JP2017509796A5 - - Google Patents
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- Publication number
- JP2017509796A5 JP2017509796A5 JP2016558011A JP2016558011A JP2017509796A5 JP 2017509796 A5 JP2017509796 A5 JP 2017509796A5 JP 2016558011 A JP2016558011 A JP 2016558011A JP 2016558011 A JP2016558011 A JP 2016558011A JP 2017509796 A5 JP2017509796 A5 JP 2017509796A5
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- distribution pipe
- evaporation
- source according
- heating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000001704 evaporation Methods 0.000 claims description 68
- 230000008020 evaporation Effects 0.000 claims description 65
- 238000009826 distribution Methods 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 42
- 238000000151 deposition Methods 0.000 claims description 39
- 230000008021 deposition Effects 0.000 claims description 36
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000011368 organic material Substances 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000012546 transfer Methods 0.000 description 33
- 238000005538 encapsulation Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000010409 thin film Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000012080 ambient air Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2014/055741 WO2015139776A1 (en) | 2014-03-21 | 2014-03-21 | Evaporation source for organic material |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509796A JP2017509796A (ja) | 2017-04-06 |
| JP2017509796A5 true JP2017509796A5 (https=) | 2017-05-25 |
| JP6466469B2 JP6466469B2 (ja) | 2019-02-06 |
Family
ID=50382442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016558011A Active JP6466469B2 (ja) | 2014-03-21 | 2014-03-21 | 有機材料用の蒸発源 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20170092899A1 (https=) |
| EP (1) | EP3119919A1 (https=) |
| JP (1) | JP6466469B2 (https=) |
| KR (1) | KR101983213B1 (https=) |
| CN (1) | CN106133183B (https=) |
| TW (1) | TWI653350B (https=) |
| WO (1) | WO2015139776A1 (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6937549B2 (ja) * | 2016-06-10 | 2021-09-22 | 株式会社ジャパンディスプレイ | 発光素子の製造装置 |
| CN109715846B (zh) * | 2016-12-14 | 2024-07-23 | 应用材料公司 | 沉积系统 |
| CN108456855B (zh) * | 2017-02-17 | 2024-09-03 | 京东方科技集团股份有限公司 | 坩埚、蒸镀准备装置、蒸镀设备及蒸镀方法 |
| CN106637091B (zh) * | 2017-02-24 | 2019-08-30 | 旭科新能源股份有限公司 | 用于薄膜太阳能电池制造的高温蒸发炉 |
| US20200040445A1 (en) * | 2017-04-28 | 2020-02-06 | Applied Materials, Inc. | Vacuum system and method for depositing a plurality of materials on a substrate |
| CN106987809A (zh) * | 2017-05-17 | 2017-07-28 | 大连交通大学 | 一种有机真空蒸发源 |
| CN107299322A (zh) * | 2017-08-07 | 2017-10-27 | 旭科新能源股份有限公司 | 一种立式低温蒸发束源炉 |
| WO2019096392A1 (en) * | 2017-11-16 | 2019-05-23 | Applied Materials, Inc. | Method of cooling a deposition source, chamber for cooling a deposition source and deposition system |
| WO2019185183A1 (en) * | 2018-03-28 | 2019-10-03 | Applied Materials, Inc. | Vacuum processing apparatus and method of processing a substrate |
| JP2020521039A (ja) * | 2018-05-04 | 2020-07-16 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 蒸発した材料を堆積させるための蒸発源、真空堆積システム、及び蒸発した材料を堆積させるための方法 |
| TWI719388B (zh) * | 2019-01-16 | 2021-02-21 | 臺灣永光化學工業股份有限公司 | 負型感光性樹脂組成物及其用途 |
| CN109817842B (zh) * | 2019-01-16 | 2021-10-01 | 京东方科技集团股份有限公司 | 一种真空干燥装置、显示用基板的制备方法 |
| CN114144872B (zh) * | 2019-07-25 | 2025-02-11 | 应用材料公司 | 用于在竖直取向上蒸镀oled层堆叠物的系统和方法 |
| JP7409799B2 (ja) * | 2019-07-29 | 2024-01-09 | キヤノントッキ株式会社 | ノズルユニット，坩堝，蒸発源及び蒸着装置 |
| EP4162094A4 (en) * | 2020-06-04 | 2024-10-02 | Applied Materials, Inc. | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber |
| CN111945116A (zh) * | 2020-08-14 | 2020-11-17 | 云谷（固安）科技有限公司 | 一种蒸镀设备和蒸镀方法 |
| WO2025088368A1 (en) * | 2023-10-27 | 2025-05-01 | Applied Materials, Inc. | Method of coating a substrate and evaporation source arrangement |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5904958A (en) * | 1998-03-20 | 1999-05-18 | Rexam Industries Corp. | Adjustable nozzle for evaporation or organic monomers |
| EP2369035B9 (en) * | 2003-08-04 | 2014-05-21 | LG Display Co., Ltd. | Evaporation source |
| KR20090130559A (ko) * | 2008-06-16 | 2009-12-24 | 삼성모바일디스플레이주식회사 | 이송 장치 및 이를 구비하는 유기물 증착 장치 |
| EP2204467B1 (en) * | 2008-12-23 | 2014-05-07 | Applied Materials, Inc. | Method and apparatus for depositing mixed layers |
| DE102010041380A1 (de) * | 2009-09-25 | 2011-04-28 | Von Ardenne Anlagentechnik Gmbh | Verdampfereinrichtung für eine Beschichtungsanlage |
| KR101708420B1 (ko) * | 2010-09-15 | 2017-02-21 | 삼성디스플레이 주식회사 | 기판 증착 시스템 및 이를 이용한 증착 방법 |
| KR101288307B1 (ko) * | 2011-05-31 | 2013-07-22 | 주성엔지니어링(주) | 증발 증착 장치 및 증발 증착 방법 |
| KR20130068926A (ko) * | 2011-12-16 | 2013-06-26 | 주식회사 원익아이피에스 | 증발원 및 이를 구비한 진공 증착 장치 |
| JP2013211137A (ja) * | 2012-03-30 | 2013-10-10 | Samsung Display Co Ltd | 真空蒸着方法及びその装置 |
-
2014
- 2014-03-21 JP JP2016558011A patent/JP6466469B2/ja active Active
- 2014-03-21 EP EP14712647.8A patent/EP3119919A1/en not_active Withdrawn
- 2014-03-21 KR KR1020167029505A patent/KR101983213B1/ko active Active
- 2014-03-21 US US15/126,565 patent/US20170092899A1/en not_active Abandoned
- 2014-03-21 CN CN201480077377.5A patent/CN106133183B/zh active Active
- 2014-03-21 WO PCT/EP2014/055741 patent/WO2015139776A1/en not_active Ceased
-
2015
- 2015-03-20 TW TW104108946A patent/TWI653350B/zh active
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