JP2018170152A - Oled表示装置の製造方法、マスク及びマスクの設計方法 - Google Patents
Oled表示装置の製造方法、マスク及びマスクの設計方法 Download PDFInfo
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Abstract
【解決手段】複数のノズルを含むリニアソースを第1方向に移動しながら、基板上の電極面に、マスクを介して、有機発光材料を蒸着することを含み、マスクは、リニアソースへの対向面に形成された複数の穴を含み、複数の穴の各穴は、第1開口と、第1開口とリニアソースとの間に位置し、第1開口より大きい第2開口とを含み、第1開口から電極面までの距離D1、第1方向における有機発光材料の最大入射角θM、第1開口のエッジから第1方向における隣接副画素電極までの距離SX、第1開口のエッジと第2開口のエッジとを結ぶ直線と第1方向との間で決まるテーパアングルθT、として、θT<90−θM、SX>D1tanθMが満たされている、OLED表示装置の製造方法。
【選択図】図5
Description
図1及び図2を参照して、本実施形態に係る、表示装置10の全体構成を説明する。なお、説明をわかりやすくするため、図示した物の寸法、形状については、誇張して記載している場合もある。
OLED表示装置10の製造方法の一例を説明する。後述するように、本開示は、有機発光層165の蒸着に特徴を有する。本実施形態の有機発光層165の蒸着が適用できれば、他のステップは任意である。以下の説明において、同一工程で(同時に)形成される要素は、同一層の要素である。
S1L=(SH+AD)×tan(θ2M) (1)
S1R=(SH+AD)×tan(θ1M) (2)
S2L=(SH+AD)×tan(θ1M) (3)
S2R=(SH+AD)×tan(θ2M) (4)
θT<90−θ1M (5)
θT<90−θ2M (6)
θT<90−max(θ1M、θ2M) (7)
max(θ1M、θ2M)は、θ1M、θ2Mのうちの大きい値である。
θS<90−θ1M (8)
θS<90−θ2M (9)
θS<90−max(θ1M、θ2M) (10)
S1LM>S1L=(SH+AD)×tan(θ2M) (11)
S1RM>S1R=(SH+AD)×tan(θ1M) (12)
S2LM>S2L=(SH+AD)×tan(θ1M) (13)
S2RM>S2R=(SH+AD)×tan(θ2M) (14)
S1M(SY)>(SH+AD)×tan(θM) (15)
S2M(SX)>(SH+AD)×tan(θM) (16)
+(ΔTp2+ΔCd2+ΔAe2)1/2 (17)
S1RM>S1R=(SH+AD)×tan(θ1M)
+(ΔTp2+ΔCd2+ΔAe2)1/2 (18)
S2LM>S2L=(SH+AD)×tan(θ1M)
+(ΔTp2+ΔCd2+ΔAe2)1/2 (19)
S2RM>S2R=(SH+AD)×tan(θ2M)
+(ΔTp2+ΔCd2+ΔAe2)1/2 (20)
+(ΔTp2+ΔCd2+ΔAe2)1/2 (21)
S2M>(SH+AD)×tan(θM)
+(ΔTp2+ΔCd2+ΔAe2)1/2 (22)
Claims (13)
- OLED表示装置の製造方法であって、
複数のノズルを含むリニアソースを第1方向に移動しながら、基板上の電極面に、マスクを介して、有機発光材料を蒸着することを含み、
前記マスクは、前記リニアソースへの対向面に形成された複数の穴を含み、
前記複数の穴の各穴は、第1開口と、前記第1開口と前記リニアソースとの間に位置し、前記第1開口より大きい第2開口とを含み、
前記第1開口から前記電極面までの距離D1
前記第1方向における前記有機発光材料の最大入射角θM
前記第1開口のエッジから前記第1方向における隣接副画素電極までの距離SX
前記第1開口のエッジと前記第2開口のエッジとを結ぶ直線と前記第1方向との間で決まるテーパアングルθT
として、
θT<90−θM
SX>D1tanθM
が満たされている、製造方法。 - 請求項1に記載の製造方法であって、
前記マスクは、前記リニアソースへの前記対向面の反対面に、前記複数の穴それぞれと重なる複数の第2穴を含み、
前記複数の第2穴のそれぞれは、前記第1開口と前記基板との間に位置し、前記第1開口より大きい第3開口を含み、
前記第1開口のエッジと前記第3開口のエッジとを結ぶ直線と前記第1方向との間で決まるステップアングルθSは、
θS<90−θM
を満たす、製造方法。 - 請求項1又は2に記載の製造方法であって、
前記第1開口のエッジから前記第1開口から露出する電極面までの距離SYは、
SY>D1tanθM
を満たす、製造方法。 - 請求項1、2又は3に記載の製造方法であって、
開口ピッチの規定偏差ΔTp
開口サイズの規定偏差ΔCd
アライメントの規定偏差ΔAe
が定義されており、
SX>D1×tan(θM)+(ΔTp2+ΔCd2+ΔAe2)1/2
を満たす、製造方法。 - 請求項4に記載の製造方法であって、
SY>D1×tan(θM)+(ΔTp2+ΔCd2+ΔAe2)1/2
を満たす、製造方法。 - 請求項1に記載の製造方法であって、
前記有機発光材料は、第1色の有機発光材料であって、
前記隣接副画素電極には、第2色の有機発光材料が蒸着される、製造方法。 - 複数のノズルを含み第1方向に移動するリニアソースと基板上の電極面との間に配置され、前記電極面に対する有機発光材料の蒸着において使用されるマスクであって、
前記リニアソースへの対向面に形成された複数の穴を含み、
