからなる1つのスーパーサイクル(すなわち、スーパーサイクル=窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=1秒間/10秒間/20秒間*/10秒間)×1サイクル+窒化チタン:(TDMAT/パージ/プラズマ/パージ=1.0秒間/20秒間/10秒間*/10秒間)×5サイクル)を繰り返した。そのスーパーサイクルを50回(すなわち、(窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=1秒間/10秒間/20秒間*/10秒間)×1サイクル+窒化チタン:(TDMAT/パージ/プラズマ/パージ=1.0秒間/20秒間/10秒間*/10秒間)×5サイクル)×50サイクル)繰り返した。TEM測定は以下の厚さ:230Åのホウ素ドープ窒化チタンを示した。得られた膜の二次イオン質量分析法(SIMS)での分析では、以下の組成:B=2.82at%、Ti=41.02at%、N=47.73at%、O=2.61at%、C=3.62at%、H=2.48at%を示した。別の実験において、工程b〜eを有する窒化ホウ素を2回と、その後、工程f〜iを有する窒化チタンを5回とからなる1つのスーパーサイクル(すなわち、スーパーサイクル=窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=1秒間/10秒間/20秒間*/10秒間)×2サイクル+窒化チタン:(TDMAT/パージ/プラズマ/パージ=1.0秒間/20秒間/10秒間*/10秒間)×5サイクル)を繰り返した。そのスーパーサイクルを50回(すなわち、窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=1秒間/10秒間/20秒間*/10秒間)×2サイクル+窒化チタン:(TDMAT/パージ/プラズマ/パージ=1.0秒間/20秒間/10秒間*/10秒間)×5サイクル)×50サイクル)繰り返した。TEM測定は以下の厚さ:220Åのホウ素ドープ窒化チタンの膜厚を示した。得られた膜の二次イオン質量分析法(SIMS)での分析では、以下の組成:B=5.90at%、Ti=37.58at%、N=46.95at%、O=1.85at%、C=4.12at%、H=3.59at%を示した。図4では、ホウ素含有量に対する、堆積したホウ素ドープ窒化チタンの抵抗率を示し、堆積パラメータを変化させることで、膜特性を調整することができることを示した。コンフォマリティ又は段差被覆率を試験するために、AR=12:1(幅=95nm、深さ=1160nm)を有するパターンウエハ片を用いた。この実験において、工程b〜eを有する窒化ホウ素を2回と、その後、工程f〜iを有する窒化チタンを5回とからなる1つのスーパーサイクル(すなわち、(スーパーサイクル=窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=1秒間/10秒間/20秒間*/10秒間)×2サイクル+窒化チタン:(TDMAT/パージ/プラズマ/パージ=1.0秒間/20秒間/10秒間*/10秒間)×5サイクル)を繰り返した。そのスーパーサイクルを50回(すなわち、窒化ホウ素:(DSBAB/パージ/プラズマ/パージ=1秒間/10秒間/20秒間*/10秒間)×2サイクル+窒化チタン:(TDMAT/パージ/プラズマ/パージ=1.0秒間/20秒間/10秒間*/10秒間)×5サイクル)×50サイクル:(10サイクルについては、DIPAS/パージ/プラズマ/パージ=1.0秒間/10秒間/10秒間*/10秒間)×50サイクル)繰り返した。TEM測定(図5)は、以下の厚さ:上部220Å、中央部220Å、及び下部220Åを示し、それは、100%のコンフォマリティ又は段差被覆率に相当する。
Claims (20)
- 式Iを有する化合物及び式IIを有する化合物からなる群より選択され、
- 前記化合物が、ジメチルアミノボラン、ジエチルアミノボラン、エチルメチルアミノボラン、ジイソプロピルアミノボラン、ジ−sec−ブチルアミノボラン、N−エチルシクロヘキシルアミノボラン、N−メチルシクロへキシルアミノボラン、N−イソプロピルシクロヘキシルアミノボラン、フェニルメチルアミノボラン、フェニルエチルアミノボラン、ピペリジノボラン、2,6−ジメチルピペリジノボラン、ジイソプロピルアミノジボラン、ジ−sec−ブチルアミノジボラン、2,6−ジメチルピペリジノジボラン、及び2,2,6,6−テトラメチルピペリジノボランからなる群より選択される少なくとも1つの要素を含む、請求項1に記載の前駆体。
- (a)式I又はII:
(b)少なくとも1つの溶媒とを含む組成物であって、前記溶媒がある沸点を有し、前記溶媒の沸点と、前記少なくとも1つのホウ素含有前駆体の沸点との間の差が40℃以下である、組成物。 - 前記化合物が、ジメチルアミノボラン、ジエチルアミノボラン、エチルメチルアミノボラン、ジイソプロピルアミノボラン、ジ−sec−ブチルアミノボラン、N−エチルシクロヘキシルアミノボラン、N−メチルシクロへキシルアミノボラン、N−イソプロピルシクロヘキシルアミノボラン、フェニルメチルアミノボラン、フェニルエチルアミノボラン、ピペリジノボラン、2,6−ジメチルピペリジノボラン、ジイソプロピルアミノジボラン、ジ−sec−ブチルアミノジボラン、2,6−ジメチルピペリジノジボラン、及び2,2,6,6−テトラメチルピペリジノボランからなる群より選択される少なくとも1つの要素を含む、請求項3に記載の組成物。
- 前記溶媒が、エーテル、3級アミン、アルキル炭化水素、芳香族炭化水素、3級アミノエーテルからなる群より選択される少なくとも1つの要素を含む、請求項3に記載の組成物。
- 基材の少なくとも表面上にホウ素含有膜を堆積する方法であって、
反応器中に前記基材を提供する工程と、
以下の式I及びII:
を含む方法。 - 原子層堆積プロセス又はALD型プロセスにより、ホウ素ドープ窒化ケイ素、ホウ素ドープ炭窒化ケイ素、ホウ素ドープ炭酸窒化ケイ素の膜を形成する方法であって、
a.基材を反応器中に提供する工程と、
b.以下の式I及びII:
c.前記反応器をパージガスでパージする工程と、
d.少なくとも1つの窒素含有源を提供して、前記少なくとも1つの表面上に前記膜を堆積する工程と、
e.前記反応器をパージガスでパージする工程と、
f.少なくとも1つのケイ素含有源を前記反応器中に導入する工程と、
g.前記反応器をパージガスでパージする工程と、
h.少なくとも1つの窒素含有源を提供して、前記少なくとも1つの表面上に前記膜を堆積する工程と、
i.前記反応器をパージガスでパージする工程とを含み、
工程b〜iが、前記膜の所望の厚さが得られるまで繰り返される方法。 - 前記窒素含有源が、アンモニア、ヒドラジン、モノアルキルヒドラジン、ジアルキルヒドラジン、有機アミン、有機アミンプラズマ、窒素、窒素プラズマ、窒素/水素、窒素/ヘリウム、窒素/アルゴンプラズマ、アンモニアプラズマ、アンモニア/ヘリウムプラズマ、アンモニア/アルゴンプラズマ、アンモニア/窒素プラズマ、NF3、NF3プラズマ、及びそれらの混合物からなる群より選択される少なくとも1つの要素を含む、請求項7に記載の方法。
- 原子層堆積プロセス又はALD型プロセスにより、ホウ素ドープ酸化ケイ素、ホウ素ドープ炭酸化ケイ素の膜を形成する方法であって、
a.基材を反応器中に提供する工程と、
b.以下の式I及びII:
c.前記反応器をパージガスでパージする工程と、
d.少なくとも1つの酸素含有源を提供して、前記少なくとも1つの表面上に前記膜を堆積する工程と、
e.前記反応器をパージガスでパージする工程と、
f.少なくとも1つのケイ素含有源を前記反応器中に導入する工程と、
g.前記反応器をパージガスでパージする工程と、
h.少なくとも1つの酸素含有源を提供して、前記少なくとも1つの表面上に前記膜を堆積する工程と、
i.前記反応器をパージガスでパージする工程とを含み、
工程b〜iが、前記膜の所望の厚さが得られるまで繰り返される方法。 - 前記酸素含有源が、オゾン、水(H2O)(例えば、脱イオン水、精製水、及び/又は蒸留水)、酸素(O2)、オゾンプラズマ、酸素プラズマ、NO、N2O、NO2、一酸化炭素(CO)、二酸化炭素(CO2)、及びそれらの組み合わせからなる群より選択される少なくとも1つの要素を含む、請求項9に記載の方法。
- 原子層堆積プロセス又はALD型プロセスにより、ホウ素ドープ金属窒化物、ホウ素ドープ金属炭窒化物、ホウ素ドープ金属炭酸窒化物の膜を形成する方法であって、
a.基材を反応器中に提供する工程と、
b.以下の式I及びII:
c.前記反応器をパージガスでパージする工程と、
d.少なくとも1つの窒素含有源を提供して、前記少なくとも1つの表面上に前記膜を堆積する工程と、
e.前記反応器をパージガスでパージする工程と、
f.少なくとも1つの金属含有源を前記反応器中に導入する工程と、
g.前記反応器をパージガスでパージする工程と、
h.少なくとも1つの窒素含有源を提供して、前記少なくとも1つの表面上に前記膜を堆積する工程と、
i.前記反応器をパージガスでパージする工程とを含み、
工程b〜iが、前記膜の所望の厚さが得られるまで繰り返される方法。 - 前記窒素含有源が、アンモニア、ヒドラジン、モノアルキルヒドラジン、ジアルキルヒドラジン、有機アミン、有機アミンプラズマ、窒素、窒素プラズマ、窒素/水素、窒素/ヘリウム、窒素/アルゴンプラズマ、アンモニアプラズマ、アンモニア/ヘリウムプラズマ、アンモニア/アルゴンプラズマ、アンモニア/窒素プラズマ、NF3、NF3プラズマ、及びそれらの混合物からなる群より選択される少なくとも1つの要素を含む、請求項11に記載の方法。
- 前記金属含有源が、トリメチルアルミニウム、トリエチルアルミニウム、トリス(ジメチルアミノ)アルミニウム、トリス(エチルメチルアミノ)アルミニウム、塩化アルキルアルミニウム(例えば、塩化メチルアルミニウム、DMACl)、AlCl3、トリメチルアルミニウム(TMA)、トリエチルアルミニウム、塩化メチルアルミニウム(MeAlCl2)、トリス(ジメチルアミノ)アルミニウム(TDMAA)、トリス(ジメチルアミノ)アルミニウム(TDMAA)、及びトリス(ジエチルアミノ)アルミニウム(TDEAA)、塩化ジルコニウム(ZrCl4)、テトラキス(ジメチルアミノ)ジルコニウム(TDMAZ)、テトラキス(ジエチルアミノ)ジルコニウム(TDEAZ)、テトラキス(エチルメチルアミノ)ジルコニウム(TEMAZ)、テトラキス(ジメチルアミノ)ハフニウム(TDMAH)、テトラキス(ジエチルアミノ)ハフニウム(TDEAH)、及びテトラキス(エチルメチルアミノ)ハフニウム(TEMAH)、塩化チタン(TiCl4)、テトラキス(ジメチルアミノ)チタン(TDMAT)、テトラキス(ジエチルアミノ)チタン(TDEAT)、テトラキス(エチルメチルアミノ)チタン(TEMAT)、塩化バナジウム、テトラキス(ジメチルアミノ)バナジウム(TDMAV)、テトラキス(ジエチルアミノ)バナジウム(TDEAV)、テトラキス(エチルメチルアミノ)バナジウム(TEMAV)、塩化タンタル(TaCl5)、tert−ブチルイミノトリ(ジエチルアミノ)タンタル(TBTDET)、tert−ブチルイミノトリ(ジメチルアミノ)タンタル(TBTDMT)、tert−ブチルイミノトリ(エチルメチルアミノ)タンタル(TBTEMT)、エチルイミノトリ(ジエチルアミノ)タンタル(EITDET)、エチルイミノトリ(ジメチルアミノ)タンタル(EITDMT)、エチルイミノトリ(エチルメチルアミノ)タンタル(EITEMT)、tert−アミルイミノトリ(ジメチルアミノ)タンタル(TAIMAT)、tert−アミルイミノトリ(ジエチルアミノ)タンタル、ペンタキス(ジメチルアミノ)タンタル、tert−アミルイミノトリ(エチルメチルアミノ)タンタル、六フッ化タングステン、六塩化タングステン、五塩化タングステン、ビス(tert−ブチルイミノ)ビス(ジメチルアミノ)タングステン(BTBMW)、ビス(tert−ブチルイミノ)ビス(ジエチルアミノ)タングステン、ビス(tert−ブチルイミノ)ビス(エチルメチルアミノ)タングステン、並びにそれらの組み合わせからなる群より選択される少なくとも1つの要素を含む、請求項11に記載の方法。
- 前記ホウ素ドープ金属窒化物が、ホウ素ドープ窒化チタン、ホウ素ドープ窒化ジルコニウム、ホウ素ドープ窒化ハフニウム、ホウ素ドープ窒化バナジウム、ホウ素ドープ窒化タンタル、ホウ素ドープ窒化アルミニウム、ホウ素ドープ窒化タングステン、及びそれらの組み合わせからなる群より選択される少なくとも1つの要素を含む、請求項11に記載の方法。
- 前記ホウ素ドープ金属窒化物が10at%以下のホウ素を有する、請求項11に記載の方法。
- 前記ホウ素ドープ金属窒化物が8at%以下のホウ素を有する、請求項11に記載の方法。
- 請求項6に従って製造されたホウ素含有膜。
- 請求項7に従って製造されたホウ素含有膜。
- 請求項9に従って製造されたホウ素含有膜。
- 請求項11に従って製造されたホウ素含有膜。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020076114A (ja) * | 2018-11-05 | 2020-05-21 | 株式会社Adeka | 薄膜形成用原料及び薄膜の製造方法 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10763103B2 (en) * | 2015-03-31 | 2020-09-01 | Versum Materials Us, Llc | Boron-containing compounds, compositions, and methods for the deposition of a boron containing films |
JP6986425B2 (ja) * | 2016-12-22 | 2021-12-22 | 東京応化工業株式会社 | 不純物拡散剤組成物、及び半導体基板の製造方法 |
US11011371B2 (en) * | 2016-12-22 | 2021-05-18 | Applied Materials, Inc. | SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material |
KR102020211B1 (ko) * | 2017-01-09 | 2019-11-04 | 주식회사 테스 | 탄소 및/또는 보론를 포함하는 비정질 실리콘막의 형성 방법 |
US10584039B2 (en) * | 2017-11-30 | 2020-03-10 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Titanium-containing film forming compositions for vapor deposition of titanium-containing films |
CN108622857B (zh) * | 2018-04-13 | 2021-06-04 | 河南师范大学 | 环状硼氮氢化合物氨基乙硼烷的制备方法 |
US11328928B2 (en) * | 2018-06-18 | 2022-05-10 | Applied Materials, Inc. | Conformal high concentration boron doping of semiconductors |
WO2020020972A1 (en) * | 2018-07-24 | 2020-01-30 | Cic Nanogune - Asociación Centro De Investigación Cooperativa En Nanociencias | Method for producing organic-inorganic hybrid materials |
SG11202109675XA (en) * | 2019-03-12 | 2021-10-28 | Univ Of Vermont And State Agricultural College | Low-temperature formation of group 13-15 ceramics and group 13-15-16 ceramics |
US20200318237A1 (en) * | 2019-04-05 | 2020-10-08 | Asm Ip Holding B.V. | Methods for forming a boron nitride film by a plasma enhanced atomic layer deposition process |
WO2020263718A1 (en) * | 2019-06-24 | 2020-12-30 | Lam Research Corporation | Selective carbon deposition |
US20210040607A1 (en) * | 2019-08-07 | 2021-02-11 | Applied Materials, Inc. | Modified stacks for 3d nand |
WO2021091835A1 (en) * | 2019-11-08 | 2021-05-14 | Applied Materials, Inc. | Methods to reduce material surface roughness |
US11352693B1 (en) * | 2020-04-24 | 2022-06-07 | United States Of America As Represented By The Administrator Of Nasa | Boron aluminum oxide compound deposited by atomic layer deposition on product used for radiation shielding |
WO2022187238A1 (en) * | 2021-03-02 | 2022-09-09 | Versum Materials Us, Llc | Compositions and methods using same for films comprising silicon and boron |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3031503A (en) * | 1959-07-22 | 1962-04-24 | Callery Chemical Co | Preparation of aminodiboranes |
