EP3442691A4 - Method, system, and device for delivery of process gas - Google Patents

Method, system, and device for delivery of process gas Download PDF

Info

Publication number
EP3442691A4
EP3442691A4 EP17783234.2A EP17783234A EP3442691A4 EP 3442691 A4 EP3442691 A4 EP 3442691A4 EP 17783234 A EP17783234 A EP 17783234A EP 3442691 A4 EP3442691 A4 EP 3442691A4
Authority
EP
European Patent Office
Prior art keywords
delivery
process gas
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP17783234.2A
Other languages
German (de)
French (fr)
Other versions
EP3442691A1 (en
Inventor
Jr. Daniel Alvarez
Russell J. Holmes
Jeffrey J. Spiegelman
Edward HEINLEIN
Christopher RAMOS
Jeremiah Trammel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RASIRC Inc
Original Assignee
RASIRC Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RASIRC Inc filed Critical RASIRC Inc
Priority to DE17783234.2T priority Critical patent/DE17783234T1/en
Publication of EP3442691A1 publication Critical patent/EP3442691A1/en
Publication of EP3442691A4 publication Critical patent/EP3442691A4/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B01D53/44—Organic components
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/36—Pervaporation; Membrane distillation; Liquid permeation
    • B01D61/363—Vapour permeation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/30—Polyalkenyl halides
    • B01D71/32—Polyalkenyl halides containing fluorine atoms
    • B01D71/36—Polytetrafluoroethene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D2053/221—Devices
    • B01D2053/223—Devices with hollow tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/42—Ion-exchange membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/02—Hollow fibre modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/08—Hollow fibre membranes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Power Engineering (AREA)
  • Biomedical Technology (AREA)
  • Water Supply & Treatment (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
EP17783234.2A 2016-04-16 2017-04-14 Method, system, and device for delivery of process gas Pending EP3442691A4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE17783234.2T DE17783234T1 (en) 2016-04-16 2017-04-14 METHOD, SYSTEM AND DEVICE FOR DISPENSING PROCESS GAS

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662323697P 2016-04-16 2016-04-16
PCT/US2017/027634 WO2017181013A1 (en) 2016-04-16 2017-04-14 Method, system, and device for delivery of process gas

Publications (2)

Publication Number Publication Date
EP3442691A1 EP3442691A1 (en) 2019-02-20
EP3442691A4 true EP3442691A4 (en) 2019-12-18

Family

ID=60042719

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17783234.2A Pending EP3442691A4 (en) 2016-04-16 2017-04-14 Method, system, and device for delivery of process gas

Country Status (6)

Country Link
EP (1) EP3442691A4 (en)
JP (1) JP6918921B2 (en)
KR (1) KR102483803B1 (en)
CN (1) CN109152990B (en)
DE (1) DE17783234T1 (en)
WO (1) WO2017181013A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10150048B2 (en) 2014-10-23 2018-12-11 Rasirc, Inc. Method, system, and device for delivery of process gas
JP7141395B2 (en) * 2016-12-01 2022-09-22 ラシルク，インコーポレイテッド Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas supply system
US11471816B2 (en) * 2019-03-11 2022-10-18 Karim Salehpoor Pollutant capturer and mobilizer

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2785052A (en) * 1951-06-22 1957-03-12 Metalectro Corp Production of hydrazine
US2865714A (en) * 1954-08-02 1958-12-23 Guggenheim Brothers Production of anhydrous hydrazine
US3557009A (en) * 1967-05-15 1971-01-19 Norac Co Nonhazardous polymerization initiators
LU85789A1 (en) * 1985-02-26 1986-09-02 Oreal USE IN THE THERAPEUTIC AND COSMETIC FIELDS OF AN ANHYDROUS SOLUTION OF HYDROGEN PEROXIDE
JPH04154193A (en) * 1990-10-18 1992-05-27 Mitsubishi Gas Chem Co Inc Manufacture of multilayer printed board
JPH07230953A (en) * 1994-02-15 1995-08-29 Sumitomo Chem Co Ltd Vapor growth method for 3b-5b group compound semiconductor
JP4232264B2 (en) * 1999-03-26 2009-03-04 株式会社Ｉｈｉ Nitride semiconductor manufacturing method and manufacturing apparatus
FR2802829B1 (en) * 1999-12-24 2002-05-17 Atofina PROCESS FOR CONCENTRATION OF AQUEOUS HYDRAZINE SOLUTION AND DEVICE FOR IMPLEMENTING SAME
FR2815956B1 (en) * 2000-10-26 2003-05-23 Atofina PROCESS FOR OBTAINING ANHYDROUS HYDRAZINE AND DEVICE FOR IMPLEMENTING SAME
CA2867883C (en) * 2012-03-28 2020-06-02 Rasirc, Inc. Method of delivering a process gas from a multi-component solution
WO2014014511A1 (en) * 2012-07-16 2014-01-23 Rasirc Method, system, and device for delivery of high purity hydrogen peroxide
KR102192990B1 (en) * 2013-04-05 2020-12-18 라시크 아이엔씨. Delivery of a high concentration hydrogen peroxide gas stream
US10214420B2 (en) * 2014-10-23 2019-02-26 Rasirc, Inc. Method, system, and device for delivery of process gas

