TWI683923B - 遞送製程氣體之方法、系統及裝置 - Google Patents

遞送製程氣體之方法、系統及裝置 Download PDF

Info

Publication number
TWI683923B
TWI683923B TW104134937A TW104134937A TWI683923B TW I683923 B TWI683923 B TW I683923B TW 104134937 A TW104134937 A TW 104134937A TW 104134937 A TW104134937 A TW 104134937A TW I683923 B TWI683923 B TW I683923B
Authority
TW
Taiwan
Prior art keywords
hydrazine
membrane
gas
aqueous solution
carrier gas
Prior art date
Application number
TW104134937A
Other languages
English (en)
Chinese (zh)
Other versions
TW201629257A (zh
Inventor
小丹尼爾 阿爾瓦雷斯
魯塞爾Ｊ 霍姆斯
傑佛瑞 斯佩格曼
愛德華 海萊因
克里斯托福 拉摩斯
Original Assignee
美商拉瑟克股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商拉瑟克股份有限公司 filed Critical 美商拉瑟克股份有限公司
Publication of TW201629257A publication Critical patent/TW201629257A/zh
Application granted granted Critical
Publication of TWI683923B publication Critical patent/TWI683923B/zh

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/16—Hydrazine; Salts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0031—Degasification of liquids by filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0068—General arrangements, e.g. flowsheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/06—Tubular membrane modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/42—Ion-exchange membranes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
TW104134937A 2014-10-23 2015-10-23 遞送製程氣體之方法、系統及裝置 TWI683923B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201462067901P 2014-10-23 2014-10-23
US62/067,901 2014-10-23
US201562190578P 2015-07-09 2015-07-09
US62/190,578 2015-07-09

Publications (2)

Publication Number Publication Date
TW201629257A TW201629257A (zh) 2016-08-16
TWI683923B true TWI683923B (zh) 2020-02-01

Family

ID=55761540

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104134937A TWI683923B (zh) 2014-10-23 2015-10-23 遞送製程氣體之方法、系統及裝置

Country Status (4)

Country Link
US (1) US10214420B2 (enExample)
JP (1) JP6739427B2 (enExample)
TW (1) TWI683923B (enExample)
WO (1) WO2016065132A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10150048B2 (en) 2014-10-23 2018-12-11 Rasirc, Inc. Method, system, and device for delivery of process gas
US10363497B2 (en) 2016-02-18 2019-07-30 Rasirc, Inc. Devices, systems, and methods for controlled delivery of process gases
KR102483803B1 (ko) * 2016-04-16 2022-12-30 라시크 아이엔씨. 프로세스 가스의 전달을 위한 방법, 시스템 및 장치
WO2018089502A1 (en) * 2016-11-08 2018-05-17 Rasirc, Inc. Method, system and device for delivery of process gas
US11027974B2 (en) * 2016-11-08 2021-06-08 Matheson Tri-Gas, Inc. Removal of moisture from hydrazine
US20200316490A1 (en) * 2016-12-01 2020-10-08 Rasirc, Inc. Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems
DE102017202207A1 (de) * 2017-02-13 2018-08-16 Arianegroup Gmbh Verfahren zum Entgasen von hypergolen Treibstoffen
WO2018170292A1 (en) * 2017-03-17 2018-09-20 Rasirc, Inc. System, device, and method for controlling mass flow of a catalytically reactive gas in a mixed gas stream
KR102785430B1 (ko) * 2017-11-17 2025-03-21 라시크 아이엔씨. 기재로부터의 프로세스 가스의 저장 및 전달을 위한 방법, 시스템, 및 디바이스
US11458412B2 (en) * 2018-01-17 2022-10-04 Rasirc, Inc. Controlled vapor delivery into low pressure processes
JP7129310B2 (ja) * 2018-10-17 2022-09-01 株式会社カネカ 蒸着装置
CN114594805B (zh) * 2022-01-26 2023-04-25 青岛明华电子仪器有限公司 一种基于Nafion管的烟气湿度控制方法
JP2024027373A (ja) * 2022-08-17 2024-03-01 大陽日酸株式会社 混合ガス供給方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2785052A (en) * 1951-06-22 1957-03-12 Metalectro Corp Production of hydrazine
US2865714A (en) * 1954-08-02 1958-12-23 Guggenheim Brothers Production of anhydrous hydrazine
US20020144887A1 (en) * 2000-10-26 2002-10-10 Jean-Philippe Ricard Process for the production of anhydrous hydrazine and device for its implementation
WO2013148262A1 (en) * 2012-03-28 2013-10-03 Rasirc Method of delivering a process gas from a multi-component solution

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143944A (en) * 1977-05-20 1978-12-14 Sanyo Electric Co Method of manufacturing positive electrode plate for alkaline storage battery
JPS6313036A (ja) * 1986-07-03 1988-01-20 Ube Ind Ltd ポリイミド系樹脂膜からなるパタ−ンの形成法
DE68915554T2 (de) * 1988-01-26 1995-01-12 Asahi Glass Co Ltd Für Dampf permselektive Membran.
FR2802829B1 (fr) 1999-12-24 2002-05-17 Atofina Procede de concentration de solution d'hydrazine aqueuse et dispositif pour sa mise en oeuvre
DE602006019543D1 (de) * 2006-02-06 2011-02-24 Samsung Sdi Germany Gmbh Kohlendioxidabscheider für Direkt-Methanol-Brennstoffzellensystem
WO2014014511A1 (en) * 2012-07-16 2014-01-23 Rasirc Method, system, and device for delivery of high purity hydrogen peroxide

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2785052A (en) * 1951-06-22 1957-03-12 Metalectro Corp Production of hydrazine
US2865714A (en) * 1954-08-02 1958-12-23 Guggenheim Brothers Production of anhydrous hydrazine
US20020144887A1 (en) * 2000-10-26 2002-10-10 Jean-Philippe Ricard Process for the production of anhydrous hydrazine and device for its implementation
WO2013148262A1 (en) * 2012-03-28 2013-10-03 Rasirc Method of delivering a process gas from a multi-component solution

Also Published As

Publication number Publication date
WO2016065132A1 (en) 2016-04-28
JP6739427B2 (ja) 2020-08-12
US20170369315A1 (en) 2017-12-28
US10214420B2 (en) 2019-02-26
TW201629257A (zh) 2016-08-16
JP2017535413A (ja) 2017-11-30

Similar Documents

Publication Publication Date Title
TWI683923B (zh) 遞送製程氣體之方法、系統及裝置
US7618027B2 (en) Vaporizer for delivery of low vapor pressure gases
CN104203381B (zh) 从多组分溶液输送工艺气体的方法
US20190070521A1 (en) Method, system, and device for delivery of process gas
US9545585B2 (en) Method, system, and device for delivery of high purity hydrogen peroxide
US10363497B2 (en) Devices, systems, and methods for controlled delivery of process gases
JP6918921B2 (ja) プロセスガスの送達のための方法、システム、および装置
US20200316490A1 (en) Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems
TWI703087B (zh) 用於淨化過氧化氫溶液之方法及系統
US11458412B2 (en) Controlled vapor delivery into low pressure processes
WO2018089502A1 (en) Method, system and device for delivery of process gas