JP2018110156A - 半導体装置、その製造方法およびカメラ - Google Patents
半導体装置、その製造方法およびカメラ Download PDFInfo
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Abstract
【解決手段】半導体素子が配された表面と、表面とは反対側の裏面と、表面と裏面とを結ぶ側面と、を有する半導体基板を備えた半導体装置であって、側面は、各々が表面の縁に沿って延び、表面および裏面に交差する方向に並んだ複数の凹部と、各々が複数の凹部のうち互いに隣接する2つの凹部の境界に位置する複数の頂部と、を有しており、複数の凹部および複数の頂部が、炭素およびフッ素を含む絶縁膜によって覆われている。
【選択図】図1
Description
図1〜3を参照して、本発明の実施形態による半導体装置の構成およびその製造方法について説明する。図1(a)は、本発明の第1の実施形態における半導体チップ100の構成を示す断面図である。半導体チップ100は、基板121と、基板121の2つの主面のうち一方の主面である表面101に形成された半導体素子111、素子分離部110、層間絶縁膜120、配線パターン130、プラグ131および電極部132とを含む。また、半導体チップ100は、基板121の側面102を覆う絶縁膜140を含む。
プロセスガス:C4F8 300sccm
上部電極パワー:2000W
下部(基板側)電極パワー:0W
圧力:8Pa
図4を参照して、本発明の実施形態による半導体装置の構成およびその製造方法について説明する。図4は、本発明の第2の実施形態における半導体チップ400の構成および製造方法を示す断面図である。本実施形態において、図4(g)に示すように、半導体チップ400に配される多数の半導体素子111の一部が、入射する光に応じた信号を生成するためのフォトダイオードなどの光電変換部401を含む撮像素子であることが上述の第1の実施形態と異なる。また、本実施形態の半導体チップ400は、撮像素子の上に配されたカラーフィルタ402およびマイクロレンズ403を含んでいてもよい。これ以外の構成は、第1の実施形態に示した半導体チップ100と同様であってもよい。例えば、半導体チップ400は、図1(b)に示すように、上述の半導体チップ100と同様に半導体装置1000を構成しうる。
Claims (20)
- 半導体素子が配された表面と、前記表面とは反対側の裏面と、前記表面と前記裏面とを結ぶ側面と、を有する半導体基板を備えた半導体装置であって、
前記側面は、各々が前記表面の縁に沿って延び、前記表面および前記裏面に交差する方向に並んだ複数の凹部と、各々が前記複数の凹部のうち互いに隣接する2つの凹部の境界に位置する複数の頂部と、を有しており、
前記複数の凹部および前記複数の頂部が、炭素およびフッ素を含む絶縁膜によって覆われていることを特徴とする半導体装置。 - 前記複数の凹部は、第1の凹部と、前記第1の凹部よりも前記表面の縁から離れた第2の凹部と、を含み、
前記複数の頂部のうち、前記第1の凹部と前記複数の凹部のうち前記第1の凹部にそれぞれ隣接する凹部との境界に位置する頂部と頂部との間隔が、前記複数の頂部のうち、前記第2の凹部と前記複数の凹部のうち前記第2の凹部にそれぞれ隣接する凹部との境界に位置する頂部と頂部との間隔以上であることを特徴とする請求項1に記載の半導体装置。 - 前記複数の頂部のうち、前記複数の凹部のそれぞれの凹部と前記複数の凹部のうち当該凹部にそれぞれ隣接する凹部との境界に位置する頂部と頂部との間隔が、前記表面の縁から離れるにしたがって、連続的または段階的に小さくなることを特徴とする請求項1または2に記載の半導体装置。
- 前記側面は、前記複数の凹部のうち互いに隣接する2つの凹部と、前記複数の頂部のうち当該2つの凹部の境界に位置する1つの頂部と、によってそれぞれ構成される第1の凹凸と、前記第1の凹凸よりも前記表面の縁から離れた第2の凹凸と、を含み、
前記第1の凹凸の段差が、前記第2の凹凸の段差以上であることを特徴とする請求項1乃至3の何れか1項に記載の半導体装置。 - 前記側面は、前記複数の凹部のうち互いに隣接する2つの凹部と、前記複数の頂部のうち当該2つの凹部の境界に位置する1つの頂部と、によってそれぞれ構成される凹凸の段差が、前記表面の縁から離れるにしたがって、連続的または段階的に小さくなることを特徴とする請求項1乃至4の何れか1項に記載の半導体装置。
- 前記絶縁膜は、前記側面の側の第1の面と、前記第1の面と反対側の第2の面とを有し、
前記第2の面が、前記側面よりも平坦性が高いことを特徴とする請求項1乃至5の何れか1項に記載の半導体装置。 - 前記複数の凹部のうち互いに隣接する2つの凹部と、前記複数の頂部のうち当該2つの凹部の境界に位置する1つの頂部と、によってそれぞれ構成される凹凸の段差よりも、前記絶縁膜のうち当該凹凸の上の部分の前記第2の面の段差が小さいことを特徴とする請求項6に記載の半導体装置。
- 前記絶縁膜のうち、前記複数の凹部のうち互いに隣接する2つの凹部の境界に位置する1つの頂部を覆う部分の厚さが、前記2つの凹部と前記1つの頂部によって構成される凹凸の段差よりも大きいことを特徴とする請求項1乃至7の何れか1項に記載の半導体装置。
- 前記絶縁膜のうち前記複数の頂部を覆う部分の膜厚が100nm以上かつ10μm以下であることを特徴とする請求項1乃至8の何れか1項に記載の半導体装置。
- 前記絶縁膜が、窒素をさらに含むことを特徴とする請求項1乃至9の何れか1項に記載の半導体装置。
- 前記複数の凹部の各々は、弧形状を有することを特徴とする請求項1乃至10の何れか1項に記載の半導体装置。
- 前記絶縁膜は、前記表面の縁から前記裏面の縁まで、連続的に前記側面を覆っていることを特徴とする請求項1乃至11の何れか1項に記載の半導体装置。
- 前記半導体素子が、入射する光に応じた信号を生成する光電変換部を含む撮像素子を含むことを特徴とする請求項1乃至12の何れか1項に記載の半導体装置。
- 請求項1乃至13の何れか1項に記載の半導体装置と、前記半導体装置によって得られた信号を処理する信号処理部と、を備えることを特徴とするカメラ。
- 半導体装置の製造方法であって、
各々に半導体素子が配された複数のデバイス領域と、前記複数のデバイス領域の間に位置するスクライブ領域と、を有する半導体基板の表面の上に、前記スクライブ領域に開口を有するマスクパターンを形成する工程と、
前記マスクパターンの開口を介して前記半導体基板をエッチングし、前記複数のデバイス領域ごとに前記半導体基板を分割する分割工程と、
前記分割工程によって分割された前記半導体基板の側面に絶縁膜を形成する成膜工程と、
前記成膜工程の後、前記マスクパターンを剥離する工程と、
を含み、
前記分割工程が、前記半導体基板のエッチングと、保護膜の成膜と、前記保護膜のエッチングと、を含むサイクルを繰り返し行うプロセス、および、ボッシュプロセスの少なくとも一方のプロセスを含むことを特徴とする製造方法。 - 前記絶縁膜を前記保護膜の上に形成することを特徴とする請求項15に記載の製造方法。
- 前記成膜工程において前記絶縁膜を成膜するプロセスでは、前記サイクルのうち前記保護膜を成膜するプロセスと、同じプロセスガスを用いることを特徴とする請求項15または16に記載の製造方法。
- 前記成膜工程において前記絶縁膜を成膜する時間が、前記サイクルのうち前記保護膜を成膜する時間よりも長いことを特徴とする請求項15乃至17の何れか1項に記載の製造方法。
- 前記分割工程と前記成膜工程とが、同じ装置で行われることを特徴とする請求項15乃至18の何れか1項に記載の製造方法。
- 繰り返される前記サイクルにおける前記半導体基板のエッチングの時間が、サイクルが進むにつれて連続的または段階的に短くなることを特徴とする請求項15乃至19の何れか1項に記載の製造方法。
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