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
KR102483803B1 (en) 2022-12-30
KR20180135915A (en) 2018-12-21
JP2019521948A (en) 2019-08-08
CN109152990B (en) 2021-11-09
JP6918921B2 (en) 2021-08-11
CN109152990A (en) 2019-01-04
DE17783234T1 (en) 2019-06-27
WO2017181013A1 (en) 2017-10-19
EP3442691A1 (en) 2019-02-20

Similar Documents

Publication Publication Date Title
EP3432250A4 (en) Ride-share support system, ride-share support method, and ride-share support apparatus
EP3497574A4 (en) System and method for continuous testing and delivery of software
EP3123104A4 (en) Apparatus, system and method for blasting
EP3222977B8 (en) System and method for metering gas
EP3288231A4 (en) Method, apparatus and system for detecting security conditions of terminal
EP3226122A4 (en) Complex event processing method, apparatus and system
EP3162093A4 (en) Apparatus,system and method of geofencing
EP3123630A4 (en) Method, system and apparatus for cross point bluetooth communication
EP3537734A4 (en) Method, apparatus, system, and device for connecting bluetooth device
EP3320423A4 (en) Authentication method, apparatus, and system
EP3326193A4 (en) Method and apparatus for gas abatement
EP3112248A4 (en) System and method for processing boil-off gas
EP3471066A4 (en) Anti-passback method, apparatus and system
EP3329062A4 (en) System, method and apparatus for compressed insulation
EP3493485A4 (en) Method, apparatus and system for notification
EP3368960A4 (en) Method, system, and device for process triggering
EP3200857A4 (en) A method and apparatus for the controlled delivery of gases
EP3334117A4 (en) Method, apparatus and system for quantizing defence result
EP3361231A4 (en) Inspection apparatus, inspection system, and inspection method
EP3531280A4 (en) Accelerator loading method and system, and accelerator loading apparatus
EP3185031A4 (en) Positioning method, apparatus and system for terminal device
EP3534648A4 (en) Access method for access point, apparatus, and system
EP3210417A4 (en) Method, apparatus and system
EP3493590A4 (en) Common process implementation method, apparatus and system
EP3117023A4 (en) System for and method of fast pulse gas delivery

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20181023

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIN1 Information on inventor provided before grant (corrected)

Inventor name: HEINLEIN, EDWARD

Inventor name: TRAMMEL, JEREMIAH

Inventor name: ALVAREZ, JR., DANIEL

Inventor name: HOLMES, RUSSELL J.

Inventor name: RAMOS, CHRISTOPHER

Inventor name: SPIEGELMAN, JEFFREY J.

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

REG Reference to a national code

Ref country code: DE

Ref legal event code: R210

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20191119

RIC1 Information provided on ipc code assigned before grant

Ipc: B01B 1/00 20060101ALI20191113BHEP

Ipc: B01J 20/292 20060101ALI20191113BHEP

Ipc: B01D 53/77 20060101ALI20191113BHEP

Ipc: B01D 53/44 20060101ALI20191113BHEP

Ipc: B01D 63/02 20060101ALN20191113BHEP

Ipc: F17C 11/00 20060101ALI20191113BHEP

Ipc: H01G 4/06 20060101ALI20191113BHEP

Ipc: B01D 69/08 20060101ALN20191113BHEP

Ipc: C23C 16/448 20060101ALI20191113BHEP

Ipc: B01F 3/02 20060101AFI20191113BHEP

Ipc: B01D 71/36 20060101ALI20191113BHEP

Ipc: B01D 69/02 20060101ALI20191113BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS