JP2017191848A - ガス供給機構及び半導体製造システム - Google Patents
ガス供給機構及び半導体製造システム Download PDFInfo
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- 230000007246 mechanism Effects 0.000 title claims abstract description 72
- 239000004065 semiconductor Substances 0.000 title claims abstract description 57
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 55
- 230000002093 peripheral effect Effects 0.000 claims abstract description 28
- 230000000149 penetrating effect Effects 0.000 claims abstract 2
- 239000007789 gas Substances 0.000 description 312
- 238000011144 upstream manufacturing Methods 0.000 description 38
- 238000000034 method Methods 0.000 description 28
- 238000009792 diffusion process Methods 0.000 description 17
- 238000005530 etching Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 238000004088 simulation Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
- F16K5/04—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having cylindrical surfaces; Packings therefor
- F16K5/0442—Spindles and actuating means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
- F16K31/086—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet the magnet being movable and actuating a second magnet connected to the closing element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
- Taps Or Cocks (AREA)
Abstract
Description
図1は、第1実施形態に係る半導体製造システム10を概略的に示す断面図である。図1に示されるように、半導体製造システム10は、容量結合型平行平板プラズマエッチング装置であり、半導体製造装置10A及びガス供給装置10Bを備えている。
第2実施形態は第1実施形態に対して、第1のガス供給機構1A及び第2のガス供給機構1Bのみが相違する。第2実施形態では、第1実施形態との相違点を中心に説明し、重複する説明は省略する。なお、第2のガス供給機構1Bの構成は第1のガス供給機構1Aと同一であるため詳細な説明は省略する。
第3実施形態は第1実施形態に対して、第1のガス供給機構1A及び第2のガス供給機構1Bのみが相違する。第3実施形態では、第1実施形態との相違点を中心に説明し、重複する説明は省略する。なお、第2のガス供給機構1Bの構成は第1のガス供給機構1Aと同一であるため詳細な説明は省略する。
Claims (5)
- ガスソースから半導体製造装置へガスを供給するガス供給機構であって、
前記ガスソースと前記半導体製造装置とを接続する配管と、
前記配管に設けられ、前記ガスソースから前記半導体製造装置へ供給されるガスの流量を制御するバルブと、
を備え、
前記バルブは、内部に円筒状の内部空間が形成されているハウジングと、
円柱状のシャフトと、
を有し、
前記ハウジングには、前記ガスソースから前記内部空間へガスが流入する入口及び前記内部空間から前記半導体製造装置へガスが流出する出口が形成され、
前記シャフトは、前記シャフトの外周面と前記ハウジングの内壁面との間に隙間を設けて前記ハウジングの内部空間に収容され、前記シャフトの軸線を中心に回転可能であり、
前記シャフトの外周面には、前記シャフトを貫通する貫通孔が形成され、前記貫通孔の両端は前記入口及び前記出口に対応する、ガス供給機構。 - 前記ハウジングの内壁面と前記シャフトの外周面とに接触する複数のシール部材を更に備え、
複数の前記シール部材は、前記シャフトの軸線方向において前記入口及び前記出口が前記シール部材間に配置されるように設けられる、請求項1に記載のガス供給機構。 - 前記シャフトを前記シャフトの軸線を中心に回転させる駆動部と、
前記駆動部を制御する制御部と、
を更に備える請求項1又は2に記載のガス供給機構。 - 前記駆動部は、回転軸と、
前記回転軸に設けられた駆動側磁石と、
を有し、
前記シャフトには、前記ハウジングの側壁を介して前記駆動側磁石に対向して配置される従動側磁石が固定され、
前記ハウジングの側壁は、非磁性体である、
請求項3に記載のガス供給機構。 - 請求項1〜4のいずれか一項に記載のガス供給機構を備える半導体製造システム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016080216A JP6546874B2 (ja) | 2016-04-13 | 2016-04-13 | ガス供給機構及び半導体製造システム |
KR1020170044667A KR102362458B1 (ko) | 2016-04-13 | 2017-04-06 | 가스 공급 기구 및 반도체 제조 시스템 |
US15/484,389 US10950467B2 (en) | 2016-04-13 | 2017-04-11 | Gas supply mechanism and semiconductor manufacturing system |
TW106111991A TWI710022B (zh) | 2016-04-13 | 2017-04-11 | 氣體供給機構及半導體製造系統 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2016080216A JP6546874B2 (ja) | 2016-04-13 | 2016-04-13 | ガス供給機構及び半導体製造システム |
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JP2017191848A true JP2017191848A (ja) | 2017-10-19 |
JP6546874B2 JP6546874B2 (ja) | 2019-07-17 |
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US (1) | US10950467B2 (ja) |
