JP2018129511A - 太陽電池 - Google Patents
太陽電池 Download PDFInfo
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- JP2018129511A JP2018129511A JP2018019357A JP2018019357A JP2018129511A JP 2018129511 A JP2018129511 A JP 2018129511A JP 2018019357 A JP2018019357 A JP 2018019357A JP 2018019357 A JP2018019357 A JP 2018019357A JP 2018129511 A JP2018129511 A JP 2018129511A
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- 239000000758 substrate Substances 0.000 claims abstract description 102
- 239000004065 semiconductor Substances 0.000 claims abstract description 101
- 239000011521 glass Substances 0.000 claims abstract description 94
- 238000002161 passivation Methods 0.000 claims abstract description 94
- 239000002923 metal particle Substances 0.000 claims abstract description 92
- 239000012535 impurity Substances 0.000 claims abstract description 54
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 11
- 239000002210 silicon-based material Substances 0.000 claims abstract description 10
- 239000003989 dielectric material Substances 0.000 claims abstract description 7
- QGMWCJPYHVWVRR-UHFFFAOYSA-N tellurium monoxide Chemical compound [Te]=O QGMWCJPYHVWVRR-UHFFFAOYSA-N 0.000 claims description 28
- 230000008018 melting Effects 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 208000032953 Device battery issue Diseases 0.000 abstract 1
- 240000004808 Saccharomyces cerevisiae Species 0.000 description 24
- 238000000034 method Methods 0.000 description 21
- 238000010438 heat treatment Methods 0.000 description 19
- 230000008569 process Effects 0.000 description 19
- 239000010410 layer Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 238000007639 printing Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- 230000006798 recombination Effects 0.000 description 5
- 238000005215 recombination Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910004205 SiNX Inorganic materials 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004012 SiCx Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
【解決手段】太陽電池は、第1導電型の不純物を含有する半導体基板110と、第1導電型と反対の第2導電型の不純物を含有する第1導電型領域120と、誘電体材質を含む制御パッシベーション膜160と、第1導電型の不純物が半導体基板110より高濃度でドープされた多結晶シリコン材質を含む第2導電型領域170と、第1導電型領域120と接続される第1電極140と、第2導電型領域170と接続される第2電極150とを含み、第1、第2電極140、150のそれぞれは、金属粒子とガラスフリットを含み、第2電極150に含有される単位体積当たりのガラスフリットの含有量は、第1電極140に含有される単位体積当たりのガラスフリットの含有量より少ない。
【選択図】図1
Description
Claims (20)
- 半導体基板と、
前記半導体基板の前面に位置し、第1導電型の不純物または第2導電型の不純物の内、いずれか1つの不純物を含有する第1導電型領域と、
前記半導体基板の後面表面上に位置し、前記第1導電型領域に含まれた不純物と反対の導電型の不純物を含有し、多結晶シリコン材質を含む第2導電型領域と、
前記半導体基板の前面に位置し、前記第1導電型領域と接続される第1電極と、
前記半導体基板の後面に位置し、前記第2導電型領域と接続される第2電極とを含み、
前記第1、第2電極のそれぞれは、金属粒子とガラスフリットを含み、
前記第2電極に含有される単位体積当たりの前記ガラスフリットの含有量は、前記第1電極に含有される単位体積当たりの前記ガラスフリットの含有量より少ない、太陽電池。 - 前記第1電極で単位体積当たりの前記ガラスフリットの含有量は、6wt%〜8wt%であり、
前記第2電極で単位体積当たりの前記ガラスフリットの含有量は、2.50wt%〜5wt%である、請求項1に記載の太陽電池。 - 前記第1電極に含有される単位体積当たりの前記金属粒子の含有量は、前記第2電極に含有される単位体積当たりの前記金属粒子の含有量より多い、請求項1に記載の太陽電池。
- 前記第1電極に含有される単位体積当たりの前記金属粒子の含有量は、82wt%〜92wt%であり、
前記第2電極に含有される単位体積当たりの前記金属粒子の含有量は、68wt%〜73wt%である、請求項3に記載の太陽電池。 - 前記第1導電型領域の前面には、反射防止膜がさらに位置し、
前記半導体基板の後面と前記第2導電型領域との間に誘電体材質を含む制御パッシベーション膜がさらに位置し、
前記第2導電型領域の後面には、前記制御パッシベーション膜より厚い厚さを有する後面パッシベーション膜がさらに位置し、
前記後面パッシベーション膜の厚さは、前記反射防止膜より薄い、請求項1に記載の太陽電池。 - 前記反射防止膜の厚さは、100nm〜140nmであり、
前記後面パッシベーション膜の厚さは、前記反射防止膜の厚さより薄い範囲で65nm〜105nmである、請求項5に記載の太陽電池。 - 前記制御パッシベーション膜の厚さは、前記後面パッシベーション膜の厚さより薄く、前記制御パッシベーション膜の厚さは、0.5nm〜10nmである、請求項5に記載の太陽電池。
- 前記第2導電型領域の厚さは、前記第1導電型領域の厚さより薄い、請求項1に記載の太陽電池。
- 前記第1導電型領域の厚さは、300nm〜700nmであり、
前記第2導電型領域の厚さは、前記第1導電型領域の厚さより低い範囲で290nm〜390nmである、請求項8に記載の太陽電池。 - 前記第2電極に含まれる前記ガラスフリットは、PbO系またはBiO系の内、少なくともいずれか一つである、請求項1に記載の太陽電池。
- 前記第2電極に含まれる前記ガラスフリットは、酸化テルル(TeO)をさらに含む、請求項10に記載の太陽電池。
- 前記酸化テルル(TeO)が含有されたガラスフリットの融点は200℃〜500℃である、請求項11に記載の太陽電池。
- 前記第2電極は、
前記第2導電型領域と接する界面に、前記酸化テルル(TeO)が含有されたガラスフリットが位置する第1層と
前記第1層の上に前記金属粒子と前記酸化テルル(TeO)が含まれないガラスフリットが位置する第2層を備える、請求項11に記載の太陽電池。 - 前記第1層と前記第2導電型領域の界面には、前記金属粒子と前記第2導電型領域のシリコンが結合された結晶体(crystallite)が分布する、請求項13に記載の太陽電池。
- 前記第1電極に含まれる前記ガラスフリットは、PbO系またはBiO系の内、少なくともいずれか一つである、請求項1に記載の太陽電池。
- 前記第1電極に含まれる前記ガラスフリットは、酸化テルル(TeO)をさらに含む、請求項15に記載の太陽電池。
- 前記第1電極に含まれる金属粒子は、円形または楕円形の形状を有する第1金属粒子と長軸を有し、表面がでこぼこした板状の形状を有する第2金属粒子を含み、
前記第2電極に含まれる金属粒子は、前記第1金属粒子を含み、前記第2金属粒子は含まない、請求項1に記載の太陽電池。 - 前記第1電極に含まれる前記第2金属粒子の長軸の長さは、前記第1、第2電極のそれぞれに含まれる前記第1金属粒子の大きさより大きい、請求項17に記載の太陽電池。
- 半導体基板と、
前記半導体基板の前面に位置し、第1導電型の不純物または第2導電型の不純物の内、いずれか1つの不純物を含有する第1導電型領域と、
前記半導体基板の後面上に位置し、誘電体材質を含む制御パッシベーション膜と、
前記半導体基板の後面表面上に位置し、前記第1導電型領域に含まれた不純物と反対の導電型の不純物を含有し、多結晶シリコン材質を含む第2導電型領域と、
前記半導体基板の前面に位置し、前記第1導電型領域と接続される第1電極と、
前記半導体基板の後面に位置し、前記第2導電型領域と接続される第2電極とを含み、
前記第1、第2電極のそれぞれは、金属粒子とガラスフリットを含み、
前記第1電極のガラスフリットは、酸化テルル(TeO)を含む、太陽電池。 - 前記第2電極に含まれる前記ガラスフリットは、酸化テルル(TeO)をさらに含む、請求項19に記載の太陽電池。
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