TWM385624U - Gas flow rate control valve - Google Patents

Gas flow rate control valve

Info

Publication number
TWM385624U
TWM385624U TW99200023U TW99200023U TWM385624U TW M385624 U TWM385624 U TW M385624U TW 99200023 U TW99200023 U TW 99200023U TW 99200023 U TW99200023 U TW 99200023U TW M385624 U TWM385624 U TW M385624U
Authority
TW
Taiwan
Prior art keywords
flow rate
control valve
gas flow
rate control
gas
Prior art date
Application number
TW99200023U
Other languages
Chinese (zh)
Inventor
Ya-Wen He
Original Assignee
Ya-Wen He
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ya-Wen He filed Critical Ya-Wen He
Priority to TW99200023U priority Critical patent/TWM385624U/en
Publication of TWM385624U publication Critical patent/TWM385624U/en

Links

TW99200023U 2010-01-04 2010-01-04 Gas flow rate control valve TWM385624U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW99200023U TWM385624U (en) 2010-01-04 2010-01-04 Gas flow rate control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW99200023U TWM385624U (en) 2010-01-04 2010-01-04 Gas flow rate control valve

Publications (1)

Publication Number Publication Date
TWM385624U true TWM385624U (en) 2010-08-01

Family

ID=50602414

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99200023U TWM385624U (en) 2010-01-04 2010-01-04 Gas flow rate control valve

Country Status (1)

Country Link
TW (1) TWM385624U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI710022B (en) * 2016-04-13 2020-11-11 日商東京威力科創股份有限公司 Gas supply mechanism and semiconductor manufacturing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI710022B (en) * 2016-04-13 2020-11-11 日商東京威力科創股份有限公司 Gas supply mechanism and semiconductor manufacturing system

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Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees