JP2017502355A - 光導波路及びコンタクトワイヤ交差の構造 - Google Patents
光導波路及びコンタクトワイヤ交差の構造 Download PDFInfo
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- JP2017502355A JP2017502355A JP2016543609A JP2016543609A JP2017502355A JP 2017502355 A JP2017502355 A JP 2017502355A JP 2016543609 A JP2016543609 A JP 2016543609A JP 2016543609 A JP2016543609 A JP 2016543609A JP 2017502355 A JP2017502355 A JP 2017502355A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12135—Temperature control
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12142—Modulator
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- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
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Abstract
Description
特定の構成及び配置について議論しているが、これは説明の目的でのみ行ったことは理解されるべきである。当業者は、本発明の精神及び範囲から離れることなく、他の構成及び配置が使用できることを認識するだろう。この発明が様々な他の用途にもまた採用され得ることは当業者にとって明らかだろう。
Claims (22)
- 半導体材料内に定義されたリッジ;
上記半導体材料内に定義された半島構造部であって、当該半島構造部の端面と上記リッジの側壁との間にギャップが存在するように、上記リッジに隣接している半島構造部;及び
上記半島構造部の上面上及び上記リッジの上面上を延伸するように、上記ギャップを横切って架けられている導電性トレース
を含む、装置。 - 上記ギャップは、100nmから500nmの間の幅である、請求項1に記載の装置。
- 上記導電性トレースの厚みは、200nmから1μmの間である、請求項2に記載の装置。
- 上記リッジは光導波路であり、かつ、上記半導体材料が、シリコン、リン化インジウム、及び、ヒ化ガリウム、の少なくとも一つを含む、請求項1に記載の装置。
- 上記リッジの上面及び側壁の上に堆積したクラッド層をさらに含む、請求項1に記載の装置。
- 上記クラッド層は、上記半島構造部の上面及び端面の上にさらに堆積している、請求項5に記載の装置。
- 上記ギャップの幅は、上記リッジの側壁と上記半島構造部の端面との間の、上記クラッド層の厚みに基づいて定められている、請求項6に記載の装置。
- 上記リッジの上面の上の上記クラッド層上に堆積した加熱素子をさらに含む、請求項5に記載の装置。
- 上記導電性トレースは、上記加熱素子との電気的な接触を提供する、請求項8に記載の装置。
- 上記リッジの厚みは、1μmから5μmの間である、請求項1に記載の装置。
- 上記半島構造部は、上記リッジと実質的に直交する角をなしている、請求項1に記載の装置。
- 半島構造部がリッジに隣接し、当該半島構造部の端面と当該リッジの側壁との間にギャップが存在するように、半導体材料に上記リッジ及び上記半島構造部をエッチングする工程;及び
導電性トレースが上記ギャップを横切って架かり、上記半島構造部の上面上及び上記リッジの上面上を延伸するように、上記導電性トレースを形成する工程
を含む、装置の製造方法。 - 上記形成する工程は、上記導電性トレースをスパッタリングにより堆積することを含む、請求項12に記載の装置の製造方法。
- 上記形成する工程は、上記導電性トレースを、蒸着金属を用いて堆積することを含む、請求項12に記載の装置の製造方法。
- 上記リッジの上面及び側壁の上に、クラッド層を堆積する工程をさらに含む、請求項12に記載の装置の製造方法。
- 上記半島構造部の上面及び端面の上に、上記クラッド層を堆積する工程をさらに含む、請求項15に記載の装置の製造方法。
- 上記クラッド層を熱により成長させる、請求項16に記載の装置の製造方法。
- 上記ギャップの幅が、上記リッジの側壁と上記半島構造部の端面との間のクラッド層の厚みに基づいて定められている、請求項16に記載の装置の製造方法。
- 上記リッジの上面上の上記クラッド層の上に加熱素子を堆積する工程をさらに含む、請求項15に記載の装置の製造方法。
- 上記導電性トレースは、上記加熱素子との電気的な接触を提供する、請求項19に記載の装置の製造方法。
- 上記加熱素子に電流を提供することで、上記リッジを通過する放射線ビームを変調する工程をさらに含む、請求項19に記載の装置の製造方法。
- 上記エッチングする工程は、上記半島構造部が上記リッジと実質的に直交する角をなすようにエッチングすることを含む、請求項12に記載の装置の製造方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US201361922297P | 2013-12-31 | 2013-12-31 | |
US61/922,297 | 2013-12-31 | ||
US14/584,592 US9588291B2 (en) | 2013-12-31 | 2014-12-29 | Structure for optical waveguide and contact wire intersection |
US14/584,592 | 2014-12-29 | ||
PCT/EP2014/079428 WO2015101619A1 (en) | 2013-12-31 | 2014-12-30 | Structure for optical waveguide and contact wire intersection |
