JP2018194840A5 - - Google Patents
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- Publication number
- JP2018194840A5 JP2018194840A5 JP2018093909A JP2018093909A JP2018194840A5 JP 2018194840 A5 JP2018194840 A5 JP 2018194840A5 JP 2018093909 A JP2018093909 A JP 2018093909A JP 2018093909 A JP2018093909 A JP 2018093909A JP 2018194840 A5 JP2018194840 A5 JP 2018194840A5
- Authority
- JP
- Japan
- Prior art keywords
- carbon nanotube
- pellicle
- film
- forming
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000000034 method Methods 0.000 claims 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 14
- 239000002041 carbon nanotube Substances 0.000 claims 11
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 11
- 239000002238 carbon nanotube film Substances 0.000 claims 10
- 238000000576 coating method Methods 0.000 claims 6
- 239000011248 coating agent Substances 0.000 claims 5
- 239000000463 material Substances 0.000 claims 5
- 229910021389 graphene Inorganic materials 0.000 claims 3
- 239000012528 membrane Substances 0.000 claims 3
- 238000001900 extreme ultraviolet lithography Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 239000011247 coating layer Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP17171172.4 | 2017-05-15 | ||
| EP17171172.4A EP3404487B1 (en) | 2017-05-15 | 2017-05-15 | Method for forming a carbon nanotube pellicle membrane |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018194840A JP2018194840A (ja) | 2018-12-06 |
| JP2018194840A5 true JP2018194840A5 (enExample) | 2021-04-30 |
| JP6975678B2 JP6975678B2 (ja) | 2021-12-01 |
Family
ID=58709413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018093909A Active JP6975678B2 (ja) | 2017-05-15 | 2018-05-15 | カーボンナノチューブペリクル膜の形成方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10712659B2 (enExample) |
| EP (1) | EP3404487B1 (enExample) |
| JP (1) | JP6975678B2 (enExample) |
| CN (1) | CN108873596B (enExample) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6781864B2 (ja) * | 2016-07-05 | 2020-11-11 | 三井化学株式会社 | ペリクル膜、ペリクル枠体、ペリクル、その製造方法、露光原版、露光装置、半導体装置の製造方法 |
| EP3404486B1 (en) * | 2017-05-15 | 2021-07-14 | IMEC vzw | A method for forming a pellicle |
| KR102532602B1 (ko) * | 2017-07-27 | 2023-05-15 | 삼성전자주식회사 | 포토마스크용 펠리클 조성물, 이로부터 형성된 포토마스크용 펠리클, 그 제조방법, 펠리클을 함유한 레티클 및 레티클을 포함하는 리소그래피용 노광장치 |
| KR20210090189A (ko) * | 2018-11-16 | 2021-07-19 | 에이에스엠엘 네델란즈 비.브이. | Euv 리소그래피를 위한 펠리클 |
| JP7224712B2 (ja) | 2018-12-03 | 2023-02-20 | 信越化学工業株式会社 | ペリクルの製造方法、ペリクル、ペリクル付フォトマスク、露光方法、半導体デバイスの製造方法、液晶ディスプレイの製造方法及び有機ｅｌディスプレイの製造方法。 |
| EP3671342B1 (en) | 2018-12-20 | 2021-03-17 | IMEC vzw | Induced stress for euv pellicle tensioning |
| EP3674797B1 (en) * | 2018-12-28 | 2021-05-05 | IMEC vzw | An euvl scanner |
| WO2020243112A1 (en) * | 2019-05-31 | 2020-12-03 | Lintec Of America, Inc. | Films of multiwall, few wall, and single wall carbon nanotube mixtures |
| NL2026303B1 (en) * | 2019-08-26 | 2021-10-14 | Asml Netherlands Bv | Pellicle membrane for a lithographic apparatus |
| DE102020115130B4 (de) * | 2019-10-30 | 2025-05-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Robuste membran mit hoher durchlässigkeit für lithografische extremes-ultraviolett-anlagen |
| JP7434810B2 (ja) * | 2019-11-05 | 2024-02-21 | Ｔｏｐｐａｎホールディングス株式会社 | ペリクル膜及びペリクル |
