JP6975678B2 - カーボンナノチューブペリクル膜の形成方法 - Google Patents

カーボンナノチューブペリクル膜の形成方法 Download PDF

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JP6975678B2
JP6975678B2 JP2018093909A JP2018093909A JP6975678B2 JP 6975678 B2 JP6975678 B2 JP 6975678B2 JP 2018093909 A JP2018093909 A JP 2018093909A JP 2018093909 A JP2018093909 A JP 2018093909A JP 6975678 B2 JP6975678 B2 JP 6975678B2
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cnt
pellicle
film
carbon nanotube
coating
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JP2018194840A (ja
JP2018194840A5 (enExample
Inventor
エミリー・ギャラガー
セドリック・ハイヘバールト
イヴァン・ポランティエ
ハンス・クリストフ・アデルマン
マリーナ・ティンメルマンス
イ・ジェウク
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Interuniversitair Microelektronica Centrum vzw IMEC
Imec USA Nanoelectronics Design Center Inc
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Interuniversitair Microelektronica Centrum vzw IMEC
Imec USA Nanoelectronics Design Center Inc
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/48—Protective coatings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/159—Carbon nanotubes single-walled
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Laminated Bodies (AREA)
JP2018093909A 2017-05-15 2018-05-15 カーボンナノチューブペリクル膜の形成方法 Active JP6975678B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP17171172.4 2017-05-15
EP17171172.4A EP3404487B1 (en) 2017-05-15 2017-05-15 Method for forming a carbon nanotube pellicle membrane

Publications (3)

Publication Number Publication Date
JP2018194840A JP2018194840A (ja) 2018-12-06
JP2018194840A5 JP2018194840A5 (enExample) 2021-04-30
JP6975678B2 true JP6975678B2 (ja) 2021-12-01

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JP2018093909A Active JP6975678B2 (ja) 2017-05-15 2018-05-15 カーボンナノチューブペリクル膜の形成方法

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US (1) US10712659B2 (enExample)
EP (1) EP3404487B1 (enExample)
JP (1) JP6975678B2 (enExample)
CN (1) CN108873596B (enExample)

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US12153339B2 (en) * 2021-01-29 2024-11-26 Taiwan Semiconductor Manufacturing Co., Ltd. Network type pellicle membrane and method for forming the same
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Publication number Publication date
US10712659B2 (en) 2020-07-14
EP3404487A1 (en) 2018-11-21
JP2018194840A (ja) 2018-12-06
CN108873596B (zh) 2021-05-18
CN108873596A (zh) 2018-11-23
US20180329289A1 (en) 2018-11-15
EP3404487B1 (en) 2021-12-01

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