JP2005513135A (ja) * | 2001-12-21 | 2005-05-12 | ソントル ナショナル ド ラ ルシェルシュ ションティフィーク | (アリール)(アミノ)ボラン化合物およびそれらの調製プロセス |
JP2008222488A (ja) * | 2007-03-12 | 2008-09-25 | National Institute For Materials Science | 立方晶窒化ホウ素の製造方法 |
JP2010519773A (ja) * | 2007-02-27 | 2010-06-03 | シクストロン アドヴァンスド マテリアルズ、インコーポレイテッド | 基板上に膜を形成するための方法 |
US20110195569A1 (en) * | 2010-02-10 | 2011-08-11 | Kwangjin Moon | Semiconductor Device and Method for Forming the Same |
JP2011171730A (ja) * | 2010-02-04 | 2011-09-01 | Air Products & Chemicals Inc | ケイ素含有膜を調製するための方法 |
Family Cites Families (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3232723A (en) * | 1959-03-20 | 1966-02-01 | Monsanto Co | Fuels containing organic compounds of boron and phosphorus |
US6482262B1 (en) * | 1959-10-10 | 2002-11-19 | Asm Microchemistry Oy | Deposition of transition metal carbides |
DE1206899B (de) * | 1963-11-29 | 1965-12-16 | Bayer Ag | Verfahren zur Herstellung von siliciumhaltigen N, N', N"-Triorgano-B, B', B"-trihydrido-borazolen |
DE2835069A1 (de) * | 1978-08-10 | 1980-02-21 | Bayer Ag | N-amino-3,4,5-trihydroxypiperidine, ihre herstellung und verwendung |
US4312989A (en) * | 1979-08-21 | 1982-01-26 | The United States Of America As Represented By The Secretary Of The Army | Pharmacologically active amine boranes |
US4578283A (en) * | 1982-09-23 | 1986-03-25 | Allied Corporation | Polymeric boron nitrogen dopant |
US4545968A (en) * | 1984-03-30 | 1985-10-08 | Toshiba Tungaloy Co., Ltd. | Methods for preparing cubic boron nitride sintered body and cubic boron nitride, and method for preparing boron nitride for use in the same |
US4774354A (en) * | 1985-04-09 | 1988-09-27 | Utah State University Foundation | Hydroborate compounds |
US4658051A (en) * | 1985-04-09 | 1987-04-14 | Utah State University Foundation | Hydroborate compounds |
US4581468A (en) * | 1985-05-13 | 1986-04-08 | Ultrasystems, Inc. | Boron nitride preceramic polymers |
US4977268A (en) * | 1988-04-08 | 1990-12-11 | Duke University | Boron dipeptide compounds |
US5204295A (en) * | 1989-02-17 | 1993-04-20 | University Of New Mexico | Precursors for boron nitride coatings |
US5082693A (en) * | 1989-02-17 | 1992-01-21 | University Of New Mexico | Precursors for boron nitride ceramic coatings |
US5128286A (en) * | 1989-06-20 | 1992-07-07 | Tonen Corporation | Boron-containing, silicon nitride-based ceramic shaped body |
EP0450125B1 (de) * | 1990-04-06 | 1994-10-26 | Siemens Aktiengesellschaft | Verfahren zur Herstellung von mikrokristallin kubischen Bornitridschichten |
DE4113791A1 (de) * | 1991-04-26 | 1992-10-29 | Solvay Deutschland | Verfahren zur abscheidung einer bor und stickstoff enthaltenden schicht |
