JP2017513803A - 超高純度(uhp)二酸化炭素浄化のためのシステム及び方法 - Google Patents
超高純度(uhp)二酸化炭素浄化のためのシステム及び方法 Download PDFInfo
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims abstract description 88
- 238000000746 purification Methods 0.000 title claims abstract description 67
- 239000001569 carbon dioxide Substances 0.000 title claims abstract description 44
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 26
- 229910000480 nickel oxide Inorganic materials 0.000 claims abstract description 30
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910003445 palladium oxide Inorganic materials 0.000 claims abstract description 23
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000004891 communication Methods 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims abstract description 8
- 238000000926 separation method Methods 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 24
- 229910052760 oxygen Inorganic materials 0.000 claims description 24
- 239000001301 oxygen Substances 0.000 claims description 24
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 18
- 238000005070 sampling Methods 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 10
- 150000003464 sulfur compounds Chemical class 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910001935 vanadium oxide Inorganic materials 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- 229910016978 MnOx Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011538 cleaning material Substances 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000000671 immersion lithography Methods 0.000 description 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/864—Removing carbon monoxide or hydrocarbons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/38—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
- B01J23/40—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
- B01J23/44—Palladium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
- B01J23/74—Iron group metals
- B01J23/755—Nickel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
- B01J35/19—Catalysts containing parts with different compositions
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/50—Carbon dioxide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/10—Noble metals or compounds thereof
- B01D2255/102—Platinum group metals
- B01D2255/1023—Palladium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20753—Nickel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/22—Carbon dioxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
- B01D2257/702—Hydrocarbons
- B01D2257/7022—Aliphatic hydrocarbons
- B01D2257/7025—Methane
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/20—Capture or disposal of greenhouse gases of methane
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Health & Medical Sciences (AREA)
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- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
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Abstract
Description
11 容器
12 粒子フィルタ
13 担持された酸化ニッケル
14 担持された酸化パラジウム
15 サンプリングポート
16 入口
17 出口
18、18’、18’’ 遮断バルブ
20 超高純度二酸化炭素浄化システム
23 担持された酸化ニッケル
24 担持された酸化パラジウム
25 サンプリングポート
28、28’、28’’、28’’’ 遮断バルブ
100 切欠図
211 上部
212 下部
221 粒子フィルタ
222 粒子フィルタ
261 入口
262 入口
271 出口
272 出口
Claims (20)
