WO2019081010A1

WO2019081010A1 - Carrier for use in a vacuum chamber, system for testing a transport arrangement in a vacuum chamber, vacuum processing system, and method for testing a transport arrangement in a vacuum chamber

Info

Publication number: WO2019081010A1
Application number: PCT/EP2017/077300
Authority: WO
Inventors: Simon Lau; Hans Joachim HANDT; Joachim Sonnenschein; Claus ZENGEL; Marko GERHARD; Alen OSMANLIC; Hauke Hansen; Won Jun Choi
Original assignee: Applied Materials, Inc.
Priority date: 2017-10-25
Filing date: 2017-10-25
Publication date: 2019-05-02
Also published as: KR20190053864A; CN109964308B; CN109964308A; KR102253018B1

Abstract

The present disclosure provides a carrier (100) for transportation in a vacuum chamber (302). The carrier (100) includes a body (110) and one or more motion sensors (120) connected to the body (110).

Description

CARRIER FOR USE IN A VACUUM CHAMBER, SYSTEM FOR TESTING A TRANSPORT ARRANGEMENT IN A VACUUM CHAMBER, VACUUM PROCESSING SYSTEM, AND METHOD FOR TESTING A TRANSPORT

ARRANGEMENT IN A VACUUM CHAMBER

FIELD [0001] Embodiments of the present disclosure relate to a carrier for use in a vacuum chamber, a system for testing a transport arrangement in a vacuum chamber, a vacuum processing system, and a method for testing a transport arrangement in a vacuum chamber. Embodiments of the present disclosure particularly relate to a test carrier for determining a state of a transport arrangement under vacuum conditions.

BACKGROUND

[0002] Techniques for layer deposition on a substrate include, for example, thermal evaporation, physical vapor deposition (PVD), and chemical vapor deposition (CVD). Coated substrates may be used in several applications and in several technical fields. For instance, substrates for displays can be coated by a PVD process. Some applications include insulating panels, organic light emitting diode (OLED) panels, substrates with TFTs, color filters or the like. Glass substrates can be supported on carriers which are transported through a vacuum processing system using a transport arrangement. The transport arrangement may include tracks on which the carrier is placed, so that the carrier is moved along a transport path provided by the tracks. If the tracks are not properly aligned and include for instance discontinuities or bumps, the glass substrate can break due to an impact on the carrier.

[0003] In view of the above, new carriers for use in a vacuum chamber, systems for testing a transport arrangement in a vacuum chamber, vacuum processing systems, and methods for testing a transport arrangement in a vacuum chamber that overcome at least some of the problems in the art are beneficial. The present disclosure particularly aims at providing a test carrier that can identify a misalignment of a transport arrangement such that substrate breakage can be reduced or even avoided.

SUMMARY [0004] In light of the above, a carrier for use in a vacuum chamber, a system for testing a transport arrangement in a vacuum chamber, a vacuum processing system, and a method for testing a transport arrangement in a vacuum chamber are provided. Further aspects, benefits, and features of the present disclosure are apparent from the claims, the description, and the accompanying drawings. [0005] According to an aspect of the present disclosure, a carrier for use in a vacuum chamber is provided. The carrier includes a body and one or more motion sensors connected to the body.

[0006] According to another aspect of the present disclosure, a carrier for use in a vacuum chamber is provided. The carrier includes one or more motion sensors configured to detect a momentum acting on the carrier and/or an acceleration of the carrier.

[0007] According to a further aspect of the present disclosure, a system for testing a transport arrangement in a vacuum chamber is provided. The system includes a carrier having one or more motion sensors and a processor device configured to analyze motion data provided by the one or more motion sensors. [0008] According to a yet further aspect of the present disclosure, a vacuum processing system is provided. The vacuum processing system includes a vacuum chamber, the carrier according to the present disclosure, and a transport arrangement configured for transportation of the carrier in the vacuum chamber.