前記複数の穴の各穴は、第1開口と、前記第1開口と前記リニアソースとの間に位置し、前記第1開口より大きい第2開口とを含み、
前記第1開口から前記電極面までの距離D1
前記第1方向における前記有機発光材料の最大入射角θM
前記第1開口のエッジから前記第1方向における隣接副画素電極までの距離SX
前記第1開口のエッジと前記第2開口のエッジとを結ぶ直線と前記第1方向との間で決まるテーパアングルθT
として、
θT<90−θM
SX>D1tanθM
を満たす、マスク。 - 請求項7に記載のマスクであって、
前記リニアソースへの前記対向面の反対面に、前記複数の穴それぞれと重なる複数の第2穴を含み、
前記複数の第2穴のそれぞれは、前記第1開口と前記基板との間に位置し、前記第1開口より大きい第3開口を含み、
前記第1開口のエッジと前記第3開口のエッジとを結ぶ直線と前記第1方向との間で決まるステップアングルθSは、
θS<90−θM
を満たす、マスク。 - 請求項7又は8に記載のマスクであって、
前記第1開口のエッジから前記第1開口から露出する面までの距離SYは、
SY>D1tanθM
を満たす、マスク。 - 請求項7、8又は9に記載のマスクであって、
開口ピッチの規定偏差ΔTp
開口サイズの規定偏差ΔCd
アライメントの規定偏差ΔAe
が定義されており、
SX>D1×tan(θM)+(ΔTp2+ΔCd2+ΔAe2)1/2
を満たす、マスク。 - 請求項10に記載のマスクであって、
SY>D1×tan(θM)+(ΔTp2+ΔCd2+ΔAe2)1/2
を満たす、マスク。 - 複数のノズルを含み第1方向に移動するリニアソースと基板上の電極面との間に配置され、前記電極面に対する有機発光材料の蒸着において使用されるマスクの設計方法であって、
前記マスクは、前記リニアソースへの対向面に形成された複数の穴を含み、
前記複数の穴の各穴は、第1開口と、前記第1開口と前記リニアソースとの間に位置し、前記第1開口より大きい第2開口とを含み、
前記設計方法は、
前記第1方向における前記有機発光材料の最大入射角θM
前記第1開口のエッジから隣接副画素への、前記第1方向における距離S1
の値を予め定義し、
前記第1開口から前記電極面までの距離D1と、
前記第1開口のエッジと前記第2開口のエッジとを結ぶ直線と前記第1方向との間で決まるテーパアングルθTと、前記第1開口から前記電極面までの距離D1とを、
θT<90−θM
SX>D1tanθM
が満たされるように決定する、設計方法。 - 請求項12に記載の設計方法であって、
前記第1開口のエッジから前記第1開口から露出する電極面までの規定距離SYの値を予め定義し、
前記第1開口から前記電極面までの距離D1を、
SY>D1tanθM
が満たされるように決定する、設計方法。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021199401A1 (ja) * | 2020-04-02 | 2021-10-07 | シャープ株式会社 | 蒸着マスク、表示パネル、及び表示パネルの製造方法 |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108496260B (zh) | 2015-10-26 | 2020-05-19 | Oti照明公司 | 用于图案化表面上覆层的方法和包括图案化覆层的装置 |
CN108735915B (zh) * | 2017-04-14 | 2021-02-09 | 上海视涯技术有限公司 | 用于oled蒸镀的荫罩及其制作方法、oled面板的制作方法 |
KR102563713B1 (ko) | 2017-04-26 | 2023-08-07 | 오티아이 루미오닉스 인크. | 표면의 코팅을 패턴화하는 방법 및 패턴화된 코팅을 포함하는 장치 |
US11043636B2 (en) | 2017-05-17 | 2021-06-22 | Oti Lumionics Inc. | Method for selectively depositing a conductive coating over a patterning coating and device including a conductive coating |
US11751415B2 (en) | 2018-02-02 | 2023-09-05 | Oti Lumionics Inc. | Materials for forming a nucleation-inhibiting coating and devices incorporating same |
US11655536B2 (en) * | 2018-03-20 | 2023-05-23 | Sharp Kabushiki Kaisha | Film forming mask and method of manufacturing display device using same |
WO2019215591A1 (en) | 2018-05-07 | 2019-11-14 | Oti Lumionics Inc. | Method for providing an auxiliary electrode and device including an auxiliary electrode |
US11613801B2 (en) | 2018-05-14 | 2023-03-28 | Kunshan Go-Visionox Opto-Electronics Co., Ltd. | Masks and display devices |