- 入口(16;261)及び出口(17;272)を有する超高純度(UHP)二酸化炭素浄化システム(10;20)であって、前記入口(16;261)に最も近いその上部は、担持された酸化ニッケルで少なくとも部分的に満たされており、前記出口(17;272)に最も近いその下部は、担持された酸化パラジウムで少なくとも部分的に満たされており、前記浄化システムの前記上部及び前記下部は物理的な分離を有しているが、流体連通にあることを特徴とする、超高純度二酸化炭素浄化システム。
- 前記物理的な分離及び流体連通は、前記上部と前記下部との間に挿入された、金属メッシュ、多孔性隔膜、スクリーングリッド、粒子フィルタ(12)または有孔金属シートの一つ以上によって達成される、請求項1に記載の超高純度二酸化炭素浄化システム(10)。
- 前記物理的な分離及び流体連通は、入口(261)及び出口(271)を有する、担持された酸化ニッケルで少なくとも部分的に満たされている第1の容器(211)によって達成されており、その出口(271)は担持された酸化パラジウムで少なくとも部分的に満たされている第2の容器(212)の入口(262)と連通している、請求項1に記載の超高純度二酸化炭素浄化システム(20)。
- 前記第1の容器(211)の前記出口(271)は、前記第2の容器(212)の前記入口(262)に直接接続されており、前記直接の接続は、好ましくは前記容器(211、212)間に置かれた一つ以上の遮断バルブ(28’、28’’)を含んでいる、請求項3に記載の超高純度二酸化炭素浄化システム(20)。
- 前記担持された酸化ニッケルと前記担持された酸化パラジウムの重量比は、10から0.1、好ましくは5から0.2である、請求項1から4のいずれか一項に記載の超高純度二酸化炭素浄化システム(10;20)。
- 前記上部体積の少なくとも20%は担持された酸化ニッケルで満たされており、前記下部体積の少なくとも20%は担持された酸化パラジウムで満たされている、請求項1から5のいずれか一項に記載の超高純度二酸化炭素浄化システム(10;20)。
- 前記システム(10;20)は、少なくとも1つのヒーター及び1つの温度検出装置を備えている、請求項1から6のいずれか一項に記載の超高純度二酸化炭素浄化システム(10;20)。
- 前記第1の容器(211)及び前記第2の容器(212)はそれぞれ、ヒーター及び一つ以上の温度検出装置を備えている、請求項3に記載の超高純度二酸化炭素浄化システム(20)。
- 酸素添加の入口をさらに含んでいる、請求項1から8のいずれか一項に記載の超高純度二酸化炭素浄化システム(10;20)。
- サンプリングポート(15;25)をさらに含んでいる、請求項1から8のいずれか一項に記載の超高純度二酸化炭素浄化システム(10;20)。
- 前記サンプリングポート(25)は、前記第1の容器(211)の前記入口(261)と前記第2の容器(212)の前記入口(262)との間に置かれている、請求項3及び10に記載の超高純度二酸化炭素浄化システム(10;20)。
- 前記サンプリングポート(25)は、前記第1の容器(211)の最下部に置かれている、請求項11に記載の超高純度二酸化炭素浄化システム(10;20)。
- 前記サンプリングポート(25)は、前記第1の容器(211)の前記出口(271)と前記第2の容器(212)の前記入口(262)との間に置かれている、請求項11に記載の超高純度二酸化炭素浄化システム(10;20)。
- 請求項1に基づく超高純度二酸化炭素浄化システム(10;20)に高純度グレードまたはそれ以上の二酸化炭素を供給するステップを含む、高純度(HP)二酸化炭素を超高純度(UHP)レベルまで浄化または予浄化するための方法。
- 最大で50ppmの酸素が、流入する高純度二酸化炭素の気体の流れに添加される、請求項14に記載の方法。
- 前記添加される酸素は、公称の入口メタン濃度の2から50倍である、請求項15に記載の方法。
- 前記浄化システム(10;20)は、150℃から400℃、好ましくは275℃から350℃の温度で加熱される、請求項14から16のいずれか一項に記載の方法。
- 前記浄化システム(20)が、担持された酸化ニッケルで少なくとも部分的に満たされた第1の容器(211)及び担持された酸化パラジウムで少なくとも部分的に満たされた第2の容器(212)を含む場合、前記第1の容器(211)は、150℃から400℃、より好ましくは200℃から350℃の温度で加熱され、前記第2の容器(212)は、250℃から400℃、より好ましくは275℃から350℃の温度で加熱される、請求項17に記載の方法。
- 前記浄化システムにおける気体は、硫黄化合物のレベルのためにサンプリングされ、分析される、請求項14から18のいずれか一項に記載の方法。
- 前記浄化システム(20)が、担持された酸化ニッケルで少なくとも部分的に満たされた第1の容器(211)及び担持された酸化パラジウムで少なくとも部分的に満たされた第2の容器(212)を含む場合、前記第1の容器(211)は、硫黄化合物の前記レベルが、好ましくは10から50ppbであるしきい値に等しいかそれより高いときに、新しい担持された酸化ニッケルを含む新たなもので交換される、請求項19に記載の方法。
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ITMI20140415 | 2014-03-14 | ||
ITMI2014A000415 | 2014-03-14 | ||
PCT/IB2015/051614 WO2015136416A1 (en) | 2014-03-14 | 2015-03-05 | System and method for ultra high purity (uhp) carbon dioxide purification |
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JP2017513803A true JP2017513803A (ja) | 2017-06-01 |
JP2017513803A5 JP2017513803A5 (ja) | 2018-04-12 |
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CN (1) | CN106103342B (ja) |
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KR102318490B1 (ko) | 2021-04-13 | 2021-10-29 | 주식회사 하이퓨리티 | 이산화탄소 가스의 정제유닛 및 정제방법 |
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CN106103342A (zh) | 2016-11-09 |
CN106103342B (zh) | 2018-01-23 |
US9695049B2 (en) | 2017-07-04 |
KR20160134666A (ko) | 2016-11-23 |
EP3077336A1 (en) | 2016-10-12 |
EP3077336B1 (en) | 2017-05-17 |
JP6450405B2 (ja) | 2019-01-09 |
WO2015136416A1 (en) | 2015-09-17 |
TWI669271B (zh) | 2019-08-21 |
US20170044019A1 (en) | 2017-02-16 |
TW201542455A (zh) | 2015-11-16 |
KR102371149B1 (ko) | 2022-03-07 |
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