JP2017509794A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017509794A5 JP2017509794A5 JP2016557604A JP2016557604A JP2017509794A5 JP 2017509794 A5 JP2017509794 A5 JP 2017509794A5 JP 2016557604 A JP2016557604 A JP 2016557604A JP 2016557604 A JP2016557604 A JP 2016557604A JP 2017509794 A5 JP2017509794 A5 JP 2017509794A5
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- source array
- array according
- distribution
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 67
- 230000008020 evaporation Effects 0.000 claims description 63
- 238000000151 deposition Methods 0.000 claims description 46
- 230000008021 deposition Effects 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 41
- 238000001816 cooling Methods 0.000 claims description 25
- 239000011368 organic material Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000012423 maintenance Methods 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000012809 cooling fluid Substances 0.000 claims 1
- 230000002441 reversible effect Effects 0.000 claims 1
- 238000012546 transfer Methods 0.000 description 33
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000005538 encapsulation Methods 0.000 description 11
- 239000010409 thin film Substances 0.000 description 9
- 238000012545 processing Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000012080 ambient air Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2014/055744 WO2015139777A1 (en) | 2014-03-21 | 2014-03-21 | Evaporation source for organic material |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019137536A Division JP2019214791A (ja) | 2019-07-26 | 2019-07-26 | 有機材料用の蒸発源 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509794A JP2017509794A (ja) | 2017-04-06 |
| JP2017509794A5 true JP2017509794A5 (https=) | 2017-05-25 |
| JP6704348B2 JP6704348B2 (ja) | 2020-06-03 |
Family
ID=50382443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016557604A Active JP6704348B2 (ja) | 2014-03-21 | 2014-03-21 | 有機材料用の蒸発源 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20170081755A1 (https=) |
| EP (1) | EP3119920A1 (https=) |
| JP (1) | JP6704348B2 (https=) |
| KR (1) | KR101997808B1 (https=) |
| CN (1) | CN106133184B (https=) |
| TW (1) | TWI640646B (https=) |
| WO (1) | WO2015139777A1 (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101990619B1 (ko) * | 2014-11-07 | 2019-06-18 | 어플라이드 머티어리얼스, 인코포레이티드 | 증발된 재료를 증착하기 위한 장치, 분배 파이프, 진공 증착 챔버, 및 증발된 재료를 증착하기 위한 방법 |
| WO2017121491A1 (en) * | 2016-01-15 | 2017-07-20 | Applied Materials, Inc. | Evaporation source, apparatus and method for depositing organic material |
| JP6941564B2 (ja) * | 2016-05-10 | 2021-09-29 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 蒸発した材料を堆積させるための蒸発源、及び蒸発した材料を堆積させるための方法 |
| CN106595759B (zh) * | 2016-12-07 | 2019-02-01 | 上海宇航系统工程研究所 | 一种低温推进剂贮存技术地面试验系统 |
| KR20200049915A (ko) * | 2016-12-12 | 2020-05-08 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 상에서의 재료의 증착을 위한 장치, 기판 상에 하나 또는 그 초과의 층들을 증착하기 위한 시스템, 및 진공 증착 시스템을 모니터링하기 위한 방법 |
| CN109563608A (zh) * | 2017-02-24 | 2019-04-02 | 应用材料公司 | 用于基板载体和掩模载体的定位配置、用于基板载体和掩模载体的传送系统及其方法 |
| CN106637091B (zh) * | 2017-02-24 | 2019-08-30 | 旭科新能源股份有限公司 | 用于薄膜太阳能电池制造的高温蒸发炉 |
| CN108966659B (zh) * | 2017-03-17 | 2021-01-15 | 应用材料公司 | 沉积系统、沉积设备、和操作沉积系统的方法 |
| US20200040445A1 (en) * | 2017-04-28 | 2020-02-06 | Applied Materials, Inc. | Vacuum system and method for depositing a plurality of materials on a substrate |
| JP2019534938A (ja) * | 2017-09-26 | 2019-12-05 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 材料堆積装置、真空堆積システム、及び真空堆積を行う方法 |
| WO2019096392A1 (en) * | 2017-11-16 | 2019-05-23 | Applied Materials, Inc. | Method of cooling a deposition source, chamber for cooling a deposition source and deposition system |
| WO2019201434A1 (en) * | 2018-04-18 | 2019-10-24 | Applied Materials, Inc. | Evaporation source for deposition of evaporated material on a substrate, deposition apparatus, method for measuring a vapor pressure of evaporated material, and method for determining an evaporation rate of an evaporated material |
| CN112424393A (zh) * | 2018-06-15 | 2021-02-26 | 应用材料公司 | 用于冷却沉积区域的冷却系统，用于进行材料沉积的布置，以及在基板上进行沉积的方法 |
| CN112534564A (zh) * | 2018-08-07 | 2021-03-19 | 应用材料公司 | 材料沉积设备、真空沉积系统及用以处理大面积基板的方法 |
| US10566168B1 (en) * | 2018-08-10 | 2020-02-18 | John Bennett | Low voltage electron transparent pellicle |
| CN108842134B (zh) * | 2018-08-29 | 2024-01-16 | 郑州华晶新能源科技有限公司 | 一种油屏蔽挥发装置 |
| KR20200040537A (ko) * | 2018-10-10 | 2020-04-20 | 엘지디스플레이 주식회사 | 측향식 진공증착용 소스, 소스 어셈블리 및 이를 이용한 측향식 진공증착 장치 |
| JP7309882B2 (ja) * | 2018-12-21 | 2023-07-18 | アプライド マテリアルズ インコーポレイテッド | 真空チャンバ内で基板をコーティングするための気相堆積装置及び方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100477546B1 (ko) * | 2002-07-24 | 2005-03-18 | 주식회사 소로나 | 유기물질 증착방법 및 이를 적용한 장치 |
| JP2005002450A (ja) * | 2003-06-13 | 2005-01-06 | Pioneer Electronic Corp | 蒸着方法、蒸着ヘッド、及び有機エレクトロルミネッセンス表示パネルの製造装置 |
| EP2369035B9 (en) * | 2003-08-04 | 2014-05-21 | LG Display Co., Ltd. | Evaporation source |
| JP4557170B2 (ja) * | 2004-11-26 | 2010-10-06 | 三星モバイルディスプレイ株式會社 | 蒸発源 |
| ATE376078T1 (de) * | 2005-07-28 | 2007-11-15 | Applied Materials Gmbh & Co Kg | Bedampfervorrichtung |
| EP1752555A1 (de) * | 2005-07-28 | 2007-02-14 | Applied Materials GmbH & Co. KG | Verdampfervorrichtung |
| JP5183310B2 (ja) * | 2008-06-12 | 2013-04-17 | 日立造船株式会社 | 蒸着装置 |
| KR20090130559A (ko) * | 2008-06-16 | 2009-12-24 | 삼성모바일디스플레이주식회사 | 이송 장치 및 이를 구비하는 유기물 증착 장치 |
| EP2204467B1 (en) * | 2008-12-23 | 2014-05-07 | Applied Materials, Inc. | Method and apparatus for depositing mixed layers |
| DE102010041380A1 (de) * | 2009-09-25 | 2011-04-28 | Von Ardenne Anlagentechnik Gmbh | Verdampfereinrichtung für eine Beschichtungsanlage |
| KR101708420B1 (ko) * | 2010-09-15 | 2017-02-21 | 삼성디스플레이 주식회사 | 기판 증착 시스템 및 이를 이용한 증착 방법 |
| EP2508645B1 (en) * | 2011-04-06 | 2015-02-25 | Applied Materials, Inc. | Evaporation system with measurement unit |
| KR101288307B1 (ko) * | 2011-05-31 | 2013-07-22 | 주성엔지니어링(주) | 증발 증착 장치 및 증발 증착 방법 |
| JP2013211137A (ja) * | 2012-03-30 | 2013-10-10 | Samsung Display Co Ltd | 真空蒸着方法及びその装置 |
| CN105917019A (zh) * | 2014-02-04 | 2016-08-31 | 应用材料公司 | 用于有机材料的蒸发源、具有用于有机材料的蒸发源的设备、具有带有用于有机材料的蒸发源的蒸发沉积设备的系统以及用于操作用于有机材料的蒸发源的方法 |
-
2014
- 2014-03-21 US US15/126,568 patent/US20170081755A1/en not_active Abandoned
- 2014-03-21 JP JP2016557604A patent/JP6704348B2/ja active Active
- 2014-03-21 WO PCT/EP2014/055744 patent/WO2015139777A1/en not_active Ceased
- 2014-03-21 KR KR1020167029510A patent/KR101997808B1/ko active Active
- 2014-03-21 CN CN201480077386.4A patent/CN106133184B/zh active Active
- 2014-03-21 EP EP14712648.6A patent/EP3119920A1/en not_active Withdrawn
-
2015
- 2015-03-20 TW TW104108945A patent/TWI640646B/zh active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2017509794A5 (https=) | ||
| JP2017509796A5 (https=) | ||
| KR101997808B1 (ko) | 유기 재료를 위한 증발 소스 | |
| KR101983213B1 (ko) | 유기 재료를 위한 증발 소스 | |
| TWI658157B (zh) | 沈積一已蒸發源材料於一基板上之方法及沈積設備及操作其之方法 | |
| KR101256193B1 (ko) | 박막 증착장치 및 이에 사용되는 선형증발원 | |
| EP3245313B1 (en) | Evaporation source. | |
| KR101959417B1 (ko) | 진공 증착을 위한 재료 소스 배열체 및 재료 분배 배열체 | |
| WO2017054890A1 (en) | Variable shaper shield for evaporators and method for depositing an evaporated source material on a substrate | |
| KR102018865B1 (ko) | 진공 증착을 위한 재료 소스 배열체 및 노즐 | |
| KR20170090452A (ko) | 증발 목적들을 위한 도가니 조립체 | |
| JP2019214791A (ja) | 有機材料用の蒸発源 | |
| US11795541B2 (en) | Method of cooling a deposition source, chamber for cooling a deposition source and deposition system | |
| JP6533601B2 (ja) | 蒸発源 |