US5300634A (en) * | 1991-05-07 | 1994-04-05 | Wako Pure Chemical Industries, Ltd. | Process for producing maltooligosaccharide derivative |
US5254706A (en) * | 1991-05-10 | 1993-10-19 | Boron Biologicals, Inc. | Process of making phosphite-borane compounds |
US5143907A (en) * | 1991-05-10 | 1992-09-01 | Boron Biologicals, Inc. | Phosphite-borane compounds, and method of making and using the same |
FR2691150B1 (fr) * | 1992-05-15 | 1994-08-12 | Rhone Poulenc Chimie | Triéthylnylborazines, leur préparation et leur utilisation notamment pour la préparation de céramique essentiellement à base de nitrure de bore. |
US5324690A (en) * | 1993-02-01 | 1994-06-28 | Motorola Inc. | Semiconductor device having a ternary boron nitride film and a method for forming the same |
US5612013A (en) * | 1995-02-10 | 1997-03-18 | Trustees Of The University Of Pennsylvania | Method for synthesis of borazine |
DE19845463A1 (de) * | 1998-10-02 | 2000-04-06 | Stiftung Inst Fuer Werkstoffte | Verfahren zur Herstellung von verschleißfesten Boridschichten |
US6197715B1 (en) * | 1999-03-23 | 2001-03-06 | Cryovac, Inc. | Supported catalysts and olefin polymerization processes utilizing same |
DE60039744D1 (de) * | 1999-03-30 | 2008-09-18 | Seiko Epson Corp | Verfahren zur Hersltellung einer Siliziumschicht |
KR100412744B1 (ko) * | 1999-03-30 | 2003-12-31 | 세이코 엡슨 가부시키가이샤 | 박막 트랜지스터의 제조 방법 |
JP3737688B2 (ja) * | 2000-09-14 | 2006-01-18 | 株式会社東芝 | 電子放出素子及びその製造方法 |
US6969539B2 (en) * | 2000-09-28 | 2005-11-29 | President And Fellows Of Harvard College | Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide |
DE10057009A1 (de) * | 2000-11-17 | 2002-05-29 | Celanese Ventures Gmbh | Non-Metallocene, Verfahren zur Herstellung von diesen und deren Verwendung zur Polymerisation von Olefinen |
US6500772B2 (en) * | 2001-01-08 | 2002-12-31 | International Business Machines Corporation | Methods and materials for depositing films on semiconductor substrates |
US7563715B2 (en) * | 2005-12-05 | 2009-07-21 | Asm International N.V. | Method of producing thin films |
FR2834983B1 (fr) * | 2002-01-22 | 2004-12-17 | Eads Launch Vehicules | Procede de fabrication de fibres de nitrure de bore a partir de borylborazines |
US6962876B2 (en) | 2002-03-05 | 2005-11-08 | Samsung Electronics Co., Ltd. | Method for forming a low-k dielectric layer for a semiconductor device |
KR100449028B1 (ko) | 2002-03-05 | 2004-09-16 | 삼성전자주식회사 | 원자층 증착법을 이용한 박막 형성방법 |
US20040215030A1 (en) * | 2003-04-22 | 2004-10-28 | Norman John Anthony Thomas | Precursors for metal containing films |
US7208427B2 (en) * | 2003-08-18 | 2007-04-24 | Advanced Technology Materials, Inc. | Precursor compositions and processes for MOCVD of barrier materials in semiconductor manufacturing |
JP4461215B2 (ja) * | 2003-09-08 | 2010-05-12 | 独立行政法人産業技術総合研究所 | 低誘電率絶縁材料とそれを用いた半導体装置 |