JP (1) | JP6546874B2 (ja) |
KR (1) | KR102362458B1 (ja) |
TW (1) | TWI710022B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019087092A (ja) * | 2017-11-08 | 2019-06-06 | 東京エレクトロン株式会社 | ガス供給システム及びガス供給方法 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6324870B2 (ja) * | 2014-10-08 | 2018-05-16 | 東京エレクトロン株式会社 | ガス供給機構及び半導体製造装置 |
CN108538697B (zh) * | 2018-05-16 | 2020-02-21 | 安徽晟源环保新型材料有限公司 | 一种等离子刻蚀机 |
CN108666198B (zh) * | 2018-05-16 | 2019-12-10 | 深圳市闪德半导体有限公司 | 一种半导体芯片生产工艺 |
CN108987235B (zh) * | 2018-07-12 | 2020-06-05 | 昆山龙腾光电股份有限公司 | 一种等离子体处理装置 |
TWI729801B (zh) * | 2020-05-08 | 2021-06-01 | 晨碩國際有限公司 | 遠端摻雜氣體供應系統之氣體傳輸適配裝置 |
CN113685727B (zh) * | 2020-05-19 | 2023-04-14 | Kc股份有限公司 | 连接器插塞以及包括连接器插塞的气体供应装置 |
Citations (3)
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JPS5768972U (ja) * | 1980-10-14 | 1982-04-24 | ||
JP2011153700A (ja) * | 2010-01-28 | 2011-08-11 | Aisin Seiki Co Ltd | 流体制御弁 |
JP2015138810A (ja) * | 2014-01-20 | 2015-07-30 | 東京エレクトロン株式会社 | プラズマ処理装置 |
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DE4328466C1 (de) * | 1993-08-24 | 1995-04-13 | Siemens Ag | Siloxanhaltiges Gießharzsystem |
US6032725A (en) * | 1998-06-02 | 2000-03-07 | Marquip, Inc. | Rotary steam joint and valve assembly |
JP4008129B2 (ja) * | 1998-11-17 | 2007-11-14 | サクラ精機株式会社 | マグネットカップリングを用いた駆動装置 |
US6951762B2 (en) | 1998-12-23 | 2005-10-04 | Zuk Jr Peter | Apparatus comprising a disposable device and reusable instrument for synthesizing chemical compounds, and for testing chemical compounds for solubility |
TW481241U (en) * | 2001-04-16 | 2002-03-21 | Chin-Ming Chen | Device capable of exchanging dual barrel of fuel gas |
KR100973666B1 (ko) * | 2003-06-17 | 2010-08-03 | 주성엔지니어링(주) | 원자층증착장치의 가스밸브 어셈블리 |
TWM385624U (en) * | 2010-01-04 | 2010-08-01 | Ya-Wen He | Gas flow rate control valve |
WO2013088319A1 (en) * | 2011-12-14 | 2013-06-20 | Koninklijke Philips Electronics N.V. | Reversing valve and high frequency oscillation airflow generator |
JP5937385B2 (ja) | 2012-03-16 | 2016-06-22 | 東京エレクトロン株式会社 | 半導体製造装置のガス供給方法、ガス供給システム及び半導体製造装置 |
TWM510732U (zh) * | 2015-08-03 | 2015-10-21 | Tsukoshi Ind Corp | 模組化流量閥組 |
-
2016
- 2016-04-13 JP JP2016080216A patent/JP6546874B2/ja active Active
-
2017
- 2017-04-06 KR KR1020170044667A patent/KR102362458B1/ko active IP Right Grant
- 2017-04-11 US US15/484,389 patent/US10950467B2/en active Active
- 2017-04-11 TW TW106111991A patent/TWI710022B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5768972U (ja) * | 1980-10-14 | 1982-04-24 | ||
JP2011153700A (ja) * | 2010-01-28 | 2011-08-11 | Aisin Seiki Co Ltd | 流体制御弁 |
JP2015138810A (ja) * | 2014-01-20 | 2015-07-30 | 東京エレクトロン株式会社 | プラズマ処理装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019087092A (ja) * | 2017-11-08 | 2019-06-06 | 東京エレクトロン株式会社 | ガス供給システム及びガス供給方法 |
JP7122102B2 (ja) | 2017-11-08 | 2022-08-19 | 東京エレクトロン株式会社 | ガス供給システム及びガス供給方法 |
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TW201802933A (zh) | 2018-01-16 |
US20170301568A1 (en) | 2017-10-19 |
US10950467B2 (en) | 2021-03-16 |
KR102362458B1 (ko) | 2022-02-14 |
JP6546874B2 (ja) | 2019-07-17 |
TWI710022B (zh) | 2020-11-11 |
KR20170117321A (ko) | 2017-10-23 |
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