JP2017187105A - 絞りユニット及びこれを備えた静圧軸受装置並びに溝付きブロックの製造方法 - Google Patents
絞りユニット及びこれを備えた静圧軸受装置並びに溝付きブロックの製造方法 Download PDFInfo
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/02—Energy absorbers; Noise absorbers
- F16L55/027—Throttle passages
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0625—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via supply slits
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
- F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
- F16C32/0651—Details of the bearing area per se
- F16C32/0655—Details of the bearing area per se of supply openings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
- F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
- F16C32/0651—Details of the bearing area per se
- F16C32/0659—Details of the bearing area per se of pockets or grooves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2220/00—Shaping
- F16C2220/60—Shaping by removing material, e.g. machining
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
- F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
- F16C2240/42—Groove sizes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Pipe Accessories (AREA)
Abstract
【解決手段】絞りユニット14Aは、平面15上に少なくとも1つの微細溝25を有する溝付きブロック24と、微細溝25に対向する平面27を有する対向ブロック26とを備える。溝付きブロック24と対向ブロック26は互いに対向するように着脱可能に結合され、微細溝25と対向ブロック26の平面27とにより絞り流路18が形成される。微細溝25の少なくとも1つの面が、溝付きブロック24の平面15に対して傾斜する斜面、又は曲面で構成されている。
【選択図】図3
Description
14A〜14C…絞りユニット 16…供給孔
18…絞り流路 20…排出孔
24、24a、24b…溝付きブロック 25、25A〜25D…微細溝
26、26a、26b…対向ブロック
Claims (9)
- 少なくとも1つの供給孔より作動流体を流入させ、流入した前記作動流体を微細な絞り流路に流し、前記絞り流路を通過した前記作動流体を少なくとも1つの排出孔から流出させる絞りユニットであって、
平面上に少なくとも1つの微細溝を有する溝付きブロックと、
前記微細溝に対向する平面を有する対向ブロックと、を備え、
前記溝付きブロックと前記対向ブロックは、互いに対向するように着脱可能に結合され、
前記微細溝と前記対向ブロックの前記平面とにより前記絞り流路が形成されており、
前記微細溝の少なくとも1つの面が、前記溝付きブロックの前記平面に対して傾斜する斜面、又は曲面で構成されている、
ことを特徴とする絞りユニット。 - 請求項1記載の絞りユニットにおいて、
前記微細溝は、前記供給孔から前記排出孔まで直線状に延在している、
ことを特徴とする絞りユニット。 - 請求項1又は2記載の絞りユニットにおいて、
前記供給孔を介して複数の前記微細溝が同一直線上に配置されている、
ことを特徴とする絞りユニット。 - 請求項1〜3のいずれか1項に記載の絞りユニットにおいて、
1つの前記供給孔に対して複数の前記絞り流路が連通しており、
複数の前記絞り流路の各々に、互いに独立した前記排出孔が連通しており、
1つの前記供給孔に供給された前記作動流体は、複数の前記絞り流路に分岐して複数の前記排出孔から排出される、
ことを特徴とする絞りユニット。 - 請求項1〜4のいずれか1項に記載の絞りユニットにおいて、
前記溝付きブロック又は前記対向ブロックは、スライドの部品、ガイドの部品又は別の絞りユニットの部品を兼ねる、
ことを特徴とする絞りユニット。 - 請求項1〜5のいずれか1項に記載の絞りユニットにおいて、
前記微細溝は、前記供給孔から前記排出孔までの流路の少なくとも一部において、溝幅及び溝深さが連続的に変化している、
ことを特徴とする絞りユニット。 - 請求項1〜6のいずれか1項に記載の絞りユニットにおいて、
前記微細溝は、前記供給孔から前記排出孔までの流路の深さの最小値が1000μm以下である、
ことを特徴とする絞りユニット。 - 移動部と固定部とを有する直動軸構造又は回転軸構造において、前記移動部と前記固定部との間に静圧軸受が構成された静圧軸受装置であって、
前記移動部又は前記固定部に形成されている静圧ポケットに作動流体を供給する流体供給ラインと、
前記流体供給ラインに設けられた絞りユニットと、を備え、
前記絞りユニットは、請求項1〜7のいずれか1項に記載の絞りユニットである、
ことを特徴とする静圧軸受装置。 - 平面上に少なくとも1つの微細溝を有する溝付きブロックの製造方法であって、
前記溝付きブロックは、少なくとも1つの供給孔より作動流体を流入させ、流入した前記作動流体を微細な絞り流路に流し、前記絞り流路を通過した前記作動流体を少なくとも1つの排出孔から流出させる絞りユニットの構成部品であり、
前記絞りユニットは、前記溝付きブロックと、前記微細溝に対向する平面を有する対向ブロックと、を備え、前記溝付きブロックと前記対向ブロックは互いに対向するように着脱可能に結合され、前記微細溝と前記対向ブロックの前記平面とにより前記絞り流路が形成されるものであり、
前記溝付きブロックの製造方法は、
