JP2018174203A - 真空吸着パッドおよび基板保持装置 - Google Patents
真空吸着パッドおよび基板保持装置 Download PDFInfo
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- JP2018174203A JP2018174203A JP2017070755A JP2017070755A JP2018174203A JP 2018174203 A JP2018174203 A JP 2018174203A JP 2017070755 A JP2017070755 A JP 2017070755A JP 2017070755 A JP2017070755 A JP 2017070755A JP 2018174203 A JP2018174203 A JP 2018174203A
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- 239000000758 substrate Substances 0.000 title claims abstract description 300
- 239000011247 coating layer Substances 0.000 claims description 7
- 238000005498 polishing Methods 0.000 description 44
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
- 229910001873 dinitrogen Inorganic materials 0.000 description 14
- 230000001965 increasing effect Effects 0.000 description 13
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 238000001179 sorption measurement Methods 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000012423 maintenance Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000003020 moisturizing effect Effects 0.000 description 4
- 238000007517 polishing process Methods 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 229920000800 acrylic rubber Polymers 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/008—Machines comprising two or more tools or having several working posts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/24—Chucks characterised by features relating primarily to remote control of the gripping means
- B23B31/30—Chucks characterised by features relating primarily to remote control of the gripping means using fluid-pressure means in the chuck
- B23B31/307—Vacuum chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/004—Machines or devices using grinding or polishing belts; Accessories therefor using abrasive rolled strips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/10—Devices or means for dressing or conditioning abrasive surfaces of travelling flexible backings coated with abrasives; Cleaning of abrasive belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/11—Vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Robotics (AREA)
Abstract
【解決手段】 真空吸着パッド8は、基板保持装置2のステージ5に下面が貼着されるパッド本体37と、パッド本体37の上面に設けられ、パッド本体37の上面に真空吸着される基板Wを保持する複数の円弧状の基板保持凸部38を備えている。円弧状の基板保持凸部38は、円形状のパッド本体37と同心円状に配置されており、複数の円弧状の基板保持凸部38のうち、外径側に配置されている基板保持凸部38の径方向の幅W1は、内径側に配置されている基板保持凸部38の径方向の幅W2より狭い。
【選択図】 図4
Description
まず、本発明の実施の形態の基板保持装置の構成を、図面を参照して説明する。図1は、本実施の形態の基板保持装置を備えた研磨装置の平面図であり、図2は、本実施の形態の基板保持装置を備えた研磨装置の断面図である。図1および図2に示すように、研磨装置1の中央部には、研磨対象物である基板Wを水平に保持する基板保持装置2が設けられている。また、基板保持装置2に保持された基板Wの周囲には4つの研磨ヘッド機構3が設けられており、研磨ヘッド機構3の径方向外側には、それぞれ研磨テープ供給回収機構4が設けられている。
次に、本発明の第2の実施の形態の基板保持装置の構成を、図面を参照して説明する。図18は、本実施の形態の基板保持装置を備えた研磨装置の断面図である。図18に示すように、基板保持装置2の回転軸6の内部には、第1のチューブ10と第2のチューブ11が挿通されている。第1のチューブ10および第2のチューブ11は、回転軸6の下端に取り付けられたロータリジョイント12を介して、それぞれの真空源としての第1の真空ライン13と第2の真空ライン14に接続されている。第1のチューブ10と第2のチューブ11は、処理後の基板Wを真空吸着パッド8から離脱させる流体供給源としての第1の窒素ガス供給ライン15と第2の窒素ガス供給ライン16にも接続されている。
2 基板保持装置
5 ステージ
8 真空吸着パッド
33 第1の吸排気ライン
34 第2の吸排気ライン
37 パッド本体
38(38a、38b) 基板保持凸部
39 接触部
40 付け根部
41 エリア形成凸部
42 第1の吸排気口
43 第2の吸排気口
W 基板
Claims (7)
- 基板保持装置のステージに下面が貼着されるパッド本体と、
前記パッド本体の上面に設けられ、前記パッド本体の上面に真空吸着される基板を保持する複数の円弧状の基板保持凸部と、
を備え、
前記円弧状の基板保持凸部は、前記円形状のパッド本体と同心円状に配置されており、
前記複数の円弧状の基板保持凸部のうち外径側に配置されている基板保持凸部の径方向の幅は、内径側に配置されている基板保持凸部の径方向の幅より狭い、真空吸着パッド。 - 前記パッド本体の上面には、基板剥離性を有するコーティング層が形成されている、請求項1に記載の真空吸着パッド。
- 前記パッド本体の上面に設けられ、当該パッド本体の上面を複数の真空吸着エリアに径方向に分割するエリア形成凸部を備え、
外径側の真空吸着エリアには、前記基板保持装置の第1の吸排気ラインに接続される第1の吸排気口が設けられ、
内径側の真空吸着エリアには、前記基板保持装置の第2の吸排気ラインに接続される第2の吸排気口が設けられている、請求項1または請求項2に記載の真空吸着パッド。 - 前記基板保持凸部は、前記基板に接触する接触部と、前記接触部を支持する付け根部とを備え、
前記接触部の径方向の幅は、前記根端部の径方向の幅より広く設定されている、請求項1〜請求項3のいずれかに記載の真空吸着パッド。 - 前記基板保持凸部は、前記基板に接触する接触部と、前記接触部を支持する付け根部とを備え、
前記接触部の径方向の幅は、前記根端部の径方向の幅より狭く設定されている、請求項1〜請求項3のいずれかに記載の真空吸着パッド。 - 前記基板保持凸部の断面形状は円形である、請求項1〜請求項3のいずれかに記載の真空吸着パッド。
- 基板を保持するためのステージと、前記ステージに貼着される真空吸着パッドとを備える基板保持装置であって、
前記真空吸着パッドは、
前記ステージに下面が貼着されるパッド本体と、
前記パッド本体の上面に設けられ、前記パッド本体の上面に真空吸着される基板を保持する複数の円弧状の基板保持凸部と、
を備え、
前記円弧状の基板保持凸部は、前記円形状のパッド本体と同心円状に配置されており、
前記複数の円弧状の基板保持凸部のうち外径側に配置されている基板保持凸部の径方向の幅は、内径側に配置されている基板保持凸部の径方向の幅より狭い、基板保持装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017070755A JP6914078B2 (ja) | 2017-03-31 | 2017-03-31 | 真空吸着パッドおよび基板保持装置 |
TW107109655A TWI752200B (zh) | 2017-03-31 | 2018-03-21 | 真空吸著墊及基板保持裝置 |
EP18164652.2A EP3381608B1 (en) | 2017-03-31 | 2018-03-28 | Vacuum suction pad and substrate holder |
KR1020180035723A KR102498116B1 (ko) | 2017-03-31 | 2018-03-28 | 진공 흡착 패드 및 기판 보유 지지 장치 |
US15/940,399 US10639727B2 (en) | 2017-03-31 | 2018-03-29 | Vacuum suction pad and substrate holder |
CN201810286499.5A CN108705422B (zh) | 2017-03-31 | 2018-03-30 | 真空吸附垫和基板保持装置 |
Applications Claiming Priority (1)
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JP2017070755A JP6914078B2 (ja) | 2017-03-31 | 2017-03-31 | 真空吸着パッドおよび基板保持装置 |
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JP2018174203A true JP2018174203A (ja) | 2018-11-08 |
JP6914078B2 JP6914078B2 (ja) | 2021-08-04 |
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JP2017070755A Active JP6914078B2 (ja) | 2017-03-31 | 2017-03-31 | 真空吸着パッドおよび基板保持装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10639727B2 (ja) |
EP (1) | EP3381608B1 (ja) |
JP (1) | JP6914078B2 (ja) |
KR (1) | KR102498116B1 (ja) |
CN (1) | CN108705422B (ja) |
TW (1) | TWI752200B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2022036498A (ja) * | 2020-08-24 | 2022-03-08 | 株式会社サンシン | 研磨ロボット装置 |
KR20220073938A (ko) * | 2020-11-27 | 2022-06-03 | 주식회사 기가레인 | 디몰더 장치 및 이를 이용한 패턴 기판 생산 방법 |
Families Citing this family (10)
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KR102420162B1 (ko) * | 2018-02-09 | 2022-07-12 | 삼성전자주식회사 | 진공 척 및 이를 포함하는 반도체 제조 장치 |
JP7210896B2 (ja) * | 2018-04-23 | 2023-01-24 | 東京エレクトロン株式会社 | 基板載置装置及び基板載置方法 |
KR102041044B1 (ko) * | 2018-04-30 | 2019-11-05 | 피에스케이홀딩스 주식회사 | 기판 지지 유닛 |
DE102019123238B4 (de) * | 2019-08-29 | 2021-08-05 | J. Schmalz Gmbh | Flächensauggreifer |
CN111085954A (zh) * | 2019-12-24 | 2020-05-01 | 深圳市华星光电半导体显示技术有限公司 | 基板吸附装置 |
JP7430074B2 (ja) * | 2020-02-20 | 2024-02-09 | 株式会社荏原製作所 | 基板保持装置 |
KR102154468B1 (ko) | 2020-04-29 | 2020-09-09 | 김회복 | 진공 리프팅 장치용 탄성 흡착패드의 제조방법 및 이에 의해 제조된 탄성 흡착패드 |
CN112238954B (zh) * | 2020-10-14 | 2022-02-08 | 哈尔滨工业大学 | 一种基于仿生可控吸附的空间目标吸附抓持装置 |
US11676916B2 (en) | 2021-08-30 | 2023-06-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and formation method of package with warpage-control element |
CN113772169B (zh) * | 2021-09-24 | 2022-09-27 | 佛山松标智能装备有限公司 | 一种真空吸盘的设计方法 |
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2017
- 2017-03-31 JP JP2017070755A patent/JP6914078B2/ja active Active
-
2018
- 2018-03-21 TW TW107109655A patent/TWI752200B/zh active
- 2018-03-28 EP EP18164652.2A patent/EP3381608B1/en active Active
- 2018-03-28 KR KR1020180035723A patent/KR102498116B1/ko active IP Right Grant
- 2018-03-29 US US15/940,399 patent/US10639727B2/en active Active
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JP2022036498A (ja) * | 2020-08-24 | 2022-03-08 | 株式会社サンシン | 研磨ロボット装置 |
JP7111778B2 (ja) | 2020-08-24 | 2022-08-02 | 株式会社サンシン | 研磨ロボット装置 |
KR20220073938A (ko) * | 2020-11-27 | 2022-06-03 | 주식회사 기가레인 | 디몰더 장치 및 이를 이용한 패턴 기판 생산 방법 |
KR20220074714A (ko) * | 2020-11-27 | 2022-06-03 | 주식회사 기가레인 | 디몰더 장치 및 이를 이용한 기판 디몰더 방법 |
KR102441428B1 (ko) * | 2020-11-27 | 2022-09-08 | 주식회사 기가레인 | 디몰더 장치 및 이를 이용한 패턴 기판 생산 방법 |
KR102495087B1 (ko) * | 2020-11-27 | 2023-02-06 | 주식회사 기가레인 | 디몰더 장치 및 이를 이용한 기판 디몰더 방법 |
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US10639727B2 (en) | 2020-05-05 |
KR102498116B1 (ko) | 2023-02-09 |
KR20180111612A (ko) | 2018-10-11 |
US20180286772A1 (en) | 2018-10-04 |
CN108705422B (zh) | 2022-02-25 |
TWI752200B (zh) | 2022-01-11 |
JP6914078B2 (ja) | 2021-08-04 |
CN108705422A (zh) | 2018-10-26 |
EP3381608A1 (en) | 2018-10-03 |
TW201838080A (zh) | 2018-10-16 |
EP3381608B1 (en) | 2019-08-21 |
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