JP2017508303A5 - - Google Patents

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Publication number
JP2017508303A5
JP2017508303A5 JP2016561588A JP2016561588A JP2017508303A5 JP 2017508303 A5 JP2017508303 A5 JP 2017508303A5 JP 2016561588 A JP2016561588 A JP 2016561588A JP 2016561588 A JP2016561588 A JP 2016561588A JP 2017508303 A5 JP2017508303 A5 JP 2017508303A5
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JP
Japan
Prior art keywords
coating
region
thickness
tapered
support ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016561588A
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English (en)
Japanese (ja)
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JP6408606B2 (ja
JP2017508303A (ja
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Publication date
Priority claimed from US14/218,597 external-priority patent/US9330955B2/en
Application filed filed Critical
Publication of JP2017508303A publication Critical patent/JP2017508303A/ja
Publication of JP2017508303A5 publication Critical patent/JP2017508303A5/ja
Application granted granted Critical
Publication of JP6408606B2 publication Critical patent/JP6408606B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016561588A 2013-12-31 2014-11-25 マスキングされたエッジを有する支持リング Active JP6408606B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361922451P 2013-12-31 2013-12-31
US61/922,451 2013-12-31
US14/218,597 US9330955B2 (en) 2013-12-31 2014-03-18 Support ring with masked edge
US14/218,597 2014-03-18
PCT/US2014/067367 WO2015102781A1 (en) 2013-12-31 2014-11-25 Support ring with masked edge

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018176528A Division JP6758353B2 (ja) 2013-12-31 2018-09-20 マスキングされたエッジを有する支持リング

Publications (3)

Publication Number Publication Date
JP2017508303A JP2017508303A (ja) 2017-03-23
JP2017508303A5 true JP2017508303A5 (https=) 2018-01-18
JP6408606B2 JP6408606B2 (ja) 2018-10-17

Family

ID=53482656

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016561588A Active JP6408606B2 (ja) 2013-12-31 2014-11-25 マスキングされたエッジを有する支持リング
JP2018176528A Active JP6758353B2 (ja) 2013-12-31 2018-09-20 マスキングされたエッジを有する支持リング

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018176528A Active JP6758353B2 (ja) 2013-12-31 2018-09-20 マスキングされたエッジを有する支持リング

Country Status (6)

Country Link
US (4) US9330955B2 (https=)
JP (2) JP6408606B2 (https=)
KR (3) KR102279150B1 (https=)
CN (2) CN110223949B (https=)
TW (3) TWI594361B (https=)
WO (1) WO2015102781A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
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WO2012158291A1 (en) * 2011-05-13 2012-11-22 Dow Global Technologies Llc Insulation formulations
US9330955B2 (en) * 2013-12-31 2016-05-03 Applied Materials, Inc. Support ring with masked edge
JP2020516770A (ja) 2017-04-07 2020-06-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板端部上のプラズマ密度制御
CN107121892B (zh) * 2017-04-26 2018-12-28 武汉华星光电技术有限公司 一种基板曝边设备
CN111819679A (zh) * 2018-03-13 2020-10-23 应用材料公司 具有等离子体喷涂涂层的支撑环
CN110920254B (zh) 2018-09-19 2021-03-16 精工爱普生株式会社 打印头控制电路及液体喷出装置
US12134835B2 (en) * 2021-09-01 2024-11-05 Applied Materials, Inc. Quartz susceptor for accurate non-contact temperature measurement
US20250305141A1 (en) * 2024-03-27 2025-10-02 Applied Materials, Inc. Multi-section substrate supports and related methods, process kits, and processing chambers for semiconductor manufacturing
KR102944097B1 (ko) * 2024-09-23 2026-03-27 주식회사 비아트론 웨이퍼 지지용 에지링

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US9330955B2 (en) * 2013-12-31 2016-05-03 Applied Materials, Inc. Support ring with masked edge

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