JP2019521948A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2019521948A5 JP2019521948A5 JP2019505137A JP2019505137A JP2019521948A5 JP 2019521948 A5 JP2019521948 A5 JP 2019521948A5 JP 2019505137 A JP2019505137 A JP 2019505137A JP 2019505137 A JP2019505137 A JP 2019505137A JP 2019521948 A5 JP2019521948 A5 JP 2019521948A5
- Authority
- JP
- Japan
- Prior art keywords
- aqueous solution
- vapor phase
- carrier gas
- hydrazine
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 39
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 36
- 239000007864 aqueous solution Substances 0.000 claims description 34
- 239000000126 substance Substances 0.000 claims description 24
- 239000012808 vapor phase Substances 0.000 claims description 22
- 239000012159 carrier gas Substances 0.000 claims description 20
- 239000007789 gas Substances 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical group OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 12
- 239000012528 membrane Substances 0.000 claims description 12
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 claims description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 8
- 239000000243 solution Substances 0.000 claims description 8
- 239000002904 solvent Substances 0.000 claims description 8
- GUVUOGQBMYCBQP-UHFFFAOYSA-N dmpu Chemical compound CN1CCCN(C)C1=O GUVUOGQBMYCBQP-UHFFFAOYSA-N 0.000 claims description 6
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 4
- 239000003014 ion exchange membrane Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- YPFDHNVEDLHUCE-UHFFFAOYSA-N propane-1,3-diol Chemical compound OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 claims description 4
- 235000013772 propylene glycol Nutrition 0.000 claims description 4
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000356 contaminant Substances 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims description 2
- 239000012466 permeate Substances 0.000 claims description 2
- VTGOHKSTWXHQJK-UHFFFAOYSA-N pyrimidin-2-ol Chemical compound OC1=NC=CC=N1 VTGOHKSTWXHQJK-UHFFFAOYSA-N 0.000 claims description 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662323697P | 2016-04-16 | 2016-04-16 | |
| US62/323,697 | 2016-04-16 | ||
| PCT/US2017/027634 WO2017181013A1 (en) | 2016-04-16 | 2017-04-14 | Method, system, and device for delivery of process gas |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019521948A JP2019521948A (ja) | 2019-08-08 |
| JP2019521948A5 true JP2019521948A5 (enExample) | 2020-05-14 |
| JP6918921B2 JP6918921B2 (ja) | 2021-08-11 |
Family
ID=60042719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019505137A Active JP6918921B2 (ja) | 2016-04-16 | 2017-04-14 | プロセスガスの送達のための方法、システム、および装置 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP3442691A4 (enExample) |
| JP (1) | JP6918921B2 (enExample) |
| KR (1) | KR102483803B1 (enExample) |
| CN (1) | CN109152990B (enExample) |
| DE (1) | DE17783234T1 (enExample) |
| WO (1) | WO2017181013A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10150048B2 (en) | 2014-10-23 | 2018-12-11 | Rasirc, Inc. | Method, system, and device for delivery of process gas |
| US20200316490A1 (en) * | 2016-12-01 | 2020-10-08 | Rasirc, Inc. | Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems |
| US11471816B2 (en) * | 2019-03-11 | 2022-10-18 | Karim Salehpoor | Pollutant capturer and mobilizer |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2785052A (en) * | 1951-06-22 | 1957-03-12 | Metalectro Corp | Production of hydrazine |
| US2865714A (en) * | 1954-08-02 | 1958-12-23 | Guggenheim Brothers | Production of anhydrous hydrazine |
| US3557009A (en) * | 1967-05-15 | 1971-01-19 | Norac Co | Nonhazardous polymerization initiators |
| LU85789A1 (fr) * | 1985-02-26 | 1986-09-02 | Oreal | Utilisation dans les domaines therapeutique et cosmetique d'une solution anhydre de peroxyde d'hydrogene |
| JPH04154193A (ja) * | 1990-10-18 | 1992-05-27 | Mitsubishi Gas Chem Co Inc | 多層プリント板の製造法 |
| JPH07230953A (ja) * | 1994-02-15 | 1995-08-29 | Sumitomo Chem Co Ltd | ３ｂ−５ｂ族化合物半導体の気相成長方法 |
| JP4232264B2 (ja) * | 1999-03-26 | 2009-03-04 | 株式会社Ｉｈｉ | 窒化物半導体の製造方法および製造装置 |
| FR2802829B1 (fr) * | 1999-12-24 | 2002-05-17 | Atofina | Procede de concentration de solution d'hydrazine aqueuse et dispositif pour sa mise en oeuvre |
| FR2815956B1 (fr) * | 2000-10-26 | 2003-05-23 | Atofina | Procede d'obtention d'hydrazine anhydre et dispositif pour sa mise en oeuvre |
| US9610550B2 (en) * | 2012-03-28 | 2017-04-04 | Rasirc, Inc. | Method of delivering a process gas from a multi-component solution |
| WO2014014511A1 (en) * | 2012-07-16 | 2014-01-23 | Rasirc | Method, system, and device for delivery of high purity hydrogen peroxide |
| JP6514189B2 (ja) * | 2013-04-05 | 2019-05-15 | ラシリック, インコーポレイテッドRASIRC, Inc. | 高濃度過酸化水素ガスストリームの供給 |
| JP6739427B2 (ja) * | 2014-10-23 | 2020-08-12 | ラシリック, インコーポレイテッドRASIRC, Inc. | プロセスガスの送達のための方法、システムおよび装置 |
| WO2018089502A1 (en) * | 2016-11-08 | 2018-05-17 | Rasirc, Inc. | Method, system and device for delivery of process gas |
-
2017
- 2017-04-14 KR KR1020187031690A patent/KR102483803B1/ko active Active
- 2017-04-14 EP EP17783234.2A patent/EP3442691A4/en active Pending
- 2017-04-14 JP JP2019505137A patent/JP6918921B2/ja active Active
- 2017-04-14 WO PCT/US2017/027634 patent/WO2017181013A1/en not_active Ceased
- 2017-04-14 DE DE17783234.2T patent/DE17783234T1/de active Pending
- 2017-04-14 CN CN201780029147.5A patent/CN109152990B/zh active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2017535413A5 (enExample) | ||
| JP6290856B2 (ja) | 多成分溶液からプロセスガスを送達する方法 | |
| JP2017518798A5 (enExample) | ||
| JP6339512B2 (ja) | 過酸化水素を半導体処理チャンバへ送る方法及びシステム | |
| JP2019521948A5 (enExample) | ||
| TWI683923B (zh) | 遞送製程氣體之方法、系統及裝置 | |
| EP3626334A1 (en) | Carbon dioxide separation membrane and production method therefor | |
| JP2009530854A (ja) | 低蒸気圧ガスを送るためのベポライザー | |
| KR102192990B1 (ko) | 고농도 과산화수소 가스 스트림의 공급 | |
| JP2018526201A5 (enExample) | ||
| US20190070521A1 (en) | Method, system, and device for delivery of process gas | |
| JP6918921B2 (ja) | プロセスガスの送達のための方法、システム、および装置 | |
| JP6829649B2 (ja) | 堆積物の除去方法、及び堆積物の除去装置 | |
| WO2023026783A1 (ja) | ガス分離システム及び混合ガスの分離方法 | |
| CN116943287B (zh) | 一种气相色谱柱及其制备方法与应用 | |
| Alamaria et al. | Chemical cross-linking of sago/PVA blend membrane for pervaporation separation of water from ethyl acetate mixture | |
| JP7717742B2 (ja) | 貯蔵装置 | |
| WO2025063216A1 (ja) | ガス分離システム及び混合ガスの分離方法 | |
| CN103760285A (zh) | 一种氟利昂色谱柱及其制备方法 |