US7235482B2 (en) * | 2003-09-08 | 2007-06-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of manufacturing a contact interconnection layer containing a metal and nitrogen by atomic layer deposition for deep sub-micron semiconductor technology |
US7074502B2 (en) * | 2003-12-05 | 2006-07-11 | Eastman Kodak Company | Organic element for electroluminescent devices |
US7045583B2 (en) * | 2003-12-22 | 2006-05-16 | Exxon Mobil Chemical Patents Inc. | Olefin polymerization catalyst system |
US8114381B2 (en) * | 2004-02-13 | 2012-02-14 | The University Of British Columbia | Radiolabeled compounds and compositions, their precursors and methods for their production |
FR2868085B1 (fr) * | 2004-03-24 | 2006-07-14 | Alchimer Sa | Procede de revetement selectif d'une surface composite, fabrication d'interconnexions en microelectronique utilisant ce procede, et circuits integres |
US7388100B2 (en) * | 2004-07-16 | 2008-06-17 | Tetsuya Nishio | Tertiary amine compounds |
US7241686B2 (en) * | 2004-07-20 | 2007-07-10 | Applied Materials, Inc. | Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA |
US20060115591A1 (en) * | 2004-11-29 | 2006-06-01 | Olander W K | Pentaborane(9) storage and delivery |
JP2007062629A (ja) | 2005-09-01 | 2007-03-15 | Kobelco Contstruction Machinery Ltd | 建設機械のステップ構造 |
US20090131366A1 (en) * | 2005-09-13 | 2009-05-21 | Morris Srebnik | Use of Amine-Borane Compounds as Anti-Microbial Agents |
JP5153628B2 (ja) * | 2005-11-17 | 2013-02-27 | 三菱電機株式会社 | 化学気相成長成膜用組成物および低誘電率膜の製造方法 |
US7531458B2 (en) * | 2006-07-31 | 2009-05-12 | Rohm And Haas Electronics Materials Llp | Organometallic compounds |
US20080145536A1 (en) | 2006-12-13 | 2008-06-19 | Applied Materials, Inc. | METHOD AND APPARATUS FOR LOW TEMPERATURE AND LOW K SiBN DEPOSITION |
WO2008127935A1 (en) * | 2007-04-13 | 2008-10-23 | The Board Of Trustees Of The University Of Illinois | Metal complex compositions and methods for making metal-containing films |
US7633125B2 (en) | 2007-08-31 | 2009-12-15 | Intel Corporation | Integration of silicon boron nitride in high voltage and small pitch semiconductors |
US20090098741A1 (en) * | 2007-10-15 | 2009-04-16 | Asm Japan K.K. | Method for forming ultra-thin boron-containing nitride films and related apparatus |
FR2923221B1 (fr) | 2007-11-07 | 2012-06-01 | Air Liquide | Procede de depot par cvd ou pvd de composes de bore |
US20090286402A1 (en) * | 2008-05-13 | 2009-11-19 | Applied Materials, Inc | Method for critical dimension shrink using conformal pecvd films |
US20100047988A1 (en) * | 2008-08-19 | 2010-02-25 | Youn-Joung Cho | Methods of forming a layer, methods of forming a gate structure and methods of forming a capacitor |