| FI3842861T3 (fi) | 2019-12-23 | 2025-06-23 | Imec Vzw | Menetelmä euvl-pintakalvon muodostamiseksi |
| KR102855040B1 (ko) | 2020-02-26 | 2025-09-04 | 미쯔이가가꾸가부시끼가이샤 | 펠리클막, 펠리클, 노광 원판, 노광 장치, 펠리클의 제조 방법 및 반도체 장치의 제조 방법 |
| JP7596637B2 (ja) * | 2020-02-27 | 2024-12-10 | Ｔｏｐｐａｎホールディングス株式会社 | ペリクル膜及びペリクル |
| EP4120017A4 (en) * | 2020-04-17 | 2023-11-01 | Mitsui Chemicals, Inc. | Exposure pellicle film, pellicle, exposure original, exposure device, and method for manufacturing exposure pellicle film |
| JP7392184B2 (ja) * | 2020-09-16 | 2023-12-05 | リンテック オブ アメリカ インク | ナノ構造フィルム、ペリクル、及びｅｕｖリソグラフィを行う方法 |
| JP2023544099A (ja) * | 2020-09-17 | 2023-10-20 | リンテック オブ アメリカ インク | ナノファイバーフィルム張力制御 |
| KR102585401B1 (ko) * | 2020-11-17 | 2023-10-10 | 주식회사 에스앤에스텍 | 독립된 박막 형태의 캡핑층을 갖는 극자외선 리소그래피용 펠리클 및 그 제조방법 |
| US12153339B2 (en) * | 2021-01-29 | 2024-11-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Network type pellicle membrane and method for forming the same |
| US12346020B2 (en) * | 2021-02-12 | 2025-07-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Optical assembly with coating and methods of use |
| US20220365420A1 (en) * | 2021-05-12 | 2022-11-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-layer pellicle membrane |
| US12174526B2 (en) | 2021-08-06 | 2024-12-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pellicle for an EUV lithography mask and a method of manufacturing thereof |
| US11860534B2 (en) | 2021-08-06 | 2024-01-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pellicle for an EUV lithography mask and a method of manufacturing thereof |
| KR20230050162A (ko) * | 2021-10-07 | 2023-04-14 | 에스케이하이닉스 주식회사 | 펠리클을 포함한 포토마스크 |
| KR102891816B1 (ko) | 2021-10-20 | 2025-11-26 | 엔지케이 인슐레이터 엘티디 | Euv 투과막 |
| KR20240105488A (ko) * | 2021-11-25 | 2024-07-05 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치에 사용하기 위한 펠리클 및 멤브레인 |
| JP2024543986A (ja) * | 2021-12-02 | 2024-11-26 | インテグリス・インコーポレーテッド | 炭化ケイ素ナノ構造体を備えるペリクル及び関連するデバイス |
| EP4202546B1 (en) * | 2021-12-22 | 2024-08-28 | Imec VZW | An euv pellicle |
| US20230205073A1 (en) * | 2021-12-29 | 2023-06-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pellicle for euv lithography masks and methods of manufacturing thereof |
| EP4495686A1 (en) | 2022-03-18 | 2025-01-22 | NGK Insulators, Ltd. | Euv-transmissive film production method and pellicle |
| WO2024057499A1 (ja) | 2022-09-15 | 2024-03-21 | 日本碍子株式会社 | Ｅｕｖ透過膜 |
| TW202503402A (zh) * | 2023-01-20 | 2025-01-16 | 美商應用材料股份有限公司 | 極紫外光表模及製造方法 |
| CN120883131A (zh) * | 2023-03-28 | 2025-10-31 | 琳得科株式会社 | 防护膜组件、防护膜支撑体及防护膜组件的制造方法 |
| CN120883130A (zh) * | 2023-04-04 | 2025-10-31 | Asml荷兰有限公司 | Euv透射屏障 |
| US20250085623A1 (en) * | 2023-09-07 | 2025-03-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multilayer protection coating with layers of different functions on carbon nanotube |
| WO2025075910A1 (en) * | 2023-10-02 | 2025-04-10 | Lintec Of America, Inc. | Improved extreme ultraviolet pellicle with enhanced extreme ultraviolet transmission and method of producing thereof |
| JP7528393B1 (ja) | 2024-03-29 | 2024-08-05 | 住友化学株式会社 | カーボンナノチューブ集合体、カーボンナノチューブ分散液、導電材料、電極、二次電池、平面状集合体、フィルター、電磁波シールド及び極端紫外線用ペリクル |
| FI131459B1 (en) * | 2024-04-26 | 2025-05-05 | Canatu Finland Oy | A coated free-standing film of carbon nanostructures |
