JP6324870B2 - ガス供給機構及び半導体製造装置 - Google Patents
ガス供給機構及び半導体製造装置 Download PDFInfo
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- JP6324870B2 JP6324870B2 JP2014207207A JP2014207207A JP6324870B2 JP 6324870 B2 JP6324870 B2 JP 6324870B2 JP 2014207207 A JP2014207207 A JP 2014207207A JP 2014207207 A JP2014207207 A JP 2014207207A JP 6324870 B2 JP6324870 B2 JP 6324870B2
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- 230000007246 mechanism Effects 0.000 title claims description 46
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000007789 gas Substances 0.000 description 361
- 238000009792 diffusion process Methods 0.000 description 31
- 238000000034 method Methods 0.000 description 25
- 238000011144 upstream manufacturing Methods 0.000 description 24
- 230000008859 change Effects 0.000 description 15
- 230000008021 deposition Effects 0.000 description 15
- 230000008569 process Effects 0.000 description 13
- 238000005530 etching Methods 0.000 description 12
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
- F16K3/08—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages with circular plates rotatable around their centres
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
- F16K3/08—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages with circular plates rotatable around their centres
- F16K3/085—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages with circular plates rotatable around their centres the axis of supply passage and the axis of discharge passage being coaxial and parallel to the axis of rotation of the plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Chemical Vapour Deposition (AREA)
- Sliding Valves (AREA)
- Plasma Technology (AREA)
Description
Claims (6)
- 半導体製造装置にガスを供給するためのガス供給機構であって、
ガスソースと前記半導体製造装置とを接続する配管と、
前記配管の途中に設けられたバルブと、
を備え、
前記バルブは、
板厚方向に延びる軸線を中心に回転可能なプレートと、
前記プレートを収容するよう前記プレートに沿って該プレートに非接触に設けられたハウジングであり、前記配管と共にガス供給経路を提供する該ハウジングと、
を有し、
前記プレートには、前記軸線を中心に延在し且つ前記ガス供給経路と交差する円周上の位置において該プレートを貫通する貫通孔が形成され、
前記プレートを回転させる駆動部と、
前記プレートの回転角を制御するために前記駆動部を制御する制御部と、
を更に備え、
前記駆動部は、
筒状の固定子と、
前記固定子の内側において該固定子と同軸に設けられた筒状の回転子と、
を有し、
前記プレートは、前記回転子の内孔の中に設けられており、該回転子に結合されている、ガス供給機構。 - 前記駆動部は、前記プレートを回転させるモータを含み、
前記モータは、前記軸線上で延在し前記プレートに連結される出力軸を有する、
請求項1に記載のガス供給機構。 - 前記軸線に対して直交する方向における前記貫通孔の幅は、前記軸線に対して周方向において変化している、請求項1又は2に記載のガス供給機構。
- 半導体製造装置にガスを供給するためのガス供給機構であって、
ガスソースと前記半導体製造装置とを接続する配管と、
前記配管の途中に設けられたバルブと、
を備え、
前記バルブは、
板厚方向に延びる軸線を中心に回転可能なプレートと、
前記プレートを収容するよう前記プレートに沿って該プレートに非接触に設けられたハウジングであり、前記配管と共にガス供給経路を提供する該ハウジングと、
を有し、
前記プレートには、前記軸線を中心に延在し且つ前記ガス供給経路と交差する円周上の位置において該プレートを貫通する貫通孔が形成され、
前記プレートには、前記軸線を中心とする環状をなし、前記軸線方向に向けて突出する複数の突出部が形成され、
前記ハウジングには、前記軸線を中心とする環状をなし、前記軸線方向に向けて窪む複数の凹部が形成され、
前記複数の突出部は、前記貫通孔よりも前記プレートの径方向の内側及び外側に設けられ、前記複数の凹部内にそれぞれ挿入されている、ガス供給機構。 - 半導体製造装置にガスを供給するためのガス供給機構であって、
ガスソースと前記半導体製造装置とを接続する配管と、
前記配管の途中に設けられたバルブと、
を備え、
前記バルブは、
板厚方向に延びる軸線を中心に回転可能なプレートと、
前記プレートを収容するよう前記プレートに沿って該プレートに非接触に設けられたハウジングであり、前記配管と共にガス供給経路を提供する該ハウジングと、
を有し、
前記プレートには、前記軸線を中心に延在し且つ前記ガス供給経路と交差する円周上の位置において該プレートを貫通する貫通孔が形成され、
