JP2018088501A - 半導体基板 - Google Patents
半導体基板 Download PDFInfo
- Publication number
- JP2018088501A JP2018088501A JP2016231901A JP2016231901A JP2018088501A JP 2018088501 A JP2018088501 A JP 2018088501A JP 2016231901 A JP2016231901 A JP 2016231901A JP 2016231901 A JP2016231901 A JP 2016231901A JP 2018088501 A JP2018088501 A JP 2018088501A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- crystal layer
- semiconductor substrate
- avg
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 103
- 239000004065 semiconductor Substances 0.000 title claims abstract description 64
- 239000013078 crystal Substances 0.000 claims abstract description 120
- 238000000731 high angular annular dark-field scanning transmission electron microscopy Methods 0.000 claims abstract description 28
- 229910002704 AlGaN Inorganic materials 0.000 claims abstract description 21
- 239000010410 layer Substances 0.000 claims description 319
- 239000000203 mixture Substances 0.000 claims description 40
- 238000006243 chemical reaction Methods 0.000 claims description 34
- 230000001629 suppression Effects 0.000 claims description 31
- 150000004767 nitrides Chemical class 0.000 claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 9
- 239000002356 single layer Substances 0.000 claims description 5
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 125000004429 atom Chemical group 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 238000009499 grossing Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 230000000007 visual effect Effects 0.000 description 5
- 238000003917 TEM image Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 3
- 230000010349 pulsation Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005533 two-dimensional electron gas Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- -1 nitride compound Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001350 scanning transmission electron microscopy Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
- H01L21/02507—Alternating layers, e.g. superlattice
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
- H01L29/205—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Junction Field-Effect Transistors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】AlxGa1−xNからなる第1結晶層およびAlyGa1−yNからなる第2結晶層が繰り返し積層された積層構造を有するバッファ層を有し、バッファ層の断面を単一の第1結晶層を含む観察領域においてTEM観察したとき、深さDを変数とするHAADF−STEM強度I(D)が、深さDminで極小値Iminを示し、深さDmax(Dmax>Dmin)で極大値Imaxを示し、Dminより浅く位置する単調減少領域においてI(D)がImaxおよびIminの中間値ImidからIminに至るまでの深さ方向距離DD1と、Dminより深く位置する単調増加領域においてI(D)がIminからImaxに至るまでの深さ方向距離DD2とが、DD1≦0.3×DD2、の条件を満たす半導体基板を提供する。
【選択図】図1
Description
観察領域におけるHAADF−STEM強度I(D)が異なる複数の半導体基板100(実験例1〜3および比較例)を作製した。すなわち、実験例1〜3および比較例の半導体基板100として、ベース基板102にSi基板を用い、Si基板の(111)面上に、反応抑制層104および中間層110として、設計厚さ150〜160nmのAlN層および設計厚さ250nmのAlGaN層を形成した。さらに、バッファ層106として、設計厚さ5nmのAlN層(第1結晶層106a)および設計厚さ28nmのAlGaN層(第2結晶層106b)からなるAlN/AlGaN積層構造(積層構造106c)を繰り返し積層して形成し、デバイス形成層108として、設計厚さ800nmのGaN層(活性層112)および設計厚さ20〜50nmのAlGaN層(ショットキ層114)を形成した。
Claims (8)
- ベース基板と、デバイス形成層と、前記ベース基板および前記デバイス形成層の間に位置するバッファ層とを有し、
前記バッファ層が、AlxGa1−xNからなる第1結晶層およびAlyGa1−yNからなる第2結晶層が繰り返し積層された積層構造を有する半導体基板であって、
前記第1結晶層の平均Al組成AVG(x)および前記第2結晶層の平均Al組成AVG(y)が、0<AVG(x)≦1、0≦AVG(y)<1、および、AVG(x)>AVG(y)の条件を満たし、
前記バッファ層の断面を単一の前記第1結晶層を含む観察領域においてTEM観察したとき、深さDを変数とするHAADF−STEM強度I(D)が、深さDminで極小値Iminを示し、深さDmax(Dmax>Dmin)で極大値Imaxを示し、
前記Dminより浅く位置する単調減少領域において前記I(D)が前記Imaxおよび前記Iminの中間値Imidから前記Iminに至るまでの深さ方向距離DD1と、前記Dminより深く位置する単調増加領域において前記I(D)が前記Iminから前記Imaxに至るまでの深さ方向距離DD2とが、DD1≦0.3×DD2、の条件を満たす
半導体基板。 - 前記I(D)の2階微分d2I(D)/dD2が、前記Dminと前記Dmaxとの間で、1を超えるゼロクロス点を有する
請求項1に記載の半導体基板。 - 前記デバイス形成層の熱膨張係数が、前記ベース基板の熱膨張係数より大きく、
前記第2結晶層の平均格子定数が、前記第1結晶層の平均格子定数より大きい
請求項1または請求項2に記載の半導体基板。 - 前記ベース基板が、シリコン基板であり、
前記デバイス形成層が、GaNまたはAlGaNからなる単層または積層である
請求項3に記載の半導体基板。 - 前記ベース基板と前記バッファ層との間に、シリコン原子とIII族原子との反応を抑制する反応抑制層をさらに有する
請求項1から請求項4の何れか一項に記載の半導体基板。 - 前記反応抑制層と前記バッファ層との間に、バルク結晶状態における格子定数が前記反応抑制層の格子定数より大きい中間層、をさらに有する
請求項5に記載の半導体基板。 - 前記第1結晶層の厚さが5.0nmを超え20nm未満であり、
前記第2結晶層の厚さが10nm以上300nm以下であり、
前記ベース基板上に位置する、前記バッファ層および前記デバイス形成層を含む窒化物結晶層の厚さが、500nm以上13000nm以下である
請求項1から請求項6の何れか一項に記載の半導体基板。 - 前記AVG(x)および前記AVG(y)が、0.9≦AVG(x)≦1、および、0≦AVG(y)≦0.3の条件を満たす
請求項1から請求項7の何れか一項に記載の半導体基板。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016231901A JP6859084B2 (ja) | 2016-11-30 | 2016-11-30 | 半導体基板 |
CN201780073869.0A CN110024082A (zh) | 2016-11-30 | 2017-11-28 | 半导体衬底 |
EP17877266.1A EP3550591A4 (en) | 2016-11-30 | 2017-11-28 | SEMI-CONDUCTIVE SUBSTRATE |
PCT/JP2017/042694 WO2018101280A1 (ja) | 2016-11-30 | 2017-11-28 | 半導体基板 |
TW106141874A TWI744429B (zh) | 2016-11-30 | 2017-11-30 | 半導體基板 |
US16/425,501 US20190280091A1 (en) | 2016-11-30 | 2019-05-29 | Semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016231901A JP6859084B2 (ja) | 2016-11-30 | 2016-11-30 | 半導体基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018088501A true JP2018088501A (ja) | 2018-06-07 |
JP6859084B2 JP6859084B2 (ja) | 2021-04-14 |
Family
ID=62242146
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016231901A Active JP6859084B2 (ja) | 2016-11-30 | 2016-11-30 | 半導体基板 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20190280091A1 (ja) |
EP (1) | EP3550591A4 (ja) |
JP (1) | JP6859084B2 (ja) |
CN (1) | CN110024082A (ja) |
TW (1) | TWI744429B (ja) |
WO (1) | WO2018101280A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6868389B2 (ja) * | 2016-12-27 | 2021-05-12 | 住友化学株式会社 | 半導体基板および電子デバイス |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010123803A (ja) * | 2008-11-20 | 2010-06-03 | Mitsubishi Chemicals Corp | 窒化物半導体 |
WO2011016304A1 (ja) * | 2009-08-07 | 2011-02-10 | 日本碍子株式会社 | 半導体素子用エピタキシャル基板、半導体素子用エピタキシャル基板の製造方法、および半導体素子 |
WO2016072521A1 (ja) * | 2014-11-07 | 2016-05-12 | 住友化学株式会社 | 半導体基板および半導体基板の検査方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5224311B2 (ja) | 2007-01-05 | 2013-07-03 | 古河電気工業株式会社 | 半導体電子デバイス |
EP2221856B1 (en) * | 2007-11-21 | 2020-09-09 | Mitsubishi Chemical Corporation | Nitride semiconductor, nitride semiconductor crystal growth method, and nitride semiconductor light emitting element |
JP5133927B2 (ja) | 2009-03-26 | 2013-01-30 | コバレントマテリアル株式会社 | 化合物半導体基板 |
EP2538435B1 (en) * | 2010-02-16 | 2019-09-11 | NGK Insulators, Ltd. | Epitaxial substrate and method for producing same |
JP5624940B2 (ja) * | 2011-05-17 | 2014-11-12 | 古河電気工業株式会社 | 半導体素子及びその製造方法 |