US7998859B2 (en) * | 2008-09-25 | 2011-08-16 | Enthone Inc. | Surface preparation process for damascene copper deposition |
MX338021B (es) * | 2009-09-30 | 2015-08-17 | Univ Guanajuato | Sintesis borodipirrometenos con propiedades de laser. |
US8367866B2 (en) * | 2010-03-19 | 2013-02-05 | United Technologies Corporation | Single-source precursor and methods therefor |
US8288292B2 (en) | 2010-03-30 | 2012-10-16 | Novellus Systems, Inc. | Depositing conformal boron nitride film by CVD without plasma |
WO2011125395A1 (ja) | 2010-04-09 | 2011-10-13 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法および基板処理装置 |
US9611544B2 (en) * | 2010-04-15 | 2017-04-04 | Novellus Systems, Inc. | Plasma activated conformal dielectric film deposition |
US8912353B2 (en) * | 2010-06-02 | 2014-12-16 | Air Products And Chemicals, Inc. | Organoaminosilane precursors and methods for depositing films comprising same |
US8076250B1 (en) * | 2010-10-06 | 2011-12-13 | Applied Materials, Inc. | PECVD oxide-nitride and oxide-silicon stacks for 3D memory application |
JP5699980B2 (ja) | 2011-06-16 | 2015-04-15 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
FR2978152B1 (fr) * | 2011-07-22 | 2015-02-20 | Univ Lille 1 Sciences & Technologies | Nouveau procede de preparation de dialkylmagnesiens par polymerisation de l'ethylene et leurs applications |
US8632941B2 (en) * | 2011-09-22 | 2014-01-21 | Eastman Kodak Company | Negative-working lithographic printing plate precursors with IR dyes |
TWI541377B (zh) | 2011-11-04 | 2016-07-11 | Asm國際股份有限公司 | 形成摻雜二氧化矽薄膜的方法 |
JP2013191770A (ja) | 2012-03-14 | 2013-09-26 | Tokyo Electron Ltd | 成膜装置の安定化方法及び成膜装置 |
KR101973834B1 (ko) * | 2012-04-20 | 2019-04-29 | 코니카 미놀타 가부시키가이샤 | 유기 일렉트로루미네센스 소자 |
US9337018B2 (en) * | 2012-06-01 | 2016-05-10 | Air Products And Chemicals, Inc. | Methods for depositing films with organoaminodisilane precursors |
US20130330473A1 (en) * | 2012-06-11 | 2013-12-12 | Wayne State University | Atomic Layer Deposition of Transition Metal Thin Films Using Boranes as the Reducing Agent |
EP2684887B1 (en) | 2012-07-13 | 2015-06-17 | Universite De Bordeaux | New process for preparing arylboranes by arylation of organoboron compounds |
US9969622B2 (en) * | 2012-07-26 | 2018-05-15 | Lam Research Corporation | Ternary tungsten boride nitride films and methods for forming same |
US9318710B2 (en) * | 2012-07-30 | 2016-04-19 | Universal Display Corporation | Organic electroluminescent materials and devices |
US20140147684A1 (en) * | 2012-11-26 | 2014-05-29 | Korea Institute Of Science And Technology | Gas barrier film and method of preparing the same |
CN105143503A (zh) * | 2012-12-21 | 2015-12-09 | 普拉萨德·纳哈·加吉尔 | 陶瓷薄膜低温沉积方法 |