前記プレートには、前記軸線を中心とする環状をなし、前記軸線方向に向けて窪む複数の凹部が形成され、
前記ハウジングには、前記軸線を中心とする環状をなし、前記軸線方向に向けて突出する複数の突出部が形成され、
前記複数の凹部は、前記貫通孔よりも前記プレートの径方向の内側及び外側に設けられ、
前記複数の突出部は、前記複数の凹部内にそれぞれ挿入されている、ガス供給機構。 - 請求項1〜5の何れか一項に記載のガス供給機構を備える半導体製造装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014207207A JP6324870B2 (ja) | 2014-10-08 | 2014-10-08 | ガス供給機構及び半導体製造装置 |
PCT/JP2015/076922 WO2016056390A1 (ja) | 2014-10-08 | 2015-09-24 | ガス供給機構及び半導体製造装置 |
KR1020177005929A KR102420760B1 (ko) | 2014-10-08 | 2015-09-24 | 가스 공급 기구 및 반도체 제조 장치 |
US15/508,054 US10510514B2 (en) | 2014-10-08 | 2015-09-24 | Gas supply mechanism and semiconductor manufacturing apparatus |
TW104132763A TWI669768B (zh) | 2014-10-08 | 2015-10-06 | Gas supply mechanism and semiconductor manufacturing device |
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Application Number | Priority Date | Filing Date | Title |
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JP2014207207A JP6324870B2 (ja) | 2014-10-08 | 2014-10-08 | ガス供給機構及び半導体製造装置 |
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JP2016076649A JP2016076649A (ja) | 2016-05-12 |
JP6324870B2 true JP6324870B2 (ja) | 2018-05-16 |
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US (1) | US10510514B2 (ja) |
JP (1) | JP6324870B2 (ja) |
KR (1) | KR102420760B1 (ja) |
TW (1) | TWI669768B (ja) |
WO (1) | WO2016056390A1 (ja) |
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JP2016050646A (ja) * | 2014-09-01 | 2016-04-11 | 株式会社不二越 | 流量調整バルブ |
KR102222183B1 (ko) * | 2016-03-30 | 2021-03-02 | 도쿄엘렉트론가부시키가이샤 | 플라스마 전극 및 플라스마 처리 장치 |
US20210327686A1 (en) * | 2018-03-01 | 2021-10-21 | Applied Materials, Inc. | Microwave Plasma Source For Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool |
KR102278081B1 (ko) * | 2019-06-27 | 2021-07-19 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
CN111249772B (zh) * | 2020-02-29 | 2021-12-14 | 烟台沃尔姆真空技术有限公司 | 一种具有油水分离功能的真空泵系统 |
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US3888459A (en) * | 1973-11-23 | 1975-06-10 | Gen Motors Corp | Flow control valve |
JPS54144578A (en) * | 1978-05-02 | 1979-11-10 | Mikuni Kogyo Co Ltd | Flow rate control mechanism |
JPH01299379A (ja) * | 1988-05-25 | 1989-12-04 | Osaka Gas Co Ltd | 制御弁 |
JPH08264521A (ja) * | 1995-03-20 | 1996-10-11 | Kokusai Electric Co Ltd | 半導体製造用反応炉 |
JPH10184940A (ja) * | 1996-12-20 | 1998-07-14 | Sony Corp | 間欠開放弁 |
US6227299B1 (en) * | 1999-07-13 | 2001-05-08 | Halliburton Energy Services, Inc. | Flapper valve with biasing flapper closure assembly |
JP2003303788A (ja) * | 2002-04-11 | 2003-10-24 | Mitsubishi Electric Corp | エッチング装置 |
JP2004108764A (ja) * | 2002-08-30 | 2004-04-08 | Daikin Ind Ltd | 電動膨張弁及び冷凍装置 |
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JP6546874B2 (ja) * | 2016-04-13 | 2019-07-17 | 東京エレクトロン株式会社 | ガス供給機構及び半導体製造システム |
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US20170301518A1 (en) | 2017-10-19 |
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US10510514B2 (en) | 2019-12-17 |
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