JP2018018819A - 刺激開始される自己破壊基板のためのセンサおよびヒータ - Google Patents
刺激開始される自己破壊基板のためのセンサおよびヒータ Download PDFInfo
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- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
- H01L23/5256—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
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- H03K19/02—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components
- H03K19/173—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using elementary logic circuits as components
- H03K19/177—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using elementary logic circuits as components arranged in matrix form
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
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Abstract
Description
第2の電極層660は、フォトダイオード600をオンにする刺激光を実質的に透過する。例えば、第2の電極層660は、刺激光の波長で50%より大きい光透過率を有することができる。第2の電極層660に適した材料は、伝導性酸化物、例えばインジウムスズ酸化物(ITO)、導電性ポリマー、金属グリッド、カーボンナノチューブ(CNT)、グラフェン、ワイヤメッシュ、金属薄膜および/または必要な光学透過率を有する他の伝導体を含む。デバイス600は、活性領域に到達する光の波長の帯域を狭める光学フィルタを含んでいてもよい。例えば、いくつかの実施形態では、適切な厚さを有する第2の電極層、例えばITO層は、所望のトリガ刺激の波長帯域の外側にある光の波長を実質的に減衰させ、所望のトリガ刺激の波長帯域内にある光の波長を実質的に通過させる光学フィルタを提供する。
次いで、第1のドープされた半導体層およびその下にある第1の電極層は、例えば、第1の電極層/第1のドープ層のスタックの第1のマスキング工程を介するフォトリソグラフィパターニング、続く第1のドープ層のCF4プラズマエッチングおよび第1の電極層の化学的湿式エッチングによって、パターニングされて1030、第1の電極領域を形成する。
Claims (10)
- 応力負荷された基板;
前記応力負荷された基板に熱的に接続されたヒータ;
電源;
トリガ回路であって:
トリガ刺激に曝されるとトリガ信号を生成するように構成されたセンサ;
前記トリガ信号によって起動されたときに前記電源を前記ヒータに接続するように構成されたスイッチ
を含み、前記電源に接続されると、前記ヒータは、前記応力負荷された基板の自己破壊を開始するのに十分な熱を発生するように構成されている、トリガ回路
を含むデバイス。 - 前記センサは、フォトダイオードであり、前記フォトダイオードは:
前記基板上に配設され、前記フォトダイオードの第1のリードを形成するために前記基板上に延びる第1の電極層;
前記第1の電極層上に配設された第1のドープ層;
前記第1のドープ層にわたって配設された第2の反対のドープ層であって、前記第1および第2のドープ層が、前記フォトダイオードの活性領域の少なくとも一部を形成するドープ層;および
前記第2のドープ層上に配設された第2の電極層であって、前記第2のドープ層および前記第2の電極層が、前記フォトダイオードの第2のリードを形成するために前記基板上に延びる第2の電極層
を含む、請求項1に記載のデバイス。 - 前記第1および第2のリードは、前記フォトダイオードの前記活性領域を前記デバイスの周辺に電気的に接続し、1つまたは複数の外部電子デバイスと通信する外部リードに接続されるように構成される、請求項2に記載のデバイス。
- トリガ刺激への曝露に応答してトリガ信号を生成する工程;
前記トリガ信号に応答して、電源を応力負荷された基板と熱接触しているヒータに接続する工程;および
前記応力負荷された基材を加熱する工程であって、前記加熱が、前記応力負荷された基板の自己破壊を開始するのに十分な損傷を前記応力負荷された基板に与える工程
を含む方法。 - 前記トリガ刺激が、不正操作現象によって引き起こされる、請求項4に記載の方法。
- 前記トリガ刺激は、光である方法であって、前記光源を前記光に敏感なセンサに向ける工程をさらに含む、請求項4に記載の方法。
- フォトダイオードを形成する方法であって:
基板上に第1の電極層を堆積する工程;
前記第1の電極層上に活性領域の第1のドープ層を堆積する工程;
真性層を前記第1のドープ層の上に堆積する工程;
前記真性層の上に前記活性領域の第2のドープ層を堆積する工程;
前記第2のドープ層の上に第2の電極層を堆積する工程;および
前記第1の電極層、前記第1のドープ層、前記真性層、前記第2のドープ層、および前記第2の電極層をパターニングして、2つ以下のマスク工程で前記フォトダイオードを形成する工程
を含む、方法。 - 前記パターニング工程は:
第1マスクを用いて第1のパターニング工程で前記第1の電極層および前記第1のドープ層をパターニングする工程;
第2マスクを用いて第2のパターニング工程で前記第2の電極層、前記第2のドープ層および前記真性層をパターニングする工程;および
前記第2のパターニング工程の間に、自己整合様式に非保護領域内の前記第1のドープ層を除去する工程
を含む、請求項7に記載の方法。 - 前記基板上に接着促進表面を形成する工程をさらに含み、前記第1の電極層を堆積する工程が、前記第1の電極層を前記接着促進表面上に堆積させる工程を含む、請求項7に記載の方法。
- 前記第2の電極層は、前記刺激を前記フォトダイオードの前記活性領域に伝達するように構成される、請求項7に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US15/220,221 US10224297B2 (en) | 2016-07-26 | 2016-07-26 | Sensor and heater for stimulus-initiated fracture of a substrate |
US15/220,221 | 2016-07-26 |
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JP2018018819A true JP2018018819A (ja) | 2018-02-01 |
JP2018018819A5 JP2018018819A5 (ja) | 2021-03-04 |
JP6938257B2 JP6938257B2 (ja) | 2021-09-22 |
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US (2) | US10224297B2 (ja) |
EP (1) | EP3285399B1 (ja) |
JP (1) | JP6938257B2 (ja) |
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US10224297B2 (en) | 2016-07-26 | 2019-03-05 | Palo Alto Research Center Incorporated | Sensor and heater for stimulus-initiated fracture of a substrate |
US10026579B2 (en) | 2016-07-26 | 2018-07-17 | Palo Alto Research Center Incorporated | Self-limiting electrical triggering for initiating fracture of frangible glass |
US10903173B2 (en) | 2016-10-20 | 2021-01-26 | Palo Alto Research Center Incorporated | Pre-conditioned substrate |
US10626048B2 (en) | 2017-12-18 | 2020-04-21 | Palo Alto Research Center Incorporated | Dissolvable sealant for masking glass in high temperature ion exchange baths |
US10717669B2 (en) | 2018-05-16 | 2020-07-21 | Palo Alto Research Center Incorporated | Apparatus and method for creating crack initiation sites in a self-fracturing frangible member |
US11107645B2 (en) | 2018-11-29 | 2021-08-31 | Palo Alto Research Center Incorporated | Functionality change based on stress-engineered components |
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KR20220106156A (ko) * | 2019-11-27 | 2022-07-28 | 코닝 인코포레이티드 | 반도체 소자 제조용 유리 웨이퍼 |
US12013043B2 (en) | 2020-12-21 | 2024-06-18 | Xerox Corporation | Triggerable mechanisms and fragment containment arrangements for self-destructing frangible structures and sealed vessels |
US11904986B2 (en) | 2020-12-21 | 2024-02-20 | Xerox Corporation | Mechanical triggers and triggering methods for self-destructing frangible structures and sealed vessels |
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US20190172800A1 (en) | 2019-06-06 |
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