素材ブロックの平面に、少なくとも1つの面が前記素材ブロックの前記平面に対して傾斜する斜面、又は曲面で構成された微細溝を切削加工により形成する切削工程と、
前記切削工程において形成された前記微細溝を顕微鏡により前記素材ブロックの前記平面に垂直な方向から観察し、観察した前記微細溝の溝深さを算出する深さ算出工程と、
算出された前記溝深さに基づいて、切削加工を行う加工装置に補正を加える補正工程と、を含む、
ことを特徴とする溝付きブロックの製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2016076039A JP6577404B2 (ja) | 2016-04-05 | 2016-04-05 | 絞りユニット及びこれを備えた静圧軸受装置並びに溝付きブロックの製造方法 |
CN201710213472.9A CN107269699B (zh) | 2016-04-05 | 2017-04-01 | 节流单元、具备该节流单元的静压轴承装置以及带槽块体的制造方法 |
KR1020170042901A KR102159933B1 (ko) | 2016-04-05 | 2017-04-03 | 스로틀 유닛 및 이것을 구비한 정압 베어링 장치 그리고 홈이 형성된 블록의 제조 방법 |
DE102017003276.9A DE102017003276A1 (de) | 2016-04-05 | 2017-04-04 | Drosseleinheit und mit der drosseleinheit ausgestattete statische drucklagervorrichtung und verfahren zum herstellen eines nutblocks |
US15/478,445 US20170284464A1 (en) | 2016-04-05 | 2017-04-04 | Throttle unit and a static pressure bearing device equipped with the throttle unit, and a method of manufacturing a grooved block |
TW106111315A TWI692591B (zh) | 2016-04-05 | 2017-04-05 | 節流單元、設有該節流單元的靜壓軸承裝置及附設溝槽的塊體之製造方法 |
US16/688,303 US11125272B2 (en) | 2016-04-05 | 2019-11-19 | Throttle unit and a static pressure bearing device equipped with the throttle unit, and a method of manufacturing a grooved block |
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JP2016076039A JP6577404B2 (ja) | 2016-04-05 | 2016-04-05 | 絞りユニット及びこれを備えた静圧軸受装置並びに溝付きブロックの製造方法 |
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JP6577404B2 JP6577404B2 (ja) | 2019-09-18 |
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KR (1) | KR102159933B1 (ja) |
CN (1) | CN107269699B (ja) |
DE (1) | DE102017003276A1 (ja) |
TW (1) | TWI692591B (ja) |
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JP6696821B2 (ja) * | 2016-04-26 | 2020-05-20 | Dmg森精機株式会社 | 工作機械 |
KR102339495B1 (ko) | 2019-11-27 | 2021-12-15 | 전남대학교 산학협력단 | 괭생이모자반 추출물을 포함하는 피부장벽 강화용 조성물 |
DE112020005994T5 (de) * | 2019-12-07 | 2022-10-13 | Akribis Systems Pte Ltd | Aerostatisches Lager mit Ultraflachprofil und Verfahren zu seiner Herstellung |
CN112922961B (zh) * | 2021-03-23 | 2022-06-24 | 哈尔滨工业大学 | 基于多孔质节流单元的静压气浮单元及加工方法 |
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- 2017-04-03 KR KR1020170042901A patent/KR102159933B1/ko active IP Right Grant
- 2017-04-04 US US15/478,445 patent/US20170284464A1/en not_active Abandoned
- 2017-04-04 DE DE102017003276.9A patent/DE102017003276A1/de active Pending
- 2017-04-05 TW TW106111315A patent/TWI692591B/zh active
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US20200080592A1 (en) | 2020-03-12 |
KR20170114959A (ko) | 2017-10-16 |
CN107269699B (zh) | 2020-09-04 |
US20170284464A1 (en) | 2017-10-05 |
CN107269699A (zh) | 2017-10-20 |
JP6577404B2 (ja) | 2019-09-18 |
DE102017003276A1 (de) | 2017-10-05 |
TW201736746A (zh) | 2017-10-16 |
US11125272B2 (en) | 2021-09-21 |
TWI692591B (zh) | 2020-05-01 |
KR102159933B1 (ko) | 2020-09-25 |
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