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JP2017502355A true JP2017502355A (ja) | 2017-01-19 |
JP6700185B2 JP6700185B2 (ja) | 2020-05-27 |
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JP2016543609A Active JP6700185B2 (ja) | 2013-12-31 | 2014-12-30 | 光導波路及びコンタクトワイヤ交差の構造 |
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US (2) | US9588291B2 (ja) |
EP (1) | EP3090294B1 (ja) |
JP (1) | JP6700185B2 (ja) |
CN (1) | CN105980895B (ja) |
AU (1) | AU2014375262B2 (ja) |
BR (1) | BR112016015195B1 (ja) |
CA (1) | CA2935309C (ja) |
ES (1) | ES2709498T3 (ja) |
WO (1) | WO2015101619A1 (ja) |
Cited By (3)
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---|---|---|---|---|
JP2019161070A (ja) * | 2018-03-14 | 2019-09-19 | 古河電気工業株式会社 | 光導波路構造及びその製造方法 |
JP2019159158A (ja) * | 2018-03-14 | 2019-09-19 | 古河電気工業株式会社 | 光導波路構造及びその製造方法 |
JP7173409B1 (ja) * | 2021-12-27 | 2022-11-16 | 三菱電機株式会社 | 半導体光素子 |
Families Citing this family (4)
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US9588291B2 (en) * | 2013-12-31 | 2017-03-07 | Medlumics, S.L. | Structure for optical waveguide and contact wire intersection |
US9976844B2 (en) | 2015-02-06 | 2018-05-22 | Medlumics S.L. | Miniaturized OCT package and assembly thereof |
US10194981B2 (en) | 2015-07-29 | 2019-02-05 | Medlumics S.L. | Radiofrequency ablation catheter with optical tissue evaluation |
WO2021067500A1 (en) * | 2019-09-30 | 2021-04-08 | California Institute Of Technology | Integrated electronic-photonic devices, systems and methods of making thereof |
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- 2014-12-30 EP EP14821222.8A patent/EP3090294B1/en active Active
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JP2019161070A (ja) * | 2018-03-14 | 2019-09-19 | 古河電気工業株式会社 | 光導波路構造及びその製造方法 |
JP2019159158A (ja) * | 2018-03-14 | 2019-09-19 | 古河電気工業株式会社 | 光導波路構造及びその製造方法 |
JP7012409B2 (ja) | 2018-03-14 | 2022-01-28 | 古河電気工業株式会社 | 光導波路構造及びその製造方法 |
JP7051505B2 (ja) | 2018-03-14 | 2022-04-11 | 古河電気工業株式会社 | 光導波路構造及びその製造方法 |
JP7173409B1 (ja) * | 2021-12-27 | 2022-11-16 | 三菱電機株式会社 | 半導体光素子 |
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US20150185415A1 (en) | 2015-07-02 |
WO2015101619A1 (en) | 2015-07-09 |
ES2709498T3 (es) | 2019-04-16 |
AU2014375262B2 (en) | 2019-05-16 |
US9829628B2 (en) | 2017-11-28 |
BR112016015195B1 (pt) | 2022-05-10 |
CN105980895B (zh) | 2020-08-14 |
EP3090294B1 (en) | 2018-10-31 |
AU2014375262A1 (en) | 2016-07-14 |
JP6700185B2 (ja) | 2020-05-27 |
CA2935309C (en) | 2023-04-04 |
US20170176676A1 (en) | 2017-06-22 |
CN105980895A (zh) | 2016-09-28 |
CA2935309A1 (en) | 2015-07-09 |
EP3090294A1 (en) | 2016-11-09 |
BR112016015195A2 (pt) | 2017-10-10 |
US9588291B2 (en) | 2017-03-07 |
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