JP2017535787A - 基板の検査装置、基板の検査方法、大面積基板検査装置、及びその操作方法 - Google Patents
基板の検査装置、基板の検査方法、大面積基板検査装置、及びその操作方法 Download PDFInfo
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Abstract
Description
Claims (15)
- ディスプレイ製造用大面積基板を検査するための装置であって、
真空チャンバと、
真空チャンバ内に配置され、ディスプレイ製造用大面積基板を支持するように構成された基板支持体と、
基板支持体によって支持された基板を検査するための荷電粒子ビームを生成するように構成され、対物レンズの減速電解レンズコンポーネントを含む第1の撮像荷電粒子ビーム顕微鏡とを含む装置。 - 真空発生装置(特に、真空ポンプ)と、
真空発生装置と真空チャンバとの間の接続部内に又は接続部に設けられた振動ダンパーとを含む、請求項1記載の装置。 - 真空チャンバ内に又は真空チャンバに配置された1以上の補強バーを含み、補強バーは、真空チャンバを構造的に補強して振動を低減するように構成される、前記請求項のいずれか1項記載の装置。
- 1以上の空気圧要素を含み、真空チャンバは、1以上の空気圧要素上に取り付けられる、前記請求項のいずれか1項記載の装置。
- 真空チャンバを音響振動から遮蔽するように構成された音響シールドを含む、前記請求項のいずれか1項記載の装置。
- 第1の撮像荷電粒子ビーム顕微鏡と基板支持体との間の相対位置に影響を及ぼす振動を測定するように構成された振動センサ(特に、干渉計)を含む、前記請求項のいずれか1項記載の装置。
- 真空チャンバは、炭素鋼及び鉱物鋳造物からなる群から選択される少なくとも1つの材料で作られているか、又は炭素鋼及び鉱物鋳造物からなる群から選択される少なくとも1つの材料の補強構造を有している、前記請求項のいずれか1項記載の装置。
- 基板支持体は、第1の方向に沿った第1の受け入れ領域寸法を有する基板受け入れ領域を提供し、装置は、
第1の受け入れ領域寸法の30%〜70%の又は30cm以上の第1の方向に沿った第1の撮像荷電粒子ビーム顕微鏡からの距離を有する第2の撮像荷電粒子ビーム顕微鏡を含む、前記請求項のいずれか1項記載の装置。 - 基板(特に、ディスプレイ製造用大面積基板)を検査するための装置であって、
真空チャンバと、
真空チャンバ内に配置された基板支持体であって、第1の方向に沿った第1の受け入れ領域寸法を有する基板受け入れ領域を提供する基板支持体と、
第1の受け入れ領域寸法の30%〜70%の第1の方向に沿った距離を有する第1の撮像荷電粒子ビーム顕微鏡及び第2の撮像荷電粒子ビーム顕微鏡とを含む装置。 - 真空チャンバは、第1の方向に沿った第1の受け入れ領域寸法の150%〜180%の第1の方向に沿った第1の内側寸法を有する、請求項8又は9記載の装置。
- 第2の撮像荷電粒子ビーム顕微鏡は、第1の撮像荷電粒子ビーム顕微鏡から第1の方向に沿って少なくとも30cmの距離だけ離れている、請求項8〜10のいずれか1項記載の装置。
- 大面積基板から放出されたX線を分析するように構成されたX線検出器を含む、請求項9〜11のいずれか1項記載の装置。
- ディスプレイ製造用大面積基板を検査するための方法であって、
大面積基板を真空チャンバ内に提供する工程と、
第1の撮像荷電粒子ビーム顕微鏡を用いて第1の荷電粒子ビームを生成する工程とを含み、第1の荷電粒子ビームは、2keV以下の入射エネルギーで基板に衝突する方法。 - 第1の荷電粒子ビームは、第1のビーム位置で基板に衝突し、方法は、
第2の撮像荷電粒子ビーム顕微鏡を用いて第2の荷電粒子ビームを生成する工程であって、第2の荷電粒子ビームは、2keV以下の入射エネルギーで第2のビーム位置で基板に衝突する工程を含み、
第1のビーム位置は、第2のビーム位置から第1の方向に沿って少なくとも30cmのビーム距離だけ離れている、請求項13記載の方法。 - 第1の方向に沿った第1の基板位置は、第1のビーム位置で結像され、第1の方向に沿った第2の基板位置は、第2のビーム位置で結像され、第1の方向に沿った第1の基板位置と第2の基板位置との間の距離は、第1の方向に沿った基板幅の40%以上である、請求項13又は14記載の方法。
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PCT/EP2014/079018 WO2016101978A1 (en) | 2014-12-22 | 2014-12-22 | Apparatus for inspecting a substrate, method for inspecting a substrate, large area substrate inspection apparatus and method of operating thereof |
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KR20190102170A (ko) * | 2018-02-22 | 2019-09-03 | 어플라이드 머티어리얼스, 인코포레이티드 | 디스플레이 제조를 위한 기판에 대한 자동화된 임계 치수 측정을 위한 방법, 디스플레이 제조를 위한 대면적 기판을 검사하는 방법, 디스플레이 제조를 위한 대면적 기판을 검사하기 위한 장치, 및 그 동작 방법 |
KR20210088720A (ko) * | 2018-11-22 | 2021-07-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판에 대한 임계 치수 측정을 위한 방법, 및 기판 상의 전자 디바이스를 검사하고 절단하기 위한 장치 |
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CN107110799A (zh) | 2017-08-29 |
WO2016101978A1 (en) | 2016-06-30 |
TW201626421A (zh) | 2016-07-16 |
CN115901831A (zh) | 2023-04-04 |
TWI673748B (zh) | 2019-10-01 |
JP6604704B2 (ja) | 2019-11-13 |
KR20170101265A (ko) | 2017-09-05 |
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