JP2018080709A - 圧電式アクチュエータ及び圧電式バルブ - Google Patents
圧電式アクチュエータ及び圧電式バルブ Download PDFInfo
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- JP2018080709A JP2018080709A JP2016221198A JP2016221198A JP2018080709A JP 2018080709 A JP2018080709 A JP 2018080709A JP 2016221198 A JP2016221198 A JP 2016221198A JP 2016221198 A JP2016221198 A JP 2016221198A JP 2018080709 A JP2018080709 A JP 2018080709A
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- 238000012545 processing Methods 0.000 claims abstract description 57
- 238000006073 displacement reaction Methods 0.000 claims abstract description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 230000001629 suppression Effects 0.000 claims description 13
- 238000007599 discharging Methods 0.000 claims description 2
- 239000012636 effector Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 230000036278 prepulse Effects 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
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- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
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- 230000032683 aging Effects 0.000 description 1
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- 230000008859 change Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
- F01L9/00—Valve-gear or valve arrangements actuated non-mechanically
- F01L9/20—Valve-gear or valve arrangements actuated non-mechanically by electric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
- F01L9/00—Valve-gear or valve arrangements actuated non-mechanically
- F01L9/20—Valve-gear or valve arrangements actuated non-mechanically by electric means
- F01L9/24—Piezoelectric actuators
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
i)同文献中に記載されている2段出力の駆動電圧波形の場合でも、パルス波形には、圧電式アクチュエータの周波数成分を含んでいるため、共振振動抑制の効果は低い。
ii)共振の概念がないので、構造を変更すると、現物合わせで再度チューニングする必要があり、事前にどのような2段出力にすれば良いのかがわからない。
iii)同文献に記載の2段出力の駆動電圧波形(1段目より2段目が電圧が高い)は、更新ピッチの遅いローパスフィルタを介した波形と同じと考えられる。共振振動を抑制するには、ローパスフィルタのカットオフ周波数を圧電式アクチュエータの共振周波数より低く設定することが有効であるが、その結果、駆動電圧波形から圧電式アクチュエータの共振より高い周波数成分も減少するため、圧電式アクチュエータの応答性が悪い。
前記圧電素子13の変位を拡大して前記弁体12に作用させる。
12…作動体(弁体)
13…圧電素子
14…変位拡大機構
15…駆動手段(コントローラ)
15x…共振抑制処理部(第1のフィルタ処理部)
15y…遅れ補償処理部(第2のフィルタ処理部)
19…板ばね
111…気体圧力室
112…気体排出路
A…圧電式アクチュエータ
V…圧電式バルブ
Claims (5)
- 作動体の動作に必要な駆動力を変位として発生する圧電素子と、
前記圧電素子の変位を拡大し前記作動体に作用させるべく少なくともバネ要素を一部に含んだ変位拡大機構と、
前記圧電素子に電圧を印加して該圧電素子を伸張させることで前記作動体を作動させる駆動手段と、を備えてなる圧電式アクチュエータにおいて、
前記駆動手段は、前記変位拡大機構を動作させる際の機械的な共振周波数の逆関数特性を有する共振抑制処理部を備えており、この共振抑制処理部を通して前記圧電素子に前記機械的な共振を低減した電圧を印加するように構成されていることを特徴とする圧電式アクチュエータ。 - 前記駆動手段は、前記圧電素子を駆動する際の遅れの原因となる電気的な駆動特性の逆特性を有する遅れ補償処理部を備えており、この遅れ補償処理部を通して前記圧電素子に前記電気的な駆動特性の影響を低減する電圧を印加するように構成されている請求項1に記載の圧電式アクチュエータ。
- 共振抑制処理部がノッチフィルタである請求項1又は2に記載の圧電式アクチュエータ。
- 共振抑制処理部がノッチフィルタであり、遅れ補償処理部がハイパスフィルタである請求項2に記載の圧電式アクチュエータ。
- 請求項1〜4に記載の圧電式アクチュエータを用いたものであって、
外部から供給される圧縮気体を受け入れる気体圧力室及び該気体圧力室から前記圧縮気体を排出する気体排出路が形成されるバルブ本体と、
前記気体圧力室に配置され前記気体排出路を開閉する作動体である弁体とを備えていることを特徴とする圧電式バルブ。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016221198A JP6955137B2 (ja) | 2016-11-14 | 2016-11-14 | 圧電式アクチュエータ及び圧電式バルブ |
TW106117224A TWI735580B (zh) | 2016-11-14 | 2017-05-24 | 壓電式致動器及壓電式閥 |
CN201780069881.4A CN109982780B (zh) | 2016-11-14 | 2017-07-14 | 压电式致动器以及压电式阀 |
PCT/JP2017/025659 WO2018087959A1 (ja) | 2016-11-14 | 2017-07-14 | 圧電式アクチュエータ及び圧電式バルブ |
KR1020197011814A KR102338645B1 (ko) | 2016-11-14 | 2017-07-14 | 압전식 액추에이터 및 압전식 밸브 |
US16/349,407 US11009141B2 (en) | 2016-11-14 | 2017-07-14 | Piezoelectric actuator and piezoelectric valve |
EP17869630.8A EP3539680B1 (en) | 2016-11-14 | 2017-07-14 | Piezoelectric actuator and piezoelectric valve |
Applications Claiming Priority (1)
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JP2016221198A JP6955137B2 (ja) | 2016-11-14 | 2016-11-14 | 圧電式アクチュエータ及び圧電式バルブ |
Publications (2)
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JP2018080709A true JP2018080709A (ja) | 2018-05-24 |
JP6955137B2 JP6955137B2 (ja) | 2021-10-27 |
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Country Status (7)
Country | Link |
---|---|
US (1) | US11009141B2 (ja) |
EP (1) | EP3539680B1 (ja) |
JP (1) | JP6955137B2 (ja) |
KR (1) | KR102338645B1 (ja) |
CN (1) | CN109982780B (ja) |
TW (1) | TWI735580B (ja) |
WO (1) | WO2018087959A1 (ja) |
Citations (13)
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JPH0999567A (ja) * | 1995-10-04 | 1997-04-15 | Denso Corp | ピエゾアクチュエータ |
JPH10288618A (ja) * | 1997-04-16 | 1998-10-27 | Seiko Instr Inc | 表面分析装置 |
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JP2004316835A (ja) * | 2003-04-18 | 2004-11-11 | Satake Corp | 圧電式エアバルブおよび複合圧電式エアバルブ |
JP2007028419A (ja) * | 2005-07-20 | 2007-02-01 | Victor Co Of Japan Ltd | スピーカ駆動装置 |
JP2009156911A (ja) * | 2007-12-25 | 2009-07-16 | Sanyo Electric Co Ltd | 振動補償制御回路 |
JP2011087455A (ja) * | 2009-09-18 | 2011-04-28 | Murata Mfg Co Ltd | 圧電アクチュエーター駆動回路 |
JP2011143099A (ja) * | 2010-01-15 | 2011-07-28 | Asahi Kasei Electronics Co Ltd | 振動要素駆動回路および振動要素保護回路 |
JP2012528557A (ja) * | 2009-05-29 | 2012-11-12 | コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング | ピエゾバルブを操作するための回路装置および方法 |
JP2013144273A (ja) * | 2012-01-13 | 2013-07-25 | Taiheiyo Cement Corp | 圧電アクチュエータの駆動回路 |
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2016
- 2016-11-14 JP JP2016221198A patent/JP6955137B2/ja active Active
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- 2017-05-24 TW TW106117224A patent/TWI735580B/zh active
- 2017-07-14 EP EP17869630.8A patent/EP3539680B1/en active Active
- 2017-07-14 WO PCT/JP2017/025659 patent/WO2018087959A1/ja active Application Filing
- 2017-07-14 CN CN201780069881.4A patent/CN109982780B/zh active Active
- 2017-07-14 KR KR1020197011814A patent/KR102338645B1/ko active IP Right Grant
- 2017-07-14 US US16/349,407 patent/US11009141B2/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0999567A (ja) * | 1995-10-04 | 1997-04-15 | Denso Corp | ピエゾアクチュエータ |
JPH10288618A (ja) * | 1997-04-16 | 1998-10-27 | Seiko Instr Inc | 表面分析装置 |
JP2001021477A (ja) * | 1999-07-06 | 2001-01-26 | Olympus Optical Co Ltd | 動吸振器付き走査型プローブ顕微鏡及びその測定方法 |
JP2004316835A (ja) * | 2003-04-18 | 2004-11-11 | Satake Corp | 圧電式エアバルブおよび複合圧電式エアバルブ |
JP2007028419A (ja) * | 2005-07-20 | 2007-02-01 | Victor Co Of Japan Ltd | スピーカ駆動装置 |
JP2009156911A (ja) * | 2007-12-25 | 2009-07-16 | Sanyo Electric Co Ltd | 振動補償制御回路 |
JP2012528557A (ja) * | 2009-05-29 | 2012-11-12 | コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング | ピエゾバルブを操作するための回路装置および方法 |
JP2011087455A (ja) * | 2009-09-18 | 2011-04-28 | Murata Mfg Co Ltd | 圧電アクチュエーター駆動回路 |
JP2011143099A (ja) * | 2010-01-15 | 2011-07-28 | Asahi Kasei Electronics Co Ltd | 振動要素駆動回路および振動要素保護回路 |
JP2013144273A (ja) * | 2012-01-13 | 2013-07-25 | Taiheiyo Cement Corp | 圧電アクチュエータの駆動回路 |
WO2013157548A1 (ja) * | 2012-04-20 | 2013-10-24 | 株式会社サタケ | 圧電式バルブ、及び該圧電式バルブを利用した噴風手段を備える光学式粒状物選別機 |
JP2015085278A (ja) * | 2013-10-31 | 2015-05-07 | ローム株式会社 | アクチュエータの駆動回路装置及び駆動方法並びにそれらを用いたレンズモジュール及び電子機器 |
JP2016032939A (ja) * | 2015-09-25 | 2016-03-10 | セイコーエプソン株式会社 | 制御装置および流体噴射装置 |
Also Published As
Publication number | Publication date |
---|---|
JP6955137B2 (ja) | 2021-10-27 |
KR102338645B1 (ko) | 2021-12-13 |
EP3539680B1 (en) | 2024-03-13 |
WO2018087959A1 (ja) | 2018-05-17 |
CN109982780B (zh) | 2021-10-01 |
CN109982780A (zh) | 2019-07-05 |
TW201818012A (zh) | 2018-05-16 |
KR20190080870A (ko) | 2019-07-08 |
TWI735580B (zh) | 2021-08-11 |
US11009141B2 (en) | 2021-05-18 |
US20190264827A1 (en) | 2019-08-29 |
EP3539680A4 (en) | 2020-07-22 |
EP3539680A1 (en) | 2019-09-18 |
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