[0009] According to an aspect of the present disclosure, a method for testing a transport arrangement in a vacuum chamber is provided. The method includes moving a carrier having one or more motion sensors along a track in the vacuum chamber, and analyzing sensor signals provided by the one or more motion sensors. [0010] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0011] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIGs. 1A and B show schematic views of a carrier for use in a vacuum chamber according to embodiments described herein;

FIGs. 2A and B show schematic views of a carrier and a transport arrangement according to embodiments described herein;

FIG. 3 shows a schematic view of a vacuum processing system according to embodiments described herein; and

FIG. 4 shows a flow chart of a method for testing a transport arrangement in a vacuum chamber according to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS [0012] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Generally, only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0013] Substrates can be supported on carriers which are transported through a vacuum processing system using a transport arrangement. The transport arrangement may include tracks on which the carrier is placed, so that the carrier is moved along a transport path provided by the tracks. If the tracks are not properly aligned and include for instance discontinuities or bumps, the substrate can be damaged due to a sudden movement of the carrier.

[0014] The carrier of the present disclosure includes motion sensors, such as acceleration sensors, to determine the state of the transport arrangement e.g. under vacuum conditions. The carrier can for instance be used to check whether the tracks of the transport arrangement are still properly aligned even after the vacuum has been established inside the vacuum chamber. The motion sensors can detect a momentum acting on the carrier and/or an acceleration of the carrier to identify for instance discontinuities or bumps at the tracks. The transport arrangement can be aligned and/or repaired before carriers which support substrates are transported through the vacuum chamber for vacuum processing. Substrate breakage can be reduced or even avoided.

[0015] FIG. 1A shows a schematic front view of a carrier 100 for use in a vacuum chamber according to embodiments described herein. FIG. IB shows a side view of the carrier 100 of FIG. 1A. The carrier 100 can be a test carrier to test the transport arrangement under vacuum conditions.

[0016] The carrier 100 includes a body 110 and one or more motion sensors 120 connected to the body 110. The one or more motion sensors 120 are configured to detect a momentum acting on the carrier 100 and/or an acceleration of the carrier 100. In particular, the one or more motion sensors 120 are fixedly mounted at the body 110 such that movements of the body 110, which may be caused by a misalignment of the transport arrangement, can be detected by the one or more motion sensors 120. In some implementations, the one or more motion sensors 120 can be acceleration sensors. For example, the momentum can be derived from the measured acceleration.

[0017] Providing the one or more motion sensors allows to record a fingerprint of the vacuum processing system, and particularly the transport arrangement, under process conditions. The sensor data provided by the one or more motion sensors can be correlated or synchronized with the carrier position and optionally further parameters. Bumps or discontinuities can for instance be allocated to individual elements of the transport arrangement, such as individual rollers. The evaluation of the sensor data can be performed in an entirely automatic manner e.g. by a processing device configured to analyze motion data provided by the one or more motion sensors.

[0018] According to some embodiments, which can be combined with other embodiments described herein, the carrier 100 is configured for transportation along the tracks in an essentially vertical orientation. As used throughout the present disclosure, "essentially vertical" is to be understood particularly when referring to the carrier orientation, to allow for a deviation from the vertical direction or orientation of ±20° or below, e.g. of ±10° or below. The term "vertical direction" or "vertical orientation" is understood to distinguish over "horizontal direction" or "horizontal orientation". The vertical direction can be essentially parallel to the force of gravity. In FIGs. 1A and B the vertical direction as indicated with reference numeral "1" and the horizontal direction is indicated with reference numerals "2" and "3". Reference numeral "2" also indicates the transport direction of the carrier 100 along the track(s). In some embodiments, two or more tracks or transportation paths can be provided which can be arranged substantially parallel to each other for transportation of respective carriers. Each of the two or more tracks can be configured for transportation of a respective carrier in the transport direction 2. According to some embodiments, the carriers can switch between the tracks ("track switch"). The track switch direction can be essentially perpendicular to the transport direction 2. For example, the track switch direction can be direction 3 illustrated in FIG. IB. [0019] According to some embodiments, which can be combined with other embodiments described herein, the carrier 100 can include a support structure, such as one or more contact elements 130. In some implementations, the one or more contact elements 130 include at least one of a rod, a rail, and a bar. The one or more contact elements 130 can be attached to the body 110, e.g., by one or more connecting elements 132 such as connecting bridges. In some embodiments, the one or more contact elements 130 and the body 110 can be integrally formed.

[0020] The transport arrangement may include one or more tracks which provide a transport path in the vacuum chamber along which the carrier 100 is transported. The one or more tracks can be configured to mechanically contact the one or more contact elements 130 of the carrier 100. For example, the one or more tracks can include a plurality of rollers which may be actively driven to transport the carrier 100 along the transport path in the transport direction 2.

[0021] Although FIGs. 1A and B exemplarily illustrate one single contact element at the lower end of the carrier 100, it is to be understood that the present disclosure is not limited thereto, and that the carrier 100 can include at least one further contact element, such as a contact element at the top end of the carrier 100. The lower end and the top end of the carrier 100 can be defined in the vertical direction.

[0022] According to some embodiments, which can be combined with other embodiments described herein, the one or more motion sensors 120 can be configured to generate sensor signals indicating motion characteristics of the carrier 100 during transportation thereof along the track(s) in the transport direction 2. The sensor signals can be analyzed to determine unusual carrier motions, such as impacts or local accelerations of the carrier, which may be caused by a misalignment of the track(s). The occurrence of the unusual carrier motion can be correlated with a position of the carrier 100 in the vacuum chamber. The faulty or misaligned section of the transport arrangement can be identified. [0023] In some embodiments, the one or more motion sensors 120 are two or more motion sensors, such as four motion sensors. At least one motion sensor can be provided in each corner region of the carrier 100, such as the upper left corner region, the upper right corner region, the lower left corner region, and the lower right corner region when the carrier 100 is in the substantially vertical orientation. A movement pattern of the carrier 100 in three dimensions (x, y, z) can be determined to reliably identify irregularities at the transport arrangement.

[0024] According to some embodiments, which can be combined with other embodiments described herein, the carrier 100 further includes a communication device 140 connected to the one or more motion sensors 120 via wires or wirelessly. The communication device 140 can be configured to transmit motion data provided by the one or more motion sensors 120 to an external device (not shown). The communication device 140 can be a wireless transmitter configured to transmit the motion data of the carrier 100 to the external device, which may be a processor device. The external device can be configured to automatically determine faulty portions and/or a misalignment of the transport arrangement based on the motion data received from the carrier 100. However, the present disclosure is not limited thereto, and the one or more motion sensors 120 can be read out individually. For example, the carrier 100 can include at least one memory configured to memorize the motion data. After a test drive through the system, the at least one memory can be read out to obtain the motion data collected during the test drive. In this case the carrier 100 may not include the communication device.

[0025] In some implementations, a system for testing a transport arrangement in a vacuum chamber can include the carrier according to the present disclosure and a processor device configured to analyze motion data provided by the one or more motion sensors. The processor device can be included in the external device described above or can be integrated in the carrier 100.

[0026] The communication device 140 can be configured to provide a wireless communication between the autonomous carrier and the surroundings of the carrier 100. No wired connection has to be provided and a particle generation inside the vacuum chamber e.g. due to the carrier movement can be reduced. For example, the communication device 140 can include the wireless transmitter configured to transmit the motion data of the carrier 100 to the external device. Optionally, the communication device 140 can include a wireless receiver configured to receive data, such as control commands, for controlling e.g. the one or more motion sensors 120. [0027] In some implementations, the carrier 100 includes one or more further sensors, such as temperature sensors, pressure sensors, cameras, and the like. The one or more further sensors can be connected to the communication device 140 to provide additional sensor information to the external device. The additional information can be used to improve an accuracy of the testing results provided by the test carrier.

[0028] According to some embodiments, the carrier 100 can include a power source for the devices and sensors, such as the one or more motion sensors 120, the communication device 140, and the one or more further sensors. In some implementations, the power source can be a rechargeable battery. [0029] According to some embodiments, which can be combined with other embodiments described herein, the carrier 100 is a test carrier or diagnostic carrier not configured to carry a substrate or a mask. The test carrier can be used to inspect the transport arrangement under vacuum conditions. In particular, the test carrier can be transported through the vacuum chamber under vacuum. In particular, the system can be deformed by atmospheric forces and the alignment of, for example, the rollers of the transport arrangement can change. The test carrier can identify such changes which can then be compensated before "real" carriers having substrates thereon are transported through the vacuum chamber to perform e.g. a vacuum deposition process on a substrate.

[0030] The term "vacuum" as used throughout the present disclosure can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. The pressure in the vacuum chamber may be between 10 -^"5 mbar and about 10 -^"8 mbar, specifically between 10 -^"5 mbar and 10 -^"7 mbar, and more specifically between about 10^"6 mbar and about 10^"7 mbar. One or more vacuum pumps, such as turbo pumps and/or cryo-pumps, connected to the vacuum chamber for generation of the vacuum inside the vacuum chamber can be provided.

[0031] FIG. 2A shows a schematic front view of a carrier 200 and a transport arrangement 250 according to embodiments described herein. FIG. 2B shows a side view of the carrier 200 and transport arrangement 250 of FIG. 2A. The carrier 200 can have a body 210 configured to support substrate. [0032] According to some embodiments, which can be combined with other embodiments described herein, the transport arrangement 250 may be arranged in the vacuum chamber of the vacuum processing system. The vacuum chamber may be a vacuum deposition chamber. One or more vacuum pumps, such as turbo pumps and/or cryo-pumps, can be connected to the vacuum chamber for generation of the vacuum inside the vacuum chamber.

[0033] The carrier 200 can be configured for transportation through the vacuum chamber, and in particular through a deposition area, along a transportation path, such as a linear transportation path. For example, the carrier 200 can be configured for transportation in a transport direction 2, which can be a horizontal direction. FIGs. 2A and B exemplarily illustrate a transportation of the carrier 200 using a mechanical contact between the carrier 200 and the tracks of the transport arrangement 250. However, the present disclosure is not limited thereto, and the carrier 200 can be configured for contactless levitation and/or contactless transportation in the vacuum chamber using for instance magnetic forces. In particular, the transport arrangement can be configured for contactless levitation of the carrier and/or contactless transportation of the carrier in the vacuum chamber. The one or more motion sensors can identify for instance faulty magnets and/or an inhomogeneity in the magnetic field.

[0034] As illustrated in FIG. 2A, according to an embodiment, the transport arrangement 250 for transportation of the carrier 200 includes at least one track device, such as a first track device 252 and a second track device 254. The first track device 252 and the second track device 254 can extend essentially parallel to each other in the transport direction 2, which may be an essentially horizontal direction. The first track device 252 can be a lower track configured to support a lower portion of the carrier 200, such as a first contact element 230 which may be provided at a first or lower end of the carrier 200. The second track device 254 can be an upper track configured to support and/or guide an upper portion of the carrier 200, such as a second contact and/or guide element 232 which may be provided at a second or upper end of the carrier 200.

[0035] In some embodiments, the transport arrangement 250 can provide two or more tracks or transportation paths which can be arranged substantially parallel to each other for transportation of respective carriers. For example, the transport arrangement 250 can include a first track having the first track device 252 and the second track device 254 and a second track having another first track device and another second track device. According to some embodiments, the carriers can switch between the tracks, such as from the first track to the second track, or vice versa. [0036] In some implementations, the transport arrangement 250 may include a drive structure. The drive structure can include the first track device 252. The drive structure, and in particular the first track device 252, can include a plurality of rollers 253 rotatable around a rotational axis A. In some embodiments, the rotational axis A can be an essentially horizontal rotational axis. The plurality of rollers 253 can be arranged along the transport direction 2. The plurality of rollers 253 can contact and support the first contact element 230. For example, the plurality of rollers 253 can be actively driven by one or more motors to rotate around the rotational axis A for transportation of the carrier 200 in the transport direction 2.

[0037] According to some embodiments, the transport arrangement 250 can include a guiding structure extending in the transport direction 2, which can be a horizontal direction. The guiding structure can include the second track device 254. The carrier 200 can be movable along the guiding structure. In particular, the guiding structure can guide the movement of the carrier 200 at the upper end of the carrier 200 such that the carrier maintains the essentially vertical orientation. [0038] FIG. 3 shows a system 300 for vacuum processing according to embodiments described herein. The system 300, which can also be referred to as "vacuum processing system", can be configured for depositing one or more layers on a substrate.

[0039] The system 300 includes a vacuum chamber 302, the carrier 100 according to the embodiments described herein, and the transport arrangement 250 configured for transportation of the carrier 100 in the vacuum chamber 302. In some implementations, the system 300 includes one or more material deposition sources 380 in the vacuum chamber 302. The carrier 100 can be a test carrier to test the transport arrangement under vacuum conditions. The system 300 can be configured for thermal evaporation, CVD or PVD, such as sputter deposition. [0040] As indicated in FIG. 3, further chambers can be provided adjacent to the vacuum chamber 302. The vacuum chamber 302 can be separated from adjacent chambers by a valve having a valve housing 304 and a valve unit 306. After the carrier 100 with the substrate thereon is inserted into the vacuum chamber 302 as indicated by the arrow, the valve unit 306 can be closed. The atmosphere in the vacuum chamber 302 can be individually controlled by generating a technical vacuum, for example with vacuum pumps connected to the vacuum chamber 302.

[0041] The carrier 100 for testing the transport arrangement can be transported into and through the vacuum chamber 302, and in particular through a deposition area, along a transportation path, such as a linear transportation path. In some implementations, the system 300 can include one or more transportation paths extending through the vacuum chamber 302. The carrier 100 can be configured for transportation along the one or more transportation paths, for example, past the one or more material deposition sources 380. Although in FIG. 3 one transportation path is exemplarily indicated by the arrow, it is to be understood that the present disclosure is not limited thereto, and that two or more transportation paths can be provided. For example, at least two transportation paths can be arranged substantially parallel to each other for transportation of respective carriers. The one or more material deposition sources 380 can be arranged between the two transportation paths. [0042] The vacuum processing system described herein can be utilized for evaporation on large area substrates, e.g., for display manufacturing. Specifically, the substrates for which the structures according to embodiments described herein are provided, are large area substrates. For instance, a large area substrate or carrier can be GEN 4.5, which corresponds to a surface area of about 0.67 m² (0.73 x 0.92m), GEN 5, which corresponds to a surface area of about 1.4 m² (1.1 m x 1.3 m), GEN 7.5, which corresponds to a surface area of about 4.29 m² (1.95 m x 2.2 m), GEN 8.5, which corresponds to a surface area of about 5.7m² (2.2 m x 2.5 m), or even GEN 10, which corresponds to a surface area of about 8.7 m² (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding surface areas can similarly be implemented. Half sizes of the GEN generations or substrates smaller than GEN 4.5 may also be provided in display manufacturing. [0043] FIG. 4 shows a flow chart of a method 400 for testing a transport arrangement in a vacuum chamber according to embodiments described herein. The method can utilize the carriers and the systems according to the present disclosure.

[0044] The method 400 includes, in block 410, moving a carrier having one or more motion sensors along a track in the vacuum chamber, and, in block 420, analyzing sensor signals provided by the one or more motion sensors. The sensor signals indicate motion characteristics of the carrier during transportation thereof along the track(s) in the transport direction. The sensor signals can be analyzed to determine unusual carrier motions, such as impacts or local accelerations of the carrier, which may be caused by a misalignment of the track(s). The occurrence of the unusual carrier motion can be correlated with a position of the carrier in the vacuum chamber. The faulty or misaligned section of the transport arrangement can be identified

[0045] For example, the sensor signals may be analyzed to determine acceleration characteristics of the carrier. In some implementations, acceleration characteristics, such as momenta in one or more directions can be determined. In particular, acceleration characteristics in one or more directions perpendicular to the transport direction, such as the first direction (e.g. the vertical direction) and the third direction (e.g. the horizontal direction) can be determined. If the determined momentum (or impact) or acceleration in at least one direction is above a predetermined or set threshold, a faulty condition, such as a misalignment, of the track can be determined.

[0046] According to some embodiments, the test procedure can be performed during installation, such as an initial setup, of the vacuum processing system. Optionally or alternatively, the test procedure can be performed in regular intervals and/or if substrate breakage occurs more frequently. [0047] According to embodiments described herein, the method for testing a transport arrangement in a vacuum chamber can be conducted using computer programs, software, computer software products and the interrelated controllers, which can have a CPU, a memory, a user interface, and input and output devices being in communication with the corresponding components of the apparatus for processing a large area substrate. [0048] The carrier of the present disclosure includes diagnostic tools, and in particular motion sensors, to determine a state of the transport arrangement e.g. under vacuum conditions. The carrier can for instance be used to check whether the tracks of the transport arrangement are still properly aligned even after the vacuum has been established inside the vacuum chamber. The motion sensors can detect a momentum acting on the carrier to identify for instance discontinuities or bumps at the tracks. The transport arrangement can be aligned and/or repaired before carriers which support substrates are transported through the vacuum chamber for vacuum processing. Substrate breakage can be reduced or even avoided.

[0049] The test carrier of the present disclosure can provide benefits compared to an alignment using e.g. an alignment telescope. For example, the one or more motion sensors allow to record a fingerprint of the vacuum processing system, and particularly the transport arrangement, under process conditions. Further, the test can be performed without breaching the vacuum. Moreover, the duration of the test is short and the test is independent from individual measurement results of different persons.

[0050] While the foregoing is directed to embodiments of the disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

1. A carrier for transportation in a vacuum chamber, comprising: a body; and one or more motion sensors connected to the body.

2. A carrier for use in a vacuum chamber, comprising: one or more motion sensors configured to detect at least one of a momentum acting on the carrier and an acceleration of the carrier.

3. The carrier of claim 1 or 2, wherein the carrier is configured for transportation along a track in the vacuum chamber.

4. The carrier of claim 3, further comprising one or more contact elements configured to mechanically contact the track for transportation of the carrier in the vacuum chamber.

5. The carrier of any one of claims 1 to 4, wherein the one or more motion sensors are acceleration sensors.

6. The carrier of any one of claims 1 to 5, further comprising a communication device connected to the one or more motion sensors.

7. The carrier of claim 6, wherein the communication device is configured to transmit motion data provided by the one or more motion sensors to an external device.

8. The carrier of any one of claims 1 to 7, wherein the carrier is a test carrier not configured to carry a substrate or a mask.

9. A system for testing a transport arrangement in a vacuum chamber, comprising: a carrier having one or more motion sensors; and a processor device configured to analyze motion data provided by the one or more motion sensors.

10. The system of claim 9, wherein the carrier is configured according to any one of claims 1 to 8.

11. A vacuum processing system, comprising: a vacuum chamber; the carrier of any one of claims 1 to 8; and a transport arrangement configured for transportation of the carrier in the vacuum chamber.

12. A method for testing a transport arrangement in a vacuum chamber, comprising: moving a carrier having one or more motion sensors along a track in the vacuum chamber; and analyzing sensor signals provided by the one or more motion sensors.

The method of claim 12, wherein analyzing the sensor signals comprises: determining acceleration characteristics of the carrier.

14. The method of claim 12 or 13, wherein analyzing the sensor signals comprises: determining impacts on the carrier.

15. The method of claim 14, further comprising: determining a faulty condition of the track if at least one impact is above a set threshold.