JP5804768B2 (ja) * | 2011-05-17 | 2015-11-04 | 古河電気工業株式会社 | 半導体素子及びその製造方法 |
JP5665676B2 (ja) | 2011-07-11 | 2015-02-04 | Dowaエレクトロニクス株式会社 | Iii族窒化物エピタキシャル基板およびその製造方法 |
JP5785103B2 (ja) * | 2012-01-16 | 2015-09-24 | シャープ株式会社 | ヘテロ接合型電界効果トランジスタ用のエピタキシャルウエハ |
-
2016
- 2016-11-30 JP JP2016231901A patent/JP6859084B2/ja active Active
-
2017
- 2017-11-28 CN CN201780073869.0A patent/CN110024082A/zh active Pending
- 2017-11-28 WO PCT/JP2017/042694 patent/WO2018101280A1/ja unknown
- 2017-11-28 EP EP17877266.1A patent/EP3550591A4/en not_active Withdrawn
- 2017-11-30 TW TW106141874A patent/TWI744429B/zh active
-
2019
- 2019-05-29 US US16/425,501 patent/US20190280091A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010123803A (ja) * | 2008-11-20 | 2010-06-03 | Mitsubishi Chemicals Corp | 窒化物半導体 |
WO2011016304A1 (ja) * | 2009-08-07 | 2011-02-10 | 日本碍子株式会社 | 半導体素子用エピタキシャル基板、半導体素子用エピタキシャル基板の製造方法、および半導体素子 |
WO2016072521A1 (ja) * | 2014-11-07 | 2016-05-12 | 住友化学株式会社 | 半導体基板および半導体基板の検査方法 |
Also Published As
Publication number | Publication date |
---|---|
US20190280091A1 (en) | 2019-09-12 |
EP3550591A1 (en) | 2019-10-09 |
JP6859084B2 (ja) | 2021-04-14 |
EP3550591A4 (en) | 2020-08-05 |
TWI744429B (zh) | 2021-11-01 |
TW201834199A (zh) | 2018-09-16 |
CN110024082A (zh) | 2019-07-16 |
WO2018101280A1 (ja) | 2018-06-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107799583B (zh) | 在异质基底上的第III族氮化物缓冲层结构的p型掺杂 | |
JP5804768B2 (ja) | 半導体素子及びその製造方法 | |
TWI611576B (zh) | 半導體基板及半導體基板之製造方法 | |
JP2013026321A (ja) | 窒化物系半導体層を含むエピタキシャルウエハ | |
JP6656160B2 (ja) | 半導体基板および半導体基板の検査方法 | |
US11011630B2 (en) | Semiconductor wafer | |
JP2013145821A (ja) | ヘテロ接合型電界効果トランジスタ用のエピタキシャルウエハ | |
JP2008545270A (ja) | 炭化ケイ素基板上の第iii族窒化物エピタキシャル層 | |
WO2016084311A1 (ja) | エピタキシャルウェーハ、半導体素子、エピタキシャルウェーハの製造方法、並びに、半導体素子の製造方法 | |
JP2014103307A (ja) | 窒化物半導体素子、窒化物半導体ウェーハ及び窒化物半導体層の形成方法 | |
JP6239017B2 (ja) | 窒化物半導体基板 | |
WO2018101280A1 (ja) | 半導体基板 | |
CN112687732A (zh) | 半导体薄膜结构以及包括其的电子器件 | |
US20160293710A1 (en) | Nitride semiconductor substrate | |
JP2014103377A (ja) | 窒化物半導体素子、窒化物半導体ウェーハ及び窒化物半導体層の形成方法 | |
JP5756830B2 (ja) | 半導体基板、半導体装置、及び、半導体装置の製造方法 | |
JP2015207771A (ja) | 化合物半導体基板 | |
JPWO2015115126A1 (ja) | 窒化物半導体積層体およびその製造方法並びに窒化物半導体装置 | |
US20160118486A1 (en) | Semiconductor device | |
WO2016152106A1 (ja) | 半導体ウエハ、半導体装置及び半導体ウエハの製造方法 | |
US20240096969A1 (en) | Nitride semiconductor with multiple nitride regions of different impurity concentrations, wafer, semiconductor device and method for manufacturing the same | |
US20230049717A1 (en) | Nitride semiconductor, semiconductor device, and method for manufacturing nitride semiconductor | |
JP2021019009A (ja) | 半導体ウエハー及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190821 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201006 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20201204 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210202 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210302 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210325 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6859084 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |