JP2018072284A - 超音波検査装置 - Google Patents
超音波検査装置 Download PDFInfo
- Publication number
- JP2018072284A JP2018072284A JP2016216025A JP2016216025A JP2018072284A JP 2018072284 A JP2018072284 A JP 2018072284A JP 2016216025 A JP2016216025 A JP 2016216025A JP 2016216025 A JP2016216025 A JP 2016216025A JP 2018072284 A JP2018072284 A JP 2018072284A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- ultrasonic
- medium
- inspection apparatus
- analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/11—Analysing solids by measuring attenuation of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/225—Supports, positioning or alignment in moving situation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/27—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the material relative to a stationary sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/28—Details, e.g. general constructional or apparatus details providing acoustic coupling, e.g. water
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/015—Attenuation, scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0258—Structural degradation, e.g. fatigue of composites, ageing of oils
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/26—Scanned objects
- G01N2291/269—Various geometry objects
- G01N2291/2697—Wafer or (micro)electronic parts
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
Abstract
【解決手段】超音波検査装置1は、パッケージ化された半導体デバイスDを検査対象とする装置であって、半導体デバイスDに対向して配置される超音波振動子2と、超音波振動子2において半導体デバイスDに対向する端部2bに設けられ、超音波Wを伝搬させる媒質Mを保持する媒質保持部12と、半導体デバイスDと超音波振動子2との相対位置を移動させるステージ3と、超音波振動子2による超音波Wの入力に応じた半導体デバイスDの反応を解析する解析部22と、を備える。
【選択図】図2
Description
Claims (9)
- パッケージ化された半導体デバイスを検査対象とする超音波検査装置であって、
前記半導体デバイスに対向して配置される超音波振動子と、
前記超音波振動子において前記半導体デバイスに対向する端部に設けられ、前記超音波を伝搬させる媒質を保持する媒質保持部と、
前記半導体デバイスと前記超音波振動子との相対位置を移動させるステージと、
前記超音波振動子による超音波の入力に応じた前記半導体デバイスの反応を解析する解析部と、を備える、超音波検査装置。 - 前記媒質保持部は、前記超音波振動子の前記端部に設けられた筒状部材によって構成されている、請求項1記載の超音波検査装置。
- 前記媒質保持部は、前記超音波振動子の前記端部にスライド自在に嵌合されている、請求項1又は2記載の超音波検査装置。
- 前記媒質保持部は、前記媒質の保持量を調整する媒質流通口を有している、請求項1〜3のいずれか一項記載の超音波検査装置。
- 前記媒質保持部は、前記媒質の保持量を検出する保持量検出部を有している、請求項1〜4のいずれか一項記載の超音波検査装置。
- 前記半導体デバイスに定電圧又は定電流を印加する電源装置と、
前記定電圧又は前記定電流の印加状態において、前記超音波の入力に応じた前記半導体デバイスの電流又は電圧を検出する反応検出部と、を更に備え、
前記解析部は、前記反応検出部からの検出信号に基づいて解析画像を生成する、請求項1〜5のいずれか一項記載の超音波検査装置。 - 前記超音波振動子に対して駆動信号を入力すると共に、前記駆動信号に応じた参照信号を出力する信号発生部を更に備え、
前記解析部は、前記検出信号と前記参照信号とに基づいて前記解析画像を生成する、請求項6記載の超音波検査装置。 - 前記半導体デバイスで反射した前記超音波の反射波を検出する反射検出部を更に備え、
前記解析部は、前記反射検出部からの検出信号に基づいて反射画像を生成する、請求項6又は7記載の超音波検査装置。 - 前記解析部は、前記解析画像と前記反射画像とを重畳した重畳画像を生成する、請求項8記載の超音波検査装置。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016216025A JP6745196B2 (ja) | 2016-11-04 | 2016-11-04 | 超音波検査装置 |
US16/346,585 US11428673B2 (en) | 2016-11-04 | 2017-09-08 | Ultrasonic inspection device |
CN201780066138.3A CN109863394A (zh) | 2016-11-04 | 2017-09-08 | 超声波检查装置 |
SG11201903418QA SG11201903418QA (en) | 2016-11-04 | 2017-09-08 | Ultrasonic inspection device |
KR1020197012767A KR102279570B1 (ko) | 2016-11-04 | 2017-09-08 | 초음파 검사 장치 |
PCT/JP2017/032545 WO2018083882A1 (ja) | 2016-11-04 | 2017-09-08 | 超音波検査装置 |
DE112017005573.3T DE112017005573T5 (de) | 2016-11-04 | 2017-09-08 | Ultraschallprüfvorrichtung |
TW106135391A TWI731181B (zh) | 2016-11-04 | 2017-10-17 | 超音波檢查裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016216025A JP6745196B2 (ja) | 2016-11-04 | 2016-11-04 | 超音波検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018072284A true JP2018072284A (ja) | 2018-05-10 |
JP6745196B2 JP6745196B2 (ja) | 2020-08-26 |
Family
ID=62076873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016216025A Active JP6745196B2 (ja) | 2016-11-04 | 2016-11-04 | 超音波検査装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US11428673B2 (ja) |
JP (1) | JP6745196B2 (ja) |
KR (1) | KR102279570B1 (ja) |
CN (1) | CN109863394A (ja) |
DE (1) | DE112017005573T5 (ja) |
SG (1) | SG11201903418QA (ja) |
TW (1) | TWI731181B (ja) |
WO (1) | WO2018083882A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020174984A1 (ja) | 2019-02-26 | 2020-09-03 | 国立大学法人豊橋技術科学大学 | 超音波検査装置及び超音波検査方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI686618B (zh) * | 2018-11-23 | 2020-03-01 | 行政院原子能委員會核能研究所 | 單探頭式非線性超音波檢測裝置及其方法 |
KR102406801B1 (ko) * | 2021-09-07 | 2022-06-10 | 주식회사 엠아이티 | 초음파 프로브를 이용한 불량 소자 검사방법 및 이를 이용하는 검사장치 |
EP4290250A1 (de) * | 2022-06-08 | 2023-12-13 | Siemens Aktiengesellschaft | Verfahren zur prüfung einer elektronischen baugruppe sowie elektronischen baugruppe mit vorrichtung zur prüfung |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0329848A (ja) * | 1989-06-28 | 1991-02-07 | Kyushu Electric Power Co Inc | 局部水浸用探触子 |
US5493912A (en) * | 1991-08-16 | 1996-02-27 | Krautkramer Gmbh & Co. | Ultrasonic probe suitable for acoustic coupling via a water channel |
JPH08320259A (ja) * | 1995-05-25 | 1996-12-03 | Nikon Corp | 赤外線検出装置 |
JP2004077341A (ja) * | 2002-08-20 | 2004-03-11 | Hitachi Kenki Fine Tech Co Ltd | 超音波映像検査方法および超音波映像検査装置 |
JP2011053126A (ja) * | 2009-09-03 | 2011-03-17 | Disco Abrasive Syst Ltd | 超音波検査方法及び超音波検査装置 |
JP2013178101A (ja) * | 2012-02-28 | 2013-09-09 | Nissan Motor Co Ltd | ドライ式超音波探傷検査装置とその方法 |
WO2015099229A1 (ko) * | 2013-12-23 | 2015-07-02 | 주식회사 포스코 | 강판 결함 검출을 위한 초음파 탐상 장치 및 방법 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6072327A (en) * | 1995-05-26 | 2000-06-06 | Nec Corporation | Method and device of testing semiconductor integrated circuit chip capable of preventing electron-hole pairs |
JP2666772B2 (ja) | 1995-05-26 | 1997-10-22 | 日本電気株式会社 | 超音波加熱を用いた半導体集積回路配線系の検査法および装置 |
US7421900B2 (en) | 2001-11-14 | 2008-09-09 | Kabushiki Kaisha Toshiba | Ultrasonograph, ultrasonic transducer, examining instrument, and ultrasonographing device |
JP2003254953A (ja) | 2002-03-05 | 2003-09-10 | Hitachi Kenki Fine Tech Co Ltd | 超音波映像検査装置 |
US7518251B2 (en) * | 2004-12-03 | 2009-04-14 | General Electric Company | Stacked electronics for sensors |
US7793546B2 (en) * | 2005-07-11 | 2010-09-14 | Panasonic Corporation | Ultrasonic flaw detection method and ultrasonic flaw detection device |
US9121817B1 (en) | 2009-03-10 | 2015-09-01 | Sandia Corporation | Ultrasonic testing device having an adjustable water column |
CN102928516B (zh) * | 2012-10-23 | 2014-11-19 | 沈阳黎明航空发动机(集团)有限责任公司 | 一种检测复合材料制件的超声探头水囊 |
JP5650339B1 (ja) * | 2014-02-06 | 2015-01-07 | 株式会社日立パワーソリューションズ | 超音波検査装置 |
US10302600B2 (en) * | 2016-01-19 | 2019-05-28 | Northrop Grumman Innovation Systems, Inc. | Inspection devices and related systems and methods |
JP6927690B2 (ja) * | 2016-11-04 | 2021-09-01 | 浜松ホトニクス株式会社 | 半導体デバイス検査装置及び半導体デバイス検査方法 |
JP6745197B2 (ja) * | 2016-11-04 | 2020-08-26 | 浜松ホトニクス株式会社 | 超音波検査装置及び超音波検査方法 |
-
2016
- 2016-11-04 JP JP2016216025A patent/JP6745196B2/ja active Active
-
2017
- 2017-09-08 KR KR1020197012767A patent/KR102279570B1/ko active IP Right Grant
- 2017-09-08 DE DE112017005573.3T patent/DE112017005573T5/de active Pending
- 2017-09-08 SG SG11201903418QA patent/SG11201903418QA/en unknown
- 2017-09-08 US US16/346,585 patent/US11428673B2/en active Active
- 2017-09-08 WO PCT/JP2017/032545 patent/WO2018083882A1/ja active Application Filing
- 2017-09-08 CN CN201780066138.3A patent/CN109863394A/zh active Pending
- 2017-10-17 TW TW106135391A patent/TWI731181B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0329848A (ja) * | 1989-06-28 | 1991-02-07 | Kyushu Electric Power Co Inc | 局部水浸用探触子 |
US5493912A (en) * | 1991-08-16 | 1996-02-27 | Krautkramer Gmbh & Co. | Ultrasonic probe suitable for acoustic coupling via a water channel |
JPH08320259A (ja) * | 1995-05-25 | 1996-12-03 | Nikon Corp | 赤外線検出装置 |
JP2004077341A (ja) * | 2002-08-20 | 2004-03-11 | Hitachi Kenki Fine Tech Co Ltd | 超音波映像検査方法および超音波映像検査装置 |
JP2011053126A (ja) * | 2009-09-03 | 2011-03-17 | Disco Abrasive Syst Ltd | 超音波検査方法及び超音波検査装置 |
JP2013178101A (ja) * | 2012-02-28 | 2013-09-09 | Nissan Motor Co Ltd | ドライ式超音波探傷検査装置とその方法 |
WO2015099229A1 (ko) * | 2013-12-23 | 2015-07-02 | 주식회사 포스코 | 강판 결함 검출을 위한 초음파 탐상 장치 및 방법 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020174984A1 (ja) | 2019-02-26 | 2020-09-03 | 国立大学法人豊橋技術科学大学 | 超音波検査装置及び超音波検査方法 |
KR20210126553A (ko) | 2019-02-26 | 2021-10-20 | 고꾸리쯔 다이가꾸 호우징 도요하시 기쥬쯔 가가꾸 다이가꾸 | 초음파 검사 장치 및 초음파 검사 방법 |
Also Published As
Publication number | Publication date |
---|---|
DE112017005573T5 (de) | 2019-08-29 |
US20190257798A1 (en) | 2019-08-22 |
SG11201903418QA (en) | 2019-05-30 |
US11428673B2 (en) | 2022-08-30 |
TW201818086A (zh) | 2018-05-16 |
KR20190077373A (ko) | 2019-07-03 |
KR102279570B1 (ko) | 2021-07-21 |
TWI731181B (zh) | 2021-06-21 |
WO2018083882A1 (ja) | 2018-05-11 |
CN109863394A (zh) | 2019-06-07 |
JP6745196B2 (ja) | 2020-08-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2018083883A1 (ja) | 超音波検査装置及び超音波検査方法 | |
WO2018083882A1 (ja) | 超音波検査装置 | |
JP5154422B2 (ja) | 超音波測定方法及び装置 | |
KR101819830B1 (ko) | 초음파 검사 장치, 초음파 검사 시스템 및 초음파 검사 방법 | |
KR102328606B1 (ko) | 반도체 디바이스 검사 장치 및 반도체 디바이스 검사 방법 | |
WO2021039483A1 (ja) | 超音波検査装置および超音波検査方法 | |
US10663433B2 (en) | Ultrasound imaging device and method of generating image for ultrasound imaging device | |
JP7276744B2 (ja) | 超音波検査装置及び超音波検査方法 | |
JP2022053511A (ja) | 配線を有する基板、機器または部品の検査装置、及び当該基板、機器の検査方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190827 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200512 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200710 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200728 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200803 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6745196 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |