JP2017535413A5 - - Google Patents
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- Publication number
- JP2017535413A5 JP2017535413A5 JP2017522189A JP2017522189A JP2017535413A5 JP 2017535413 A5 JP2017535413 A5 JP 2017535413A5 JP 2017522189 A JP2017522189 A JP 2017522189A JP 2017522189 A JP2017522189 A JP 2017522189A JP 2017535413 A5 JP2017535413 A5 JP 2017535413A5
- Authority
- JP
- Japan
- Prior art keywords
- aqueous solution
- delivery system
- membrane
- gas
- gas phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 25
- 239000007864 aqueous solution Substances 0.000 claims 20
- 239000007789 gas Substances 0.000 claims 19
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims 18
- 239000000126 substance Substances 0.000 claims 15
- 239000012071 phase Substances 0.000 claims 11
- 239000012159 carrier gas Substances 0.000 claims 10
- 239000012528 membrane Substances 0.000 claims 10
- 239000007788 liquid Substances 0.000 claims 8
- 239000002904 solvent Substances 0.000 claims 6
- 229920000151 polyglycol Polymers 0.000 claims 5
- 239000010695 polyglycol Substances 0.000 claims 5
- 239000000243 solution Substances 0.000 claims 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 claims 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 4
- 239000012530 fluid Substances 0.000 claims 3
- 239000003014 ion exchange membrane Substances 0.000 claims 3
- 229910052786 argon Inorganic materials 0.000 claims 2
- 239000001307 helium Substances 0.000 claims 2
- 229910052734 helium Inorganic materials 0.000 claims 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 2
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 239000012457 nonaqueous media Substances 0.000 claims 2
- 230000006320 pegylation Effects 0.000 claims 2
- 229920001223 polyethylene glycol Polymers 0.000 claims 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 claims 1
- 239000004372 Polyvinyl alcohol Substances 0.000 claims 1
- 239000000356 contaminant Substances 0.000 claims 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 claims 1
- 235000010299 hexamethylene tetramine Nutrition 0.000 claims 1
- 239000004312 hexamethylene tetramine Substances 0.000 claims 1
- GNOIPBMMFNIUFM-UHFFFAOYSA-N hexamethylphosphoric triamide Chemical compound CN(C)P(=O)(N(C)C)N(C)C GNOIPBMMFNIUFM-UHFFFAOYSA-N 0.000 claims 1
- -1 hyglyme Chemical compound 0.000 claims 1
- 239000012466 permeate Substances 0.000 claims 1
- 229920000767 polyaniline Polymers 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 229920000128 polypyrrole Polymers 0.000 claims 1
- 229920002451 polyvinyl alcohol Polymers 0.000 claims 1
- ZUHZGEOKBKGPSW-UHFFFAOYSA-N tetraglyme Chemical compound COCCOCCOCCOCCOC ZUHZGEOKBKGPSW-UHFFFAOYSA-N 0.000 claims 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462067901P | 2014-10-23 | 2014-10-23 | |
| US62/067,901 | 2014-10-23 | ||
| US201562190578P | 2015-07-09 | 2015-07-09 | |
| US62/190,578 | 2015-07-09 | ||
| PCT/US2015/056887 WO2016065132A1 (en) | 2014-10-23 | 2015-10-22 | Method, system, and device for delivery of process gas |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017535413A JP2017535413A (ja) | 2017-11-30 |
| JP2017535413A5 true JP2017535413A5 (enExample) | 2018-11-29 |
| JP6739427B2 JP6739427B2 (ja) | 2020-08-12 |
Family
ID=55761540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017522189A Active JP6739427B2 (ja) | 2014-10-23 | 2015-10-22 | プロセスガスの送達のための方法、システムおよび装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10214420B2 (enExample) |
| JP (1) | JP6739427B2 (enExample) |
| TW (1) | TWI683923B (enExample) |
| WO (1) | WO2016065132A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10150048B2 (en) | 2014-10-23 | 2018-12-11 | Rasirc, Inc. | Method, system, and device for delivery of process gas |
| US10363497B2 (en) | 2016-02-18 | 2019-07-30 | Rasirc, Inc. | Devices, systems, and methods for controlled delivery of process gases |
| KR102483803B1 (ko) * | 2016-04-16 | 2022-12-30 | 라시크 아이엔씨. | 프로세스 가스의 전달을 위한 방법, 시스템 및 장치 |
| WO2018089502A1 (en) * | 2016-11-08 | 2018-05-17 | Rasirc, Inc. | Method, system and device for delivery of process gas |
| US11027974B2 (en) * | 2016-11-08 | 2021-06-08 | Matheson Tri-Gas, Inc. | Removal of moisture from hydrazine |
| US20200316490A1 (en) * | 2016-12-01 | 2020-10-08 | Rasirc, Inc. | Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems |
| DE102017202207A1 (de) * | 2017-02-13 | 2018-08-16 | Arianegroup Gmbh | Verfahren zum Entgasen von hypergolen Treibstoffen |
| WO2018170292A1 (en) * | 2017-03-17 | 2018-09-20 | Rasirc, Inc. | System, device, and method for controlling mass flow of a catalytically reactive gas in a mixed gas stream |
| KR102785430B1 (ko) * | 2017-11-17 | 2025-03-21 | 라시크 아이엔씨. | 기재로부터의 프로세스 가스의 저장 및 전달을 위한 방법, 시스템, 및 디바이스 |
| US11458412B2 (en) * | 2018-01-17 | 2022-10-04 | Rasirc, Inc. | Controlled vapor delivery into low pressure processes |
| JP7129310B2 (ja) * | 2018-10-17 | 2022-09-01 | 株式会社カネカ | 蒸着装置 |
| CN114594805B (zh) * | 2022-01-26 | 2023-04-25 | 青岛明华电子仪器有限公司 | 一种基于Nafion管的烟气湿度控制方法 |
| JP2024027373A (ja) * | 2022-08-17 | 2024-03-01 | 大陽日酸株式会社 | 混合ガス供給方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2785052A (en) * | 1951-06-22 | 1957-03-12 | Metalectro Corp | Production of hydrazine |
| US2865714A (en) * | 1954-08-02 | 1958-12-23 | Guggenheim Brothers | Production of anhydrous hydrazine |
| JPS53143944A (en) * | 1977-05-20 | 1978-12-14 | Sanyo Electric Co | Method of manufacturing positive electrode plate for alkaline storage battery |
| JPS6313036A (ja) * | 1986-07-03 | 1988-01-20 | Ube Ind Ltd | ポリイミド系樹脂膜からなるパタ−ンの形成法 |
| DE68915554T2 (de) * | 1988-01-26 | 1995-01-12 | Asahi Glass Co Ltd | Für Dampf permselektive Membran. |
| FR2802829B1 (fr) | 1999-12-24 | 2002-05-17 | Atofina | Procede de concentration de solution d'hydrazine aqueuse et dispositif pour sa mise en oeuvre |
| FR2815956B1 (fr) | 2000-10-26 | 2003-05-23 | Atofina | Procede d'obtention d'hydrazine anhydre et dispositif pour sa mise en oeuvre |
| DE602006019543D1 (de) * | 2006-02-06 | 2011-02-24 | Samsung Sdi Germany Gmbh | Kohlendioxidabscheider für Direkt-Methanol-Brennstoffzellensystem |
| US9610550B2 (en) | 2012-03-28 | 2017-04-04 | Rasirc, Inc. | Method of delivering a process gas from a multi-component solution |
| WO2014014511A1 (en) * | 2012-07-16 | 2014-01-23 | Rasirc | Method, system, and device for delivery of high purity hydrogen peroxide |
-
2015
- 2015-10-22 JP JP2017522189A patent/JP6739427B2/ja active Active
- 2015-10-22 WO PCT/US2015/056887 patent/WO2016065132A1/en not_active Ceased
- 2015-10-22 US US15/520,031 patent/US10214420B2/en active Active
- 2015-10-23 TW TW104134937A patent/TWI683923B/zh active
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