JP6739427B2 - プロセスガスの送達のための方法、システムおよび装置 - Google Patents

プロセスガスの送達のための方法、システムおよび装置 Download PDF

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Publication number
JP6739427B2
JP6739427B2 JP2017522189A JP2017522189A JP6739427B2 JP 6739427 B2 JP6739427 B2 JP 6739427B2 JP 2017522189 A JP2017522189 A JP 2017522189A JP 2017522189 A JP2017522189 A JP 2017522189A JP 6739427 B2 JP6739427 B2 JP 6739427B2
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Prior art keywords
hydrazine
gas
membrane
solution
hydrazine solution
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JP2017522189A
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Japanese (ja)
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JP2017535413A5 (enExample
JP2017535413A (ja
Inventor
ダニエル・アルバレス・ジュニア
ラッセル・ジェイ・ホームズ
ジェフリー・スピーゲルマン
エドワード・ハインライン
クリストファー・ラモス
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Rasirc Inc
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Rasirc Inc
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Publication of JP2017535413A5 publication Critical patent/JP2017535413A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/16—Hydrazine; Salts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0031—Degasification of liquids by filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0068—General arrangements, e.g. flowsheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/06—Tubular membrane modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/42—Ion-exchange membranes

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
JP2017522189A 2014-10-23 2015-10-22 プロセスガスの送達のための方法、システムおよび装置 Active JP6739427B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462067901P 2014-10-23 2014-10-23
US62/067,901 2014-10-23
US201562190578P 2015-07-09 2015-07-09
US62/190,578 2015-07-09
PCT/US2015/056887 WO2016065132A1 (en) 2014-10-23 2015-10-22 Method, system, and device for delivery of process gas

Publications (3)

Publication Number Publication Date
JP2017535413A JP2017535413A (ja) 2017-11-30
JP2017535413A5 JP2017535413A5 (enExample) 2018-11-29
JP6739427B2 true JP6739427B2 (ja) 2020-08-12

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ID=55761540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017522189A Active JP6739427B2 (ja) 2014-10-23 2015-10-22 プロセスガスの送達のための方法、システムおよび装置

Country Status (4)

Country Link
US (1) US10214420B2 (enExample)
JP (1) JP6739427B2 (enExample)
TW (1) TWI683923B (enExample)
WO (1) WO2016065132A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019521948A (ja) * 2016-04-16 2019-08-08 ラサーク インコーポレイテッド プロセスガスの送達のための方法、システム、および装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10150048B2 (en) 2014-10-23 2018-12-11 Rasirc, Inc. Method, system, and device for delivery of process gas
US10363497B2 (en) 2016-02-18 2019-07-30 Rasirc, Inc. Devices, systems, and methods for controlled delivery of process gases
WO2018089502A1 (en) * 2016-11-08 2018-05-17 Rasirc, Inc. Method, system and device for delivery of process gas
US11027974B2 (en) * 2016-11-08 2021-06-08 Matheson Tri-Gas, Inc. Removal of moisture from hydrazine
US20200316490A1 (en) * 2016-12-01 2020-10-08 Rasirc, Inc. Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems
DE102017202207A1 (de) * 2017-02-13 2018-08-16 Arianegroup Gmbh Verfahren zum Entgasen von hypergolen Treibstoffen
WO2018170292A1 (en) * 2017-03-17 2018-09-20 Rasirc, Inc. System, device, and method for controlling mass flow of a catalytically reactive gas in a mixed gas stream
KR102785430B1 (ko) * 2017-11-17 2025-03-21 라시크 아이엔씨. 기재로부터의 프로세스 가스의 저장 및 전달을 위한 방법, 시스템, 및 디바이스
US11458412B2 (en) * 2018-01-17 2022-10-04 Rasirc, Inc. Controlled vapor delivery into low pressure processes
JP7129310B2 (ja) * 2018-10-17 2022-09-01 株式会社カネカ 蒸着装置
CN114594805B (zh) * 2022-01-26 2023-04-25 青岛明华电子仪器有限公司 一种基于Nafion管的烟气湿度控制方法
JP2024027373A (ja) * 2022-08-17 2024-03-01 大陽日酸株式会社 混合ガス供給方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2785052A (en) * 1951-06-22 1957-03-12 Metalectro Corp Production of hydrazine
US2865714A (en) * 1954-08-02 1958-12-23 Guggenheim Brothers Production of anhydrous hydrazine
JPS53143944A (en) * 1977-05-20 1978-12-14 Sanyo Electric Co Method of manufacturing positive electrode plate for alkaline storage battery
JPS6313036A (ja) * 1986-07-03 1988-01-20 Ube Ind Ltd ポリイミド系樹脂膜からなるパタ−ンの形成法
DE68915554T2 (de) * 1988-01-26 1995-01-12 Asahi Glass Co Ltd Für Dampf permselektive Membran.
FR2802829B1 (fr) 1999-12-24 2002-05-17 Atofina Procede de concentration de solution d'hydrazine aqueuse et dispositif pour sa mise en oeuvre
FR2815956B1 (fr) 2000-10-26 2003-05-23 Atofina Procede d'obtention d'hydrazine anhydre et dispositif pour sa mise en oeuvre
DE602006019543D1 (de) * 2006-02-06 2011-02-24 Samsung Sdi Germany Gmbh Kohlendioxidabscheider für Direkt-Methanol-Brennstoffzellensystem
US9610550B2 (en) 2012-03-28 2017-04-04 Rasirc, Inc. Method of delivering a process gas from a multi-component solution
WO2014014511A1 (en) * 2012-07-16 2014-01-23 Rasirc Method, system, and device for delivery of high purity hydrogen peroxide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019521948A (ja) * 2016-04-16 2019-08-08 ラサーク インコーポレイテッド プロセスガスの送達のための方法、システム、および装置

Also Published As

Publication number Publication date
WO2016065132A1 (en) 2016-04-28
US20170369315A1 (en) 2017-12-28
US10214420B2 (en) 2019-02-26
TWI683923B (zh) 2020-02-01
TW201629257A (zh) 2016-08-16
JP2017535413A (ja) 2017-11-30

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