CA2903281C (en) * | 2013-03-08 | 2022-11-29 | The University Of British Columbia | Substituted organofluoroborates as imaging agents |
US20140273524A1 (en) * | 2013-03-12 | 2014-09-18 | Victor Nguyen | Plasma Doping Of Silicon-Containing Films |
GB201307334D0 (en) * | 2013-04-23 | 2013-05-29 | Novaucd | Process |
US20150014663A1 (en) * | 2013-07-11 | 2015-01-15 | Korea Institute Of Science And Technology | Organic light emitting display apparatus and the method for manufacturing the same |
KR20150009123A (ko) | 2013-07-15 | 2015-01-26 | 삼성전자주식회사 | 레이저를 이용하여 반도체를 가공하는 장치 |
JP6018984B2 (ja) * | 2013-07-31 | 2016-11-02 | 富士フイルム株式会社 | 着色組成物、硬化膜、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置 |
US10453675B2 (en) * | 2013-09-20 | 2019-10-22 | Versum Materials Us, Llc | Organoaminosilane precursors and methods for depositing films comprising same |
KR101718941B1 (ko) * | 2013-09-30 | 2017-03-22 | 주식회사 엘지화학 | 광반응기를 갖는 고리형 올레핀 화합물 및 광반응성 중합체 |
US9576790B2 (en) * | 2013-10-16 | 2017-02-21 | Asm Ip Holding B.V. | Deposition of boron and carbon containing materials |
US10763103B2 (en) * | 2015-03-31 | 2020-09-01 | Versum Materials Us, Llc | Boron-containing compounds, compositions, and methods for the deposition of a boron containing films |
KR102463893B1 (ko) * | 2015-04-03 | 2022-11-04 | 삼성전자주식회사 | 하드마스크 조성물 및 이를 이용한 패턴의 형성방법 |
US10745808B2 (en) * | 2015-07-24 | 2020-08-18 | Versum Materials Us, Llc | Methods for depositing Group 13 metal or metalloid nitride films |
-
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3031503A (en) * | 1959-07-22 | 1962-04-24 | Callery Chemical Co | Preparation of aminodiboranes |
JP2005513135A (ja) * | 2001-12-21 | 2005-05-12 | ソントル ナショナル ド ラ ルシェルシュ ションティフィーク | (アリール)(アミノ)ボラン化合物およびそれらの調製プロセス |
JP2010519773A (ja) * | 2007-02-27 | 2010-06-03 | シクストロン アドヴァンスド マテリアルズ、インコーポレイテッド | 基板上に膜を形成するための方法 |
JP2008222488A (ja) * | 2007-03-12 | 2008-09-25 | National Institute For Materials Science | 立方晶窒化ホウ素の製造方法 |
JP2011171730A (ja) * | 2010-02-04 | 2011-09-01 | Air Products & Chemicals Inc | ケイ素含有膜を調製するための方法 |
US20110195569A1 (en) * | 2010-02-10 | 2011-08-11 | Kwangjin Moon | Semiconductor Device and Method for Forming the Same |
Non-Patent Citations (3)
Title |
---|
INORGANIC CHEMISTRY, vol. 21, no. 6, JPN7018003860, 1982, pages 2473 - 2476, ISSN: 0003916836 * |
JOURNAL OF THE CHEMICAL SOCIETY, CHEMICAL COMMUNICATIONS, JPN7018003859, 1993, pages 684 - 685, ISSN: 0003916835 * |
MAIN GROUP METAL CHEMISTRY, vol. 23, no. 12, JPN7018003861, 2000, pages 735 - 760, ISSN: 0003916837 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020076114A (ja) * | 2018-11-05 | 2020-05-21 | 株式会社Adeka | 薄膜形成用原料及び薄膜の製造方法 |
JP7197328B2 (ja) | 2018-11-05 | 2022-12-27 | 株式会社Adeka | 薄膜形成用原料及び薄膜の製造方法 |
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