DE17783234T1 - Verfahren, system und vorrichtung zur abgabe von prozessgas - Google Patents

Verfahren, system und vorrichtung zur abgabe von prozessgas Download PDF

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Publication number
DE17783234T1
DE17783234T1 DE17783234.2T DE17783234T DE17783234T1 DE 17783234 T1 DE17783234 T1 DE 17783234T1 DE 17783234 T DE17783234 T DE 17783234T DE 17783234 T1 DE17783234 T1 DE 17783234T1
Authority
DE
Germany
Prior art keywords
vapor phase
solution
carrier gas
vapor
hydrazine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE17783234.2T
Other languages
German (de)
English (en)
Inventor
Jr. Daniel Alvarez
Russell J. Holmes
Jeffrey J. Spiegelman
Edward HEINLEIN
Christopher RAMOS
Jeremiah Trammel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rasirc Inc
Original Assignee
Rasirc Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rasirc Inc filed Critical Rasirc Inc
Publication of DE17783234T1 publication Critical patent/DE17783234T1/de
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B01D53/44—Organic components
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/36—Pervaporation; Membrane distillation; Liquid permeation
    • B01D61/363—Vapour permeation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/02—Hollow fibre modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/30—Polyalkenyl halides
    • B01D71/32—Polyalkenyl halides containing fluorine atoms
    • B01D71/36—Polytetrafluoroethene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D2053/221—Devices
    • B01D2053/223—Devices with hollow tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/42—Ion-exchange membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/08—Hollow fibre membranes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Degasification And Air Bubble Elimination (AREA)
DE17783234.2T 2016-04-16 2017-04-14 Verfahren, system und vorrichtung zur abgabe von prozessgas Pending DE17783234T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201662323697P 2016-04-16 2016-04-16
US201662323697P 2016-04-16
EP17783234.2A EP3442691A4 (en) 2016-04-16 2017-04-14 METHOD, SYSTEM AND DEVICE FOR DELIVERING PROCESS GAS
PCT/US2017/027634 WO2017181013A1 (en) 2016-04-16 2017-04-14 Method, system, and device for delivery of process gas

Publications (1)

Publication Number Publication Date
DE17783234T1 true DE17783234T1 (de) 2019-06-27

Family

ID=60042719

Family Applications (1)

Application Number Title Priority Date Filing Date
DE17783234.2T Pending DE17783234T1 (de) 2016-04-16 2017-04-14 Verfahren, system und vorrichtung zur abgabe von prozessgas

Country Status (6)

Country Link
EP (1) EP3442691A4 (enExample)
JP (1) JP6918921B2 (enExample)
KR (1) KR102483803B1 (enExample)
CN (1) CN109152990B (enExample)
DE (1) DE17783234T1 (enExample)
WO (1) WO2017181013A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10150048B2 (en) 2014-10-23 2018-12-11 Rasirc, Inc. Method, system, and device for delivery of process gas
US20200316490A1 (en) * 2016-12-01 2020-10-08 Rasirc, Inc. Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems
US11471816B2 (en) * 2019-03-11 2022-10-18 Karim Salehpoor Pollutant capturer and mobilizer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2785052A (en) * 1951-06-22 1957-03-12 Metalectro Corp Production of hydrazine
US2865714A (en) * 1954-08-02 1958-12-23 Guggenheim Brothers Production of anhydrous hydrazine
US3557009A (en) * 1967-05-15 1971-01-19 Norac Co Nonhazardous polymerization initiators
LU85789A1 (fr) * 1985-02-26 1986-09-02 Oreal Utilisation dans les domaines therapeutique et cosmetique d'une solution anhydre de peroxyde d'hydrogene
JPH04154193A (ja) * 1990-10-18 1992-05-27 Mitsubishi Gas Chem Co Inc 多層プリント板の製造法
JPH07230953A (ja) * 1994-02-15 1995-08-29 Sumitomo Chem Co Ltd ３ｂ−５ｂ族化合物半導体の気相成長方法
JP4232264B2 (ja) * 1999-03-26 2009-03-04 株式会社Ｉｈｉ 窒化物半導体の製造方法および製造装置
FR2802829B1 (fr) * 1999-12-24 2002-05-17 Atofina Procede de concentration de solution d'hydrazine aqueuse et dispositif pour sa mise en oeuvre
FR2815956B1 (fr) * 2000-10-26 2003-05-23 Atofina Procede d'obtention d'hydrazine anhydre et dispositif pour sa mise en oeuvre
US9610550B2 (en) * 2012-03-28 2017-04-04 Rasirc, Inc. Method of delivering a process gas from a multi-component solution
WO2014014511A1 (en) * 2012-07-16 2014-01-23 Rasirc Method, system, and device for delivery of high purity hydrogen peroxide
JP6514189B2 (ja) * 2013-04-05 2019-05-15 ラシリック, インコーポレイテッドRASIRC, Inc. 高濃度過酸化水素ガスストリームの供給
JP6739427B2 (ja) * 2014-10-23 2020-08-12 ラシリック, インコーポレイテッドRASIRC, Inc. プロセスガスの送達のための方法、システムおよび装置
WO2018089502A1 (en) * 2016-11-08 2018-05-17 Rasirc, Inc. Method, system and device for delivery of process gas

Also Published As

Publication number Publication date
EP3442691A1 (en) 2019-02-20
CN109152990B (zh) 2021-11-09
EP3442691A4 (en) 2019-12-18
JP2019521948A (ja) 2019-08-08
KR20180135915A (ko) 2018-12-21
CN109152990A (zh) 2019-01-04
KR102483803B1 (ko) 2022-12-30
JP6918921B2 (ja) 2021-08-11
WO2017181013A1 (en) 2017-10-19

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