| JP2025184609A (ja) * | 2024-06-07 | 2025-12-18 | 住友化学株式会社 | カーボンナノチューブ集合体、カーボンナノチューブ分散液、導電助剤、電極、二次電池、平面状集合体、フィルター、電磁波シールド、極端紫外線用ペリクル及び組成物 |
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| KR100455297B1 (ko) * | 2002-06-19 | 2004-11-06 | 삼성전자주식회사 | 무기물 나노튜브 제조방법 |
| FI121334B (fi) | 2004-03-09 | 2010-10-15 | Canatu Oy | Menetelmä ja laitteisto hiilinanoputkien valmistamiseksi |
| CN103276486B (zh) | 2004-11-09 | 2017-12-15 | 得克萨斯大学体系董事会 | 纳米纤维纱线、带和板的制造和应用 |
| US7767985B2 (en) * | 2006-12-26 | 2010-08-03 | Globalfoundries Inc. | EUV pellicle and method for fabricating semiconductor dies using same |
| EP2321703B1 (en) * | 2008-08-06 | 2013-01-16 | ASML Netherlands BV | Optical element for a lithographic apparatus, lithographic apparatus comprising such optical element and method for making the optical element |
| KR101242529B1 (ko) * | 2011-02-22 | 2013-03-12 | 주식회사 대유신소재 | 나노 실리콘카바이드 코팅을 이용한 탄소재료 계면강화 방법 |
| CN102795613B (zh) | 2011-05-27 | 2014-09-10 | 清华大学 | 石墨烯-碳纳米管复合结构的制备方法 |
| US20140377462A1 (en) * | 2012-06-21 | 2014-12-25 | Robert Davis | Suspended Thin Films on Low-Stress Carbon Nanotube Support Structures |
| CN104768871B (zh) * | 2012-10-24 | 2017-07-07 | 国立研究开发法人物质·材料研究机构 | 石墨烯超薄片及其制作装置、制作方法、以及电容器及其制作方法 |
| US9458017B2 (en) * | 2012-11-14 | 2016-10-04 | Pontificia Universidad Catolica Madre Y Maestra | Carbon nanotubes conformally coated with diamond nanocrystals or silicon carbide, methods of making the same and methods of their use |
| JP6071763B2 (ja) * | 2013-06-05 | 2017-02-01 | 日立造船株式会社 | カーボンナノチューブシートの製造方法及びカーボンナノチューブシート |
| TWI658321B (zh) * | 2013-12-05 | 2019-05-01 | 荷蘭商Ａｓｍｌ荷蘭公司 | 用於製造一表膜的裝置與方法，以及一表膜 |
| JP6097783B2 (ja) * | 2014-04-14 | 2017-03-15 | ツィンファ ユニバーシティ | カーボンナノチューブアレイの転移方法及びカーボンナノチューブ構造体の製造方法 |
| US9958770B2 (en) * | 2014-04-17 | 2018-05-01 | Industry-University Cooperation Foundation Hanyang University | Pellicle for EUV lithography |
| US9256123B2 (en) * | 2014-04-23 | 2016-02-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of making an extreme ultraviolet pellicle |
| WO2015166927A1 (ja) * | 2014-05-02 | 2015-11-05 | 三井化学株式会社 | ペリクル枠、ペリクル及びその製造方法、露光原版及びその製造方法、露光装置、並びに半導体装置の製造方法 |
| JP6520041B2 (ja) * | 2014-10-21 | 2019-05-29 | 凸版印刷株式会社 | ペリクル |
| US9547232B2 (en) | 2014-12-04 | 2017-01-17 | Globalfoundries Inc. | Pellicle with aerogel support frame |
| KR102366806B1 (ko) * | 2015-05-13 | 2022-02-23 | 삼성전자주식회사 | 열 축적을 방지하는 펠리클 및 이를 포함하는 극자외선 리소그래피 장치 |
| KR102345543B1 (ko) * | 2015-08-03 | 2021-12-30 | 삼성전자주식회사 | 펠리클 및 이를 포함하는 포토마스크 조립체 |
| US9835940B2 (en) | 2015-09-18 | 2017-12-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method to fabricate mask-pellicle system |
| JP6781864B2 (ja) * | 2016-07-05 | 2020-11-11 | 三井化学株式会社 | ペリクル膜、ペリクル枠体、ペリクル、その製造方法、露光原版、露光装置、半導体装置の製造方法 |
| EP3404486B1 (en) * | 2017-05-15 | 2021-07-14 | IMEC vzw | A method for forming a pellicle |
-
2017
- 2017-05-15 EP EP17171172.4A patent/EP3404487B1/en active Active
-
2018
- 2018-05-15 US US15/979,800 patent/US10712659B2/en active Active
- 2018-05-15 CN CN201810461607.8A patent/CN108873596B/zh active Active
- 2018-05-15 JP JP2018093909A patent/JP6975678B2/ja active Active
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