JP2017506156A - 表面洗浄のためのシステム及び方法 - Google Patents
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
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-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
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- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
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- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/005—Vibratory devices, e.g. for generating abrasive blasts by ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
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Abstract
Description
前記第2の超音波デバイスが、前記物体に空気連結され、
前記超音波及び前記第2の超音波の干渉が、前記表面の少なくとも一部分の周囲で、超音波相互作用体積を画定する。
Claims (40)
- 表面を含む物体を洗浄するためのシステムであって、
洗浄媒体を前記表面に送出するように構成された洗浄媒体ディスペンサであって、前記洗浄媒体が、前記表面から堆積物を取り除き捕捉する、洗浄媒体ディスペンサと、
超音波を前記物体に送出するように構成された超音波デバイスであって、前記超音波が、前記表面から前記洗浄媒体及び捕捉した堆積物を微粒化する、超音波デバイスと、
バキューム気流を提供するように構成されたバキュームであって、前記バキューム気流が、微粒化した洗浄媒体及び捕捉した堆積物を集める、バキュームと
を備えるシステム。 - 前記超音波が、前記物体の前記表面に超音波振動を発生させる、請求項1に記載のシステム。
- 前記超音波が、前記物体の中に超音波振動を発生させる、請求項1に記載のシステム。
- 前記超音波が、縦波、せん断波、表面波及びプレート波の少なくとも1つを含む、請求項1から3の何れか一項に記載のシステム。
- 前記洗浄媒体ディスペンサ、前記超音波デバイス及び前記バキュームの位置が、前記表面に対して調節可能である、請求項1に記載のシステム。
- 前記洗浄媒体ディスペンサ、前記超音波デバイス及び前記バキュームが、洗浄ヘッドに装着される、請求項1に記載のシステム。
- 前記洗浄ヘッドが、可動アセンブリに装着され、前記可動アセンブリが、前記表面に対して前記洗浄ヘッドを位置付ける、請求項6に記載のシステム。
- 前記超音波が、前記表面の洗浄ゾーンに集束される、請求項1から7の何れか一項に記載のシステム。
- 前記物体を保持するように構成された保持固定具を更に備え、前記保持固定具が、音響共振システムを画定し、前記超音波が、前記物体の中で超音波振動を発生させる、請求項1から8の何れか一項に記載のシステム。
- 前記超音波デバイスが、前記保持固定具に連結され、
前記洗浄媒体ディスペンサ及び前記バキュームが、洗浄ヘッドに装着される、請求項9に記載のシステム。 - 前記超音波デバイスが、前記保持固定具に連結され、
前記洗浄媒体ディスペンサ及び前記バキュームの位置が、前記物体に対して調節可能である、請求項9に記載のシステム。 - 前記超音波デバイスが、前記保持固定具に物理的に連結される、請求項9に記載のシステム。
- 前記超音波デバイスが、前記保持固定具及び前記物体の少なくとも1つに空気連結される、請求項9に記載のシステム。
- 前記洗浄媒体ディスペンサ、前記超音波デバイス及び前記バキュームが、洗浄ヘッドに装着され、
前記保持固定具が、前記保持固定具を通って前記物体内に第2の超音波を送出するように構成された第2の超音波デバイスを備え、
前記超音波及び前記第2の超音波が、前記表面から前記洗浄媒体を微粒化するために、前記物体の中に前記超音波振動を発生させる、請求項9に記載のシステム。 - 前記保持固定具が、前記物体の一部である、請求項9に記載のシステム。
- 第2の超音波を前記物体に送出するように構成された第2の超音波デバイスを更に備える、請求項1から15の何れか一項に記載のシステム。
- 前記超音波デバイスが、前記物体に空気連結され、
前記第2の超音波デバイスが、前記物体に空気連結され、
前記超音波及び前記第2の超音波の干渉が、前記表面の少なくとも一部分の周囲で、超音波相互作用体積を画定する、請求項16に記載のシステム。 - 前記物体を保持するように構成された保持固定具を更に備え、前記保持固定具が、音響共振システムを画定し、前記超音波及び前記第2の超音波が、前記表面から前記洗浄媒体を微粒化するために、前記物体の中に前記超音波振動を発生させる、請求項16に記載のシステム。
- 前記第2の超音波デバイスが、前記保持固定具に物理的に連結される、請求項18に記載のシステム。
- 前記超音波デバイスが、前記物体及び前記保持固定具の少なくとも1つに空気連結される、請求項18に記載のシステム。
- 音響アレイの中に配置された複数の超音波デバイスを更に備え、前記複数の超音波デバイスが、前記超音波を前記物体に送出する、請求項1から20の何れか一項に記載のシステム。
- 前記超音波が、前記物体の中に超音波振動のパターンを生成する、請求項21に記載のシステム。
- 前記音響アレイが、パラメトリックアレイ及びフェーズドアレイの少なくとも1つを含む、請求項21に記載のシステム。
- 前記複数の超音波デバイスが、前記物体に空気連結される、請求項21に記載のシステム。
- 前記物体を保持するように構成された保持固定具を更に備え、前記保持固定具が、音響共振システムを画定する、請求項21に記載のシステム。
- 前記複数の超音波デバイスの少なくとも一部分が、前記保持固定具に物理的に連結される、請求項25に記載のシステム。
- 前記複数の超音波デバイスの少なくとも一部分が、前記保持固定具及び前記物体の少なくとも1つに空気連結される、請求項25に記載のシステム。
- 前記洗浄媒体が、前記表面から前記堆積物を分解し取り除く、請求項1に記載のシステム。
- 前記超音波が、前記表面と前記堆積物との間の粘着力を低減する、請求項1に記載のシステム。
- 前記洗浄媒体が流体を含む、請求項1に記載のシステム。
- 前記流体が、液体及び気体の少なくとも1つを含む、請求項30に記載のシステム。
- 前記洗浄媒体が、蒸気、水、及び水溶液の少なくとも1つを含む、請求項1に記載のシステム。
- 表面を含む物体を洗浄するための方法であって、
洗浄媒体を前記表面に送出することと、
前記洗浄媒体を微粒化するために、超音波を前記物体に送出することと、
微粒化した洗浄媒体を集めるために、バキューム気流を適用することと
を含む方法。 - 前記超音波が、前記物体の中に超音波振動を発生させる、請求項33に記載の方法。
- 前記物体を保持固定具に装着することであって、前記保持固定具が音響共振システムを画定する、装着することと、
前記物体の中で超音波振動を発生させるために、前記保持固定具及び前記物体の少なくとも1つに前記超音波を送出することと
を更に含む、請求項33又は34に記載の方法。 - 前記表面の洗浄ゾーン上に前記超音波を集束させることと、
前記物体の中に超音波振動のパターンを生成することと
を更に含む、請求項33から35の何れか一項に記載の方法。 - 前記超音波振動のパターンを生成する前記ステップが、前記超音波の干渉によって、前記表面の少なくとも一部分の周囲に超音波相互作用体積を画定することを含む、請求項36に記載の方法。
- 前記洗浄媒体が、前記表面から堆積物を取り除く、請求項33に記載の方法。
- 前記洗浄媒体が、液体及び気体の少なくとも1つを含む、請求項33に記載の方法。
- 前記超音波が、前記表面と前記堆積物との間の粘着力を低減する、請求項33に記載の方法。
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US14/187,865 | 2014-02-24 | ||
US14/187,865 US10343193B2 (en) | 2014-02-24 | 2014-02-24 | System and method for surface cleaning |
PCT/US2015/013211 WO2015126585A1 (en) | 2014-02-24 | 2015-01-28 | System and method for surface cleaning |
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EP (1) | EP3110571A1 (ja) |
JP (2) | JP6663862B2 (ja) |
CN (1) | CN106061632B (ja) |
AU (2) | AU2015219442B2 (ja) |
CA (1) | CA2935291C (ja) |
WO (1) | WO2015126585A1 (ja) |
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US11062898B2 (en) | 2018-07-30 | 2021-07-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Particle removal apparatus, particle removal system and particle removal method |
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JP7201229B2 (ja) * | 2019-03-28 | 2023-01-10 | 株式会社エアレックス | 除染装置 |
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CN110479698A (zh) * | 2019-09-06 | 2019-11-22 | 山东智汇新谷科技企业孵化器有限公司 | 一种自动化设备用除尘装置 |
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AU2019203263A1 (en) | 2019-05-30 |
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CA2935291C (en) | 2020-03-31 |
WO2015126585A1 (en) | 2015-08-27 |
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US20150239020A1 (en) | 2015-08-27 |
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US11351579B2 (en) | 2022-06-07 |
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CA2935291A1 (en) | 2015-08-27 |
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US20190275566A1 (en) | 2019-09-12 |
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