WO2019218606A1 (zh) * | 2018-05-14 | 2019-11-21 | 昆山国显光电有限公司 | 掩膜板、显示器件、显示面板及显示终端 |
US11773477B2 (en) * | 2018-12-25 | 2023-10-03 | Dai Nippon Printing Co., Ltd. | Deposition mask |
JP6900961B2 (ja) * | 2019-02-28 | 2021-07-14 | セイコーエプソン株式会社 | 画像表示装置および虚像表示装置 |
WO2020178804A1 (en) | 2019-03-07 | 2020-09-10 | Oti Lumionics Inc. | Materials for forming a nucleation-inhibiting coating and devices incorporating same |
CN110137238A (zh) * | 2019-06-21 | 2019-08-16 | 京东方科技集团股份有限公司 | Oled显示基板及其制作方法、显示装置 |
KR20220046551A (ko) | 2019-06-26 | 2022-04-14 | 오티아이 루미오닉스 인크. | 광 회절 특성을 갖는 광 투과 영역을 포함하는 광전자 디바이스 |
US11832473B2 (en) | 2019-06-26 | 2023-11-28 | Oti Lumionics Inc. | Optoelectronic device including light transmissive regions, with light diffraction characteristics |
KR20220045202A (ko) | 2019-08-09 | 2022-04-12 | 오티아이 루미오닉스 인크. | 보조 전극 및 파티션을 포함하는 광전자 디바이스 |
CN110943109A (zh) * | 2019-11-22 | 2020-03-31 | 武汉华星光电半导体显示技术有限公司 | 显示面板及显示面板的制备方法 |
CN110931639A (zh) * | 2019-11-26 | 2020-03-27 | 武汉华星光电半导体显示技术有限公司 | 可提高像素分辨率的像素排列显示设备与蒸镀方法 |
JP2021175824A (ja) * | 2020-03-13 | 2021-11-04 | 大日本印刷株式会社 | 有機デバイスの製造装置の蒸着室の評価方法、評価方法で用いられる標準マスク装置及び標準基板、標準マスク装置の製造方法、評価方法で評価された蒸着室を備える有機デバイスの製造装置、評価方法で評価された蒸着室において形成された蒸着層を備える有機デバイス、並びに有機デバイスの製造装置の蒸着室のメンテナンス方法 |
CN114556566B (zh) * | 2020-09-18 | 2023-12-12 | 京东方科技集团股份有限公司 | 一种显示基板、显示面板及显示装置 |
US11985841B2 (en) | 2020-12-07 | 2024-05-14 | Oti Lumionics Inc. | Patterning a conductive deposited layer using a nucleation inhibiting coating and an underlying metallic coating |
CN113380701B (zh) * | 2021-05-28 | 2023-03-21 | 惠科股份有限公司 | 薄膜晶体管的制作方法和掩膜版 |
TWI777604B (zh) * | 2021-06-08 | 2022-09-11 | 友達光電股份有限公司 | 畫素陣列及其製作方法,金屬光罩及其製作方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004030975A (ja) * | 2002-06-21 | 2004-01-29 | Samsung Nec Mobile Display Co Ltd | 有機電子発光素子用メタルマスク及びこれを利用した有機電子発光素子の製造方法 |
JP2004185832A (ja) * | 2002-11-29 | 2004-07-02 | Samsung Nec Mobile Display Co Ltd | 蒸着マスク、これを利用した有機el素子の製造方法及び有機el素子 |
JP2004335460A (ja) * | 2003-05-06 | 2004-11-25 | Lg Electron Inc | 有機電界発光素子製作用シャドーマスク |
JP2013147739A (ja) * | 2012-01-19 | 2013-08-01 | Samsung Display Co Ltd | 蒸着用マスク及びこれを含む蒸着設備 |
CN105655382A (zh) * | 2016-04-08 | 2016-06-08 | 京东方科技集团股份有限公司 | 显示基板制作方法、显示基板和显示装置 |
US20160333457A1 (en) * | 2015-05-13 | 2016-11-17 | Boe Technology Group Co., Ltd. | Mask plate, method for fabricating the same, display panel and display device |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3765314B2 (ja) * | 2004-03-31 | 2006-04-12 | セイコーエプソン株式会社 | マスク、マスクの製造方法、電気光学装置の製造方法および電子機器 |
WO2011148750A1 (ja) * | 2010-05-28 | 2011-12-01 | シャープ株式会社 | 蒸着マスク及びこれを用いた有機el素子の製造方法と製造装置 |
KR101146996B1 (ko) * | 2010-07-12 | 2012-05-23 | 삼성모바일디스플레이주식회사 | 유기 발광 표시 장치의 제조 방법 |
US9076989B2 (en) * | 2010-12-27 | 2015-07-07 | Sharp Kabushiki Kaisha | Method for forming deposition film, and method for producing display device |
KR101942471B1 (ko) * | 2012-06-15 | 2019-01-28 | 삼성디스플레이 주식회사 | 증착 장치 및 이를 이용한 유기 발광 표시장치의 제조방법 |
KR102103247B1 (ko) * | 2012-12-21 | 2020-04-23 | 삼성디스플레이 주식회사 | 증착 장치 |
JP5856584B2 (ja) * | 2013-06-11 | 2016-02-10 | シャープ株式会社 | 制限板ユニットおよび蒸着ユニット並びに蒸着装置 |
US9142779B2 (en) * | 2013-08-06 | 2015-09-22 | University Of Rochester | Patterning of OLED materials |
JP6241903B2 (ja) * | 2014-03-11 | 2017-12-06 | 株式会社Joled | 蒸着装置及び蒸着装置を用いた蒸着方法、及びデバイスの製造方法 |
KR102322012B1 (ko) * | 2014-10-20 | 2021-11-05 | 삼성디스플레이 주식회사 | 표시 장치의 제조 장치 및 표시 장치의 제조 방법 |
KR102391346B1 (ko) * | 2015-08-04 | 2022-04-28 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치, 유기층 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조방법 |
KR102399569B1 (ko) * | 2015-10-28 | 2022-05-19 | 삼성디스플레이 주식회사 | 마스크 어셈블리, 표시 장치의 제조 장치 및 표시 장치의 제조 방법 |
TWI721170B (zh) * | 2016-05-24 | 2021-03-11 | 美商伊麥傑公司 | 蔽蔭遮罩沉積系統及其方法 |
-
2017
- 2017-03-29 JP JP2017066366A patent/JP2018170152A/ja active Pending
-
2018
- 2018-02-26 CN CN201810158926.1A patent/CN108695361B/zh active Active
- 2018-03-28 US US15/937,899 patent/US10263185B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004030975A (ja) * | 2002-06-21 | 2004-01-29 | Samsung Nec Mobile Display Co Ltd | 有機電子発光素子用メタルマスク及びこれを利用した有機電子発光素子の製造方法 |
JP2004185832A (ja) * | 2002-11-29 | 2004-07-02 | Samsung Nec Mobile Display Co Ltd | 蒸着マスク、これを利用した有機el素子の製造方法及び有機el素子 |
JP2004335460A (ja) * | 2003-05-06 | 2004-11-25 | Lg Electron Inc | 有機電界発光素子製作用シャドーマスク |
JP2013147739A (ja) * | 2012-01-19 | 2013-08-01 | Samsung Display Co Ltd | 蒸着用マスク及びこれを含む蒸着設備 |
US20160333457A1 (en) * | 2015-05-13 | 2016-11-17 | Boe Technology Group Co., Ltd. | Mask plate, method for fabricating the same, display panel and display device |
CN105655382A (zh) * | 2016-04-08 | 2016-06-08 | 京东方科技集团股份有限公司 | 显示基板制作方法、显示基板和显示装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021199401A1 (ja) * | 2020-04-02 | 2021-10-07 | シャープ株式会社 | 蒸着マスク、表示パネル、及び表示パネルの製造方法 |
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